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DOE OSTI2018

Bottom-Up Copper Filling of Large Scale Through Silicon Vias for MEMS Technology

An electrodeposition process for void-free bottom-up filling of sub-millimeter scale through silicon vias (TSVs) with Cu is detailed. The 600 μm deep and nominally 125 μm diameter metallized vias were filled with Cu in less than 7 hours under potentiostatic control. The electrolyte is made up of 1.25 mol/L CuSO 4 – 0.25 mol/L CH 3 SO 3 H with polyether and halide additions that selectively suppress metal deposition on the free surface and side walls. A brief qualitative discussion of the procedures used to identify and optimize the bottom-up void-free feature filling is presented.

42 ENGINEERING↗

DOE OSTI2015

Fabrication of Carbon-Platinum Interdigitated Array Electrodes and Their Application for Investigating Homogeneous Hydrogen Evolution Catalysis

Interdigitated array electrodes (IDAEs) with one carbon electrode and the other platinum electrode were constructed by electrodepositing platinum on one set of the carbon electrodes. Platinum deposition was confirmed by scanning electron microscope (SEM) and cyclic voltammetry. The width of the carbon and platinum digits is less than 2 μm and the gap between two adjacent digits is around 3 μm. The carbon-platinum IDAEs benefit from the characteristics of both carbon and platinum in that carbon can provide a wide nonreactive potential window while platinum is a good catalyst for hydrogen reactions making it useful to characterize the catalytic hydrogen production cycle of the molecular electrocatalyst [Ni(P Ph 2 N Ph 2 ) 2 (CH 3 CN)](BF 4 ) 2 (where P Ph 2 N Ph 2 is 1,3,5,7-tetraphenyl-1,5-diaza-3,7-diphosphacyclooctane). With properly set potentials, the molecular electrocatalyst was reduced at the carbon digits to initiate a homogeneous H 2 production reaction while the platinum digits detect the H 2 by oxidation, providing direct evidence of its production rate from the catalytic cycles.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2018

Avoiding Pitfalls in the Determination of Reliable Electrochemical Kinetics Parameters for the Cu 2+ → Cu 1+ Reduction Reaction in Deep Eutectic Solvents

Deep eutectic solvents (DES), on account of their low-cost, non-flammability and electrochemical stability, are attracting attention for their potential use in applications such as electrodeposition and energy storage. In these applications, knowledge of the transport and electrochemical kinetics properties of DES is critically important. To date, attempts to measure the kinetics parameters of the Cu 2+ + e ⇌ Cu 1+ reaction in ethaline DES have yielded a cathodic charge transfer coefficient (α) in the range of 0.2–0.3 suggesting an unexpected asymmetric polarization behavior. In the present work, we pursued a comprehensive study of the kinetics and transport properties of the aforementioned reaction. Using steady-state and transient polarization measurements on RDE and microelectrodes combined with diffusion-reaction modeling, we demonstrate that the Cu 2+ /Cu 1+ transition exhibits a charge transfer coefficient in the range of 0.49–0.54 and an exchange current density in the range 1.72–1.88 mA/cm 2 . Recommendations are provided for avoiding pitfalls in kinetics analysis of highly resistive DES electrolytes. These recommendations include the application of accurate $IR_Ω$ correction and the use of electrode configurations where the secondary current distribution is relatively uniform.

25 ENERGY STORAGE↗

DOE OSTI2017

Electrochemical Formation of Germanene: pH 4.5

Germanene is a single layer allotrope of Ge, with a honeycomb structure similar to graphene. This report concerns the electrochemical formation of germanene in a pH 4.5 solution. The studies were performed using in situ Electrochemical Scanning Tunneling Microscopy (EC-STM), voltammetry, coulometry, surface X-ray diffraction (SXRD) and Raman spectroscopy to study germanene electrodeposition on Au(111) terraces. The deposition of Ge is kinetically slow and stops after 2–3 monolayers. EC-STM revealed a honeycomb (HC) structure with a rhombic unit cell, 0.44 ± 0.02 nm on a side, very close to that predicted for germanene in the literature. Ideally the HC structure is a continuous sheet, with six Ge atoms around each hole. However, only small domains, surrounded by defects, of this structure were observed in this study. The small coherence length and multiple rotations domains made direct observation with surface X-ray diffraction difficult. Raman spectroscopy was used to investigate the multi-layer Ge deposits. A peak near 290 cm -1 , predicted to correspond to germanene, was observed on one particular area of the sample, while the rest resembled amorphous germanium. Electrochemical studies of germanene showed limited stability when exposed to oxygen.

36 MATERIALS SCIENCE↗

DOE OSTI2014

Planarized arrays of aligned, untangled multiwall carbon nanotubes with Ohmic back contacts

Vertically aligned, untangled planarized arrays of multiwall carbon nanotubes (MWNTs) with Ohmic back contacts were grown in nanopore templates on arbitrary substrates. The templates were prepared by sputter depositing Nd-doped Al films onto W-coated substrates, followed by anodization to form an aluminum oxide nanopore array. The W underlayer helps eliminate the aluminum oxide barrier that typically occurs at the nanopore bottoms by instead forming a thin WO 3 layer. The WO 3 can be selectively etched to enable electrodeposition of Co catalysts with control over the Co site density. This led to control of the site density of MWNTs grown by thermal chemical vapor deposition, with the W also serving as a back electrical contact. As a result, Ohmic contact to MWNTs was confirmed, even following ultrasonic cutting of the entire array to a uniform height.

36 MATERIALS SCIENCE↗

DOE OSTI2020

In situ electrochemical scanning/transmission electron microscopy of electrode–electrolyte interfaces

Insights into the dynamics of electrochemical processes are critically needed to improve our fundamental understanding of electron, charge, and mass transfer mechanisms and reaction kinetics that influence a broad range of applications, from the functionality of electrical energy-storage and conversion devices (e.g., batteries, fuel cells, and supercapacitors), to materials degradation issues (e.g., corrosion and oxidation), and materials synthesis (e.g., electrodeposition). To unravel these processes, in situ electrochemical scanning/transmission electron microscopy (ec-S/TEM) was developed to permit detailed site-specific characterization of evolving electrochemical processes that occur at electrode–electrolyte interfaces in their native electrolyte environment, in real time and at high-spatial resolution. This approach utilizes “closed-form” microfabricated electrochemical cells that couple the capability for quantitative electrochemical measurements with high spatial and temporal resolution imaging, spectroscopy, and diffraction. Here, we review the state-of-the-art instrumentation for in situ ec-S/TEM and how this approach has resulted in new observations of electrochemical processes.

25 ENERGY STORAGE↗

DOE OSTI2014

Contributions of Stress And Oxidation on the Formation of Whiskers in Pb-Free Solders

This report summarizes the research activities of WP-1754. The study focusses on the environmental factors influencing formation of lead free whiskers on electrodeposited tin coatings over copper (or copper containing) substrates. Much of the initial results are summarized in an interim report. From the initial results, two main areas were chosen to be the focus of additional research: the demonstration of effects of elastic stress state in the nucleation of whiskers and the confirmation of the effect of oxygen/nitrogen ratio in the formation of whiskers. Different levels of elastic stress were induced with the incorporation of a custom designed fixture that loaded the substrates in a four-point bending configuration and were maintained in an environmental chamber under conditions deemed favorable for whisker growth. The results show that induced elastic stress slightly increased the concentration of nucleation sites of whiskers. The effects of oxygen content were studied by aging substrates in gas vials of varying absolute pressure and different oxygen/nitrogen ratios. The concentration of whiskers were measured and appear to be sensitive to absolute pressure but are not sensitive to oxygen content (as previously observed).

36 MATERIALS SCIENCE↗

DOE OSTI2016

Contributions of stress and oxidation on the formation of whiskers in Pb-free solders

Understanding the environmental factors influencing formation of tin whiskers on electrodeposited lead free, tin coatings over copper (or copper containing) substrates is the topic of this study . An interim report* summarized initial observations as to the role of stress and oxide formation on whisker growth. From the initial results, two main areas were chosen to be the focus of additional research: the demonstration of effects of elastic stress state in the nucleation of whiskers and the confirmation of the effect of oxygen content in the formation of whiskers. Different levels of elastic stress were induced with the incorporation of a custom designed fixture that loaded the sample in a four-point bending configuration and were maintained in an environmental chamber under conditions deemed favorable for whisker growth. The effects of oxygen content were studied by aging substrates in gas vials of varying absolute pressure and different oxygen partial pressure.

36 MATERIALS SCIENCE↗

DOE OSTI2016

Directed surfaces structures and interfaces for enhanced electrocatalyst activity, selectivity, and stability for energy conversion reactions

In this project, we have employed a systematic approach to develop active, selective, and stable catalyst materials for important electrochemical reactions involving energy conversion. In particular, we have focused our attention on developing active catalyst materials for the hydrogen evolution reaction (HER), oxygen evolution reaction (OER) and oxygen reduction reaction (ORR). HER: We have synthesized and investigated several highly active and acid stable non-precious metal HER catalysts, including: [Mo 3 S 13 ] 2- nanoclusters (Nature Chemistry, 2014) and molybdenum phosphosulfide (MoP|S) (Angewandte Chemie, 2014). We have also aimed to engineer these catalyst formulations in a membrane electrode assembly (MEA) for fundamental studies of water electrolysis at high current densities, approximately 1 A/cm 2 (ChemSusChem, 2015). We furthermore investigated transition metal phosphide (TMP) catalysts for HER by a combined experimental–theoretical approach (Energy & Environmental Science, 2015). By synthesizing different TMPs and comparing experimentally determined HER activities with the hydrogen adsorption free energies, ΔG H , calculated by density functional theory, we showed that the TMPs follow a volcano relationship for the HER. Using our combined experimental–theoretical model, we predicted that the mixed metal TMP, Fe 0.5 Co 0.5 P, should have a near-optimal ΔG H . We synthesized several mixtures of Co and Fe phosphides alloys and confirmed that Fe 0.5 Co 0.5 P exhibits the highest HER activity of the investigated TMPs (Energy & Environmental Science, 2015). The understanding gained as to how to improve catalytic activity for the HER, particularly for non-precious metal materials, is important to DOE targets for sustainable H 2 production. OER: We have developed a SrIrO 3 /IrO x catalyst for acidic conditions (submitted, 2016). The SrIrO 3 /IrO x catalyst significantly outperforms rutile IrO 2 and RuO 2 , the only other OER catalysts to have reasonable stability and activity in acidic electrolyte, and in fact demonstrates the best activity for any known OER catalyst measured in either acidic or in alkaline electrolyte. For alkaline conditions we have demonstrated that the combined effect of cerium as a dopant and gold as a metal support, significantly enhances the OER activity of electrodeposited NiO x films. This NiCeO x -Au catalyst delivers high OER activity in alkaline media, and is among the most active OER electrocatalysts reported to date (Nature Energy, accepted 2016). These studies of new catalysts for the OER, both in acid and in base, are fundamental to enabling new technologies of interest for the DOE, including the production of sustainable fuels and chemicals. ORR: One method to significantly reduce the Pt loading in fuel cell devices is to increase the ORR activity of Pt based systems. To this end we have synthesized a high surface area supported meso-structured Pt x Ni alloy thin film with a double gyroid morphology that both exhibits high activity and stability for the ORR (submitted, 2016). We have furthermore developed a Ru-core, Pt-shell system that improves the per Pt site activity by more than a factor of 2 (ChemElectroChem, 2014). Further refinement, optimizing Pt-shell thickness and reducing particle sintering during processing, enabled us to obtain a mass activity that is 2 times higher than commercial Pt/C from TKK. These are important contributions to the DOE goal of reducing Pt loading since an improved understanding of how to increase mass activity and stability helps enable low Pt content fuel cells.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

DOE OSTI2018

DOE Final Report: A Unified Understanding of Residual Stress in Thin Films: Kinetic Models, Experiments and Simulations

Thin films are critical for a wide range of advanced technologies. However, the deposited films often have high levels of residual stress that can limit their performance or lead to failure. The stress is known to depend on many variables, including the processing conditions, type of material, deposition technique and the film’s microstructure. The goal of this DOE program was to develop a fundamental understanding of how the different processes that control thin film growth under different conditions can be related to the development of stress. In the program, systematic experiments were performed or analyzed that related the stress to the processing conditions that were used. Measurements of stress were obtained for films that were grown at different rates, different solutions (for electrodeposition), different particle energies (for sputter deposition) and different microstructures. Based on this data, models were developed to explain the observed dependence on the different parameters. The models were based on considering the balance among different stress-inducing mechanism occurring as the film grows (for both non-energetic and energetic deposition). Comparison of the model predictions with the experiments enabled the kinetic parameters to be determined for different materials. The resulting model equations provide a comprehensive picture of how stress changes with the processing conditions that can be used to optimize the growth of thin films.

36 MATERIALS SCIENCE↗

DOE OSTI2018

Ultra-thin targets or target-backings for accelerator

A procedure has been developed for fabrication of ultra-thin titanium foils for accelerator-based experiments. Evaporation of thin titanium layers on thin copper foils allows mechanical manipulation of the layered-foil prior to dissolution of the copper layer which leaves the thin titanium foil attached to a target frame. This is the rst time that thin titanium foils have been produced in this manner. Electrodeposition techniques can be used to result in radioactive deposits being placed ultimately on an ultra-thin titanium backing. This method was used in the past for thin nickel foils, but has been "lost" due to the companies that used to manufacture such foils not being in business any more, removing the source of copper backed foils from the market. The technique can be used for thin nickel or chromium foils, as well as several other types of foils. Titanium foils as thin as 100 nm (45 μg/cm 2 ), nickel foils as thin as 50 nm (45 μg/cm 2 ), and chromium foils as thin as 400 nm (290 μg/cm 2 ) have been successfully attached to stainless steel target frames.

36 MATERIALS SCIENCE↗

DOE OSTI2018

Cost-effective Manufacturing and Morphological Stabilization of Nanostructured Cathodes for Commercial SOFCs

The overall goals of the program were to develop methods for preparing and stabilizing SOFC electrodes by infiltration that can be manufactured on a practical scale, then transfer those methods to cells in stacks. Cathodes prepared by infiltration of nanoparticles into a porous scaffold of the electrolyte have demonstrated outstanding electrochemical performance and mechanical strength but are difficult to manufacture due to the large number of infiltration steps required to produce a conductive composite and show poor stability due to sintering of the nanoparticles. At Penn, the main goal was to develop a fabrication method that uses only a small number of infiltration steps. Infiltration with molten salts and electrodeposition were pursued but deemed impractical. A method in which an electronically conductive scaffold consisted of a composite of a mixed conductor, LSF (La 0.9 Sr 0.1 FeO 3 ), with yttria-stabilized zirconia (YSZ) was found to be promising. While some cation mixing between LSF and YSZ was observed during calcination, there was no evidence for new phases in XRD and incorporation of Zr into the perovskite could be minimized by reducing the Sr content of the LSF. To stabilize nanoparticles infiltrated into the LSF-YSZ composite scaffold, the USC team examined the effects of Atomic Layer Deposition with ZrO 2 and infiltrated nanoparticles. Significantly enhanced stability was observed with the infiltrated nanoparticles. The FuelCell Energy team prepared 4”x4” cells in which an LSF-YSZ composite scaffold was cofired with the YSZ electrolyte and infiltrated with LSCF nanoparticles. Apparently because the LSF-YSZ scaffold layer was very thin in this case, the cation mixing that occurred during calcination resulted in a poor scaffold-electrolyte interface which caused reduced performance.

36 MATERIALS SCIENCE↗

DOE OSTI2018

Stereolithographic Fabrication of a Flow Cell For Improved Neurochemical Sensor Testing

The human brain remains a mystery to researchers. Scientists at Lawrence Livermore National Laboratory (LLNL) have developed highly sensitive and flexible multimodal multielectrode arrays (MEAs) with the potential to be both powerful diagnostic and therapeutic tools when dealing with neurological ailments such as Alzheimers, Parkinson’s, Post Traumatic Stress Disorder, and Traumatic Brain Injuries. These MEAs include biosensors in addition to electrodes for electrical stimulation and recording. The transition from the traditional rigid neural probes to the flexible MEAs has led LLNL researchers on the search for alternative testing and characterization methods for flexible devices in vitro. The rigid devices have been shown to be more abrasive and damaging to the brain when implanted, but due to their rigidity – are more robust and resilient to noise artifacts in in vitro testing. The flexible MEAs, similar in size and flexibility to a human hair, cause much less damage in the brain but have had a difficult time maintaining their integrity and collecting data without high-levels of noise due to the formation of inertial eddies (due to increased turbulent flow) moving the flexible MEA during in vitro testing. The goal of this project was to design a fluidic cell to allow for a more constant electrochemical testing & characterization of biosensors on these flexible MEAs. Design and fabrication of the fluidic cell was through the use of CAD software and a stereolithography printer using clear photopolymer resin (appropriate for biomedical use and quality resolution). Flow cells facilitate analyte delivery to biosensor surfaces in a more constant and controlled fashion, allowing for –in this case –a better electrodeposition of thin-film Platinum-Iridium (Pt-Ir) on MEAs of 16 Platinum disc electrodes 50µm in diameter. Platinum-Iridium alloy electrodes have been widely used in biomedical and industrial applications. Iridium adds mechanical stiffness to platinum. PtIr is a FDA approved electrode material for human implantable devices.

36 MATERIALS SCIENCE↗

DOE OSTI2015

Final Technical Report on Fluoride Salt Study

This report fulfills the Level 3 Milestone No. M3FT-15IN0311022 titled, “Uranium Electrorefining Using Fluoride Salt” within the Department of Energy (DOE) Work Package No. FT-15IN031102 titled, “U/TRU Codeposition and Fluoride Salt Studies – INL”. This work package falls under the Fuel Cycle Research and Development (FCR&D) Materials Recovery and Waste Form Development (MRWFD) Program 1.02.03.11 titled “Domestic Echem”. The electrorefining of uranium in a LiF-NaF-KF, or FLiNaK, salt containing UF 3 has been performed. Several gram-scale electrodeposits of uranium were collected exhibiting a dendritic morphology similar to uranium electrorefining in chloride salts. Additionally, cyclic voltammetry experiments have been performed at 773 K in FLiNaK-UF 4 , FLiNaK-UF 3 , and FLiNaK-UF 3 -LaF 3 salt mixtures to analyze the feasibility of electrorefining uranium in the FLiNaK salt containing lanthanides. Results are promising, showing a 0.48 V potential window between uranium and lanthanum depositions.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2019

Low Cost Rare Earth Element (REE) Recovery from Acid Mine Drainage Sludge

In this research effort, three core technologies were evaluated for REE concentration and recovery: (1) Nanofiltration (NF), (2) Electrically conductive membranes for induced rare earth oxide (REO) precipitation, (3) dendrimer-based sorbents for REE capture. The NF showed excellent selectivity between REE components and monovalent ionic salts such as K and Na. For all AMD samples, iron selectivity is a critical challenge since it is the highest concentration bulk constituent. Membrane electrodeposition approach shows promise for scandium and cerium recovery, but iron selectivity not observed. This technology may therefore be more appropriate REE recovery technology for non-iron rich streams such as coal ash. P-dendrimer derived sorbent shows promise for aqueous application, with high sorption capacity for iron demonstrated, and pH tunable selectivity against REE sorption. Although in some cases excellent selectivity for REE was observed, the REE concentrations from all four AMD sites was low enough that the 2wt% final goal was not attained.

01 COAL, LIGNITE, AND PEAT↗

DOE OSTI2021

Copper Dendrites and Surface Engineering for Enhanced CO2 Reduction Research Report Paper

The electrocatalytic reduction of CO 2 (CO 2 R) into hydrocarbon fuels, such as ethylene and ethanol, provides an attractive pathway towards closing the industrial carbon cycle and producing chemicals using renewable electricity. Existing CO 2 R technologies can exhibit C 2+ product selectivity above 74% and operating current densities over 1.3 A/cm 2 , but none can achieve both simultaneously, limiting the commercial viability and scalability of this technology. Low CO 2 concentrations at the catalyst surface and competing side reactions such as the hydrogen evolution reaction (HER) inhibit C 2+ faradaic efficiencies and operational current densities. Additionally, the use of high surface area cathode geometries to increase operational current densities is under-investigated. In this work, we electrodeposit a macroporous copper dendrite film to form high surface area cathodes. These structures are then coated with a combination of hydrophobic/hydrophilic ionomers to achieve high electrochemically active surface areas (ECSA), form regions of intrinsic porosity, and maximize catalytic availability of CO 2 . Using these techniques, we hope to maximize C 2+ faradaic efficiencies (FE) and geometric partial current densities. The treated cathode compound macrostructure (~10μm-sized pores, and ~μm-long dendrites) and concomitant surface area allows increased geometric current densities while the ionomer coating simultaneously inhibits HER and increases hydrogen availability to improve C 2+ selectivity. Our results show that careful engineering of the catalyst-electrolyte interface can enhance CO 2 reduction product selectivity and efficiency.

10 SYNTHETIC FUELS↗

DOE OSTI2022

Cost-effective Manufacturing and Morphological Stabilization of Nanostructured Cathodes for Commercial Solid Oxide Fuel Cells (SOFCs) [Slides]

30 DIRECT ENERGY CONVERSION↗

DOE OSTI2022

Environmentally Sound One-Step Solar Silicon From Natural Quartzite

This project aimed to demonstrate a new molten salt electrodeposition process to go straight from low-cost silica at $200/tonne ($40¢/kg Si basis) to polysilicon in a single step using less than 30 kWh/kg. This would eliminate the carbothermic reduction step and all direct greenhouse emissions, along with 90% of the energy. It would also eliminate the chemical hazards of chlorosilane handling which have resulted in multiple fatalities in the polysilicon industry – in Japan, the US and China. This project had the following major accomplishments: Stakeholder engagement indicated that the solar silicon market is very sensitive to price, provided quality is sufficient. The most important measure of silicon quality is not purity but carrier lifetime, as many impurities can reduce performance at concentrations too small to measure; Experiments set a baseline of current efficiency which is too low for commercial application (~3%), with electronic current ruled out as a mechanism for reduced current efficiency; A scale-up plant narrative narrative described a potential plant and formed the basis for the TEA components; TEA showed that current efficiency, large cell size, and zirconia membrane lifetime are key factors which determine capital and operating costs for the process.

14 SOLAR ENERGY↗