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At least 91 records · Page 5

A New Process for Fabricating Random Silicon Nanotips

An improved process for the fabrication of random arrays of silicon nanotips has been demonstrated to be feasible. Relative to other such processes, this process offers advantages of low cost and simplicity. Moreover, this process can readily be combined with other processes used to fabricate integrated circuits and other monolithic silicon structures. Arrays of silicon nanotips are subjects of research and development efforts directed toward utilizing them as field emitters in flat-panel displays, vacuum microelectronics, and microwave devices. Other silicon-nanotip-fabrication processes developed thus far predominantly include lithography, etching, and/or elaborate deposition steps followed by oxide sharpening steps and are both process intensive as well as expensive. In addition to being cheaper and simpler, the present process can efficiently produce silicon nanotips that range in height from a few microns to several tens of microns and are distributed over large areas. The process mentioned here can be summarized as consisting of (1) the growth of micro-etch masks on a silicon substrate, followed by (2) etching away of the masks, along with some of the substrate, to make an array of sharp tips. In the first step of the process, a cleaned silicon substrate is subjected to reactive ion etching (RIE) in a certain mixture of oxygen and carbon tetrafluoride under radio-frequency excitation. This process step results in the growth of fluorine based compounds in the form of stumps randomly distributed on the substrate. These stumps are known in the art as polymer RIE grass. The dimensions of these stumps are of the order of hundreds of nanometers, the exact values depending on process time and gas composition. The areal density of the stumps decreases with increasing process time as they grow and merge with neighboring stumps. These stumps constitute the micro-etch masks for the next step of the process. In the second step of the process, the substrate covered with the microetch masks is subjected to deep reactive ion etching (DRIE) process, which consists of cycles of reactive ion etching alternating with passivation (the Bosch process). The gas used in the etching substeps is sulfur hexafluoride (SF6); the gas used in the passivation substeps is octafluorocyclobutane (C4F8). The portions of the substrate directly under the RIE grass stubs are etched more slowly than are the portions between the stubs. Hence, what remains at the end of the process, after the stubs and parts of the substrate have been etched away, are silicon spikes where the stubs were (see figure). In a variation of the process, one starts with a silicon or silicon-on-insulator substrate with the intent to etch through the full thickness of the substrate. That is to say, one chooses the thickness so that the DRIE step releases individual nanotips. Such individual silicon nanotips may have utility as microscopic probes in biomedical applications.

Manohara, Harish↗

NASA Tech Briefs, May 2003

Topics covered include: Using Diffusion Bonding in Making Piezoelectric Actuators; Wireless Temperature-Monitoring System; Analog Binaural Circuits for Detecting and Locating Leaks; Mirrors Containing Biomimetic Shape-Control Actuators; Surface-Micromachined Planar Arrays of Thermopiles; Cascade Back-Propagation Learning in Neural Networks; Perovskite Superlattices as Tunable Microwave Devices; Rollable Thin-Shell Nanolaminate Mirrors; Flight Tests of a Ministick Controller in an F/A-18 Airplane; Piezoelectrically Actuated Shutter for High Vacuum; Bio-Inspired Engineering of Exploration Systems; Microscope Cells Containing Multiple Micromachined Wells; Electrophoretic Deposition for Fabricating Microbatteries; Integrated Arrays of Ion-Sensitive Electrodes; Model of Fluidized Bed Containing Reacting Solids and Gases; Membrane Mirrors With Bimorph Shape Actuators; Using Fractional Clock-Period Delays in Telemetry Arraying; Developing Generic Software for Spacecraft Avionics; Numerical Study of Pyrolysis of Biomass in Fluidized Beds; and Assessment of Models of Chemically Reacting Granular Flows.

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Microwave Regenerable Air Purification Device

The feasibility of using microwave power to thermally regenerate sorbents loaded with water vapor, CO2, and organic contaminants has been rigorously demonstrated. Sorbents challenged with air containing 0.5% CO2, 300 ppm acetone, 50 ppm trichloroethylene, and saturated with water vapor have been regenerated, singly and in combination. Microwave transmission, reflection, and phase shift has also been determined for a variety of sorbents over the frequency range between 1.3-2.7 GHz. This innovative technology offers the potential for significant energy savings in comparison to current resistive heating methods because energy is absorbed directly by the material to be heated. Conductive, convective and radiative losses are minimized. Extremely rapid heating is also possible, i.e., 1400 C in less than 60 seconds. Microwave powered thermal desorption is directly applicable to the needs of Advance Life Support in general, and of EVA in particular. Additionally, the applicability of two specific commercial applications arising from this technology have been demonstrated: the recovery for re-use of acetone (and similar solvents) from industrial waste streams using a carbon based molecular sieve; and the separation and destruction of trichloroethylene using ZSM-5 synthetic zeolite catalyst, a predominant halocarbon environmental contaminant. Based upon these results, Phase II development is strongly recommended.

Atwater, James E.↗

Monolithic microwave integrated circuit devices for active array antennas

Two different aspects of active antenna array design were investigated. The transition between monolithic microwave integrated circuits and rectangular waveguides was studied along with crosstalk in multiconductor transmission lines. The boundary value problem associated with a discontinuity in a microstrip line is formulated. This entailed, as a first step, the derivation of the propagating as well as evanescent modes of a microstrip line. The solution is derived to a simple discontinuity problem: change in width of the center strip. As for the multiconductor transmission line problem. A computer algorithm was developed for computing the crosstalk noise from the signal to the sense lines. The computation is based on the assumption that these lines are terminated in passive loads.

Mittra, R.↗

Poling of Microwave Electro-Optic Devices

The desire to transmit high frequency, microwave RF signals over fiber optic cables has necessitated the need for electro-optic modulation devices. However, in order to reap these potential benefits, it is necessary to develop the devices and their associated fabrication processes, particularly those processes associated with the poling of the devices. To this end, we entered into a cooperative research agreement with Richard Kunath of NASA LeRC. A graduate student in my group, Tony Kowalczyk, worked closely with the group at NASA to develop processes for construction of a microwave frequency electro-optic modulator. Materials were commercially obtained from Amoco Chemical and in collaboration with Lockheed-Martin. The photolithography processes were developed at NASA LeRC and the electric-field poling process was carried out in our laboratory at CWRU. During the grant period, the poling process conditions were investigated for these multilayer devices. Samples were poled and the resulting nonlinear optical properties were evaluated in our laboratory. Following the grant period, Kowalczyk went to NASA under a NRC fellowship, and I continued to collaborate as a consultant. Publications listed at the end of this report came out of this work. Another manuscript is in preparation and will be submitted shortly.

Singer, Kenneth D.↗

APS-Workshop on Characterization of MMIC (Monolithic Microwave Integrated Circuit) Devices for Array Antenna

The IEEE AP-S ADCOM is attempting to expand its educational, tutorial and information exchange activities as a further benefit to all members. To this end, ADCOM will be forming specialized workshops on topics of interest to its members. The first such workshop on Characterization and Packaging of MMIC Devices for Array Antennas was conceived. The workshop took place on June 13, 1986 as part of the 1986 International Symposium sponsored by IEEE AP-S and URSI in Philadelphia, PA, June 9-13, 1986. The workshop was formed to foster the interchange of ideas among MMIC device users and to provide a forum to collect and focus information among engineers experienced and interested in the topic. After brief presentations by the panelists and comments from attendees on several subtopics, the group was divided into working committees. Each committee evaluated and made recommendations on one of the subtopics.

Smetana, Jerry↗

NASA SBIR product catalog, 1991

This catalog is a partial list of products of NASA SBIR (Small Business Innovation Research) projects that have advanced to some degree into Phase 3. While most of the products evolved from work conducted during SBIR Phase 1 and 2, a few advanced to commercial status solely from Phase 1 activities. The catalog presents information provided to NASA by SBIR contractors who wished to have their products exhibited at Technology 2001, a NASA-sponsored technology transfer conference held in San Jose, California, on December 4, 5, and 6, 1991. The catalog presents the product information in the following technology areas: computer and communication systems; information processing and AI; robotics and automation; signal and image processing; microelectronics; electronic devices and equipment; microwave electronic devices; optical devices and lasers; advanced materials; materials processing; materials testing and NDE; materials instrumentation; aerodynamics and aircraft; fluid mechanics and measurement; heat transfer devices; refrigeration and cryogenics; energy conversion devices; oceanographic instruments; atmosphere monitoring devices; water management; life science instruments; and spacecraft electromechanical systems.

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Null-balancing microwave radiometer

Device performs absolute temperature measurements over range of 0 to 300 degrees Kelvin. Stability of device approaches 0.1 degrees Kelvin. Potential uses include detecting oil slicks on water and determining cloud water content and water vapor content of atmosphere.

Hardy, W. N.↗

Changing sunlight to microwaves: A concept

Electromechanical device converts sunlight into microwave energy by direct process. Still in conceptual stage, device is expected to be lighter and more efficient (ninety percent conversion efficiency) than less-direct conversion systems that employ solar panels and magnetrons. Besides uses in satellites and spacecraft as microwave source, device has many terrestrial applications, including use in fuel-saving sun-powered microwave oven.

Dickinson, R. M.↗

Carbon Nanotubes as Resonators for RF Spectrum Analyzers

Electromechanical resonators of a proposed type would comprise single carbon nanotubes suspended between electrodes (see Figure 1). Depending on the nanotube length, diameter, and tension, these devices will resonate at frequencies in a range from megahertz through gigahertz. Like the carbon-nanotube resonators described in the preceding article, these devices will exhibit high quality factors (Q values), will be compatible with integration with electronic circuits, and, unlike similar devices made from silicone and silicone carbide, will have tunable resonant frequencies as high as several GHz. An efficient electromechanical transduction method for the carbon nanotube resonators is provided by the previously observed variation of carbon nanotube length with charge injection. It was found that injection of electrons or holes, respectively, lengthens or shortens carbon nanotubes, by amounts of the order of a percent at bias levels of a few volts. The charge-dependent length change also enables a simple and direct means of tuning the resonant frequency by varying the DC bias and hence the tension along the tube, much like tuning a guitar string. In its basic form, the invention is a tunable high-Q resonator based on a suspended carbon nanotube bridge with attached electrodes (see Figure 1). An applied DC bias controls the tension and thus the frequency of resonance. If one were to superimpose a radio-frequency (RF) bias on the DC bias, then the resulting rapid variation in tension or length would set the tube into vibration. If, on the other hand, the carbon nanotube were to be set into vibration by interaction between an incident RF electric field and electric charges in the nanotube, then the vibration would give rise to an RF signal output that is proportional to the RF amplitude at the resonance frequency. Because the transduction mechanism is extremely sensitive and the active volume is only a few nanometers in diameter, this device is not well suited for use as a microwave power device. Instead, this carbon nanotube mechanical resonator would be useful primarily as part of a highly precise, sensitive, frequency-selective detector. An array of such devices featuring nanotubes of different lengths (and thus different frequencies) could be made to operate as a highspeed spectrum analyzer (see Figure 2)

Hunt, Brian↗

Highly Stable Microwave Resonator

Superconducting walls on sapphire-filled cavity make low-loss device. Improved microwave resonant cavity consists of sapphire cylinder coated with thin film of superconducting lead. Operated well below superconducting transition temperature at 1.5K, cavity demonstrated superior frequency stability and quality factor. Cavity frequency highly stable and therefore suitable for use in standard frequency generators and filters.

Strayer, Donald M.↗

Future superconductivity applications in space - A review

High temperature superconductor (HISC) materials and devices can provide immediate applications for many space missions. The in-space thermal environment provides an opportunity to develop, test, and apply this technology to enhance performance and reliability for many applications of crucial importance to NASA. Specifically, the technology development areas include: (1) high current power transmission, (2) microwave components, devices, and antennas, (3) microwave, optical, and infrared sensors, (4) signal processors, (5) submillimeter wave components and systems, (6) ultra stable space clocks, (7) electromagnetic launch systems, and (8) accelerometers and position sensors for flight operations. HTSC is expected to impact NASA's Lunar Bases, Mars exploration, Mission to Earth, and Planetary exploration programs providing enabling and cost-effect technology. A review of the space applications of the HTSC technology is presented. Problem areas in technology development needing special attention are identified.

Krishen, Kumar↗

System of extraction of volatiles from soil using microwave processes

A device for the extraction and collection of volatiles from soil or planetary regolith. The device utilizes core drilled holes to gain access to underlying volatiles below the surface. Microwave energy beamed into the holes penetrates through the soil or regolith to heat it, and thereby produces vapor by sublimation. The device confines and transports volatiles to a cold trap for collection.

Ethridge, Edwin C.↗

Microwave-Based Water Decontamination System

A system for decontaminating a medium. The system can include a medium having one or more contaminants disposed therein. The contaminants can be or include bacteria, fungi, parasites, viruses, and combinations thereof. A microwave energy radiation device can be positioned proximate the medium. The microwave energy radiation device can be adapted to generate a signal having a frequency from about 10 GHz to about 100 GHz. The signal can be adapted to kill one or more of the contaminants disposed within the medium while increasing a temperature of the medium by less than about 10 C.

Arndt, G. Dickey↗

Microwave-Based Water Decontamination System

A system for decontaminating a medium. The system can include a medium having one or more contaminants disposed therein. The contaminants can be or include bacteria, fungi, parasites, viruses, and combinations thereof. A microwave energy radiation device can be positioned proximate the medium. The microwave energy radiation device can be adapted to generate a signal having a frequency from about 10 GHz to about 100 GHz. The signal can be adapted to kill one or more of the contaminants disposed within the medium while increasing a temperature of the medium by less than about 10 C.

Arndt, G. Dickey↗