Engineering Papers⌕ Search

SEARCH · Engineering Papers

Results for “Plasma processing”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 91 records · Page 5

Microstructure, mechanical, and thermal properties of compositionally complex (Hf,Zr,Nb,Ti)B 2 ‒LaB 6 ceramics

Novel compositionally complex borides, (Hf,Zr,Nb,Ti)B 2 and (Hf,Zr,Nb,Ti)B 2 ‒LaB 6 , were fabricated using spark plasma sintering process. (Hf,Zr,Nb,Ti)B 2 ‒LaB 6 exhibits a dual-phase microstructure, in which (Hf,Zr,Nb,Ti)B 2 is a primary phase with the hexagonal structure and LaB 6 is a secondary phase with a cubic structure. The mechanical properties of both (Hf,Zr,Nb,Ti)B 2 and (Hf,Zr,Nb,Ti)B 2 ‒LaB 6 are comparable, with a combination of high hardness and moderate fracture toughness. Thermal diffusivity and conductivity of (Hf,Zr,Nb,Ti)B 2 are much lower than the individual transition metal borides but are significantly increased by the addition of LaB 6 . Herein, it is implied that the thermal properties of boride ceramics can be controlled through the appropriate design of principal metal element compositions.

borides↗

Machine Learning of Plasma Science for Next Generation Microelectronics (Project Final Report)

Low temperature plasmas (LTPs) are an enabling technology behind reducing device dimensions and the continuation of Moore’s Law. It is estimated that 40-45% of all process steps necessary to manufacture semiconductor devices involve LTPs. However, challenges in plasma process design and continuous incorporation of novel materials for new device architectures are pushing the limits of what is possible with current plasma technology. For example, creating higher aspect ratio structures and etching features at the atomic scale both require finer control of the ion energy/velocity at wafer surfaces. To support these types of future innovations in the plasma processing systems that Sandia and the DOE rely upon, we have developed novel diagnostics, simulations, and machine learning capabilities to discover, characterize, and predict plasma phenomena affecting the ion energy/velocity distribution function (IEDF). These efforts also supported research program development and external collaboration with industry and academia through Sandia’s Plasma Research Facility (PRF). This report will focus on the following topics and accomplishments of this three year LDRD project, briefly summarized.

42 ENGINEERING↗

Active Divertor Heat Flux Control using Impurity Powder Dropper

Divertor plasma-facing components (PFCs) in a tokamak are typically designed to withstand average steady-state heat loads of about 5–10 MW/m 2 , a limit that applies to both solid and liquid lithium (LL) PFCs. Exceeding these design values can result in surface damage to tungsten PFCs or excessive lithium (Li) evaporation in liquid lithium divertor (LLD) PFCs. Since exceeding the divertor heat load limits has serious consequences, it is therefore prudent to develop a tool to reduce the divertor heat load and bring the heat load to within the design limit without affecting the plasma performance. Active low Z impurity injection such as Li has been suggested as a potential solution to mitigate excess heat flux as suggested previously, given that non-coronal radiation can be quite large ~ 20–30 MJ per mole of injected Li. Li is considered desirable for reducing the edge neutral recycling helping to improve plasma energy confinement. In this paper, we model the Impurity Power Dropper (IPD) to investigate its potential of divertor heat flux control. The IPD is typically located at the top of the tokamak device and uses a vertical drift tube of a few meters. In the 2 m drift tube case, the IPD powder is accelerated to ~ 6 m/sec before reaching the plasma with the upper divertor configuration, matching the condition for the in-board side pellet injection case. By modeling the IPD geometry we determined the IPD powder deposition profile, and thus the non-coronal radiation and ionization profiles in time as well. From the enhanced radiation power loss, it is therefore possible to reduce the divertor heat load using the divertor simulation code. In conclusion, the IPD divertor heat flux control can be tested in the facilities with IPD including ST-40, DIII-D, EAST, WEST and NSTX-U.

Active lithium injection↗

Protein Adhesion on Semi-Fluorinated Polystyrene Surfaces in Static and Dynamic Measurements

Reducing protein adhesion is a critical strategy in fouling-resistant material innovation, with broad applications spanning biomedical and healthcare devices, biosensors, industrial and environmental systems, and other important technological domains. Here, in this study, we elucidated protein adhesion behavior on polystyrene-based thin films by neutron reflectometry (NR) and quartz crystal microbalance with dissipation (QCM-D), using both lysozyme and bovine serum albumin (BSA) as model proteins. To this end, semifluorinated polystyrene thin films with gradient wettability and surface energy were fabricated through dry processing using plasma oxidation and gas-phase deposition. Although it is believed that a fully fluorinated alkyl chain offers extremely low surface energy, thus rejecting foulants, and has been used in many fouling-resistant surface designs, enhanced protein–surface interactions were observed consistently in NR and QCM-D results, due to the combined effects of surface morphology and chemistry. On the contrary, depositing shorter fluorinated silane onto a hydrophilic PS surface contributed to a more homogeneous nanoscale fluorine coating, resulting in less initial protein adsorption and improved surface recovery. Comparative analysis of proteins with different sizes on the nanopatterned semifluorinated surface revealed the influence of molecular characteristics on surface interactions. Lysozyme, being smaller and more compact, showed faster adsorption kinetics and higher surface coverage but largely reversible binding, whereas BSA, with its larger and more flexible structure, formed broader and more stable interfacial layers. This study fills the gap in understanding protein adhesion within the range of hydrophobicity (water contact angle ∼90°), as current strategies often associate with extreme hydrophilic and superhydrophobic surfaces due to hydration or low-surface-energy rejection mechanisms, respectively. It also provides in-depth insights into current combinatorial fouling-resistant surface design.

Yuan, Yue [Oak Ridge National Laboratory (ORNL), O↗

Quadrupolar density structures in driven magnetic reconnection experiments with a guide field

Magnetic reconnection is a ubiquitous process in plasma physics, driving rapid and energetic events such as coronal mass ejections. Reconnection between magnetic fields with arbitrary shear can be decomposed into an anti-parallel reconnecting component and a non-reconnecting guide-field component, which is parallel to the reconnecting electric field. This guide field modifies the structure of the reconnection layer and the reconnection rate. We present results from experiments on the MAIZE pulsed-power generator (500 kA peak current, 200 ns rise time), which use two exploding wire arrays, tilted in opposite directions, to embed a guide field in the plasma flows with a relative strength b≡B g /B rec =0, 0.4, or 1. The reconnection layers in these experiments have widths that are less than the ion skin depth, d i =c/ω pi , indicating the importance of the Hall term, which generates a distinctive quadrupolar magnetic field structure along the separatrices of the reconnection layer. Using laser imaging interferometry, we observe quadrupolar structures in the line-integrated electron density, consistent with the interaction of the embedded guide field with the quadrupolar Hall field. Our measurements extend over much larger length scales (40d i ) at higher β (∼1) than previous experiments, providing an insight into the global structure of the reconnection layer.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Deep potential molecular dynamics simulations of low-temperature plasma-surface interactions

Machine learning approaches to potential generation for molecular dynamics (MD) simulations of low-temperature plasma-surface interactions could greatly extend the range of chemical systems that can be modeled. Empirical potentials are difficult to generalize to complex combinations of multiple elements with interactions that might include covalent, ionic, and metallic bonds. This work demonstrates that a specific machine learning approach, Deep Potential Molecular Dynamics (DeepMD), can generate potentials that provide a good model of plasma etching in the Si-Cl-Ar system. Comparisons are made between MD results using DeepMD models and empirical potentials, as well as experimental measurements. Pure Si properties predicted by the DeepMD model are in reasonable agreement with experimental results. Simulations of Si bombardment by Ar + ions demonstrate the ability of the DeepMD method to predict sputtering yields as well as the depth of the amorphous-crystalline interface. Etch yields as a function of flux ratio and ion energy for simultaneous Cl 2 and Ar + impacts are in good agreement with previous simulation results and experiment. Predictions of etch yields and etch products during plasma-assisted atomic layer etching of Si-Cl 2 -Ar are shown to be in good agreement with MD predictions using empirical potentials and with experiment. Finally, good agreement was also seen with measurements for the spontaneous etching of Si by Cl atoms at 300 K. Further, the demonstration that DeepMD can reproduce results from MD simulations using empirical potentials is a necessary condition to future efforts to extend the method to a much wider range of systems for which empirical potentials may be difficult or impossible to obtain.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Development and transferability of neural-network models for plasma-surface interactions

Plasma-surface interactions are increasingly critical to modern technologies; yet, accurate molecular dynamics simulations remain limited by the capabilities of interatomic potentials. Deep Potentials (DPs) promise to revolutionize the field by providing a systematic method for producing accurate interatomic potentials. The primary challenge of DP development is selecting a dataset, which efficiently spans the set of atomic environments one expects to encounter in the subsequent molecular dynamics simulations. The computational cost of density functional theory calculations, which are the typical basis for DP development, makes it impossible to directly verify the quality of a given DP. To address this challenge, we explore the development of a deep-learned interatomic potential, “DeepREBO,” trained to reproduce the behavior of the REBO2 empirical potential, enabling direct validation of training methodology and transferability. Using an active learning framework, we begin with a minimal dataset and iteratively expand it to train a Deep Potential-Smooth Edition model that faithfully reproduces REBO2 results for 25 eV hydrogen bombardment of diamond (001), a particularly challenging case. We show that small, carefully curated datasets can outperform large, unguided ones, with effective models requiring fewer than 15 000 snapshots. Subsequent transferability tests demonstrate that while DeepREBO generalizes well to diamond (111) surfaces, performance degrades for amorphous carbon or higher-energy impacts, highlighting the need for use-case-specific training data. We also evaluate methods to improve short-range repulsion. This study outlines best practices for training robust deep potentials and underscores the importance of dataset design for predictive plasma simulations.

Ab-initio molecular dynamics↗

Basic Physical Processes Involving Dust in Fusion Plasmas

This report presents the main outcomes of our research focused on understanding the behavior and effects of dust particles in fusion plasmas, particularly in the edge regions of tokamaks and stellarators. We conducted computer modeling studies of burst injections of carbon and tungsten dust particles in DIII-D like divertor plasmas. The studies investigated effects of transient influx of the low- and high-Z material plasma contaminants in form of dust on the edge plasma dynamics in a modern mid-size tokamak. We also performed theoretical and computational studies of the forces acting on non-spherical dust grains in magnetized and nonmagnetized plasmas. In addition, we cooperated with General Atomics slag management group on development of DIII-D dust injection experiments to measure trajectories of dust grains in the divertor plasma and compare them with DUSTT code predictions for validation of the dust modeling capabilities. We collaborated with JET experimentalists on evaluation of radiative losses induced by injection of mixed neon-deuterium ice pellets for disruption and run-away electron generation mitigation during thermal and current quench phases. We also cooperated with experimentalists at LHD fusion device (Japan) on modeling support of experiments on injection of boron granules in fusion plasma discharges to assess their dynamics and effectiveness for in situ dynamic wall conditioning.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Temperature Distribution Within an Ignition Kernel Initiated by a Laser-Induced Plasma

The sizes of, and temperature distributions within, ignition kernels initiated by a Q-switched neodymium-doped yttrium aluminum garnet laser-induced plasma in an unconfined lean premixed hydrogen-air upward jet flow are investigated. The experiments involved a range of jet velocities and a range of deposited laser energies at a fixed height above the exit along the axis of a burner. The growth of, and the temperature distributions within, the ignition kernels, as affected by the size and the energy distribution of the laser-induced plasma, are monitored with an infrared camera. The initial ignition kernels’ areas are larger with higher laser pulse energies and remain unchanged up to [Formula: see text] and then increase by factors of up to 3 at [Formula: see text]. The change in the kernel area caused by the jet velocities is less than 1.5%. An increase of the bulk velocity by 190% decreases the ignition kernel temperature by 6%. This reduction in the ignition kernel temperatures is because of an increase in energy losses by a factor of 2 and decreases in heat releases by 2% at [Formula: see text] and by 11% at [Formula: see text]. The present contributions are: measurements of and insights into temperature distributions and kernel development rates during the laser-induced plasma ignition process at different deposited energies and flow velocities.

Engineering↗

Anisotropic Turbulent Flows Observed in Above-the-loop-top Regions during Solar Flares

Abstract Solar flare above-the-loop-top (ALT) regions are vital for understanding solar eruptions and fundamental processes in plasma physics. Recent advances in three-dimensional (3D) magnetohydrodynamic (MHD) simulations have revealed unprecedented details on turbulent flows and MHD instabilities in flare ALT regions. Here, for the first time, we examine the observable anisotropic properties of turbulent flows in ALT by applying a flow-tracking algorithm on narrow-band extreme-ultraviolet images that are observed from the face-on viewing perspective. First, the results quantitatively confirm the previous observation that vertical motions dominate and that the anisotropic flows are widely distributed in the entire ALT region with the contribution from both upflows and downflows. Second, the anisotropy shows height-dependent features, with the most substantial anisotropy appearing at a certain middle height in ALT, which agrees well with the MHD modeling results where turbulent flows are caused by Rayleigh–Taylor-type instabilities in the ALT region. Finally, our finding suggests that supra-arcade downflows (SADs), the most prominently visible dynamical structures in ALT regions, are only one aspect of turbulent flows. Among these turbulent flows, we also report the antisunward-moving underdense flows that might develop due to MHD instabilities, as suggested by previous 3D flare models. Our results indicate that the entire flare fan displays group behavior of turbulent flows where the observational bright spikes and relatively dark SADs exhibit similar anisotropic characteristics.

Xie, Xiaoyan (ORCID:0009000705827807)↗

The Impact of Alfvénic Shear Flow on Magnetic Reconnection and Turbulence

Magnetic reconnection is a fundamental and omnipresent energy conversion process in plasma physics. Novel observations of fields and particles from Parker Solar Probe (PSP) have shown the absence of reconnection in a large number of current sheets in the near-Sun solar wind. Using near-Sun observations from PSP encounters 4–11 (2020 January–2022 March), we investigate whether reconnection onset might be suppressed by velocity shear. We compare estimates of the tearing mode growth rate in the presence of shear flow for time periods identified as containing reconnecting current sheets versus nonreconnecting times, finding systematically larger growth rates for reconnection periods. Upon examination of the parameters associated with reconnection onset, we find that 85% of the reconnection events are embedded in slow, non-Alfvénic wind streams. We compare with fast, slow non-Alfvénic, and slow Alfvénic streams, finding that the growth rate is suppressed in highly Alfvénic fast and slow wind, and reconnection is not seen in these wind types, as would be expected from our theoretical expressions. These wind streams have strong Alfvénic flow shear, consistent with the idea of reconnection suppression by such flows. This could help explain the frequent absence of reconnection events in the highly Alfvénic, near-Sun solar wind observed by PSP. Finally, we find a steepening of both the trace and magnitude magnetic field spectra within reconnection periods in comparison to ambient wind. We tie this to the dynamics of relatively balanced turbulence within these reconnection periods and the potential generation of compressible fluctuations.

slow solar wind↗

Collisionless Larmor coupling and blob formation in a laser-plasma expanding into a magnetized ambient plasma

Collisionless Larmor coupling is a fundamental process in space and astrophysical plasmas that enables momentum transfer between an expanding plasma and a magnetized ambient medium. Here, in this paper, we report on the laboratory experimental study of Larmor coupling leading to the formation of a plasma blob associated with a laser-driven, super-Alfvénic plasma flow on the Large Plasma Device at the University of California, Los Angeles. The high-repetition rate enables systematic spatial and temporal scans of the plasma evolution using Doppler spectroscopy, as well as measurements of the magnetic field, electrostatic field, and self-emission of both debris and ambient ions using filtered imaging. We observe the self-focusing of the laser-produced plasma and the formation of a secondary diamagnetic cavity associated with a blob composed of background ions. Doppler spectroscopy reveals the transverse velocity distribution of the background ions, providing direct evidence of ion energization via Larmor coupling. The systematic spatial and temporal scans enabled by the high-repetition-rate experiment allow for a detailed characterization of the ion dynamics. These experimental observations are supported by numerical simulations that provide more insight into the kinetic-scale physics associated with blob formation as well as the role of the ambient plasma density.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Science challenges and research opportunities for plasma applications in microelectronics

Low-temperature plasmas (LTPs) are essential to manufacturing devices in the semiconductor industry, from creating extreme ultraviolet photons used in the most advanced lithography to thin film etching, deposition, and surface modifications. It is estimated that 40%–45% of all process steps needed to manufacture semiconductor devices use LTPs in one form or another. LTPs have been an enabling technology in the multidecade progression of the shrinking of device dimensions, often referred to as Moore’s law. New challenges in circuit and device design, novel materials, and increasing demands to achieve environmentally benign processing technologies require advances in plasma technology beyond the current state-of-the-art. The Department of Energy Office of Science Fusion Energy Sciences held a workshop titled Plasma Science for Microelectronics Nanofabrication in August 2022 to discuss the plasma science challenges and technical barriers that need to be overcome to continue to develop the innovative plasma technologies required to support and advance the semiconductor industry. One of the key outcomes of the workshop was identifying a set of priority research opportunities (PROs) to focus attention on the most strategic plasma science challenges to address to benefit the semiconductor industry. For each PRO, scientific challenges and recommended strategies to address those challenges were identified. Furthermore, this article summarizes the PROs identified by the workshop participants.

36 MATERIALS SCIENCE↗

Multimodal azimuthal oscillations in electron beam generated E×B plasma

Electron beam (e-beam) generated plasmas with applied crossed electric and magnetic (E×B) fields are promising for low-damage material processing. However, these plasmas can be subject to the formation of azimuthally propagating structures that enhance the radial transport of energetic charged species, which can harm the gentle processing capability of the plasma. In this work, we investigate the azimuthal structure formation in an e-beam generated E×B plasma using experimental diagnostics and 2D3V particle-in-cell simulations. Our findings demonstrate the formation of multiple simultaneously occurring azimuthally propagating modes that exhibit nontrivial radial dependence. It is suggested that the multimodal azimuthal spectrum is caused in part by the radial outflow of ions in the plasma.

electron beams↗

Anticathode effect on multimodal azimuthal oscillations in electron beam generated E×B plasma

Electron beam (e-beam) generated plasmas with applied crossed electric and magnetic (⁠E x B⁠) fields are promising for low-damage (gentle) material processing. However, these plasmas can be subject to the formation of plasma non-uniformities propagating in the ⁠E x B direction. These rotating plasma structures (or “spokes”) enhance the transport of charged species across the magnetic field, which can harm the gentle processing capability of the plasma. In this work, we investigate the role of electrostatically active boundaries on the spoke formation by incorporating a variable bias conducting boundary (known as an anticathode) placed on the axially opposite side of the cathode. Our findings indicate azimuthal mode suppression occurs when the anticathode is electron collecting. Furthermore, we show selective azimuthal mode suppression by biasing the anticathode to an intermediate potential between the cathode and anode potentials. In conclusion, these findings suggest a link between the axial electron confinement in the e-beam generated plasma and azimuthally propagating plasma structure formation.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

A tetrahedral probe constellation approach for measuring canonical momentum in self-organized laboratory plasma

To examine momentum redistribution processes and study generalized helicities during plasma relaxation in Madison Symmetric Torus, MST, reversed field pinch plasma, a new probe is being tested to measure the full 3D plasma ion flow and magnetic field vectors at four spatial locations arranged in a tetrahedral shape reminiscent of a satellite measurement constellation. These measurements permit calculation of ∇ x $\vec{u}$ and canonical momentum, where $\vec{u}$ is the plasma ion flow vector. The probe consists of four probe heads arranged in a tetrahedral pattern, with an overall probe diameter of ∼31.75 mm. The probe head diameter is ∼1.0 cm, which is of the order of the ion Larmor radius. Each head has four molybdenum electrodes, also arranged in tetrahedral geometry, which are biased relative to a common return electrode, using four power supplies (one for each head), to measure the local ion flow. Additionally, each head has three orthogonal magnetic pickup coils within it to measure equilibrium and fluctuating magnetic fields.

Physics - Plasma physics↗