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At least 91 records · Page 5

Low-pressure inductively coupled plasmas in hydrogen: impact of gas heating on the spatial distribution of atomic hydrogen and vibrationally excited states

Non-equilibrium inductively coupled plasmas (ICPs) operating in hydrogen are of significant interest for applications including large-area materials processing. Increasing control of spatial gas heating, which drives the formation of neutral species density gradients and the rate of gas-temperature-dependent reactions, is critical. In this study, we use 2D fluid-kinetic simulations with the Hybrid Plasma Equipment Model to investigate the spatially resolved production of atomic hydrogen in a low-pressure planar ICP operating in pure hydrogen (10–20 Pa or 0.075–0.15 Torr, 300 W). The reaction set incorporates self-consistent calculation of the spatially resolved gas temperature and 14 vibrationally excited states. We find that the formation of neutral-gas density gradients, which result from spatially non-uniform electrical power deposition at constant pressure, can drive significant variations in the vibrational distribution function and density of atomic hydrogen when gas heating is spatially resolved. This highlights the significance of spatial gas heating on the production of reactive species in relatively high-power-density plasma processing sources.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Measurement of energy distribution in flowing hydrogen microwave plasmas

An electrothermal propulsion concept utilizing a microwave plasma system as the mechanism to convert electromagnetic energy into kinetic energy of a flowing gas is investigated. A calorimetry system enclosing a microwave plasma system has been developed to accurately measure the energy inputs and outputs of the microwave plasma system. The rate of energy transferred to the gas can be determined to within + or - 1.8 W from an energy balance around the microwave plasma system. The percentage of the power absorbed by the microwave plasma system transferred to the hydrogen gas as it flows through the system is found to increase with the increasing flow rate, to decrease with the increasing pressure, and to be independent of the absorbed power. An upper bound for the hydrogen gas temperature is estimated from the energy content, heat capacity, and flow rate of the gas stream. A lower bound for an overall heat-transfer coefficient is then calculated, characterizing the energy loss from the hydrogen gas stream to the air cooling of the plasma discharge tube wall. The heat-transfer coefficient is found to increase with the increasing flow rate and pressure and to be independent of the absorbed power. This result indicates that a convective-type mechanism is responsible for the energy transfer.

Chapman, R.↗

Radiative cooling in shock-heated hydrogen-helium plasmas

Axial and off-axis radiative cooling of cylindrical shock-heated hydrogen-helium plasmas is investigated theoretically and experimentally. The coupled fluid dynamic-radiative transfer equations are solved by a combination of approximation techniques aimed at simplifying the computation of the flux divergence term, namely, the quasi-isothermal approximation and the exponential approximation developed for the solid angle integration. The accuracy of the approximation schemes has been assessed and found acceptable for applying the methods to the rapid computation of the radiatively coupled flow problem. Radiative cooling experiments were conducted in a 6-inch annular arc accelerator shock tube (ANAA) for an initial pressure of 1 torr and shock speeds from 35 to 45 Km/sec. The results indicate that the lateral cooling is small compared with the axial cooling, and that better agreement is achieved between the data and the theoretical results by inclusion of the lateral temperature gradient.

Poon, P. T. Y.↗

Determining electron temperature and density in a hydrogen microwave plasma

A three-temperature thermo-chemical model is developed for analyzing the chemical composition and energy states of a hydrogen microwave plasma used for studying diamond deposition. The chemical and energy exchange rate coefficients are determined from cross section data, assuming Maxwellian velocity distributions for electrons. The model is reduced to a zero-dimensional problem to solve for the electron temperature and ion mole fraction, using measured vibrational and rotational temperatures. The calculations indicate that the electron temperature may be determined to within a few percent error even though the uncertainty in dissociation fraction is many times larger.

Scott, Carl D.↗

Plasma tests of sprayed coatings for rocket thrust chambers

Several plasma-sprayed coating systems were evaluated for structural stability in hydrogen plasma and in oxygen plasma mixed with hydrogen plasma. The principal test heat flux was 15 Btu per inch squared seconds. The system consisted of a number of thin 0.002 to 0.020 in. layers of metal oxides and/or metals. The principal materials included are molybdenum nichrome, alumina, and zirconia. The study identifies important factors in coating system fabrication and describes the durability of the coating systems in the test environments. Values of effective thermal conductivity for some of the systems are indicated.

Curren, A. N.↗

Modular Plasma Microreactor for Intensified Hydrogen Peroxide Production

Sustainable and decentralized manufacturing of hydrogen peroxide (H 2 O 2 ) has been extensively sought to replace the energy- and waste-intensive anthraquinone process. We introduce a helical biphasic microreactor in a coaxial dielectric barrier discharge (DBD) configuration as a modular, adaptable, and scalable intensified unit for H 2 O 2 production. Geometric and operating parameters such as electrode length, applied voltage, and gas and liquid flow rates can be tuned to regulate the residence time, delivered power, and gas–liquid interfacial area. In turn, these affect the key output parameters, i.e., H 2 O 2 concentration, production rate, and energy yield. We found a direct correlation between the H 2 O 2 production rate and the product of the interfacial area and residence time in the plasma region. We investigated the H 2 O 2 formation pathways using DMSO as an ·OH radical scavenger and found that H 2 O 2 forms by the dissolution of gaseous H 2 O 2 at low interfacial areas and is enhanced probably due to the interfacial recombination of ·OH radicals at a large gas–liquid interfacial area. The reactor temperature can also be externally controlled to intensify the production rate and energy yield of H 2 O 2 . Concentrations of up to 33 mM can be attained with a small footprint reactor that features a maximum energy yield of 4 g kWh –1 . Here, the plasma microreactor could epitomize a powerful process intensification tool for sustainable and distributed chemical manufacturing.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Equilibrium and nonequilibrium electron density measurements in transient shock-heated hydrogen-helium plasmas

In the NASA planetary program, atmospheric entry probe missions to Jupiter, Saturn, and Uranus are potential programs now being planned for the 1980's. The work reported in this paper is concerned with predicting the electron density, and resulting radiative emission from the shock layer which must be accommodated by the entry probe heatshield. Within the hydrogen-helium plasma surrounding the forward heatshield, there are regions of near thermochemical equilibrium whose properties are predictable - however, there are uncertainties in these electron density calculations necessitating further measurements by H-beta line broadening and holographic interferometer fringe shift as reported here. There is good agreement between the results obtained from the holographic measurements and the spectroscopic measurements which lends confidence to each of the two completely independent diagnostic techniques. The equilibrium electron density determined from the experimental measurements is somewhat higher than that predicted.

Livingston, F. R.↗

Reduction kinetics of hematite powder using argon/hydrogen plasma with prospects for near net shaping of sustainable iron

Direct reduction of iron ore using hydrogen plasma is being explored as a potential solution to decarbonize the iron and steel sector. The current state-of-the-art demonstrated reduction of hematite pellets via hydrogen plasma using Ar + 10% H 2 but had slow reduction kinetics, requiring 30 minutes of plasma exposure for complete reduction. Here we show that using hematite in a powder form, easily obtainable from beneficiated ore, results in 10× faster kinetics using plasma generated from Ar + 2% H 2 shielding gas compared to the current state-of-the art. Additionally, the increased kinetics using powders and a dilute hydrogen concentration can enable the use of advanced manufacturing techniques like blown powder directed energy deposition using a plasma tungsten arc welding torch to manufacture near net shape components directly from the ore concentrates. This ore to part approach will also reduce the emissions associated with downstream processes like rolling, forging, and machining, thereby further aiding in the sectorial decarbonization efforts.

36 MATERIALS SCIENCE↗

Optimization of Indium Bump Morphology for Improved Flip Chip Devices

Flip-chip hybridization, also known as bump bonding, is a packaging technique for microelectronic devices that directly connects an active element or detector to a substrate readout face-to-face, eliminating the need for wire bonding. In order to make conductive links between the two parts, a solder material is used between the bond pads on each side. Solder bumps, composed of indium metal, are typically deposited by thermal evaporation onto the active regions of the device and substrate. While indium bump technology has been a part of the electronic interconnect process field for many years and has been extensively employed in the infrared imager industry, obtaining a reliable, high-yield process for high-density patterns of bumps can be quite difficult. Under the right conditions, a moderate hydrogen plasma exposure can raise the temperature of the indium bump to the point where it can flow. This flow can result in a desirable shape where indium will efficiently wet the metal contact pad to provide good electrical contact to the underlying readout or imager circuit. However, it is extremely important to carefully control this process as the intensity of the hydrogen plasma treatment dramatically affects the indium bump morphology. To ensure the fine-tuning of this reflow process, it is necessary to have realtime feedback on the status of the bumps. With an appropriately placed viewport in a plasma chamber, one can image a small field (a square of approximately 5 millimeters on each side) of the bumps (10-20 microns in size) during the hydrogen plasma reflow process. By monitoring the shape of the bumps in real time using a video camera mounted to a telescoping 12 magnifying zoom lens and associated optical elements, an engineer can precisely determine when the reflow of the bumps has occurred, and can shut off the plasma before evaporation or de-wetting takes place.

Jones, Todd J.↗

Method to Improve Indium Bump Bonding via Indium Oxide Removal Using a Multi-Step Plasma Process

A process for removing indium oxide from indium bumps in a flip-chip structure to reduce contact resistance, by a multi-step plasma treatment. A first plasma treatment of the indium bumps with an argon, methane and hydrogen plasma reduces indium oxide, and a second plasma treatment with an argon and hydrogen plasma removes residual organics. The multi-step plasma process for removing indium oxide from the indium bumps is more effective in reducing the oxide, and yet does not require the use of halogens, does not change the bump morphology, does not attack the bond pad material or under-bump metallization layers, and creates no new mechanisms for open circuits.

Greer, H. Frank↗

Plasma processing of interstellar PAHs into solar system kerogen

Processes resulting in the formation of hydrocarbons of carbonaceous chondrites and the identity of the interstellar molecular precursors involved are an objective of investigations into the origin of the solar system and perhaps even life on earth. We have combined the resources and experience of an astronomer and physicists doing laboratory simulations with those of a chemical expert in the analysis of meteoritic hydrocarbons, in a project that investigated the conversion of polycyclic aromatic hydrocarbons (PAHs) formed in stellar atmospheres into alkanes found in meteorites. Plasma hydrogenation has been found in the University of Alabama at Birmingham Astrophysics Laboratory to produce from the precursor PAH naphthalene, a new material having an IR absorption spectrum (Lee, W. and Wdowiak, T.J., Astrophys. J. 417, L49-L51, 1993) remarkably similar to that obtained at Arizona State University of the benzene-methanol extract of the Murchison meteorite (Cronin, J.R. and Pizzarello, S., Geochim. Cosmochim. Acta 54, 2859-2868, 1990). There are astrophysical and meteoritic arguments for PAH species from extra-solar sources being incorporated into the solar nebula, where plasma hydrogenation is highly plausible. Conversion of PAHs into alkanes could also have occurred in the interstellar medium. The synthesis of laboratory analogs of meteoritic hydrocarbons through plasma hydrogenation of PAH species is underway, as is chemical analysis of those analogs. The objective is to clarify this heretofore uninvestigated process and to understand its role during the origin of the solar system as a mechanism of production of hydrocarbon species now found in meteorites. Results have been obtained in the form of time-of-flight spectroscopy and chemical analysis of the lab analog prepared from naphthalene.

NASA Discipline Exobiology↗

Effect of anode-cathode geometry on performance of the HIP-1 hot ion plasma

Hot-ion hydrogen plasma experiments were conducted in the NASA Lewis HIP-1 magnetic mirror facility to determine how the ion temperature was influenced by the axial position of the cathode tips relative to the anodes. A steady-state EXB plasma was formed by applying a strong radially inward dc electric field near the throats of the magnetic mirrors. The dc electric field was created between hollow cathode rods inside hollow anode cylinders, both concentric with the magnetic axis. The highest ion temperatures, 900 eV, were attained when the tip of each cathode was in the same plane as the end of its anode. These temperatures were reached with 22 kV applied to the electrodes in a field of 1.1 tesla. Scaling relations were empirically determined for ion temperature and the product of ion density and neutral particle density as a function of cathode voltage, discharge current, and electrode positions. Plasma discharge current vs voltage (I-V) characteristics were determined.

Lauver, M. R.↗

Experimental observation of the geodesic acoustic frequency limit for the NBI-driven Alfvén eigenmodes in TJ-II

We study Alfvén Eigenmodes (AEs) in the TJ-II heliac in hydrogen plasmas heated by hydrogen cofield NBI. Taking advantage of the unique TJ-II flexibility in varying plasma current, we have observed strong variation of the AE frequency from f AE ~ 30 to ~ 220 kHz for selected modes. An advanced heavy ion beam probe diagnostic determines the spatial location and internal amplitudes of the modes. The modes satisfy a local AE dispersion relation including the geodesic acoustic frequency that represents the lowest frequency of the mode. Linear MHD-modeling with STELLGAP and FAR3D codes shows that the calculated temporal evolution of the mode frequency reproduces the observed maxima and minima at the same time intervals with a similar frequency range and the radial profile peaks near the outer edge of the observed one.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Measurement of plasma temperature and density using laser absorption

A laser radiation absorption technique, suitable for temporal measurement of the electron density, the temperature, or a simultaneous determination of both, in an LTE plasma, is discussed. The theoretical calculation of the absorption coefficient for a hydrogen plasma is outlined; some results are presented for visible wavelengths. Measurements of electron density and temperature are presented and shown to be in good agreement with those values obtained by other methods. Finally, the possible use of the argon ion laser for simultaneous electron density and temperature measurement is discussed, and the theoretical curves necessary for its application to hydrogen plasma diagnostics are shown.

Billman, K. W.↗

Plasma deposited hydrogenated carbon on GaAs and InP

The properties of diamond like carbon films grown by RF flow discharge 30 kHz plasma using methane are reported. The Cis XPS line shape of films showed localized hybrid carbon bonds as low as 40 to as high as 95 percent. Infrared spectroscopy and N(15) nuclear reaction profiling data indicated 35 to 42 percent hydrogen, depending inversely on deposition temperature. The deposition rate of films on Si falls off exponentially with substrate temperature, and nucleation does not occur above 200 C on GaAs and InP. Optical data of the films showed bandgap values of 2.0 to 2.4 eV increasing monotonically with CH4 flow rate.

Warner, J. D.↗

Producing Hydrogen by Plasma Pyrolysis of Methane

Plasma pyrolysis of methane has been investigated for utility as a process for producing hydrogen. This process was conceived as a means of recovering hydrogen from methane produced as a byproduct of operation of a life-support system aboard a spacecraft. On Earth, this process, when fully developed, could be a means of producing hydrogen (for use as a fuel) from methane in natural gas. The most closely related prior competing process - catalytic pyrolysis of methane - has several disadvantages: a) The reactor used in the process is highly susceptible to fouling and deactivation of the catalyst by carbon deposits, necessitating frequent regeneration or replacement of the catalyst. b) The reactor is highly susceptible to plugging by deposition of carbon within fixed beds, with consequent channeling of flow, high pressure drops, and severe limitations on mass transfer, all contributing to reductions in reactor efficiency. c) Reaction rates are intrinsically low. d) The energy demand of the process is high.

Atwater, James↗

Mechanism of H 2 plasma-enabled reduction of hematite thin films

Hydrogen plasma is gaining significant interest as a promising pathway for direct iron ore reduction and for lowering process temperatures but the reduction mechanism remains poorly understood. In this work we analyzed the plasma and thermal reduction of thin-film hematite (Fe 2 O 3 ) at temperatures below 340 °C using X-ray diffraction and scanning electron microscopy with energy-dispersive X-ray spectroscopy. Plasma reduced the incubation period by an order of magnitude and increased the reduction rate by a factor of 2.6 compared to thermal reduction. Plasma-produced H-atoms facilitate the formation of numerous iron nucleation sites, bypassing the energetically unfavorable dissociative adsorption of H 2 on iron oxide. These iron nuclei can autocatalyze the reduction of the surrounding hematite via a hydrogen spillover mechanism. Our results demonstrate that plasma-derived H-atoms primarily impact the initial nucleation-limited stage. These new insights provide a mechanistic framework that can aid the implementation and optimization of hydrogen plasma-assisted iron oxide reduction at reduced temperatures.

08 HYDROGEN↗