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At least 865 records · Page 48

Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography

Extreme ultraviolet lithography (EUVL, λ = 13.5 nm) is critical for sub-1 nm technology nodes but remains constrained by inherent trade-offs among resolution, line-edge roughness (LER), and sensitivity. Stochastic effects originating from photon shot noise, low-energy secondary electron blur, and the random distribution of resist components further limit its advancement toward high numerical-aperture (NA, NA = 0.55) and hyper-NA (NA ≥0.75) EUVL. While the optimization of spin-on chemically amplified resists (CARs) continues, metal-oxide resists (MORs) have emerged as strong candidates for next-generation EUVL by incorporating metals with high EUV absorption coefficients, which enhances both resist sensitivity and etch resistance during pattern transfer. Besides spin-coating, recent advances in vapour-phase techniques, such as vapour-phase infiltration (VPI), chemical vapour deposition (CVD), and molecular atomic layer deposition (MALD), offer promising pathways to achieve new resist platforms, such as dry resists, that satisfy the stringent thickness and uniformity requirements of next-generation EUVL. These methods enable the direct incorporation of metal species into existing resist matrices or the formation of hybrid inorganic–organic resist platforms, thereby improving film uniformity, etch durability, and pattern fidelity while mitigating stochastic defects. This review highlights the latest advancements in vapour-phase-synthesized EUV resists, emphasizing material design, lithographic performance, and the underlying exposure mechanisms. Although still emerging, vapour-phase strategies are paving the way for an all-dry integration framework that could improve EUV patterning workflows and meet the demands of future technology nodes.

36 MATERIALS SCIENCE↗

Extreme ultraviolet time- and angle-resolved photoemission setup with 21.5 meV resolution using high-order harmonic generation from a turn-key Yb:KGW amplifier

Characterizing and controlling electronic properties of quantum materials require direct measurements of nonequilibrium electronic band structures over large regions of momentum space. Here, we demonstrate an experimental apparatus for time- and angle-resolved photoemission spectroscopy using high-order harmonic probe pulses generated by a robust, moderately high power (20 W) Yb:KGW amplifier with a tunable repetition rate between 50 and 150 kHz. By driving high-order harmonic generation (HHG) with the second harmonic of the fundamental 1025 nm laser pulses, we show that single-harmonic probe pulses at 21.8 eV photon energy can be effectively isolated without the use of a monochromator. The on-target photon flux can reach 5 × 1010 photons/s at 50 kHz, and the time resolution is measured to be 320 fs. The relatively long pulse duration of the Yb-driven HHG source allows us to reach an excellent energy resolution of 21.5 meV, which is achieved by suppressing the space-charge broadening using a low photon flux of 1.5 × 108 photons/s at a higher repetition rate of 150 kHz. The capabilities of the setup are demonstrated through measurements in the topological semimetal ZrSiS and the topological insulator Sb2−xGdxTe3.

Liu, Yangyang↗

High-field side scrape-off layer density profile measurements and implications for high-field side LHCD coupling in DIII-D

The high-field side (HFS) scrape-off layer (SOL) is an often under-diagnosed region of tokamak plasmas. Situated in a region with favorable curvature, the HFS SOL has minimal turbulence-induced radial transport compared to the low-field side. Using profile reflectometry, the HFS SOL density profile is measured with high temporal resolution for a wide range of DIII-D plasma discharges for the first time. The magnetic configuration, particularly the location of the secondary separatrix (SS) largely determines the HFS SOL density profile. Additionally, density perturbations induced by edge-localized modes (ELMs) are observed in the HFS SOL, and the impact of ELMs on the SOL density profile is characterized for a range of magnetic configurations. It is found that ELM-induced HFS SOL perturbations are generally localized to within the SS and ELM-induced changes to the HFS wall density are minimized in near double-null configurations. The characterization of the HFS SOL density profile on DIII-D is crucial for the effective coupling of the planned HFS lower hybrid current drive (LHCD) launcher. Experimental HFS SOL measurements are used as input to full-wave simulations of LHCD coupling. Furthermore, this work simulates the effect of the magnetic configuration on LHCD coupling. It also simulates LHCD coupling in ELMs and high q min discharges. During such discharges, the LHCD coupling is predicted to be resilient to ELM-induced SOL density perturbations.

high-field side↗

Ultra-Fast 4H-SiC LGAD With Etched Termination and Field Plate

The design, fabrication, and demonstration of a novel Silicon Carbide Low Gain Avalanche Detector (4HSiC LGAD), exhibiting an ultra-fast time response and excellent time resolution, are reported. Here, the use of field plates is proposed to suppress the high electric field caused by the negative bevel-etched angle in 4H-SiC LGADs based on TCAD simulations. Experimental measurements confirm that the field plate significantly increases the breakdown voltage of the 4H-SiC LGADs. Gain and time resolution are measured by using the ultraviolet transient current technique (UV-TCT) showing that 4H-SiC LGADs possess excellent timing performance, with a time resolution better than 35 ps for the injected laser signal with single minimum ionizing particle (MIP) charges generation at room temperature. Additionally, the gain suppression effect in a 4H-SiC LGAD is observed for the first time.

43 PARTICLE ACCELERATORS↗

Readout Noise of Digital Frequency Multiplexed TES Detectors for CUPID

The superconducting transition-edge sensor (TES) detectors have been the standard in cosmic microwave background (CMB) experiments for almost two decades and are now being adapted for use in nuclear physics, such as neutrinoless double beta decay searches. In this article, we focus on a new high-bandwidth frequency multiplexed TES readout system developed for CUPID, a neutrinoless double beta decay experiment that will replace CUORE. In order to achieve the high energy resolution requirements for CUPID, the readout noise of the system must be kept to a minimum. Low TES operating resistance and long wiring between the readout SQUID and the warm electronics are needed for CUPID, prompting a careful consideration of the design parameters of this application of frequency multiplexing. In this work, we characterize the readout noise of the newly designed frequency multiplexed TES readout system for CUPID and construct a noise model to understand it. Here, we find that current sharing between the SQUID coil impedance and other branches of the circuit, as well as the long output wiring, worsen the readout noise of the system. To meet noise requirements, a SQUID with a low input inductance, high transimpedance, and/or low dynamic impedance is needed, and the wiring capacitance should be kept as small as possible. Alternatively, the option of adding a cryogenic low-noise amplifier at the output of the SQUID should be explored.

CUPID↗

Real-time X-ray phase-contrast imaging using SPINNet—a speckle-based phase-contrast imaging neural network

X-ray phase-contrast imaging has become indispensable for visualizing samples with low absorption contrast. In this regard, speckle-based techniques have shown significant advantages in spatial resolution, phase sensitivity, and implementation flexibility compared with traditional methods. However, the computational cost associated with data inversion has hindered their wider adoption. By exploiting the power of deep learning, we developed a speckle-based phase-contrast imaging neural network (SPINNet) that significantly improves the imaging quality and boosts the phase retrieval speed by at least 2 orders of magnitude compared to existing methods. To achieve this performance, we combined SPINNet with a coded-mask-based technique, an enhanced version of the speckle-based method. Using this scheme, we demonstrate the simultaneous reconstruction of absorption and phase images on the order of 100 ms, where a traditional correlation-based analysis would take several minutes even with a cluster. In addition to significant improvement in speed, our experimental results show that the imaging and phase retrieval quality of SPINNet outperform existing single-shot speckle-based methods. Furthermore, we successfully demonstrate SPINNet application in x-ray optics metrology and 3D x-ray phase-contrast tomography. Our result shows that SPINNet could enable many applications requiring high-resolution and fast data acquisition and processing, such as in situ and in operando 2D and 3D phase-contrast imaging and real-time at-wavelength metrology and wavefront sensing.

36 MATERIALS SCIENCE↗

The Sensor Dilemma in Intelligent Transportation Systems

Intelligent Transportation Systems (ITS) are at the forefront in advancing the way we interact and perceive with the transportation network. This revolution is fueled by the significant advancement in sensor perception technologies such as Radar, LiDAR and Video Imaging which are the most popular modalities for ITS. Real-time perception data from these sensors allows intelligent infrastructure side decision making to improve the energy, efficiency and safety at traffic intersections. As traffic departments across the United States are transitioning from traditional loop detectors / emulators and embracing newer technologies, they are often left with a dilemma in choosing a sensor technology for infrastructure-based perception which is reliable, inexpensive, easy to setup and has robust performance in varying weather conditions. However, choosing a sensor which checks all boxes is not straightforward as every sensor type has unique benefits and drawbacks. Radar is excellent at detecting long range vehicles and weather resistance but lacks high resolution. LiDAR is expensive and weather-sensitive, while cameras provide rich visual data at a low cost but are constrained by lighting and visibility. This study examines Radar, LiDAR and camera sensors capabilities to ascertain whether any of these qualifies as the "best" sensor for ITS perception. Through this evaluation, we hope to draw attention to the necessity of National Renewable Energy Laboratory's (NREL) Infrastructure Perception and Control (IPC) framework which presents a multi-sensor track data fusion engine to assimilate multiple data streams in order to provide robust and reliable perception. While no single sensor can meet all the demands of ITS, a hybrid approach combining multiple sensor modalities like Radar, LiDAR and cameras, offers the most robust solution for enhancing the safety and efficiency in intelligent transportation systems.

33 ADVANCED PROPULSION SYSTEMS↗

The Sensor Dilemma in Intelligent Transportation Systems: Evaluating Radar, Lidar and Camera: Preprint

Intelligent transportation systems (ITS) are at the forefront in advancing the way we interact with and perceive the transportation network. This revolution is fueled by the significant advancement in sensor perception technologies such as radar, lidar, and video imaging, which are the most popular modalities for ITS. Real-time perception data from these sensors allow intelligent infrastructure-side decision-making to improve the energy, efficiency, and safety at traffic intersections. As traffic departments across the United States transition from traditional loop detectors and emulators and embrace newer technologies, they are often left with a dilemma in choosing a sensor technology for infrastructure-based perception that is reliable, inexpensive, and easy to set up and that has robust performance in varying weather conditions. However, choosing a sensor that checks all these boxes is not straightforward, as every sensor type has unique benefits and drawbacks. Radar is excellent at detecting long-range vehicles and weather resistance but lacks high resolution. Lidar is expensive and weather-sensitive, while cameras provide rich visual data at a low cost but are constrained by lighting and visibility. This study examines radar, lidar, and camera sensor capabilities to ascertain whether any of these qualifies as the "best" sensor for ITS perception. While no single sensor can meet all the demands of ITS, a hybrid approach combining multiple sensor modalities like radar, lidar, and cameras offers the most robust solution for enhancing the safety and efficiency of ITS. Through this evaluation, we hope to draw attention to the necessity of the National Renewable Energy Laboratory's infrastructure perception and control framework, which presents a multisensor track data fusion engine to assimilate multiple data streams in order to provide robust and reliable perception.

33 ADVANCED PROPULSION SYSTEMS↗

Detection of small drizzle droplets in a large cloud chamber using ultrahigh-resolution radar

Abstract. A large convection–cloud chamber has the potential to produce drizzle-sized droplets, thus offering a new opportunity to investigate aerosol–cloud–drizzle interactions at a fundamental level under controlled environmental conditions. One key measurement requirement is the development of methods to detect the low-concentration drizzle drops in such a large cloud chamber. In particular, remote sensing methods may overcome some limitations of in situ methods. Here, the potential of an ultrahigh-resolution radar to detect the radar return signal of a small drizzle droplet against the cloud droplet background signal is investigated. It is found that using a small sampling volume is critical to drizzle detection in a cloud chamber to allow a drizzle drop in the radar sampling volume to dominate over the background cloud droplet signal. For instance, a radar volume of 1 cubic centimeter (cm3) would enable the detection of drizzle embryos with diameter larger than 40 µm. However, the probability of drizzle sampling also decreases as the sample volume reduces, leading to a longer observation time. Thus, the selection of radar volume should consider both the signal power and the drizzle occurrence probability. Finally, observations from the Pi Convection–Cloud Chamber are used to demonstrate the single-drizzle-particle detection concept using small radar volume. The results presented in this study also suggest new applications of ultrahigh-resolution cloud radar for atmospheric sensing.

54 ENVIRONMENTAL SCIENCES↗

Ship‐Based Lidar Evaluation of Southern Ocean Low Clouds in the Storm‐Resolving General Circulation Model ICON and the ERA5 and MERRA‐2 Reanalyses

Global storm resolving models (GSRMs) represent the next generation of global climate models. One of them is a 5-km Icosahedral Nonhydrostatic Weather and Climate Model (ICON). Its high resolution means that parameterizations of convection and clouds, including subgrid-scale clouds, are omitted, relying on explicit simulation but necessarily utilizing microphysics and turbulence parameterizations. Standard-resolution (10–100 km) models, which use convection and cloud parameterizations, have substantial cloud biases over the Southern Ocean (SO), adversely affecting radiation and sea surface temperature. The SO is dominated by low clouds, which cannot be observed accurately from space due to overlapping clouds, attenuation, and ground clutter. We evaluated SO clouds in ICON and the ERA5 and MERRA-2 reanalyzes using approximately 2400 days of lidar observations and 2300 radiosonde profiles from 31 voyages and a Macquarie Island station during 2010–2021, compared to the model and reanalyzes using a ground-based lidar simulator. We found that ICON and the reanalyzes underestimate the total cloud fraction by about 10% and 20%, respectively. ICON and ERA5 overestimate the cloud occurrence peak at about 500 m, associated with underestimated lower tropospheric stability and overestimated lifting condensation level. The reanalyzes strongly underestimate fog and very low-level clouds, and MERRA-2 underestimates cloud occurrence at almost all heights. Outgoing shortwave radiation is overestimated in MERRA-2, implying a “too few, too bright” cloud problem. SO cloud and fog biases are a substantial issue in the analyzed model and reanalyzes and result in shortwave and longwave radiation biases.

Kuma, Peter [Stockholm Univ. (Sweden); Univ. of Ca↗

MeV Scale Physics in MicroBooNE

This thesis presents the reconstruction and measurement of low-energy electromagnetic activity with beam neutrino interactions within the MicroBooNE Liquid Argon Time Projection Chamber (LArTPC). LArTPCs have proven to be excellent detectors to measure neutrino interaction cross sections and are being used to perform precision measurements of neutrino oscillation parameters. The work presented in this thesis has demonstrated unprecedentedly low, sub-MeV energy thresholds that have increased sensitivity of LArTPCs to detect neutrino interactions from core collapse supernovae and Muon Decay at Rest (µDAR). In addition, such low thresholds have also increased measurement sensitivity for interactions from Beyond the Standard Model (BSM) candidates such as millicharged particles and nuclear and electron recoils from dark matter candidate particles. On the reconstruction side, this work has established an energy resolution of 6.3% for electromagnetic activity i the 0-5 MeV energy range within the MicroBooNE LArTPC. Additionally this work presents the quantitative analysis of the low-energy activity emanating from G-10 support ribs in MicroBooNE and discusses how such activity could be a problematic source of background for low-energy physics analyses in future neutrino detectors such as the Deep Underground Neutrino Experiment (DUNE).

Bhat, Avinay↗

Burst-mode dual-comb spectroscopy

We introduce a new modality of dual-comb spectroscopy that enables a simplified and powerful new approach for time-resolved measurements with increased acquisition rates. This "burst mode" form of dual-comb spectroscopy (BM-DCS) relies on the multiplexing of each probe pulse into a short train of pulses. With this approach we demonstrate a time-resolved series of absorption-based spectroscopic measurements of a laser-induced plasma using only a single laser ablation shot and identify 22 Nd lines not previously reported in the literature. The transmission spectra spanned 3.1 THz and were acquired at an effective acquisition rate of 25 kHz with 40 ms time-resolution. This simple modification to 100 MHz level dual-comb systems provides a flexible approach for studying transient and low duty-cycle events such as laser-induced plasmas, combustion, and explosive reactions.

(280.5395) Plasma Diagnostics, broadband laser spe↗

Feasibility study of a high spatial and time resolution beam emission spectroscopy diagnostic for localized density fluctuation measurements in Lithium Tokamak eXperiment-β (LTX-β)

Trapped electron mode (TEM) is the main source of turbulence predicted for the unique operation regime of a flat temperature profile under low-recycling conditions in the LTX-β tokamak, while ion temperature gradient driven turbulence may also occur with gas fueling from the edge. To investigate mainly TEM scale density fluctuations, a high spatial and time resolution 2D beam emission spectroscopy (BES) diagnostic is being developed. Apart from spatially localized density turbulence measurement, BES can provide turbulence flow and flow shear dynamics. This BES system will be realized using an avalanche photodiode-based camera and narrow band interference filter. The system can acquire data at 2 MHz. Simulations with the Simulation of Spectra (SOS) code indicate that a high signal to noise ratio can be achieved with the proposed system. This will enable sampling the density fluctuations at this high time resolution. Finally, the design considerations and system optimization using the SOS code are presented.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Time projection chamber for GADGET II

The established Gaseous Detector with Germanium Tagging (GADGET) detection system is used to measure weak, low-energy 𝛽-delayed proton decays. It consists of the Gaseous Proton Detector equipped with a MICROMEGAS (MM) readout to detect protons and other charged particles calorimetrically, surrounded by the Segmented Germanium Array (SeGA) for high-resolution detection of prompt 𝛾 rays. To upgrade GADGET's Proton Detector to operate as a compact time projection chamber (TPC) for the detection, three-dimensional imaging and identification of low-energy 𝛽-delayed single- and multiparticle emissions mainly of interest to astrophysical studies. A new high granularity MM board with 1024 pads has been designed, fabricated, installed, and tested. A high-density data acquisition system based on generic electronics for TPCs (GET) has been installed and optimized to record and process the gas avalanche signals collected on the readout pads. The TPC's performance has been tested using a 220 Rn 𝛼-particle source and cosmic-ray muons. In addition, decay events in the TPC have been simulated by adapting the attpcroot data analysis framework. Furthermore, a novel application of two-dimensional convolutional neural networks for GADGET II event classification is introduced. The optimization of data throughput is also addressed. The GADGET II TPC is capable of detecting and identifying 𝛼 particles as well as measuring their track direction, range, and energy. The extracted energy resolution of the GADGET II TPC using P10 gas is about 5.4% at 6.288 MeV ( 220 Rn 𝛼 events), computed using charge integration. Based on a systematic simulation study, we estimated the detection efficiency of the GADGET II TPC for protons and 𝛼 particles, respectively. It has also been demonstrated that the GADGET II TPC is capable of tracking minimum-ionizing particles (i.e., cosmic-ray muons). From these measurements, the electron drift velocity was measured under typical operating conditions. In addition to being one of the first generation of micropattern gaseous detectors (MPGDs) to utilize a resistive anode applied to low-energy nuclear physics, the GADGET II TPC will also be the first TPC surrounded by a high-efficiency array of high-purity germanium 𝛾-ray detectors. As a result, the TPC of GADGET II has been designed, fabricated, and tested and is ready for operation at the Facility for Rare Isotope Beams for radioactive-beam-line experiments.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Low-temperature magnetic structure and lattice response in SmCuAs 2

We investigated the structural and magnetic properties of single-crystalline SmCuAs 2 using high-resolution synchrotron x-ray diffraction and x-ray resonant magnetic scattering (XRMS) at the Sm 𝐿 2 and 𝐿 3 edges. Temperature-dependent diffraction measurements confirm that SmCuAs2 maintains its tetragonal symmetry from room temperature down to 8 K, with lattice parameters showing anomalous behavior below the resistivity minimum (𝑇≈30K). Notably, the c-axis lattice parameter exhibits a plateau and subsequent increase near the Néel temperature, indicating magnetoelastic coupling. XRMS measurements reveal a commensurate antiferromagnetic structure with a propagation vector 𝒒=(0,0,0.5). Our measurement shows that the Sm moments are aligned within the 𝒂𝒃 plane and arranged in a ++−− stacking along the 𝒄 axis. Comparison with related 𝑅⁢𝐸⁢CuAs 2 compounds (RE = Pr, Nd, and Gd) suggests that in-plane moment orientation and associated magnetic frustration play a key role in the emergence of the resistivity minimum. Differences in spin-orbit and magnetoelastic coupling across the series highlight their importance in governing low-temperature transport behavior.

36 MATERIALS SCIENCE↗

Montel mirror based collimating analyzer system for high-pressure resonant inelastic X-ray scattering experiments

Resonant inelastic X-ray scattering (RIXS) is increasingly playing a significant role in studying highly correlated systems, especially since it was proven capable of measuring low-energy magnetic excitations. However, despite high expectations for experimental evidence of novel magnetic phases at high pressure, unequivocal low-energy spectral signatures remain obscured by extrinsic scattering from material surrounding the sample in a diamond anvil cell (DAC): pressure media, Be gasket and the diamond anvils themselves. A scattered X-ray collimation based medium-energy resolution (~100 meV) analyzer system for a RIXS spectrometer at the Ir L 3 -absorption edge has been designed and built to remediate these difficulties. Due to the confocal nature of the analyzer system, the majority of extrinsic scattering is rejected, yielding a clean low-energy excitation spectrum of an iridate Sr 2 IrO 4 sample in a DAC cell. Finally, the energy resolution of different configurations of the collimating and analyzing optics are discussed.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Results from the DUNE ND-LAr 2x2 Demonstrator Run 2

The Deep Underground Neutrino Experiment (DUNE) is a cutting-edge, long-baseline experiment under construction in the United States, based on large liquid-argon time projection chambers (LArTPCs). The DUNE Near Detector LArTPC (ND-LAr) will employ a novel modular architecture using a pixelated LArPix charge readout. To validate this design and characterize detector response, the 2×2 demonstrator—an array of eight optically isolated LArTPC modules—was deployed at Fermilab in 2024. During winter 2025, the 2x2 demonstrator was operated for a second data-taking campaign (Run 2) with the aim of studying the low-energy response of the detector. Run 2 focused on calibration and response studies using a suite of deployed radioactive sources. Gamma sources (²²Na, ⁶⁰Co, and ⁸⁸Y) were used to probe module-to-module performance variations, energy resolution, and calibrations. Neutron sources (AmBe and a pulsed neutron generator) enabled studies of neutron interactions in liquid argon, including inelastic scatters and neutron capture signals, relevant for low-energy backgrounds and detector modeling. In addition, the detector was doped with ²²⁰Rn, providing Bi–Po coincidence signals that allow precise calibration of the charge and scintillation response. This poster will present results from these calibration campaigns. These studies provide critical validation of the ND-LAr modular LArTPC concept and inform calibration and reconstruction strategies for the full DUNE near detector.

Mora-Lepin, Luis [Florida State U.] (ORCID:0000000↗

Polytypism in semi-disordered lizardite and amesite by low-dose HAADF-STEM

Serpentine minerals exert important controls on the physical properties of ultramafic rocks and have the potential to influence deformation phenomena in fault zones and to control the release of water in subducted slabs. Sheet serpentine generally, and lizardite and amesite specifically, can adopt alternative crystallographic stacking arrangements called polytypes. Polytypism has been extensively studied in fully ordered crystals, but it remains largely enigmatic in the more common semi-disordered crystals that in long-range analyses such as X-ray diffraction only exhibit random combinations of 0b and ±1/3b interlayer shifts. To date, atomic-resolution imaging to identify locally ordered polytypes has been precluded by the beam-sensitive nature of this hydrous magnesium silicate mineral. Here, in this study, we employed low-dose high-angle annular dark-field scanning transmission electron microscopy (HAADF-STEM) to study the polytypic structure of semi-disordered lizardite and amesite. Because the electron dose was as low as ~6000 e–/Å 2 , it was possible to directly resolve oxygen atomic columns and all the cations with a resolution of ~1 Å and reveal the short-range order. For lizardite, we identified long-period non-standard polytypes, including examples with 3, 4, 8, and 9 layers stemming from the ordering of the octahedral tilt along the a-axis. For amesite, we found short-range ordered polytypes with periodicities of up to 42 Å stemming from the ordering of interlayer shifts along the b-axis. The resolution was sufficient to determine the relative abundance of 6R 2 , 6R 1 , 2H 1 , and 2H 2 polytypes in amesite to be 46.1, 29.6, 7.7, and 1.9%, respectively. This is contrary to the expectation that the most common form of amesite is the 2H 2 polytype, which may be more likely to form macroscopic crystals suitable for conventional X-ray diffraction-based studies. We conclude that HAADF-STEM methods open the way for the characterization of beam-sensitive minerals and to resolve the structural details of less well-ordered (but possibly more abundant) minerals at a unit-cell scale.

58 GEOSCIENCES↗