Diffusion of oxygen in amorphous Al{sub 2}O{sub 3}, Ta{sub 2}O{sub 5}, and Nb{sub 2}O{sub 5}
The self-diffusivity of oxygen in amorphous Al{sub 2}O{sub 3} (a-Al{sub 2}O{sub 3}), a-Ta{sub 2}O{sub 5}, and a-Nb{sub 2}O{sub 5} was investigated along with structural analysis in terms of pair distribution function (PDF). The low activation energy, ∼1.2 eV, for diffusion in the oxides suggests a single atomic jump of oxygen ions mediated via vacancy-like defects. However, the pre-exponential factor for a-Ta{sub 2}O{sub 5} and a-Nb{sub 2}O{sub 5} with lower bond energy was two orders of magnitude larger than that for a-Al{sub 2}O{sub 3} with higher bond energy. PDF analyses revealed that the short-range configuration in a-Ta{sub 2}O{sub 5} and a-Nb{sub 2}O{sub 5} was more broadly distributed than that in a-Al{sub 2}O{sub 3}. Due to the larger variety of atomic configurations of a-Ta{sub 2}O{sub 5} and a-Nb{sub 2}O{sub 5}, these oxides have a higher activation entropy for diffusion than a-Al{sub 2}O{sub 3}. The entropy term for diffusion associated with short-range structures was shown to be a dominant factor for diffusion in amorphous oxides.