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At least 811 records · Page 45

Mass Spectrometric and Langmuir Probe Measurements in Inductively Coupled Plasmas in Ar, CHF3/Ar and CHF3/Ar/O2 Mixtures

Absolute fluxes and energy distributions of ions in inductively coupled plasmas of Ar, CHF3/Ar, and CHF3/Ar/O2 have been measured. These plasmas were generated in a Gaseous Electronics Conference (GEC) cell modified for inductive coupling at pressures 10-50 mTorr and 100-300 W of 13.56 MHz radio frequency (RF) power in various feedgas mixtures. In pure Ar plasmas, the Ar(+) flux increases linearly with pressure as well as RF-power. Total ion flux in CHF3 mixtures decreases with increase in pressure and also CHF3 concentration. Relative ion fluxes observed in the present studies are analyzed with the help of available cross sections for electron impact ionization and charge-exchange ion-molecule reactions. Measurements of plasma potential, electron and ion number densities, electron energy distribution function, and mean electron energy have also been made in the center of the plasma with a RF compensated Langmuir probe. Plasma potential values are compared with the mean ion energies determined from the measured ion energy distributions and are consistent. Electron temperature, plasma potential, and mean ion energy vary inversely with pressure, but increase with CHF3 content in the mixture.

Kim, J. S.↗

Simulation and Experimental Measurements of Inductively Coupled CF4 and CF4/Ar Plasmas

The recently developed code SEMS (semiconductor equipment modeling software)is applied to the simulation of CF4 and CF4/Ar inductively coupled plasmas (ICP). This work builds upon the earlier nitrogen, transformer coupled plasma (TCP) SEMS research by demonstrating its accuracy for more complex reactive mixtures, moving closer to the realization of a virtual plasma reactor. Attention is given to the etching of and/or formation of carbonaceous films on the quartz dielectric window and diagnostic aperatures. The simulations are validated through comparisons with experimental measurements using FTIR (Fourier Transform Infrared) and UV absorption spectroscopy for CFx and SiFx neutral radicals, QMS (quadrupole mass spectrometry) for the ions, and Langmuir probe measurements of electron number density and temperature in an ICP GEC reference cell.

Hash, D. B.↗

Which nanowire couples better electrically to a metal contact: Armchair or zigzag nanotube?

The fundamental question of how chirality affects tile electronic coupling of a nanotube to metal contacts is important for tile application of nanotubes as nanowires. We show that metallic-zigzag nanotubes are superior to armchair nanotubes as nanowires, by modeling the metal-nanotube interface. More specifically, we show that as a function of coupling strength, the total electron transmission of armchair nanotubes increases and tends to be pinned close to unity for a metal with Fermi wave vector close to that of gold. In contrast, the transmission probability of zigzag nanotubes increases to the maximum possible value of two. The origin of these effects lies in the details of the wave function, which is explained.

Anantram, M. P.↗

Self-Sustained Ultrafast Pulsation in Coupled VCSELs

High frequency, narrow-band self-pulsating operation is demonstrated in two coupled vertical-cavity surface-emitting lasers (VCSELs). The coupled VCSELs provide an ideal source for high-repetition rate (over 40 GHz), sinusoidal-like modulated laser source with Gaussian-like near- and far-field profiles. We also show that the frequency of the modulation can be tuned by the inter-VCSEL separation or by DC-bias level.

Ning, Cun-Zheng↗

A Numerical Study of Tropical Sea-Air Interactions Using a Cloud Resolving Model Coupled with an Ocean Mixed-Layer Model

Coupling a cloud resolving model (CRM) with an ocean mixed layer (OML) model can provide a powerful tool for better understanding impacts of atmospheric precipitation on sea surface temperature (SST) and salinity. The objective of this study is twofold. First, by using the three dimensional (3-D) CRM-simulated (the Goddard Cumulus Ensemble model, GCE) diabatic source terms, radiation (longwave and shortwave), surface fluxes (sensible and latent heat, and wind stress), and precipitation as input for the OML model, the respective impact of individual component on upper ocean heat and salt budgets are investigated. Secondly, a two-way air-sea interaction between tropical atmospheric climates (involving atmospheric radiative-convective processes) and upper ocean boundary layer is also examined using a coupled two dimensional (2-D) GCE and OML model. Results presented here, however, only involve the first aspect. Complete results will be presented at the conference.

Shie, Chung-Lin↗

Comparison of Coupled Radiative Navier-Stokes Flow Solutions with the Project Fire II Flight Data

A nonequilibrium, axisymmetric, Navier-Stokes flow solver with coupled radiation has been developed to use in the design of thermal protection systems for vehicles where radiation effects are important. The present method has been compared with an existing flow and radiation solver and with the Project Fire II experimental data. Very good agreement has been obtained over the entire Fire II trajectory with the experimentally determined values of the stagnation radiation intensity in the .2 to 6.2 eV range and with the total stagnation heating. The agreement was significantly better than previous numerical predictions. The effects of a number of flow models are examined to determine which combination of physical models produces the best agreement with the experimental data. These models include radiation coupling, multi-temperature thermal models, finite-rate chemistry, and a quasi-steady-state or Boltzmann assumption for the calculation of the excited electronic states. Finally, the computational efficiency of the present model is evaluated. The radiation properties model developed for this study is shown to offer significant computational savings compared to existing codes.

Olynick, David R.↗

Coupling Between Microstrip Lines with Finite Width Ground Plane Embedded in Polyimide Layers for 3D-MMICs on Si

Three-dimensional circuits built upon multiple layers of polyimide are required for constructing Si/SiGe monolithic microwave/millimeter-wave integrated circuits on complementary metal oxide semiconductor (CMOS) (low resistivity) Si wafers. Thin film microstrip lines (TFMS) with finite width ground planes embedded in the polyimide are often used. However, the closely spaced TFMS lines are susceptible to high levels of coupling, which degrades circuit performance. In this paper, Finite Difference Time Domain (FDTD) analysis and experimental measurements are used to show that the ground planes must be connected by via holes to reduce coupling in both the forward and backward directions.

Ponchak, George E.↗

Coupled Ablation, Heat Conduction, Pyrolysis, Shape Change and Spallation of the Galileo Probe

The Galileo probe enters the atmosphere of Jupiter in December 1995. This paper presents numerical methodology and detailed results of our final pre-impact calculations for the heat shield response. The calculations are performed using a highly modified version of a viscous shock layer code with massive radiation coupled with a surface thermochemical ablation and spallation model and with the transient in-depth thermal response of the charring and ablating heat shield. The flowfield is quasi-steady along the trajectory, but the heat shield thermal response is dynamic. Each surface node of the VSL grid is coupled with a one-dimensional thermal response calculation. The thermal solver includes heat conduction, pyrolysis, and grid movement owing to surface recession. Initial conditions for the heat shield temperature and density were obtained from the high altitude rarefied-flow calculations of Haas and Milos. Galileo probe surface temperature, shape, mass flux, and element flux are all determined as functions of time along the trajectory with spallation varied parametrically. The calculations also estimate the in-depth density and temperature profiles for the heat shield. All this information is required to determine the time-dependent vehicle mass and drag coefficient which are necessary inputs for the atmospheric reconstruction experiment on board the probe.

Milos, Frank S.↗

System Simulation by Recursive Feedback: Coupling A Set of Stand-Alone Subsystem Simulations

Recursive feedback is defined and discussed as a framework for development of specific algorithms and procedures that propagate the time-domain solution for a dynamical system simulation consisting of multiple numerically coupled self-contained stand-alone subsystem simulations. A satellite motion example containing three subsystems (other dynamics, attitude dynamics, and aerodynamics) has been defined and constructed using this approach. Conventional solution methods are used in the subsystem simulations. Centralized and distributed versions of coupling structure have been addressed. Numerical results are evaluated by direct comparison with a standard total-system simultaneous-solution approach.

Nixon, Douglas D.↗

Cross Scale Coupling of Alfven Turbulence in the Polar Wind Region

Ionosphere-magnetosphere coupling phenomena are extremely complex and diverse, involving a whole series of processes operating over a wide range of spatial and temporal scales. One of the fundamental aspects of understanding this coupling is the polar wind, which is a dominant mechanism of mass transport from the ionospheric source region to the magnetosphere and strongly influences the plasma parameters above the F2 density peak. The combined effects of photoelectrons, and the ponderomotive force will be presented based on our polar wind model. The presence of photoelectrons and low frequency oscillations (that create the ponderomotive force) increase ion outflows. It is also demonstrated that large-amplitude low-frequency waves (LFW) may generate lower hybrid waves (LHW) in the auroral zone. The excitation of LHW by a LF wave may lead to the appearance of an additional channel of energy transfer from, for example, Alfven or fast magnetosonic waves, to particles. This process then influences the formation of the plasma distribution function at the expense of acceleration in the tail of the distribution during the collapse of the LHW. The ion energization due to the LHW can be comparable with that produced by the ponderomotive force of the LFW.

Khazanov, George V.↗

A Coupled Plasma Dynamics and Gas Flow Model for Semiconductor Processing

A continuum modeling approach by self-consistently coupling plasma dynamics and gas flow will be presented for the analysis of high density plasma reactors. Experimental data shows that gas flow distribution affects the etch rate uniformity even at low pressures (6-20 mTorr) and flow rates (20-70 sccm). This study will investigate the effects of gas flow and gas energy on bulk plasma densities and temperatures using a continuum model. The model solves multidimensional equations of mass balance for neutrals and ions, gas momentum, separate energy equations for electrons and neutrals and Maxwell's equations for power coupling. A test case of N2 plasma in a 300mm TCP etch reactor, for which hybrid model and Langmuir probe data are available, is chosen for this analysis. Our preliminary results show that modeling gas flow and energy improves the predictions of electron density and its spatial variation in the reactor when compared with the experimental data. The aim of this study is to identify the operating conditions for the TCP reactor when a self-consistent modeling of gas flow is important.

Bose, Deepak↗

Langmuir Probe Measurements in an Inductively Coupled GEC Reference Cell Plasma

Measurements of electron number density, electron temperature, and electron energy distribution function (EEDF) using a compensated Langmuir probe have been performed on an inductively (transformer ) coupled Gaseous Electronics Conference (GEC) reference cell plasma. The plasma source is operated with CH4, CF4, or their mixtures with argon. The effect of independently driving the electrode supporting the wafer on the probe data is studied. In particular, we find that the plasma structure depends on the phase in addition to the magnitude of the power coupled to the electrode relative to that of the transformer coil. The Langmuir probe is translated in a plane parallel to the electrode to investigate the spatial structure of the plasma. The probe data is also compared with fluid model predictions.

Ji, J. S.↗

Tightly Coupled Inertial Navigation System/Global Positioning System (TCMIG)

Many NASA applications planned for execution later this decade are seeking high performance, miniaturized, low power Inertial Management Units (IMU). Much research has gone into Micro-Electro-Mechanical System (MEMS) over the past decade as a solution to these needs. While MEMS devices have proven to provide high accuracy acceleration measurements, they have not yet proven to have the accuracy required by many NASA missions in rotational measurements. Therefore, a new solution has been formulated integrating the best of all IMU technologies to address these mid-term needs in the form of a Tightly Coupled Micro Inertial Navigation System (INS)/Global Positioning System (GPS) (TCMIG). The TCMIG consists of an INS and a GPS tightly coupled by a Kalman filter executing on an embedded Field Programmable Gate Array (FPGA) processor. The INS consists of a highly integrated Interferometric Fiber Optic Gyroscope (IFOG) and a MEMS accelerometer. The IFOG utilizes a tightly wound fiber coil to reduce volume and the high level of integration and advanced optical components to reduce power. The MEMS accelerometer utilizes a newly developed deep etch process to increase the proof mass and yield a highly accurate accelerometer. The GPS receiver consists of a low power miniaturized version of the Blackjack receiver. Such an IMU configuration is ideal to meet the mid-term needs of the NASA Science Enterprises and the new launch vehicles being developed for the Space Launch Initiative (SLI).

Watson, Michael D.↗

Self-Consistent Magnetosphere-Ionosphere Coupling: Theoretical Studies

A self-consistent ring current (RC) model has been developed that couples electron and ion magnetospheric dynamics with the calculation of the electric field. Two new features were taken into account in order to close the self-consistent magnetosphere- ionosphere coupling loop. First, in addition to the RC ions, we solve an electron kinetic equation in our model. Second, using the relation of Galand and Richmond [2001], we calculate the height integrated ionospheric conductances as a function of the precipitated high energy magnetospheric electrons and ions that are produced by our code. To validate the results of our model we simulate the magnetic storm of May 2, 1986, a storm that has has been comprehensively studied, and compare our results with different theoretical approaches. The self-consistent inclusion of the hot electrons and, their effect on the conductance results in deeper penetration of the magnetospheric electric field. In addition, a slight westward rotation of the potential pattern (compared to previous self-consistent results) is evident in the inner magnetosphere. This changes the hot plasma distribution, especially by allowing increased access of plasma sheet ions and electrons to low L shells.

Khazanov, G. V.↗

Ring Current Ion Coupling with Electromagnetic Ion Cyclotron Waves

A new ring current global model has been developed that couples the system of two kinetic equations: one equation describes the ring current (RC) ion dynamic, and another equation describes wave evolution of electromagnetic ion cyclotron waves (EMIC). The coupled model is able to simulate, for the first time self-consistently calculated RC ion kinetic and evolution of EMIC waves that propagate along geomagnetic field lines and reflect from the ionosphere. Ionospheric properties affect the reflection index through the integral Pedersen and Hall conductivities. The structure and dynamics of the ring current proton precipitating flux regions, intensities of EMIC global RC energy balance, and some other parameters will be studied in detail for the selected geomagnetic storms.

Khazanov. G. V.↗

System Simulation by Recursive Feedback: Coupling a Set of Stand-Alone Subsystem Simulations

Recursive feedback is defined and discussed as a framework for development of specific algorithms and procedures that propagate the time-domain solution for a dynamical system simulation consisting of multiple numerically coupled, self-contained, stand-alone subsystem simulations. A satellite motion example containing three subsystems (orbit dynamics, attitude dynamics, and aerodynamics) has been defined and constructed using this approach. Conventional solution methods are used in the subsystem simulations. Centralized and distributed versions of coupling structure have been addressed. Numerical results are evaluated by direct comparison with a standard total-system, simultaneous-solution approach.

Nixon, Douglas D.↗

Self-Consistent Magnetosphere-Ionosphere Coupling

A self-consistent ring current (RC) model has been developed that couples electron and ion magnetospheric dynamics with the calculation of the electric field. Two new features were taken into account in order to close the self-consistent magnetosphere-ionosphere coupling loop. First, in addition to the RC ions, we have solved an electron kinetic equation in our model. Second, using the relation of Galand and Richmond, we have calculated the height integrated ionospheric conductances as a function of the precipitated high energy magnetospheric electrons and ions that are produced by our model. To validate the results of our model we simulate the magnetic storm of May 2, 1986, a storm that has been comprehensively studied by Fok et al., and have compared our results with different theoretical approaches. The self-consistent inclusion of the hot electrons and their effect on the conductance results in deeper penetration of the magnetospheric electric field. In addition, a slight westward rotation of the potential pattern (compared to previous self-consistent results) is evident in the inner magnetosphere. These effects change the hot plasma distribution, especially by allowing increased access of plasma sheet ions and electrons to low L shells.

Six, N. Frank↗

Enhancement of Optical Nonlinearities in Composite Media and Structures via Local Fields and Electromagnetic Coupling Effects

This talk will review the linear and nonlinear optical properties of metal nanoparticles and dielectric microparticles, with an emphasis on local field effects, and whispering gallery modes (WGMs), as well as the conjunction of these two effects for enhanced Raman. In particular, enhanced optical properties that result from electromagnetic coupling effects will be discussed in the context of Mie scattering from concentric spheres and bispheres. Predictions of mode splitting and photonic bandgaps in micro-spheres will be presented and will be shown to be analogous to effects that occur in coupled resonator optical waveguides (CROW). Slow and fast light in SCISSOR / CROW configurations will also be discussed.

Smith, David D.↗