DOE OSTI2017
NiO layers were deposited by metal-organic chemical vapor deposition using bis-(ethylcyclopentadienyl) nickel (EtCp){sub 2}Ni and oxygen or ozone. As a continuation of kinetic study of NiO MOCVD the gas-phase, transformations of (EtCp){sub 2}Ni were studied in the temperature range of 380–830 K. Time of reactions corresponding to the residence time of the gas stream in hot zone of the reactor was about 0.1 s under conditions studied. The interaction of (EtCp){sub 2}Ni with oxygen started at 450 K and its conversion rate reached the maximum at 700 K. The interaction of (EtCp){sub 2}Ni with ozone started at 400 K and its conversion rate reached the maximum at 600 K. Transformations of the gas phase with the temperature in the reaction zone were studied, the model reaction schemes illustrating (EtCp){sub 2}Ni transformations in the reaction systems containing oxygen and ozone have developed. In the reaction system (EtCp){sub 2}Ni–O{sub 2}–Ar the main gas-phase products at 380–500 K were CO, CO{sub 2}, HCO, C{sub 2}H{sub 5}OH, CpCOOH, and CpO. Formation of the C{sub 2}H{sub 2}O, C{sub 3}H{sub 4}O, and C{sub 5}H{sub 8}O was found at 630–830 K. The same gas-phase species, (C{sub 4}H{sub 3}O){sub 2}Ni and dialdehydes was formed in the reaction system (EtCp){sub 2}Ni–O{sub 3}–O{sub 2}–Ar. .
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗