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DOE OSTI2021

Structural transitions of 4:1 methanol–ethanol mixture and silicone oil under high pressure

A 4:1 (volume ratio) methanol–ethanol (ME) mixture and silicone oil are two of the most widely used liquid pressure-transmitting media (PTM) in high-pressure studies. Their hydrostatic limits have been extensively studied using various methods; however, the evolution of the atomic structures associated with their emerging nonhydrostaticity remains unclear. Here, we monitor their structures as functions of pressure up to ∼30 GPa at room temperature using in situ high-pressure synchrotron x-ray diffraction (XRD), optical micro-Raman spectroscopy, and ruby fluorescence spectroscopy in a diamond anvil cell. No crystallization is observed for either PTM. The pressure dependence of the principal diffraction peak position and width indicates the existence of a glass transition in the 4:1 ME mixture at ∼12 GPa and in the silicone oil at ∼3 GPa, beyond which a pressure gradient emerges and grows quickly with pressure. There may be another liquid-to-liquid transition in the 4:1 ME mixture at ∼5 GPa and two more glass-to-glass transitions in the silicone oil at ∼10 GPa and ∼16 GPa. By contrast, Raman signals only show peak weakening and broadening for typical structural disordering, and Raman spectroscopy seems to be less sensitive than XRD in catching these structural transitions related to hydrostaticity variations in both PTM. These results uncover rich pressure-induced transitions in the two PTM and clarify their effects on hydrostaticity with direct structural evidence. The high-pressure XRD and Raman data on the two PTM obtained in this work could also be helpful in distinguishing between signals from samples and those from PTM in future high-pressure experiments.

Chen, Xiehang (ORCID:0000000168541506)↗

DOE OSTI2026

Fluid-kinetic modeling of a high power density radio frequency inductively coupled positive hydrogen ion source

High power density radio-frequency (RF) inductively coupled positive ion sources are attractive candidates for next-generation neutral beam injection (NBI) systems, where higher injected power and longer pulse lengths are desired without sacrificing source reliability. Operating at absorbed power densities of order $\gt 1~\mathrm{W\,cm}^{-3}$ places these sources in a regime with stronger gas heating, higher dissociation, and non-Maxwellian electron energy distributions. The Large Uniform Plasma for Ionizing Neutrals (LUPIN) is an RF inductively coupled plasma source designed to explore this high power density regime and to provide guidance for a positive ion source upgrade for the DIII-D NBI system. LUPIN is designed to operate at up to 20 kW of RF power at 2 MHz, coupling energy through a cylindrical quartz vessel to achieve target ion current densities of $2100\,\mathrm{A\,m}^{-2}$ . This paper presents fluid-kinetic modeling of LUPIN using the hybrid plasma equipment model where electrons are treated kinetically, and the simulations reveal that electron energy distribution function transitions from nearly Maxwellian in the core to bi-Maxwellian towards the edge. Parametric simulations investigate the effects of RF power, gas pressure, and frequency on plasma density, ion flux, and uniformity. Parametric sweeps reveal that increasing power shifts the primary ionization channel from molecular to atomic with diminishing flux gains due to skin-depth contraction and gas rarefaction. Higher frequency localizes heating and increases $\mathrm{H}_2^+$ and $\mathrm{H}_3^+$ delivery to the grid, while elevated pressure boosts ionization yet hinders ion transport due to increase in collisionality.

inductively coupled plasma↗

DOE OSTI2023

Initial study on thermal stability of cold spray tantalum coating irradiated with deuterium for fusion applications

Abstract Removal of neutral hydrogen atoms in the plasma edge reduces the number of charge exchange events and thus, the net energy losses in the plasma, significantly improving performance of fusion devices. Effective control of the residual pressure of hydrogen isotopes (HIs) in the plasma edge may be achieved by utilizing a hydrogen absorbing first wall interface capable of withstanding the harsh fusion environment. In this study, we have investigated tantalum (Ta) coating deposited by cold spray technology on 316L stainless steel substrate as a potential plasma-facing material surface. High fluence low energy deuterium plasma irradiation experiments and subsequent thermal annealing cycles associated with thermal desorption spectrometry (TDS) demonstrated superior structural stability of the Ta coating. TDS experiments revealed the outgassing of deuterium (as measure of its retention) for cold spray Ta coatings to be three times higher than bulk Ta and two orders of magnitude greater than bulk polycrystalline W. X-ray photoelectron spectroscopy revealed evolution of oxidation states upon deuterium irradiation and a partial recovery of the metallic signature of Ta after the thermal treatment at 1100 K.

Physics↗

DOE OSTI2023

The impact of halo concentration on the Sunyaev Zel’dovich effect signal from massive galaxy clusters

ABSTRACT The Sunyaev Zel’dovich (SZ) effect is sensitive to the pressure of ionized gas inside galaxy clusters, which is in turn controlled largely by the gravitational potential of the cluster. Changing the concentration parameter describing the cluster mass distribution impacts the gravitational potential and thus the cluster SZ signal, with implications for cosmological and other analyses of SZ-selected clusters. We investigate the concentration–SZ relation in theory and simulations. We find that the impact of concentration on the inner SZ profile (R ≲ 0.75R200c) can be captured with standard polytropic gas models. However, we find that such models do a poor job of reproducing the outer SZ profiles (R ≳ 0.75R200c) and the relation between the integrated SZ signal, Y, and concentration. This disagreement results from a sharp truncation of the gas pressure profile near the splashback radius, likely caused by virial shocks. We develop a simple description of the truncation that leads to a good match with the simulated SZ profiles out to several R200c for clusters of varying mass and concentration, and that also accurately predicts the concentration–Y relationship. Finally, we determine how inference of the linear bias parameter and splashback radius for SZ-selected clusters can be biased by ignoring the concentration dependence of the SZ signal, finding that bias to the former is essentially negligible, while bias to the latter can be as much as 2 per cent.

Astronomy & Astrophysics↗

DOE OSTI2020

Phonon softening near topological phase transitions

Topological phase transitions occur when the electronic bands change their topological properties, typically featuring the closing of the band gap. While the influence of topological phase transitions on electronic and optical properties has been extensively studied, its implication on phononic properties and thermal transport remains unexplored. In this paper, we use first-principles simulations to show that certain phonon modes are significantly softened near topological phase transitions, leading to increased phonon-phonon scattering and reduced lattice thermal conductivity. We demonstrate this effect using two model systems: pressure induced topological phase transition in ZrTe 5 and chemical composition induced topological phase transition in Hg 1-x Cd x Te. We attribute the phonon softening to emergent Kohn anomalies associated with the closing of the band gap. Our paper reveals the strong connection between electronic band structures and lattice instabilities, and opens up a potential direction towards controlling heat conduction in solids.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

DOE OSTI2024

Republished: Colossal density-driven resistance response in the negative charge transfer insulator MnS 2

The Mn chalcogenides show a remarkable variation in structural and physical properties with density. In MnS 2 we observe a pronounced difference with the effects of varying hydrostaticity with pressure inducing a structural transition at 300 K. Within the pyrite phase, a colossal electrical resistance drop of 10 8 Ohms is observed by 12 GPa of nonhydrostatic compression at 300 K. DFT simulations reveal the metallization to be unexpectedly driven by previously unoccupied S$^{2-}_2$ σ$^*_{3p}$ antibonding states crossing the Fermi level. This is a seldom seen variant of the charge transfer insulator to metal transition for negative charge transfer insulators which have anions with an unsaturated valence. Finally, by 36 GPa of nonhydrostatic compression, the single presence of the low-spin insulating arsenopyrite (P2 1 /c) phase is confirmed, and the bulk metallicity is broken with the system returning to an insulative electronic state.

36 MATERIALS SCIENCE↗

DOE OSTI2020

Development of a Fast Spectrum Test Loop at the Advanced Test Reactor

The United States currently has no infrastructure to provide a fast neutron flux for research purposes. With the increased interest in Sodium Fast Reactor (SFR) technology, this type of infrastructure is necessary for further development of key components such as Versatile Test Reactor. The purpose of this research is to characterize the thermal hydraulics of a test loop capable of providing SFR like operating conditions. This includes showcasing feasibility in mechanical design, reaching a high fast to thermal neutron flux ratio ideally near 15, an inlet temperature of 600 K, a temperature increase of 50 K from inlet to outlet, and test chamber radial temperature profiles similar to SFR fuel rods. Existing infrastructure must be used to provide the neutron flux for the test loop, and it was decided that the Advanced Test Reactor (ATR) was the optimal choice due to its availability and previous work conducted similar to this project. To achieve the goals of this project, several mechanical designs were put forward with the most feasible design being chosen. The neutronics and thermal hydraulics analysis were conducted in tandem, with an iterative process used to maximize efficiency of both systems. Analysis of the neutronics system was done using Attila and MCNP while the thermal hydraulic analysis was done using RELAP5. This document outlines the thermal hydraulic analysis, though it includes the results from the mechanical design and neutronics analysis. The loop design includes a primary system with molten sodium, a set of “booster fuel plates” to increase the fast flux within the test section, a water system to cool the booster fuel plates, a helium system to separate the sodium and water systems, and a thermal neutron shield to decrease the thermal flux. Each of these systems is modeled in the neutronics and thermal hydraulic analyses. The RELAP5 model showcased the feasibility of the design proposed by this report. For all designs tested, the desired 50 K temperature increase from inlet to outlet was reached. The fuel rod radial temperature profile was lower than was expected, likely due to a lower rod thermal power than expected. A parametric study was also conducted to characterize the system with three fuel pins. This study showed the effect of thermal power, fluid pressure, fluid velocity, and inlet temperature on the system. ©Copyright by Anton Higgins December 11, 2019 All Rights Reserved

99 GENERAL AND MISCELLANEOUS↗

DOE OSTI2021

Initial Assessment of TeF 6 Adsorption

Research and development that supports the management of off-gases from nuclear fuel reprocessing has historically been focused on the off-gas streams that arise from aqueous reprocessing technology. However, as Gen-IV reactor development pathways move toward deployment, alternative spent nuclear fuel (SNF) processing and disposition pathways have been considered more actively. This work is focused upon aspects of fluoride volatility (FV) processing. The versatility of this method for deployment against multiple types of spent fuel encourages the continued advancement of both the primary separations processes and the secondary processes, including waste treatment, material control and accountability, and engineering designs. Recent work noted that TeF 6 , the most highly volatile fluorinated compound produced during FV processing, did not have a clear abatement technology recommended in the literature. Thus, this work performed scoping tests on activated alumina and copper shot to assess whether they could be used to remove TeF 6 from gas streams that bear F 2 . Previous work on this topic was not well described in the literature and was not performed with excess F 2 in the stream as would be typical of spent fuel processing via FV. To support an understanding of the concentration of TeF 6 contacting the adsorbent beds, a series of preliminary testing identified the TeF 6 production rate and the equilibrium concentration of TeF 6 in the gas stream contacting the adsorbent. Excess F 2 was determined to not affect the ability of activated alumina to remove TeF 6 from the gas stream quickly and completely. A determination of whether excess F 2 affected the distribution depth of Te in the sorbent bed is still pending analysis of the used sorbent. Literature suggests that when activated alumina is near saturation, TeF 6 could migrate from the sorbent bed. Future testing should investigate this possibility. Copper metal did not adsorb TeF 6 in the presence of F 2 across the sorbent temperature range of 50 to 335°C. F 2 was fully removed by the copper bed. Although preliminary thermodynamics would indicate adsorption to be energetically favorable, other factors that impact adsorption (e.g., slow kinetics, excess fluorine on the copper surface, an unfavorable transition state) are likely preventing the adsorption of TeF 6 at an easily measurable rate. The work also investigated TeF 6 production from multiple forms of Te in the temperature range of 100 to 250°C. No previous study had assessed the initial reaction rates for this process. A carefully designed study allowed determination of the activation energy for the production of TeF 6 from Te metal. The substantial amount of data collected during this study merits analysis beyond what is described here. A more in-depth kinetic analysis will be pursued. Additional analytical results will provide the ability to benchmark adsorption coefficients for TeF 6 , understand the distribution of TeF 6 within the alumina bed, and better understand the effect of F 2 partial pressure on Te fluorination. The data from this report, as supplemented by these additional analyses, will be submitted to a peer-reviewed journal.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2021

A Lagrangian Study of the Transition from Shallow to Deep Convection Using ASR Observations and Les Simulations (Final Report)

With the support from this grant, we have made the following accomplishments. We have found that a formula for fractional entrainment rate, a key aspect for parameterization moist convection, that works for both shallow and deep convection, which provide a promising direction for unified treatment of entrainment for both shallow and deep convection. We also examined the formulation of vertical velocity and showed that the effect of non-hydrostatic pressure and entrainment on vertical velocity are not constants, as assumed in past studies, but can be computed using a simple model for the cloudy updrafts. These results also apply to both deep and shallow convection, which opens the door for a more physically based parameterization of the updraft vertical velocity. We have also conducted extensive analysis of the RACORO aircraft data and have published the results in Wei et al. (2020). We have made extensive effort scrutinizing the data in detail and examining the various hypotheses with the aid of the LES simulations. This was the first application of the modified Paluch diagram on modern aircraft data and the first comprehensive analysis of mixing in clouds using real data (instead of only LES output) in a very long time. These analyses enhanced the science return of the ASR aircraft measurements. This grant also supported a study of the collisions among cold pools and an effort to build parameterizations of moist convection using tools developed in control theory.

42 ENGINEERING↗

DOE OSTI2022

Development of Carbon Molecular Sieves Hollow Fiber Membranes based on Polybenzimidazole Doped with Polyprotic Acids with Superior H 2 /CO 2 Separation Properties (Final Report)

The goal of this project was to develop a highly efficient membrane-based process to capture CO 2 from coal-derived syngas with 95% CO 2 purity, achieving the cost of electricity (COE) 30% below the baseline capture approaches (i.e., Selexol process) when coupled with the advancement in other areas of the power generation facility. Our core approach is based on high-permeance hollow fiber membranes (HFMs) with superior H 2 /CO 2 separation properties at the syngas process conditions, which can then be further utilized to design membrane reactors for process intensification of H 2 production and purification and CO 2 capture. Three organizations with complementary skills collaborated to achieve the goal, including the University at Buffalo (UB), Los Alamos National Laboratory (LANL), and Trimeric Corporation (Trimeric). We formulated logical steps to bring the membrane technology from Technology Readiness Level (TRL) 3 (Experimental proof of concept) to TRL 4 (Laboratory scale validation in relevant environment). During the budget period (BP) 1, we screened various polymeric materials and identified polybenzimidazole doped with inorganic polyprotic acids as the desirable platform. The acid doping increases the H 2 /CO 2 selectivity, and the sequential carbonization increases H 2 permeability while retaining the high selectivity. By manipulating the acid type and doping level and the carbonization temperature, we demonstrated advanced carbon molecular sieving (CMS) materials with H 2 permeability of above 200 Barrer (1 Barrer = 10 -10 cm 3 (STP) cm cm -2 s -2 cmHg -1 ) and H 2 /CO 2 selectivity of above 40 at 200-300°C with simulated syngas containing CO and water vapor. For example, the PBI-(H 3 PO 4 ) 0.11 carbonized at 700 °C exhibits H 2 permeability of 200 Barrer and H 2 /CO 2 selectivity of 60 at 200 °C, and H 2 permeability of 240 Barrer and H 2 /CO 2 selectivity of 54 at 225 °C, which meets the targeted properties and surpasses Robeson’s upper bound. During the BP2, we focused on the conversion of the advanced CMS materials to stable HFMs. Membranes with H 2 permeance of 1,090 GPU (1 GPU = 10 -6 cm 3 (STP) cm -2 s -2 cmHg -1 ) and H 2 /CO 2 selectivity of 57 at 300 °C were successfully fabricated. The effects of temperature, gas compositions, pressure, and time on the separation properties were systematically investigated. Pencil modules were continuously evaluated for 219 h (dry pure gas) and 669 h (dry simulated syngas) and showed initial decline in permeance and increased H 2 /CO 2 selectivity over time, ultimately achieving a steady state stable value, indicating that the ageing phenomena in the nanoporous structures of the membranes during the test. Membrane reactors were fabricated based on the CMS membranes and evaluated for water-gas shift (WGS) reaction. The use of membranes slightly improves the conversion of the CO. However, parametric tests of the membrane reactors at various temperatures and flow rates need to be conducted, as well as the membranes with improved separation performance. We performed a sensitivity analysis on the impact of H 2 /CO 2 selectivity on the COE based on a hybrid process of a membrane unit and cryogenic unit developed by Membrane Technology and Research, Inc. (MTR). Three H 2 /CO 2 selectivity (40, 60, and 15) cases were developed and compared with the baseline capture process (Case B5B) provided by the DOE report. Increasing the membrane H 2 /CO 2 selectivity reduces COE, but the rate of the decrease of COE also diminishes. The COE values for H 2 /CO 2 selectivities of 40 and 60 were nearly the same. As the H 2 /CO 2 selectivity increases, the inert recycling decreases, leading to smaller equipment, less auxiliary power requirements, and less heating, cooling, and refrigeration duty. The refrigeration system used to liquefy the CO 2 is the most expensive piece of equipment and consumes the most electricity within the CO 2 capture process. Increasing the CO 2 concentration in the recycle stream would improve the economics of the process by reducing the refrigeration duty requirement of the unit and also allow for higher liquefaction temperatures. The high H 2 -selective membrane developed by our team may be applicable in other separation processes where lower pressure H 2 retains value. Typically, hydrogen retains its pressure when it is separated from syngas components. Residual components may be used as low-quality fuel and then vented to the atmosphere. Applications might include control of H 2 /CO ratios or mitigation of the water gas shift reaction by CO 2 recycling to the feed of a gasifier or steam methane reformer. To summarize, we have developed industrial HFMs with the best H 2 /CO 2 separation performance reported in the literature. The membranes demonstrate stability with simulated syngas and show great potential for membrane reactors for WGS reactions, lowering the cost of blue H 2 production.

20 FOSSIL-FUELED POWER PLANTS↗

DOE OSTI2026

Flow Regimes for Gas Migration in Liquid Stemming Columns

Some underground engineering projects require the design of an effective stemming column to confine pressurized gases within boreholes. While solid materials such as grout plugs are commonly used, their exothermic curing can damage diagnostic tools, particularly under harsh in situ conditions involving elevated pressure and temperature.

42 ENGINEERING↗

DOE OSTI2022

Components of aircraft life support systems interact with each other and the user

The life support system in a tactical aircraft provides necessary supplemental oxygen to the aircrew. However, interactions among its various components may generate unexpected breathing loads. We focus here on the interactions between a regulator and breathing mask commonly used together in the U.S. Navy, the CRU-103 regulator and MBU 23/P mask, and some effects of the interactions on the user. The data reported were collected during a larger research effort examining potential physiological and cognitive effects of low regulator inlet pressures. Seventeen participants completed a series of tasks under mild exercise while breathing 40% O 2 (balance N 2 ) from an MBU-23/P mask supplied by a CRU-103 regulator with supply pressures 10, 6, 4, and 2 psig (CRU-103 specifications are for inlet pressures from 5 to 120 psig). Variables measured included flow to the mask and pressures at the regulator supply, in the hose to the mask, and in the mask. In addition to restricting inspiratory flow, low inlet pressure to the CRU-103 caused a counterintuitive overshoot in gas delivery pressure at end-inspiration, a mean increase of 1.5 cm H 2 O between the 10- and 2 psig conditions. The added pressure to the exhalation valve increased the expiratory threshold, the pressure to start expiratory flow, by approximately 2 cm H 2 O, increasing the effort needed to exhale.

60 APPLIED LIFE SCIENCES↗

DOE OSTI2024

A Hermetic Package Technique for Multi-Functional Fiber Sensors through Pressure Boundary of Energy Systems Based on Glass Sealants

This paper presents a hermitic fiber sensor packaging technique that enables fiber sensors to be embedded in energy systems for performing multi-parameter measurements in high-temperature and strong radiation environments. A high-temperature stable Intrinsic Fabry–Perot interferometer (IFPI) array, inscribed by a femtosecond laser direct writing scheme, is used to measure both temperature and pressure induced strain changes. To address the large disparity in thermo-expansion coefficients (TECs) between silica fibers and metal parts, glass sealants with TEC between silica optical fibers and metals were used to hermetically seal optical fiber sensors inside stainless steel metal tubes. The hermetically sealed package is validated for helium leakages between 1 MPa and 10 MPa using a helium leak detector. An IFPI sensor embedded in glass sealant was used to measure pressure. The paper demonstrates an effective technique to deploy fiber sensors to perform multi-parameter measurements in a wide range of energy systems that utilize high temperatures and strong radiation environments to achieve efficient energy production.

Optics↗

DOE OSTI2025

Black Hole Supernovae, Their Equation of State Dependence, and Ejecta Composition

Abstract Recent literature on core-collapse supernovae suggests that a black hole (BH) can form within ∼1 s of shock revival, while still culminating in a successful supernova. We refer to these as BH supernovae, as they are distinct from other BH formation channels in both timescale and impact on the explosion. We simulate these events self-consistently from core collapse until 20–50 days after collapse using three axisymmetric models of a 60 M ⊙ zero-age main-sequence progenitor star and investigate how the composition of the ejecta is impacted by the BH formation. We employ Skyrme-type equations of state (EOSs) and vary the uncertain nucleonic effective mass, which affects the pressure inside the proto–neutron star through the thermal part of the EOS. This results in different BH formation times and explosion energies at BH formation, yielding final explosion energies between 0.06 and 0.72 × 10 51 erg with 21.8–23.3 M ⊙ of ejecta, of which 0–0.018 M ⊙ is 56 Ni. Compared to expectations from 1D simulations, we find more nuanced EOS dependences of the explosion dynamics, the mass of the BH remnant, and the elemental composition of the ejecta. We investigate why the explosions survive despite the massive overburden and link the shape of the diagnostic energy curve and character of the ejecta evolution to the progenitor structure.

Eggenberger Andersen, Oliver (ORCID:00000002966079↗

DOE OSTI2022

Low Temperature Combustion Exploration with Negative Valve Overlap

Progressively stringent emission regulations and increasing regulatory demands on fuel economy have led to advanced combustion development. Low temperature combustion (LTC), specifically homogenous charge compression ignition (HCCI), is a promising technology for reducing exhaust emissions and improving efficiency. However, its operating range is limited to low load without boosting and EGR, due to low volumetric efficiency and high pressure rise rates. In addition, effectively controlling the combustion phasing is another challenge in realizing the associated combustion gains. In this work, advanced valve control mechanisms known as continuously variable valve duration (CVVD) and continuously variable valve timing (CVVT) were used for both intake and exhaust valvetrains to enable negative valve overlap (NVO) for trapping hot exhaust residuals and to promote multipoint simultaneous ignition. Heat release phasing was controlled by varying the fueling scheme and by adjusting the amount of NVO. Parametric studies on valve timing and duration, fueling strategy, lambda, spark assist, etc., were carried out first. Afterwards the LTC strategy was proposed and then LTC operation was explored at different engine speeds. Various approaches for extending load limits were summarized and discussed. Finally, combustion performance was compared to that of spark ignition combustion, demonstrating the combustion gains of LTC.

02 PETROLEUM↗

DOE OSTI2025

HDG-2 & VIC Design Updates

HDG-2 and VIC Design updates. Including background, HDG-1 challenges, HDG-2 Mitigation efforts, Effect of updated ring model, Pressure boundary surface finish, and conclusions. Vendor Irradiation Capsule (VIC) to include, background, design overview, testing and neutronics results, and models.

11 - NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2024

Investigating instabilities in magnetized low-pressure capacitively coupled RF plasma using particle-in-cell (PIC) simulations

The effect of a uniform magnetic field on particle transport in low-pressure radio frequency (RF) capacitively coupled plasma (CCP) has been studied using a particle-in-cell model. Three distinct regimes of plasma behavior can be identified as a function of the magnetic field. In the first regime at low magnetic fields, asymmetric plasma profiles are observed within the CCP chamber due to the effect of $\overrightarrow{E}$ × $\overrightarrow{B}$ drift. As the magnetic field increases, instabilities develop and form self-organized spoke-shaped structures that are distinctly seen within the bulk plasma closer to the sheath. In this second regime, the spoke-shaped coherent structures rotate inside the plasma chamber in the -$\overrightarrow{E}$ × $\overrightarrow{B}$ direction, where $\overrightarrow{E}$ × $\overrightarrow{B}$ are the DC electric and magnetic field vectors, respectively, and the DC electric field exists in the sheath and pre-sheath regions. The spoke rotation frequency is in the megahertz range. As the magnetic field strength increases further, the rotating coherent spokes continue to exist near the sheath. The coherent structures are, however, accompanied by new small-scale incoherent structures originating and moving within the bulk plasma region away from the sheath. This is the third regime of plasma behavior. The threshold values of the magnetic field between these regimes were found not to vary with changing plasma reactor geometry (e.g., area ratio between ground and powered electrodes) or the use of an external capacitor between the RF-powered electrode and the RF source. The threshold values of the magnetic field between these regimes shift toward higher values with increasing gas pressure. Analysis of the results indicates that the rotating structures are due to the lower hybrid instability driven by density gradients and electron-neutral collisions. This paper provides guidance on the upper limit of the magnetic field for instability-free operation in low-pressure CCP-based semiconductor deposition and etch systems that use the external magnetic field for plasma uniformity control.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

DOE OSTI2023

Dimensional analysis on microscale gas breakdown with electric field nonuniformity and positive space charge effects

A dimensional method was employed to evaluate the microscale gas breakdown characteristics at atmospheric pressure, resulting in a universal breakdown curve applicable to different types of gases (e.g., Ar, Xe, Ne, and N2). As the gap distance decreases, the breakdown mode transitions from ion-induced secondary electron emission to the field emission regime. In the field emission regime, the positive space charge effect becomes more significant. We discovered that incorporating the positive space charge effect in the field emission regime can be achieved by modifying the local electric field enhancement factor β. Consequently, we propose an effective electric field enhancement factor, βeff, which scales linearly with β, to accurately reproduce the breakdown curve while considering the positive space charge effect. This proposed approach significantly simplifies the numerical model. Additionally, we examined the effects of gas pressure, gap distance, cathode properties (e.g., work function and secondary electron emission coefficient), and electric field nonuniformity.

Physics↗