Lattice and grain-boundary diffusions of boron atoms in BaSi{sub 2} epitaxial films on Si(111)
A 180-nm-thick boron (B) layer was deposited on a 300-nm-thick a-axis-oriented BaSi{sub 2} epitaxial film grown by molecular beam epitaxy on Si(111) and was annealed at different temperatures in ultrahigh vacuum. The depth profiles of B were investigated using secondary ion mass spectrometry (SIMS) with O{sup 2+}, and the diffusion coefficients of B were evaluated. The B profiles were reproduced well by taking both the lattice and the grain boundary (GB) diffusions into consideration. The cross-sectional transmission electron microscopy (TEM) image revealed that the GBs of the BaSi{sub 2} film were very sharp and normal to the sample surface. The plan-view TEM image exhibited that the grain size of the BaSi{sub 2} film was approximately 0.6 {mu}m. The temperature dependence of lattice and GB diffusion coefficients was derived from the SIMS profiles, and their activation energies were found to be 4.6 eV and 4.4 eV, respectively.