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Toward the fabrication of a 5 μm resolution Wolter microscope for the National Ignition Facility

Advancements in computer-controlled polishing, metrology, and replication have led to a x-ray mirror fabrication process that is capable of producing high-resolution Wolter microscopes. The mirror is a nickel-cobalt replicated full-shell mirror that was electroformed from a finely figured and polished mandrel. This mandrel was designed and fabricated for a 8 m source-to-detector distance microscope, with 10× magnification. A computer controlled polishing process corrected the low-frequency mandrel figure to < 2.0 nm RMS error. The mandrel design was optimized to reduce shell distortions that occur mainly < 20 mm from the shell ends. This design, in combination with improved replication tooling design and refined bath parameters informed by a detailed COMSOL model, have led to reductions in replication errors in the mirror shell. X-ray tests performed on a pair of mirror shells replicated from the mandrel have demonstrated < 10 μm FWHM source plane imaging resolution. Here we discuss the development process, highlight results from metrology and x-ray testing, and define a path for achieving 5 μm FWHM resolution.

Grazing Incidence, Wolter Microscope, X-ray Optics↗