Dielectric materials in semiconductor devices.
Dielectric thin film electrical and mechanical properties and preparation for semiconductor devices, emphasizing Si compounds
SEARCH · Engineering Papers
Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.
Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.
Dielectric thin film electrical and mechanical properties and preparation for semiconductor devices, emphasizing Si compounds
Resistivity, capacitance and dielectric loss measurements for diode reactive sputtering grown AlN films and film sandwich structures of Ta, Au and Al films
Dielectric overcoating effects on electromigration Al interconnections, showing dependence on thickness and surface passivation
Reflection coefficient of symmetric parallel plate waveguide operating in TEM mode illuminating lossless dielectric layer, using wedge diffraction and geometrical optics methods
Ablation heat shields, emphasizing dielectric low cost fabrication and application to entry vehicles
Saturated liquid oxygen dielectric constant measurements to calculate polarizability
Waveguide fed rectangular aperture antenna with dielectric plug load, describing admittance resonant perturbation due to excited TE mode
Sodium niobate dielectric doped with barium titanate has potential application in integrated circuits with high packing densities and voltage levels below 5 to 8 volts.
Dielectric constant and loss tangent of epoxy foam for various packing densities in antenna system
Fabry-Perot interferometer measurements of dielectric constants and loss for synthetic resins
Dielectric properties of thin films of polymerized oil-metal-silicon structures
Preparation and dielectric properties of gadolinium substituted barium sodium niobate mixed crystals
Process development for chemical deposition of aluminum oxide films as refractory dielectrics for integrated circuits
Refractory dielectric for integrated circuits
Refractory material dielectrics for integrated circuits
Research and development on refractory dielectrics for integrated circuits
Electron bremsstrahlung shielding at synchronous altitude by electron trapping in dielectrics using Monte Carlo method
Physical, electrical, and mechanical property tests at temperatures between -125 and 125 deg C of dielectric materials for electronic packaging