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At least 721 records · Page 40
All sourcesNASA NTRSDOE OSTI
NASA NTRS2005

Capture of Hydrogen Using ZrNi

Water, as ice, is thought to reside in craters at the lunar poles along with CH4 and H2 . A proposed robotic mission for 2012 will utilize metal/metal hydrides for H2 recovery. Specifications are 99% capture of H2 initially at 5 bar and 100C (or greater), and degassing completely at 300C. Of 47-systems examined using the van't Hoff equation, 4 systems, Mg/MgH2, Mg2Ni/Mg2NiH4, ZrNi/ZrNiH2.8, and Pd/PdH0.77, were considered likely candidates for further examination. It is essential, when selecting a system, to also examine questions regarding activation, kinetics, cyclic stability, and gas impurity effects. After considering those issues, ZrN1 was selected as the most promising candidate, as it is easily activated and rapidly forms ZrNiH 2.8 . In addition, it resists oxide poisoning by CO2, and H2O, while some oxidation by O2 is recommended for improved activation . The presence of hydrogen in the as received Zr-Ni alloy from Alfa Aesar posed additional technical problems. X-ray diffraction of the Zr-Ni powder (-325 mesh), with a Zr:Ni wt% ratio of 70:30, was found to consist of ZrH2, ZrNiH2.8, and ZrNi. ZrH2 in the alloy presented the risk that after degassing that both Zr and ZrNi would be present, and thus lead to erroneous results regarding the reactivity of ZrNi with H2 . Fortunately, ZrH2 is a highly stable hydride that does not degas H2 to any significant extent at temperatures below 300C. Based on equilibrium calculations for the decomposition of ZrH2, only 1 millionth of the hydride decomposed at 300C under a N2 atmosphere flowing at 25 ccm for 64 hours, the longest time for pretreatment employed in the investigation. It was possible, from the X-ray results and knowledge of the Zr:Ni ratio, to compute the composition of a pretreated specimen as being 76 wt% ZrNi and the balance ZrH2.

Patton, Lisa↗
NASA NTRS2012

Virtual Machine Language 2.1

VML (Virtual Machine Language) is an advanced computing environment that allows spacecraft to operate using mechanisms ranging from simple, time-oriented sequencing to advanced, multicomponent reactive systems. VML has developed in four evolutionary stages. VML 0 is a core execution capability providing multi-threaded command execution, integer data types, and rudimentary branching. VML 1 added named parameterized procedures, extensive polymorphism, data typing, branching, looping issuance of commands using run-time parameters, and named global variables. VML 2 added for loops, data verification, telemetry reaction, and an open flight adaptation architecture. VML 2.1 contains major advances in control flow capabilities for executable state machines. On the resource requirements front, VML 2.1 features a reduced memory footprint in order to fit more capability into modestly sized flight processors, and endian-neutral data access for compatibility with Intel little-endian processors. Sequence packaging has been improved with object-oriented programming constructs and the use of implicit (rather than explicit) time tags on statements. Sequence event detection has been significantly enhanced with multi-variable waiting, which allows a sequence to detect and react to conditions defined by complex expressions with multiple global variables. This multi-variable waiting serves as the basis for implementing parallel rule checking, which in turn, makes possible executable state machines. The new state machine feature in VML 2.1 allows the creation of sophisticated autonomous reactive systems without the need to develop expensive flight software. Users specify named states and transitions, along with the truth conditions required, before taking transitions. Transitions with the same signal name allow separate state machines to coordinate actions: the conditions distributed across all state machines necessary to arm a particular signal are evaluated, and once found true, that signal is raised. The selected signal then causes all identically named transitions in all present state machines to be taken simultaneously. VML 2.1 has relevance to all potential space missions, both manned and unmanned. It was under consideration for use on Orion.

Riedel, Joseph E.↗
DOE OSTI2021

Gouge formation and dilation impacts to flow during fracture shearing

We report flow in fractures is of critical importance to fluid flow in low-permeability shales, particularly when they restrict vertical migration from reservoirs. The Mt. Simon Sandstone is a target for geologic CO 2 sequestration and the overlying Eau Claire Formation is the sealing formation capping this reservoir. The lower Eau Claire, a primary barrier to upward migration of CO 2 from the Mt. Simon, is lithologically heterogenous with a mixture of sandstone and shale. We use a series of flow-through experiments on fractured samples from the Eau Claire to document the morphological changes taking place in the fracture and surrounding rock as it is sheared in a stepwise fashion. The samples were imaged using computed tomography after each shearing episode and flow resistance was calculated based on the pressure differential across each core. We found that gouge accumulations in the fracture plane led to specific instances of self-sealing behavior despite the fact that most samples increased in average fracture aperture and transmissivity. Gouge limited the increase or, in some cases, decreased flow through these samples. Fractures adjacent to shale-rich zones and concordant with bedding were more likely to show evidence of self-sealing, while increased sandstone content and fracture orientation perpendicular to bedding planes was more likely to result in fracture dilation and fracture permeability increases. Reactivation and shearing of vertical fractures in lithologically heterogenous caprocks is more likely to pose risks to long term CO 2 storage scenarios.

58 GEOSCIENCES↗
DOE OSTI2025

Solid State Transformer Architecture and Control Compensation for Common Mode Currents

A high-altitude electromagnetic pulse (HEMP) or similar geomagnetic disturbance (GMD) has the potential to impact the operation of large-scale electric power grids. By introducing low-frequency common-mode (CM) currents, these events can degrade the performance of critical system components, such as large power transformers by introducing CM currents which can lead to magnetic saturation of the transformer core. In this work, a solid-state transformer (SST) is developed to replace susceptible equipment and improve grid resiliency by safely absorbing these CM disturbances. This device will be referred to as a common-mode solid-state transformer (CM-SST). An SST architecture based on a four-legged AC/DC converter is developed. This architecture enables active control of CM signals without disturbing the AC voltages or the real and reactive power delivery capabilities. A system-level model of this architecture is created, and time-domain simulations are performed to evaluate the SST’s performance in response to simulated CM disturbances. A control strategy for mitigating CM current is also investigated. Hamiltonian surface shaping and power flow control (HSSPFC) is used to design a nonlinear controller for the SST’s output inverter. The objectives of the controller are to suppress CM-induced AC current offsets and regulate AC currents to desired setpoints. Nonlinear system analysis is applied to design and validate the controller. Two cases are tested: (a) the proposed four-leg inverter and (b) a standard three-leg inverter. The results show that the proposed controller rapidly mitigates CM disturbances while maintaining high-quality AC current waveforms in the four-leg configuration. Finally, the hardware performance of an SST prototype is evaluated. In particular, the ability of the SST to safely redirect and absorb CM currents is demonstrated, showing how it can protect neighboring conventional transformers in the system. The study confirms that appropriate control laws allow the SST to protect both itself and adjacent transformers during a HEMP or GMD event.

24 POWER TRANSMISSION AND DISTRIBUTION↗
DOE OSTI2021

Photon-In/Photon-Out X-ray Free-Electron Laser Studies of Radiolysis

Understanding the origin of reactive species following ionization in aqueous systems is an important aspect of radiation–matter interactions as the initial reactive species lead to production of radicals and subsequent long-term radiation damage. Tunable ultrafast X-ray free-electron pulses provide a new window to probe events occurring on the sub-picosecond timescale, supplementing other methodologies, such as pulse radiolysis, scavenger studies, and stop flow that capture longer timescale chemical phenomena. We review initial work capturing the fastest chemical processes in liquid water radiolysis using optical pump/X-ray probe spectroscopy in the water window and discuss how ultrafast X-ray pump/X-ray probe spectroscopies can examine ionization-induced processes more generally and with better time resolution. Ultimately, these methods will be applied to understanding radiation effects in complex aqueous solutions present in high-level nuclear waste.

47 OTHER INSTRUMENTATION↗
NASA NTRS1987

Analysis of eccentric annular incompressible seals. I - A new solution using fast Fourier transforms for determining hydrodynamic force

A new analysis procedure is presented which solves for the flow variables of an incompressible-flow annular pressure seal in which the rotor has a large static displacement from the centered position. The analysis begins with a set of governing equations based on a turbulent bulk-flow model and Moody's friction equation. No simplification of these bulk-flow equations is required for the solution procedure. Perturbation of the flow variables yields a set of zeroth and first-order equations. The zeroth-order equations (which model the large static displacement) are integrated by means of an efficient new method which employs fast Fourier transforms. Further integration of the zeroth-order pressures yields the hydrodynamic reactive force. Predictions for the hydrodynamic forces from this analysis procedure are in excellent agreement with available experimental results.

Nelson, C. C.↗
NASA NTRS2003

Nanoporous Silicon Carbide for Nanoelectromechanical Systems Applications

A major goal of this project is to produce porous silicon carbide (PSiC) via an electroless process for eventual utilization in nanoscale sensing platforms. Results in the literature have shown a variety of porous morphologies in SiC produced in anodic cells. Therefore, predictability and reproducibility of porous structures are initial concerns. This work has concentrated on producing morphologies of known porosity, with particular attention paid toward producing the extremely high surface areas required for a porous flow sensor. We have conducted a parametric study of electroless etching conditions and characteristics of the resulting physical nanostructure and also investigated the relationship between morphology and materials properties. Further, we have investigated bulk etching of SiC using both photo-electrochemical etching and inductively-coupled-plasma reactive ion etching techniques.

Hossain, T.↗
DOE OSTI2020

Alternative, Less Water-Intensive, Fracturing Fluids for Enhanced Geothermal Systems

Four fracturing fluids; water, CO2, CO2 with water, and CO2 with an aqueous solution of a CO2-reactive polymer, poly(allylamine) (PAA, 1wt%) were evaluated using a high-temperature true-triaxial fracturing apparatus and ½ foot side granite cubic samples. All three CO2-based fracturing fluids, CO2, CO2 with water, and CO2 with aqueous PAA fractured granite at higher breakdown pressures, high transient flow rates, and produce higher-conductivity fractures as compared to water. Additionally, faster pressurization rates with CO2-based fracturing fluids (obtained when fracturing at constant flow rate mode) are found to be associated with higher fracture conductivities. When partially saturating the rock sample with PAA solution followed by fracturing with CO2, the volume expansion caused by CO2-induced cross-linking of PAA leads to a faster pressure increase due to the associated stress generated and increase in viscosity. It was also found that CO2 as a fracturing fluid injected in hot dry rock (HDR) attain the highest fracture conductivity only when injected at very high flow rates, followed very closely by the CO2/PAA fracturing fluid system that generates fractures with, on average, similarly high conductivity values though independently of injection flow rate and using 1/6 of the mass of CO2 as compared to CO2 in HDR. Breakdown pressures were also similar for CO2 stimulation in HDR and CO2/PAA fluid system under identical injection flow rates. It is concluded that CO2 (when injected in HDR) and CO2/PAA are the fluids of choice for stimulation of granitic rock samples under the studied geothermal P/T conditions. CO2/PAA, however, offer the following three additional advantages; 1) it requires significantly lower volumes of CO2, 2) fracture permeability is independent of injection flow rate, and 3) the reversible (previously reported) viscosity increase is beneficial to transport proppants if they are ever developed enhanced geothermal systems.

Jian, Guoqing↗
DOE OSTI2020

Ammonia Permeation Through Inorganic Membranes

Moisture probes are used in the tritium facility to measure the moisture content of the gas stream. When tritium reacts with nitrogen to form ammonia, the ammonia gas damages the sensitive moisture probe. The gas stream tested during this experiment for moisture probe protection is composed of nitrogen and argon gas in conjunction with ammonia and water vapor. The gas stream is filtered through an inorganic membrane due to the high reactivity of tritium and a residual gas analyzer (RGA) is used to measure the ammonia and water vapor in the gas stream, as well as the permeability of nitrogen and argon through the inorganic membranes. The membranes tested were boron nitride and silver. The permeability was compared for each membrane at different pressures and flow rates. Fourier-transformed infrared spectroscopy (FT-IR) was used to compare the membranes before and after ammonia permeation. Ammonia gas is a byproduct formed from tritium gas reacting with nitrogen in the gas stream, similar to the Haber Process which occurs when hydrogen reacts with nitrogen [2]. The corrosive nature of ammonia damages metals and sensitive instruments such as moisture probes. Moisture probes are essential in various gas and liquid processes for measuring the moisture content of a gas. Membrane research has found that graphene oxide membranes successfully uptake ammonia from the gas stream at a humidity of approximately 30% at which point the pores pin closed, preventing gas permeation. Further research is being conducted to find an inorganic membrane that will prevent ammonia permeation thus circumventing damage to the sensitive moisture probe. The permeation measurements for argon and nitrogen gas and water and ammonia vapor were measured at various pressures of 800, 1000, 1200, 1500, 1800, and 2000 torr. The permeability average (PA) was calculated for each filter using a Barrer calculation. The average permeations for each filter were then compared. The gas composition was measured using the RGA Nitrogen was permeated through the membranes after ammonia permeation and a FT-IR spectrum was obtained. Boron Nitride: As the nitrogen pressure increased, the permeability of the membrane decreased from 800-1200 torr and remained relatively unchanged from 1200-2000 torr. The membrane exhibited a slight decrease in argon permeability from 800-1200 torr and a slight increase from 1500-2000 torr. The boron nitride membrane when permeated with ammonia and nitrogen prevented less ammonia permeation compared to the blank filter. The boron nitride filter demonstrated a decrease in permeability after ammonia permeation. Silver Membrane: When permeated with nitrogen alone, the membrane permeability decreased from 800 torr to 1200 torr. The permeability of the membrane showed little difference as pressure increased from 1200 torr. When permeated with argon, the same phenomenon occurred but on a much smaller scale. When compared to the blank and the boron nitride membranes the silver membrane exhibited significantly lower permeability. This may be in part due to the coating on the silver membrane and differences in pore size of the membranes. During permeation with ammonium hydroxide vapor and nitrogen, the partial pressure of the ammonia increased as compared to the blank membrane. The permeability before and after permeation with ammonia and nitrogen were compared. Permeability values suggested that after being permeated with the ammonia that the permeability for lower pressures increased slightly. There was no significant change in the FT-IR spectrums before and after permeation. Future work: Continue testing various inorganic membranes for ammonia permeation. Further research chemical separation of ammonia from the gas stream, which may prove difficult due to the high reactivity of tritium.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2021

Anisotropic strength behavior of single-crystal TATB

High-rate strength behavior plays an important role in the shock initiation of high explosives, with plastic deformation serving to localize heat into hot spots and as a mechanochemical means to enhance reactivity. Recent simulations predict that detonation-like shocks produce highly reactive nanoscale shear bands in the layered crystalline explosive TATB (1,3,5-triamino-2,4,6-trinitrobenzene), but the thresholds leading to this response are poorly understood. We utilize molecular dynamics to simulate the high-rate compressive stress–strain response of TATB, with a focus on understanding flow behavior. Here, the dependence of strength on pressure and loading axis (crystal orientation) is explored. The deformation mechanisms fall broadly into two categories, with compression along crystal layers activating a buckling/twinning mode and compression normal to the layers producing nanoscale shear bands. Despite the complexity of the underlying mechanisms, the crystal exhibits relatively straightforward stress–strain curves. Most of the crystal orientations studied show rapid strain softening following the onset of yielding, which settles to a steady flow state. Trajectories are analyzed using five metrics for local states and structural order, but most of these metrics yield similar distributions for these deformation mechanisms. On the other hand, a recently proposed measure of intramolecular strain energy is found to most cleanly distinguish between these mechanisms, while also providing a plausible connection with mechanochemically accelerated decomposition kinetics. Localization of intramolecular strain energy is found to depend strongly on crystal orientation and pressure.

36 MATERIALS SCIENCE↗
NASA NTRS2001

Pulse Detonation Engine Modeled

Pulse Detonation Engine Technology is currently being investigated at Glenn for both airbreathing and rocket propulsion applications. The potential for both mechanical simplicity and high efficiency due to the inherent near-constant-volume combustion process, may make Pulse Detonation Engines (PDE's) well suited for a number of mission profiles. Assessment of PDE cycles requires a simulation capability that is both fast and accurate. It should capture the essential physics of the system, yet run at speeds that allow parametric analysis. A quasi-one-dimensional, computational-fluid-dynamics-based simulation has been developed that may meet these requirements. The Euler equations of mass, momentum, and energy have been used along with a single reactive species transport equation, and submodels to account for dominant loss mechanisms (e.g., viscous losses, heat transfer, and valving) to successfully simulate PDE cycles. A high-resolution numerical integration scheme was chosen to capture the discontinuities associated with detonation, and robust boundary condition procedures were incorporated to accommodate flow reversals that may arise during a given cycle. The accompanying graphs compare experimentally measured and computed performance over a range of operating conditions for a particular PDE. Experimental data were supplied by Fred Schauer and Jeff Stutrud from the Air Force Research Laboratory at Wright-Patterson AFB and by Royce Bradley from Innovative Scientific Solutions, Inc. The left graph shows thrust and specific impulse, Isp, as functions of equivalence ratio for a PDE cycle in which the tube is completely filled with a detonable hydrogen/air mixture. The right graph shows thrust and specific impulse as functions of the fraction of the tube that is filled with a stoichiometric mixture of hydrogen and air. For both figures, the operating frequency was 16 Hz. The agreement between measured and computed values is quite good, both in terms of trend and magnitude. The error is under 10 percent everywhere except for the thrust value at an equivalence ratio of 0.8 in the left figure, where it is 14 percent. The simulation results shown were made using 200 numerical cells. Each cycle of the engine, approximately 0.06 sec, required 2.0 min of CPU time on a Sun Ultra2. The simulation is currently being used to analyze existing experiments, design new experiments, and predict performance in propulsion concepts where the PDE is a component (e.g., hybrid engines and combined cycles).

Paxson, Daniel E.↗
DOE OSTI2020

Decentralized Voltage optimization Method for Distribution Networks with Distributed PVs

In order to solve the voltage violations caused by high penetration distributed photovoltaics (PVs), this paper proposes a decentralized voltage optimization method for distribution networks. Through the optimal dispatch of distributed PVs and reactive power resources, it realizes the voltage security and economic operation of distribution systems and facilitates the integration of massive distributed PVs. The proposed method is inspired by the idea of locational marginal price (LMP) and feasible cutting plane. It separates the optimization of boundary bus voltage and power flow in adjacent regions and uses the interaction of boundary variables’ marginal prices to obtain the optimal solution. The effectiveness and accuracy of the proposed method are demonstrated via simulation test on a practical l0kV feeder in China.

Xue, Yaosuo↗
DOE OSTI2022

Thermal and solubility effects on fault leakage during geologic carbon storage

Geologic carbon storage (GCS) is a promising method for reducing anthropogenic CO 2 emissions to the atmosphere. To safely deploy GCS in the field, it is necessary to assess risks and the effect of uncertainty on safe storage. The effect of uncertainty can be quantified using batches of simulations, but the high computational costs of high-resolution simulations necessitate use of reduced-order models (ROMs). Previous work involves ROMs for quantifying the risk of different potential leakage paths from storage reservoirs to shallow formations. However, previous studies on development of fault-leakage ROMs have limited numbers of uncertain parameters and do not explicitly examine impacts of CO 2 solubility and thermal stresses on fault reactivation, which can generate high-permeability pathways and compromise CO 2 storage. Here, we analyze an ensemble of simulations considering CO 2 leakage from a storage reservoir to a shallow aquifer through a fault while varying a number of uncertain parameters related to thermo-hydro-mechanical properties and CO 2 injection. We show the effects of solubility on: free-phase CO 2 -leakage rates, brine-leakage rates, and poroelastic fault destabilization. We find that CO 2 solubility is more important for estimating free-phase CO 2 -leakage rates compared to brine-leakage rates or poroelastic fault destabilization. We also find that thermal stresses and overpressures have different spatial distributions within the fault, indicating that the spatial variability of overpressures due to variation in flow parameters does not necessarily make the spatial variability of thermal stresses negligible. We suggest the use of the CO 2 phase-change path as a variable in future fault-leakage ROMs.

03 NATURAL GAS↗
DOE OSTI2021

AC Power Flow Based DLMP Calculation and Decomposition Method to Smooth Power Fluctuation of Distributed Renewable Energy Sources

As the penetration of renewable energy sources increases, the growing renewable power variability brings ramping issues to power systems. Meanwhile, the development of distributed energy resources (DERs) makes the distribution systems to provide both energy and ancillary services. To incentivise individual resources and customers to alleviate ramping issues on the demand side, a two-stage distribution locational marginal price (DLMP) calculation and decomposition method is developed to formulate the marginal power ramping price for DERs. In the first stage of the proposed method, a distribution system operator market scheduling model based on AC optimal power flow is designed to estimate the optimal operating point of the distribution system. Subsequently, the voltage and power flow constraints are linearised in stage two to calculate DLMP. Finally, based on the Lagrange function and sensitivity factors, DLMP is decomposed to the marginal costs for active/reactive power, voltage management, power loss and power variability. Case studies demonstrate that the proposed model can effectively smooth the power fluctuation and reduce the ramping flexibility requirements of distribution systems.

AC optimal power flow↗
NASA NTRS1988

Improved synthesis of ceramic superconductors with alkaline earth peroxides - Synthesis and processing of Ba2YCu3O(7-x)

Synthesis processes for the preparation of ceramic conductors Ba2YCu3O(7-x) from BaO2 or BaCO3 in flowing O2 or N2 are described, and the characteristics of the materials produced in these processes are compared. Results of EDAX, XRD, SEM, and dc resistivity analyses demonstrated that superconducting materials made from BaO2 were more homogeneous, denser, and more metallic than materials produced from BaCO3, because of the higher reactivity of BaO2. Potential applications of this processes are discussed.

Hepp, A. F.↗
NASA NTRS1994

The Materials Chemistry of Atomic Oxygen with Applications to Anisotropic Etching of Submicron Structures in Microelectronics and the Surface Chemistry Engineering of Porous Solids

Neutral atomic oxygen is the most abundant component of the ionospheric plasma in the low Earth orbit environment (LEO; 200 to 700 kilometers altitude) and can produce significant degradation of some spacecraft materials. In order to produce a more complete understanding of the materials chemistry of atomic oxygen, the chemistry and physics of O-atom interactions with materials were determined in three radically different environments: (1) The Space Shuttle cargo bay in low Earth orbit (the EOIM-3 space flight experiment), (2) a high-velocity neutral atom beam system (HVAB) at Los Alamos National Laboratory (LANL), and (3) a microwave-plasma flowing-discharge system at JSC. The Space Shuttle and the high velocity atom beam systems produce atom-surface collision energies ranging from 0.1 to 7 eV (hyperthermal atoms) under high-vacuum conditions, while the flowing discharge system produces a 0.065 eV surface collision energy at a total pressure of 2 Torr. Data obtained in the three different O-atom environments referred to above show that the rate of O-atom reaction with polymeric materials is strongly dependent on atom kinetic energy, obeying a reactive scattering law which suggests that atom kinetic energy is directly available for overcoming activation barriers in the reaction. General relationships between polymer reactivity with O atoms and polymer composition and molecular structure have been determined. In addition, vacuum ultraviolet photochemical effects have been shown to dominate the reaction of O atoms with fluorocarbon polymers. Finally, studies of the materials chemistry of O atoms have produced results which may be of interest to technologists outside the aerospace industry. Atomic oxygen 'spin-off' or 'dual use' technologies in the areas of anisotropic etching in microelectronic materials and device processing, as well as surface chemistry engineering of porous solid materials are described.

Koontz, Steve L.↗
DOE OSTI2022

Design Considerations for Controlling Silicon Nanoparticle Nucleation and Growth in a Nonthermal Plasma

Controlling the nucleation and growth of nanoparticles in low temperature plasma systems is imperative for controlling nanoparticle size distributions; and for some applications such as deposition and etching in microelectronic processing, preventing particle contamination. In this work, silicon nanoparticle (NP) production from silane is used as a model system to investigate the nucleation process. Although the mechanisms responsible for silicon NP nucleation and growth have been studied, it is unclear how controllable system parameters (e.g., pressure, system geometry, and gas composition) can be used to inhibit or promote NP formation. For example, the transport of reactive silane species is expected to significantly affect the feed fraction of silane required to nucleate silicon NP (the nucleation onset fraction) due to losses at the reactor walls. In this work, NP mass density was determined as a function of system pressure, gas composition, and reactor diameter for a tubular flow-through radiofrequency (RF) plasma using Ar/H2/He/SiH4 gas mixtures. A quartz crystal microbalance (QCM) impactor was developed to measure the total aerosol mass density downstream of the plasma and thereby identify the nucleation onset and its dependence on process parameters. Finally, a reaction mechanism was developed and incorporated into a global plasma chemistry model to better understand the nucleation onset and NP growth.

36 MATERIALS SCIENCE↗
NASA NTRS1997

Reactive Ion Etching in a VHF Parallel Plate Reactor

VHF (very high frequency) capacitive plasma reactors may allow development of new RIE (reactive ion etching) systems with high etch rates, excellent uniformity and anisotropy and low damage. High ion and radical fluxes can be obtained by raising the RF (radio frequency) frequency which increases plasma density dramatically at a fixed voltage. The effects of variation in frequency (25-120 MHz), pressure (10-250 mTorr), and flow rate (1-100 sccm) in a CF4 discharge have been investigated. The RF current versus voltage characteristics and spatially resolved optical emission are used as diagnostics. Experiments on etch rates, etch uniformity and anisotropy in silicon, silicon dioxide and silicon nitride will be discussed. Results of fluid model simulations are used to interpret the experimental data.

Dahi, H.↗