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At least 73 records · Page 4

Electrooptic phase modulation gas correlation spectroscopy - A laboratory demonstration

A new gas-correlation spectroscopy technique is described which uses electrooptic phase modulation (EOPM) of atmospheric emission spectra together with a reference cell to selectively detect radiatively active gases. Laboratory results demonstrate that the EOPM gas-correlation technique is a sensitive approach to species abundance measurements, and support the feasibility of an instrument for measurement of winds in the stratosphere and mesosphere using an EOPM. Through the measurement of wind-induced Doppler shifts in the spectra of atmospheric species, this instrument offers a means of monitoring the wind field in the 20-100 km altitude range from a satellite.

Rider, D. M.↗

AM0 efficiency measurements

Procedures for measuring the air mass zero (AM0) current versus voltage characteristics and calculating the efficiency are discussed. The various factors influencing the determination of the efficiency include the I-V measurement system, reference cell calibration, standard reporting conditions, area measurement, light source characteristics, temperature measurement and control, and the measurement procedures. Each of these sources contributes to the precision index and bias limit which is combined to obtain the total uncertainty in the efficiency. These factors are discussed as well as how to minimize differences in the reported AM0 efficiency of a given PV cell between various laboratories.

Emery, Keith↗

Design and simulated performance of a CARS spectrometer for dynamic temperature measurements using electronic heterodyning

A new design for generating CARS signals and for the detection and processing of these signals is presented and evaluated. The design is based on electronic heterodyning of the CARS spectrum of nitrogen at two selected narrowband frequencies, ratioing the resulting signal strengths, and comparing this ratio with a theoretically derived temperature scale. A reference cell is incorporated into the design for system calibration and for accurate temperature measurements. The spectrometer is found capable of measuring temperature in the submillisecond time scale with an accuracy of 10 percent in the 1000-2000 K temperature range. A typical result using the Hg(x)Cd(1-x)Te photomixer for T = 1500 K, Delta T = 50 K is a SNR of 21 dB and a data collection rate of 300 Hz.

Deen, M. Jamal↗

Preliminary results from the advanced photovoltaic experiment flight test

The Advanced Photovoltaic Experiment is a space flight test designed to provide reference cell standards for photovoltaic measurement as well as to investigate the solar spectrum and the effect of the space environment on solar cells. After a flight of 69 months in low earth orbit as part of the Long Duration Exposure Facility set of experiments, it was retrieved in January, 1990. The electronic data acquisition system functioned as designed, measuring and recording cell performance data over the first 358 days of flight; limited by battery lifetime. Significant physical changes are also readily apparent, including erosion of front surface paint, micrometeoroid and debris catering and contamination.

Brinker, David J.↗

Preliminary flight test results from the advanced photovoltaic experiment

The Advanced Photovoltaic Experiment is a space flight test designed to provide reference cell standards for photovoltaic measurement as well as to investigate the solar spectrum and the effect of the space environment on solar cells. After a flight of 69 months in low earth orbit as part of the Long Duration Exposure Facility set of experiments, it was retrieved in January, 1990. The electronic data acquisition system functioned as designed, measuring and recording cell performance data over the first 358 days of flight, limited by battery lifetime. Significant physical changes are also readily apparent, including erosion of front surface paint, micrometeoroid and debris catering and contamination.

Brinker, David J.↗

Preliminary results from the Advanced Photovoltaic Experiment flight test

The Advanced Phototovoltaic Experiment is a space flight test designed to provide reference cell standards for photovoltaic measurements and to investigate the solar spectrum and the effect of the space environment on solar cells. After a flight of 69 months in low earth orbit as part of the Long Duration Exposure Facility set of experiments, it was retrieved in January 1990. The electronic data acquisition system functioned as designed, measuring and recording cell performance data over the first 358 days of flight, limited by battery lifetime. Significant physical changes are also readily apparent, including erosion of front surface paint, micrometeoroid and debris cratering, and contamination.

Brinker, David J.↗

Aircraft laser infrared absorption spectrometer (ALIAS) for polar ozone studies

The ALIAS instrument is a very high resolution (0.0003/cm) scanning, tunable diode laser spectrometer designed to make direct, simultaneous measurements of NO2, HNO3, HCl, CH4, and either O3 or N2O (including vertical profiles of CH4 and N2O) in the polar stratosphere at sub-part-per-billion level sensitivities over integration times from 3 to 30 s. Unique features include a sample inlet/throttle system designed to achieve near-isokinetic sampling, in PSC events, an in-flight wavelength reference cell rack, mechanical fringe-spoilers, a four-laser/four-detector dewar with 24-hr hold-time operating at a fixed temperature without electrical regulation, and in-flight fast correlation routines for spectral drift compensation prior to spectral addition. Instrument design and test flight results are discussed in the light of ALIAS's role in the Winter 1991 Arctic aircraft stratospheric ozone campaigns out of Fairbanks, Alaska, and Bangor, Maine.

Webster, C. R.↗

Diagnostic for Plasma Enhanced Chemical Vapor Deposition and Etch Systems

In order to meet NASA's requirements for the rapid development and validation of future generation electronic devices as well as associated materials and processes, enabling technologies ion the processing of semiconductor materials arising from understanding etch chemistries are being developed through a research collaboration between Stanford University and NASA-Ames Research Center, Although a great deal of laboratory-scale research has been performed on many of materials processing plasmas, little is known about the gas-phase and surface chemical reactions that are critical in many etch and deposition processes, and how these reactions are influenced by the variation in operating conditions. In addition, many plasma-based processes suffer from stability and reliability problems leading to a compromise in performance and a potentially increased cost for the semiconductor manufacturing industry. Such a lack of understanding has hindered the development of process models that can aid in the scaling and improvement of plasma etch and deposition systems. The research described involves the study of plasmas used in semiconductor processes. An inductively coupled plasma (ICP) source in place of the standard upper electrode assembly of the Gaseous Electronics Conference (GEC) radio-frequency (RF) Reference Cell is used to investigate the discharge characteristics and chemistries. This ICP source generates plasmas with higher electron densities (approximately 10(exp 12)/cu cm) and lower operating pressures (approximately 7 mTorr) than obtainable with the original parallel-plate version of the GEC Cell. This expanded operating regime is more relevant to new generations of industrial plasma systems being used by the microelectronics industry. The motivation for this study is to develop an understanding of the physical phenomena involved in plasma processing and to measure much needed fundamental parameters, such as gas-phase and surface reaction rates. species concentration, temperature, ion energy distribution, and electron number density. A wide variety of diagnostic techniques are under development through this consortium grant to measure these parameters. including molecular beam mass spectrometry (MBMS). Fourier transform infrared (FTIR) spectroscopy, broadband ultraviolet (UV) absorption spectroscopy, a compensated Langmuir probe. Additional diagnostics. Such as microwave interferometry and microwave absorption for measurements of plasma density and radical concentrations are also planned.

Cappelli, Mark A.↗

Simulation and Experimental Measurements of Inductively Coupled CF4 and CF4/Ar Plasmas

The recently developed code SEMS (semiconductor equipment modeling software)is applied to the simulation of CF4 and CF4/Ar inductively coupled plasmas (ICP). This work builds upon the earlier nitrogen, transformer coupled plasma (TCP) SEMS research by demonstrating its accuracy for more complex reactive mixtures, moving closer to the realization of a virtual plasma reactor. Attention is given to the etching of and/or formation of carbonaceous films on the quartz dielectric window and diagnostic aperatures. The simulations are validated through comparisons with experimental measurements using FTIR (Fourier Transform Infrared) and UV absorption spectroscopy for CFx and SiFx neutral radicals, QMS (quadrupole mass spectrometry) for the ions, and Langmuir probe measurements of electron number density and temperature in an ICP GEC reference cell.

Hash, D. B.↗

Research Activities at Plasma Research Laboratory at NASA Ames Research Center

In order to meet NASA's requirements for the rapid development and validation of future generation electronic devices as well as associated materials and processes, enabling technologies are being developed at NASA-Ames Research Center using a multi-discipline approach. The first step is to understand the basic physics of the chemical reactions in the area of plasma reactors and processes. Low pressure glow discharges are indispensable in the fabrication of microelectronic circuits. These plasmas are used to deposit materials and also etch fine features in device fabrication. However, many plasma-based processes suffer from stability and reliability problems leading to a compromise in performance and a potentially increased cost for the semiconductor manufacturing industry. Although a great deal of laboratory-scale research has been performed on many of these processing plasmas, little is known about the gas-phase and surface chemical reactions that are critical in many etch and deposition processes, and how these reactions are influenced by the variation in operating conditions. Such a lack of understanding has hindered the development of process models that can aid in the scaling and improvement of plasma etch and deposition systems. Our present research involves the study of such plasmas. An inductively-coupled plasma (ICP) source in place of the standard upper electrode assembly of the Gaseous Electronics Conference (GEC) radio-frequency (RF) Reference Cell is used to investigate the discharge characteristics. This ICP source generates plasmas with higher electron densities and lower operating pressures than obtainable with the original parallel-plate version of the GEC Cell. This expanded operating regime is more relevant to new generations of industrial plasma systems being used by the microelectronics industry. The research goal is to develop an understanding of the physical phenomena involved in plasma processing and to measure much needed fundamental parameters, such as gas phase and surface reaction rates, species concentration, temperature, ion energy distribution, and electron number density.

Sharma, S. P.↗

Neutral Gas Temperature Estimates in an Inductively Coupled CF4 Plasma by Fitting Diatomic Emission Spectra

This work examines the accuracy of plasma neutral temperature estimates by fitting the rotational band envelope of different diatomic species in emission. Experiments are performed in an inductively coupled CF4 plasma generated in a Gaseous Electronics Conference reference cell. Visible and ultraviolet emission spectra are collected at a power of 300 W (approximately 0.7 W/cc) and pressure of 30 mtorr. The emission bands of several molecules (CF, CN, C2, CO, and SiF) are fit simultaneously for rotational and vibrational temperatures and compared. Four different rotational temperatures are obtained: 1250 K for CF and CN, 1600 K for CO, 1800 K for C2, and 2300 K for SiF. The vibrational temperatures obtained vary from 1750-5950 K, with the higher vibrational temperatures generally corresponding to the lower rotational temperatures. These results suggest that the different species have achieved different degrees of equilibration between the rotational and vibrational modes and may not be equilibrated with the translational temperatures. The different temperatures are also related to the likelihood that the species are produced by ion bombardment of the surface, with etch products like SiF, CO, and C2 having higher temperatures than species expected to have formed in the gas phase.

Cruden, Brett A.↗

Feature Profile Evolution of SiO2 Trenches In Fluorocarbon Plasmas

Etching of silicon microstructures for semiconductor manufacturing in chlorine plasmas has been well characterized. The etching proceeds in a two-part process, where the chlorine neutrals passivate the Si surface and then the ions etch away SiClx. However, etching in more complicated gas mixtures and materials, such as etching of SiO2 in Ar/C4F8, requires knowledge of the ion and neutral distribution functions as a function of angle and velocity, in addition to modeling the gas surface reactions. In order to address these needs, we have developed and integrated a suite of models to simulate the etching process from the plasma reactor level to the feature profile evolution level. This arrangement allows for a better understanding, control, and prediction of the influence of equipment level process parameters on feature profile evolution. We are currently using the HPEM (Hybrid Plasma Equipment Model) and PCMCM (Plasma Chemistry Monte Carlo Model) to generate plasma properties and ion and neutral distribution functions for argon/fluorocarbon discharges in a GEC Reference Cell. These quantities are then input to the feature scale model, Simulation of Profile Evolution by Level Sets (SPELS). A surface chemistry model is used to determine the interaction of the incoming species with the substrate material and simulate the evolution of the trench profile. The impact of change of gas pressure and inductive power on the relative flux of CFx and F to the wafer, the etch and polymerization rates, and feature profiles will be examined. Comparisons to experimental profiles will also be presented.

Hwang, Helen↗

A DSMC Study of Low Pressure Argon Discharge

Work toward a self-consistent plasma simulation using the DSMC (Direct Simulation Monte Carlo) method for examination of the flowfields of low-pressure high density plasma reactors is presented. Presently, DSMC simulations for these applications involve either treating the electrons as a fluid or imposing experimentally determined values for the electron number density profile. In either approach, the electrons themselves are not physically simulated. Self-consistent plasma DSMC simulations have been conducted for aerospace applications but at a severe computational cost due in part to the scalar architectures on which the codes were employed. The present work attempts to conduct such simulations at a more reasonable cost using a plasma version of the object-oriented parallel Cornell DSMC code, MONACO, on an IBM SP-2. Due to availability of experimental data, the GEC reference cell is chosen to conduct preliminary investigations. An argon discharge is chosen to conduct preliminary investigations. An argon discharge is examined thus affording a simple chemistry set with eight gas-phase reactions and five species: Ar, Ar(+), Ar(*), Ar(sub 2), and e where Ar(*) is a metastable.

Hash, David B.↗

Development of the Lidar Atmospheric Sensing Experiment (LASE): An Advanced Airborne DIAL Instrument

The Lidar Atmospheric Sensing Experiment (LASE) Instrument is the first fully-engineered, autonomous Differential Absorption Lidar (DIAL) System for the measurement of water vapor in the troposphere (aerosol and cloud measurements are included). LASE uses a double-pulsed Ti:Sapphire laser for the transmitter with a 30 ns pulse length and 150 mJ/pulse. The laser beam is "seeded" to operate on a selected water vapor absorption line in the 815-nm region using a laser diode and an onboard absorption reference cell. A 40 cm diameter telescope collects the backscattered signals and directs them onto two detectors. LASE collects DIAL data at 5 Hz while onboard a NASA/Ames ER-2 aircraft flying at altitudes from 16-21 km. LASE was designed to operate autonomously within the environment and physical constraints of the ER-2 aircraft and to make water vapor profile measurements across the troposphere to better than 10% accuracy. LASE has flown 19 times during the development of the instrument and the validation of the science data. This paper describes the design, operation, and reliability of the LASE Instrument.

Moore, Alvah S., Jr.↗

CF2 Detection in Radio-Frequency Ar/CHF3 Plasmas by Fourier Transform Infrared Spectroscopy

CFx radicals, in particular CF2, are instrumental in anisotropic etching of SiO2. In order to optimize the CFx radical population in a given process environment, it is imperative that we understand their production mechanism. Towards this goal, we have conducted a series of quantitative measurements of CF2 radicals in low pressure RF plasmas similar to those used in SiO2 etching. In this study, we present preliminary results for Ar/CHF3 plasmas operating at pressures ranging from 10-50 mTorr and powers ranging from 100-500 W in the GEC reference cell, modified for inductive (transformer) coupling. Fourier transform infrared (FTIR) spectroscop) is used to observe the absorption features of the CF2 radical in the 1114 cm-1 and 1096 cm-1 spectral regions. The FTIR spectrometer is equipped with a high-sensitivity mercury cadmium telluride (MCT) detector and has afixed resolution of 0.125 cm- 1. The CF2 concentrations are measured for a range of operating pressures and discharge power levels, and are compared to measurements of the relative CF2 concentrations made by mass spectrometry using the method of appearance potential for radical selectivity.

Kim, J. S.↗

Langmuir Probe Distortions and Probe Compensation in an Inductively Coupled Plasma

In many RF discharges, Langmuir probe measurements are usually made against a background of sinusoidal (and not so sinusoidal) fluctuations in the plasma parameters such as the plasma potential (Vp), the electron number density (ne), and the electron temperature (Te). The compensation of sinusoidal fluctuations in Vp has been extensively studied and is relatively well understood. Less attention has been paid to the possible distortions introduced by small fluctuations in plasma density and/or plasma temperature, which may arise in the sheath and pre-sheath regions of RF discharges. Here, we present the results of a model simulation of probe characteristics subject to fluctuations in both Vp and ne. The modeling of probe distortion due to possible fluctuations in Te is less straightforward. A comparison is presented of calculations with experimental measurements using a compensated and uncompensated Langmuir probe in an inductively coupled GEC reference cell plasma, operating on Ar and Ar/CF4 mixtures. The plasma parameters determined from the compensated probe characteristics are compared to previous measurements of others made in similar discharges, and to our own measurements of the average electron density derived from electrical impedance measurements.

Ji, J. S.↗

Predicting Maximum Temperatures of a Li-ion Battery on a Simulated Flight Profile using a Model-based Prognostics

One of the challenges in using Li-ion packs in aeronautics is their safety, and thermal runaway (TR) is a major concern. The current engineering solutions to prevent a Li-ion pack from a catastrophic TR require additional mass and volume to isolate cells. The excess mass could be reduced by improving detection and, thus, preventing a TR event. One of the possible early warning indicators of a TR is crossing a threshold temperature. We have developed an approach, based on the Unscented Kalman Filter (UKF), to predict the likelihood of reaching the threshold temperature for simulated flight profiles. The current battery prognostics algorithms for aerospace predict state-of-charge (SOC) and end-of-life (EOL) [1]. We extended this two-level algorithm to predict the maximum temperature during discharge. The amount of heat generated in a cell depends on factors such as cell chemistry, cell packaging, total cycles, operating temperature, and abuse history [2]. Our semi-empirical thermal model depends on three phenomenological parameters which account for those factors. In addition, a two-parameter reduced-order model is developed to predict the temperature rise for short bursts of “random-walk” (RW) discharge current sequence, which simulates a flight's current-loading profile. The performance of these models on different datasets and types of current loading will be presented. To predict the maximal temperatures for future cycles we must estimate the evolution of thermal parameters as the batteries age. It is found that the parameters of the 3-parametric thermal model cannot be estimated only from the RW data. To address the issue, we will present two alternative approaches: i) expanding the datasets to include discharge profiles beyond RWs; ii) model reduction to a two-parametric model. The two approaches will be illustrated by an application to the cycling data from a commercial LG 18650 cell. References: 1. M. Daigle, C.S. Kulkarni, End-of-discharge and End-of-life Prediction in Lithium-ion Batteries with Electrochemistry-based Aging Models, in: AIAA Infotech @ Aerospace, American Institute of Aeronautics and Astronautics, San Diego, California, USA, 2016. 2. M. Börner, et. al, Correlation of aging and thermal stability of commercial 18650-type lithium ion batteries, Journal of Power Sources. 342 (2017) 382–392.

Thermal runaway↗

Impedance studies of Ni/Cd and Ni/H cells using the cell case as reference electrode

Many impedance studies were carried out on Ni electrodes and Ni/Cd and Ni/H batteries. In order for impedance to become a diagnostic tool, accurate and reproducible measurements must be made, and some way of separating the contributions of the individual electrodes must be found. Using the PAR and the Solartron impedance equipment, studies have found that consistent measurements can be made if the cells or electrodes are equilibrated at the voltage of interest. In the charged state, equilibration times required are short, on the order of a few hours or less, but the equilibration time required becomes progessively longer as the voltage is lowered. The cell case can be used as a reference electrode during impedance measurements. The voltage of the case with respect to the electrodes is unimportant provided that it does not change appreciably during the course of the measurement. Measurements were made with several uncycled Ni/Cd cells, one from a lot which was known to have faulty Cd electrodes and another from a lot which showed excellent cycle life and presumably had good Cd electrodes. The impedances of the Ni electrodes vs. the case were similar, while the impedance of the poor Cd electrodes vs. the case. A 50 AH Ni/H cell was also investigated. After subtraction of the ohmic resistances, the sums of the impedances of the individual electrodes were very close to the impedance of the total cell. This indicates that the method is valid for examining the characteristics of the individual electrodes in situ.

Reid, Margaret A.↗