Plasma etching for fabrication of low-dissipation single-mode quantum cascade lasers
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This viewgraph presentation reviews the multiplier source technologies and the status/Performance of THz multiplier sources. An example of a THz application is imaging radar. The presentation reviews areas of requirements for THz sources: (1) Figures of merit, (i.e., Frequency Terahertz for high resolution Bandwidth of at least 15 GHz for high range resolution Efficiency (i.e., minimize power supply requirements) (2) Output power: (i.e., Milliwatts below 800 GHz, 10s of microwatts above 1 THz, 1-2 microwatts near 2 THz (3) Mechanical--stability, compact, low mass (4) Environmental -- radiation, vibration, thermal. Several sources for 0.3 - 2 THz are reviewed: FIR lasers, quantum cascade lasers (QCL), backward-wave oscillator (BWO), and Multiplier sources. The current state of the art (SoA) is shown as Substrateless Technology. It also shows where the SoA is for devices beyond 1 THz. The presentation concludes by reviewing the options for future development, and 2 technology roadmaps
Terahertz (THz) external-cavity lasers based on quantum-cascade (QC) metasurfaces are emerging as widely-tunable, single-mode sources with the potential to cover the 1--6 THz range in discrete bands with milliwatt-level output power. By operating on an ultra-short cavity with a length on the order of the wavelength, the QC vertical-external-cavity surface-emitting-laser (VECSEL) architecture enables continuous, broadband tuning while producing high quality beam patterns and scalable power output. The methods and challenges for designing the metasurface at different frequencies are discussed. As the QC-VECSEL is scaled below 2 THz, the primary challenges are reduced gain from the QC active region, increased metasurface quality factor and its effect on tunable bandwidth, and larger power consumption due to a correspondingly scaled metasurface area. At frequencies above 4.5 THz, challenges arise from a reduced metasurface quality factor and the excess absorption that occurs from proximity to the Reststrahlen band. The results of four different devices — with center frequencies 1.8 THz, 2.8 THz, 3.5 THz, and 4.5 THz — are reported. Each device demonstrated at least 200 GHz of continuous single-mode tuning, with the largest being 650 GHz around 3.5 THz. The limitations of the tuning range are well modeled by a Fabry-Pérot cavity which accounts for the reflection phase of the metasurface and the effect of the metasurface quality factor on laser threshold. Lastly, the effect of different output couplers on device performance is studied, demonstrating a significant trade-off between the slope efficiency and tuning bandwidth.
We have designed and demonstrated a quantum cascade laser (QCL) based standoff system that utilizes an uncooled mercury cadmium telluride (MCT) detector with lock-in signal processing for chemical identification at a distance of 12.5 meters in indoor ambient light conditions. In the system, a tunable quad-QCL operating (1 MHz) in quasi-continuous wave mode between 8.45 and 10.03 μm (~1182 to 1000 cm –1 ) serves as the active mid-infrared source for remotely interrogating mineral, powder, and thin film oil samples including powder mixtures (6, 12.5, 25, and 50%) of crystalline quartz (SiO 2 ) in KBr. Light as reflected from a given sample is collected using a 10-inch (25.4 cm) Dall Kirkham telescope and coupled with ZnSe optics to an uncooled MCT detector. Furthermore, the mixture dependence of the highly transparent KBr and strongly absorbing quartz was found to fit a modified version of the Schatz reflectance model for compacted powder mixtures. All reflectance spectra reported are relative to an Au-coated diffuse reflector. A NIST traceable polystyrene standard reflector was also used to determine the QCL wavelength tuning range and calibration.
Research is reported on the development of sensors for gas turbine combustor applications that measure real-time gas temperature using near-infrared water vapor absorption and concentration in the combustor exhaust of trace quantities of pollutant NO and CO using mid-infrared absorption. Gas temperature is extracted from the relative absorption strength of two near-infrared transitions of water vapor. From a survey of the water vapor absorption spectrum, two overtone transitions near 1800 nm were selected that can be rapidly scanned in wavelength by injection current tuning a single DFB diode laser. From the ratio of the absorbances on these selected transitions, a path-integrated gas temperature can be extracted in near-real time. Demonstration measurements with this new temperature sensor showed that combustor instabilities could be identified in the power spectrum of the temperature versus time record. These results suggest that this strategy is extremely promising for gas turbine combustor control applications. Measurements of the concentration of NO and CO in the combustor exhaust are demonstrated with mid-infrared transitions using thermo-electrically cooled, quantum cascade lasers operating near 5.26 and 4.62 microns respectively. Measurements of NO are performed in an insulated exhaust duct of a C2H4-air flame at temperatures of approximately 600 K. CO measurements are performed above a rich H2-air flame seeded with CO2 and cooled with excess N2 to 1150 K. Using a balanced ratiometric detection technique a sensitivity of 0.36 ppm-m was achieved for NO and 0.21 ppm-m for CO. Comparisons between measured and predicted water-vapor and CO2 interference are discussed. The mid-infrared laser quantum cascade laser technology is in its infancy; however, these measurements demonstrate the potential for pollutant monitoring in exhaust gases with mid-IR laser absorption.
The dynamics of intersubband relaxation are critical to quantum well technologies such as quantum cascade lasers and quantum well infrared photodetectors. In this work, intersubband relaxation in CdSe colloidal quantum wells, or nanoplatelets, is studied via pump-push-probe transient spectroscopy. An initial interband pump pulse is followed by a secondary infrared push excitation, resonant with intersubband absorption, which promotes electrons from the first conduction band of the quantum well to the second conduction band. A probe pulse monitors subsequent electron cooling to the band edge of the quantum well. Using this technique, intersubband relaxation is studied as a function of critical variables such as colloidal quantum well size and thickness, surface ligand chemistry, temperature, and excitation pulse intensity. Larger quantum well sizes, judicious selection of surface ligand chemistry (e.g., thiolates), low temperatures, and elevated push pulse fluences slow intersubband relaxation. However, compared to resonant intraband relaxation in colloidal quantum dots (up to hundreds of picoseconds), intersubband relaxation in colloidal quantum wells is rapid (<1 ps) under all examined conditions. These experiments indicate that rapid relaxation is driven by both LO phonon and surface scattering. The short time scale of relaxation observed in these materials may hinder intersubband technologies such as mid-infrared detectors, although such rapid relaxation may prove valuable in optical switching.
The present invention provides quantum cascade lasers and amplifier that operate in a frequency range of about 1 Terahertz to about 10 Terahertz. In one aspect, a quantum cascade laser of the invention includes a semiconductor heterostructure that provides a plurality of lasing modules connected in series. Each lasing module includes a plurality of quantum well structure that collectively generate at least an upper lasing state, a lower lasing state, and a relaxation state such that the upper and the lower lasing states are separated by an energy corresponding to an optical frequency in a range of about 1 to about 10 Terahertz. The lower lasing state is selectively depopulated via resonant LO-phonon scattering of electrons into the relaxation state.
The present invention provides quantum cascade lasers and amplifier that operate in a frequency range of about 1 Terahertz to about 10 Terahertz. In one aspect, a quantum cascade laser of the invention includes a semiconductor heterostructure that provides a plurality of lasing modules connected in series. Each lasing module includes a plurality of quantum well structure that collectively generate at least an upper lasing state, a lower lasing state, and a relaxation state such that the upper and the lower lasing states are separated by an energy corresponding to an optical frequency in a range of about 1 to about 10 Terahertz. The lower lasing state is selectively depopulated via resonant LO-phonon scattering of electrons into the relaxation state.
A new infrared heterodyne instrument has been developed which allows the use of both tuneable diode lasers (TDL) and quantum cascade lasers (QCL) as local oscillators (LO). The current frequency tuning range of our system extends from 900 to 1100/cm depending on the availability of lasers but is planned to be extended to 600/cm soon. The IF-bandwidth is 1.4 GHz using an acousto-optical spectrometer (AOS). The frequency resolution and stability of the system is approximately 10(exp 7). Currently, mercury-cadmium-telluride (MCT) detectors are used as mixers while new devices like quantum-well-infrared-photodetectors (QWIP) and hot-electron-bolometers (HEB) are investigated. The IF-bandwidth can be extended to about 3 GHz by using a new broadband acousto-optical spectrometer presently under development. The instrument is fully transportable and can be attached to any infrared or optical telescope. The semiconductor laser is stabilized to a Fabry-Perot ring-resonator, which is also used as an efficient diplexer to superimpose the local-oscillator and the signal radiation. As a first step measurements of trace gases in Earth's atmosphere and non-LTE emission from Venus' atmosphere were carried out as well as observations of molecular features in sunspots. Further astronomical observations from ground-based telescopes and the airborne observatory SOFIA are planned for the future. Of particular interest are molecules without a permanent dipole moment like H2, CH4, C2H2 etc.
The mid-infrared (MIR) spectral range (3-5 μm) is of particular interest for remotely sensing gaseous molecules such as H2O, CO2, CH4, N2O, CO, NH3, and other compounds. The infrared spectra of planets, moons, comets, and asteroids are rich in information, including gas composition and surface mineralogy. Significant advances in technology have emerged for ground-based telescopes, including the higher spectral resolution permitted by cross-dispersed instruments and heterodyne techniques. New technologies offer the opportunity to break this barrier, by using solid- state photonics. In the past three years, under the NASA ROSES PICASSO program, we have been developing key components for a revolutionary MIR spectrometer: Photonic Integrated Circuit TUned for Reconnaissance and Exploration (PICTURE), which is based on integrated photonics technology that offers ultra-small size, weight, and power (SWaP) with non-moving parts and low cost for future planetary missions. In this paper, we will describe our science and technology development progress leading to demonstrating the concept and functionalities of the PICTURE instrument. The photonic integrated circuit spectrometer (PICS) of the PICTURE instrument uses an integrated heterodyne detection scheme to significantly reduce SWaP and improve sensitivity. Our program goals are to advance the building blocks needed for the PICS, which include arrayed waveguide gratings (AWGs), quantum cascade lasers (QCLs) as local oscillators, and quantum cascade detectors (QCDs) as heterodyne detectors. In addition, we are leveraging a NASA SBIR program to develop the toolsets needed to fabricate MIR photonics lanterns (PL). The PL is a critical component that enables PICTURE to bring a signal from the collecting telescope to the PICS, which requires single optical mode inputs. PICTURE focuses on the CO spectral band at 4.6-4.8 μm that is of key importance to cometary science. We also continue to explore future instrument concepts that exploit the broad wavelength potential of the PICS design to perform spectroscopy spanning the full MIR and longwave IR (LWIR) bands. This will have wide applicability in planetary science, for example, to probe the strongest CO2, H2O, and CH4 transitions that are difficult (CH4) or impossible (CO2, H2O) to detect using Earth-based telescopes due to atmospheric opacity. Each integrated-photonics-spectrometer chip will feature a single heterodyne room-temperature laser with a wide wavelength tuning range, or multiple local-oscillator lasers for much broader spectral coverage. The fully developed PICTURE instrument will provide a cost-effective, high-resolution spectrometer for future space applications.
The mid-infrared (MIR) spectral range (3-5 μm) is of particular interest for remotely sensing gaseous molecules such as H2O, CO2, CH4, N2O, CO, NH3, and other compounds. The infrared spectra of planets, moons, comets, and asteroids are rich in information, including gas composition and surface mineralogy. Significant advances in technology have emerged for ground-based telescopes, including the higher spectral resolution permitted by cross-dispersed instruments and heterodyne techniques. New technologies offer the opportunity to break this barrier, by using solid-state photonics. In the past three years, under the NASA ROSES PICASSO program, we have been developing key components for a revolutionary MIR spectrometer: Photonic Integrated Circuit TUned for Reconnaissance and Exploration (PICTURE), which is based on integrated photonics technology that offers ultra-small size, weight, and power (SWaP) with non-moving parts and low cost for future planetary missions. In this paper, we will describe our science and technology development progress leading to demonstrating the concept and functionalities of the PICTURE instrument. The photonic integrated circuit spectrometer (PICS) of the PICTURE instrument uses an integrated heterodyne detection scheme to significantly reduce SWaP and improve sensitivity. Our program goals are to advance the building blocks needed for the PICS, which include arrayed waveguide gratings (AWGs), quantum cascade lasers (QCLs) as local oscillators, and quantum cascade detectors (QCDs) as heterodyne detectors. In addition, we are leveraging a NASA SBIR program to develop the toolsets needed to fabricate MIR photonics lanterns (PL). The PL is a critical component that enables PICTURE to bring a signal from the collecting telescope to the PICS, which requires single optical mode inputs. PICTURE focuses on the CO spectral band at 4.6-4.8 μm that is of key importance to cometary science. We also continue to explore future instrument concepts that exploit the broad wavelength potential of the PICS design to perform spectroscopy spanning the full MIR and longwave IR (LWIR) bands. This will have wide applicability in planetary science, for example, to probe the strongest CO2, H2O, and CH4 transitions that are difficult (CH4) or impossible (CO2, H2O) to detect using Earth-based telescopes due to atmospheric opacity. Each integrated-photonics-spectrometer chip will feature a single heterodyne room-temperature laser with a wide wavelength tuning range, or multiple local-oscillator lasers for much broader spectral coverage. The fully developed PICTURE instrument will provide a cost-effective, high-resolution spectrometer for future space applications.
The mid-infrared (MIR) spectral range (3-5 μm) is of particular interest for remotely sensing gaseous molecules such as H2O, CO2, CH4, N2O, CO, NH3, and other compounds. The infrared spectra of planets, moons, comets, and asteroids are rich in information, including gas composition and surface mineralogy. Significant advances in technology have emerged for ground-based telescopes, including the higher spectral resolution permitted by cross-dispersed instruments and heterodyne techniques. New technologies offer the opportunity to break this barrier, by using solid-state photonics. In the past three years, under the NASA ROSES PICASSO program, we have been developing key components for a revolutionary MIR spectrometer: Photonic Integrated Circuit TUned for Reconnaissance and Exploration (PICTURE), which is based on integrated photonics technology that offers ultra-small size, weight, and power (SWaP) with non-moving parts and low cost for future planetary missions. In this paper, we will describe our science and technology development progress leading to demonstrating the concept and functionalities of the PICTURE instrument. The photonic integrated circuit spectrometer (PICS) of the PICTURE instrument uses an integrated heterodyne detection scheme to significantly reduce SWaP and improve sensitivity. Our program goals are to advance the building blocks needed for the PICS, which include arrayed waveguide gratings (AWGs), quantum cascade lasers (QCLs) as local oscillators, and quantum cascade detectors (QCDs) as heterodyne detectors. In addition, we are leveraging a NASA SBIR program to develop the toolsets needed to fabricate MIR photonics lanterns (PL). The PL is a critical component that enables PICTURE to bring a signal from the collecting telescope to the PICS, which requires single optical mode inputs. PICTURE focuses on the CO spectral band at 4.6-4.8 μm that is of key importance to cometary science. We also continue to explore future instrument concepts that exploit the broad wavelength potential of the PICS design to perform spectroscopy spanning the full MIR and longwave IR (LWIR) bands. This will have wide applicability in planetary science, for example, to probe the strongest CO2, H2O, and CH4 transitions that are difficult (CH4) or impossible (CO2, H2O) to detect using Earth-based telescopes due to atmospheric opacity. Each integrated-photonics-spectrometer chip will feature a single heterodyne room-temperature laser with a wide wavelength tuning range, or multiple local-oscillator lasers for much broader spectral coverage. The fully developed PICTURE instrument will provide a cost-effective, high-resolution spectrometer for future space applications.
Tunable, unipolar, near-infrared intraband optical gain is demonstrated in semiconductor colloidal quantum wells, expanding the form and optical range for potential infrared applications. Atomically flat colloidal quantum wells of cadmium selenide display photoinduced absorption features in the near-infrared assigned to intraband (alternatively intersubband) transitions from the first to second electron subbands of the quantum wells. Under ultraviolet optical excitation, these same transitions from the first to second electron subbands are shown to exhibit stimulated emission, resulting in optical gain covering the near-infrared spectral region. The modal gain, bandwidth, and lifetime of this intraband gain are manipulated by using excitation energy, fluence, temperature, and surface chemistry. Unlike previous demonstrations of intraband optical gain in epitaxial quantum wells (e.g., quantum cascade lasers), the colloidal quantum wells are undoped. As a result, nearly thresholdless gain is in principle possible and limited in practice by the measurement of small optical losses of the samples in the near-infrared. Furthermore, the observations may be understood as a modified "quantum fountain" employing the valence band, a strategy that may be applied to many other materials.
As part of the Complex Terrain Dual Tracer Experiments performed in support of the LYNM program, a swept-wavelength external cavity quantum cascade laser (swept-ECQCL) remote detection system was deployed to measure chemical plume propagation with high temporal resolution. The swept-ECQCL remote detection technology was initially developed at PNNL, and is now under further development at Opticslah, LLC under SBIR funding from DOE (DOE SBIR Phase I Project DE-SC0019855, Remote Detection Technologies, Program Manager Chris Ramos). The swept-ECQCL technology provides a single-frequency infrared laser source which is rapidly scanned over a large wavelength range to measure the infrared absorption of gases, liquids, or solids. Analysis of the measured infrared absorption spectrum is used to detect, identify, and quantify the chemical species which are present. While most previous laser-based techniques used small wavelength tuning ranges to measure only a few isolated spectral lines of a few species, the swept-ECQCL provides the large tuning range needed to measure multiple species simultaneously, and to detect broad absorption features from large molecules or condensed phase materials. In addition, the swept-ECQCL systems have high enough spectral resolution and sensitivity to measure narrow lines of small molecules and determine isotope ratios. The remote detection system for gas plumes is based on the swept-ECQCL technology, and consists of a swept-ECQCL source, infrared detector, control electronics, and beam transmitting and alignment optics. The remote detection system directs the infrared output of the swept-ECQCL to a target retro reflector typically located at ~10-10,000 m distance. The swept-ECQCL wavelength is varied continuously over a large wavelength range (>1000 nm) at rates up to 1000 Hz. The swept ECQCL light reflected from the remote target is collected and focused onto an infrared photodetector. By measuring the detector signal continuously as the swept-ECQCL wavelength is varied, a time-series of absorption spectra are measured for the gases along the beam line of-sight. Based on analysis and fitting of the measured absorption spectra, the time-dependent chemical concentrations of species are determined. Multiple species and mixtures can be detected simultaneously, for all species with absorption features above the sensor noise floor. The sensor output is thus a continuous, high-speed record of identified chemicals along with their concentrations and isotope ratios of interest. The high-speed operation enables low-noise operation in conditions of atmospheric turbulence and allows tracking of fluctuating concentrations in transient chemical plumes as needed for reliable remote detection applications. All components operate with minimal cooling requirements and no cryogens are needed. In addition, the output infrared light is invisible with an intensity below the maximum permissible exposure (MPE) threshold of 100 mW/cm2 for these infrared wavelengths and thus eye safe. The measurement concept for plume detection using the swept-ECQCL remote detection system is as follows. The ECQCL beam is directed toward a remote retro-reflector, which reflects the beam back to the ECQCL system where it is focused onto an infrared photodetector. The line-of-sight from the ECQCL system to the retro-reflector defines the measurement path. The detected infrared signal is recorded continuously and detects the absorption of molecular species along the measurement path. Before a plume release, the system measures absorption from atmospheric constituents, which in this LWIR band consist primarily of lines from H 2 O and CO 2 , with additional weaker absorption from N 2 O, NH 3 , and O 3 possibly contributing. The system then measures any changes in absorption due to the tracer compounds when they enter the measurement path. The shape of absorption features is used to distinguish and identify the different tracer compounds, and the strength of the absorption is used to determine the path-integrated concentration – also called the column density.
Mid-infrared semiconductor lasers have emerged as indispensable compact coherent sources for military and commercial applications. While much of the historical emphasis has been on maximizing the output power and/or spectral purity, a recent new focus has been on engineering these lasers to operate as optical frequency combs (OFCs) for broadband real-time spectroscopy. In particular, the combination of low-drive-power and broad gain bandwidth has made interband cascade laser (ICL) OFCs an attractive complement to quantum cascade laser OFCs operating at longer wavelengths. Moreover, ICL combs can potentially be incorporated into fully-integrated dual-comb spectrometers that employ fast, room-temperature IC photodetectors processed on the same chip.However, the high refractive index of the ICL’s GaSb substrate poses some challenges to the optical waveguiding. Because the modal index is considerably lower than that of the substrate, the optical field can penetrate the bottom cladding layer and leak into the GaSb, inducing wavelength-dependent interference that modifies the gain and group velocity dispersion (GVD) profiles. Even when the effect on lasing threshold is small, the comb properties can be adversely affected. Using the sub-threshold Fourier transform technique, we studied ICL combs with various ridge widths, substrate thicknesses, and center wavelengths. This allowed us to evaluate the effects of modal leakage on the GVD. We find that the resonant nature of the substrate modes induces oscillations, which affect both the spectral bandwidth and the phase-locking properties above threshold. Strategies to mitigate the GVD’s undesired and unpredictable spectral variation will be presented.
Advanced instrumentation and sensing methods are the key factor in the determination of many climate science research problems. In this Phase I STTR a laser-based diagnostic system for atmospheric temperature and water concentrations measurements was developed, this system, HALOS – High Altitude Laser Optical Sensor, employs a mid-infrared (MIR) quantum cascade laser (QCL) of the distributed feedback variety (DFB) powered by a 100 kHz rep rate ramp modulated current profile which enables spectral profiling. Measurements made during Phase I showed that HALOS can surpass the available hygrometers refresh rates while offering superior accuracy (<4%) from the low Frost Point (Tfrost) of -110°C to dew points (Tdew) at 35°C while being able to encompass sub ppm concentration at altitude and supersaturated conditions at ground level. Readings from HALOS include temperature sensitivity on the order of 0.2°C and absolute humidity sensitivity (AH) on the order of 0.010 μmol/m 3 (0.18 mg/m 3 ) at a data output rate exceeding 1 kHz. HALOS can be easily integrable in existing Department of Energy (DOE) or National Oceanic and Atmospheric Administration (NOAA) conventional or remote operated aircraft having either a fixed or rotary wing.