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Stroboscopic Interferometer for Measuring Mirror Vibrations

Stroboscopic interferometry is a technique for measuring the modes of vibration of mirrors that are lightweight and, therefore, unavoidably flexible. The technique was conceived especially for modal characterization of lightweight focusing mirror segments to be deployed in outer space; however, the technique can be applied to lightweight mirrors designed for use on Earth as well as the modal investigation of other optical and mechanical structures. To determine the modal structure of vibration of a mirror, it is necessary to excite the mirror by applying a force that varies periodically with time at a controllable frequency. The excitation can utilize sinusoidal, square, triangular, or even asynchronous waveforms. Because vibrational modes occur at specific resonant frequencies, it is necessary to perform synchronous measurements and sweep the frequency to locate the significant resonant modes. For a given mode it is possible to step the phase of data acquisition in order to capture the modal behavior over a single cycle of the resonant frequency. In order to measure interferometrically the vibrational response of the mirror at a given frequency, an interferometer must be suitably aligned with the mirror and adjustably phase-locked with the excitation signal. As in conventional stroboscopic photography, the basic idea in stroboscopic interferometry is to capture an image of the shape of a moving object (in this case, the vibrating mirror) at a specified instant of time in the vibration cycle. Adjusting the phase difference over a full cycle causes the interference fringes to vary over the full range of motion for the mode at the excitation frequency. The interference-fringe pattern is recorded as a function of the phase difference, and, from the resulting data, the surface shape of the mirror for the given mode is extracted. In addition to the interferometer and the mirror to be tested, the equipment needed for stroboscopic interferometry includes an arbitrary-function generator (that is, a signal generator), an oscilloscope, a trigger filter, and an advanced charge-coupled-device (CCD) camera. The optical components are positioned to form a pupil image of the mirror under test on the CCD chip, so that the interference pattern representative of the instantaneous mirror shape is imaged on the CCD chip.

Stahl, H. Philip

Progress in the Fabrication and Testing of Telescope Mirrors for the James Webb Space Telescope

The telescope of the James Webb Space Telescope (JWST) is an f/20, three mirror anastigmat design, passively cooled (40K) in an L2 orbit. The design provides diffraction limited performance (Strehl > or = 0.8) at .=2 m. To fit within the launch vehicle envelope (Arianne V), the 6.6 meter primary mirror and the secondary mirror support structure are folded for launch, then deployed and aligned in space. The primary mirror is composed of 18 individual, 1.3 meter (flat flat) hexagonal segments, each adjustable in seven degrees of freedom (six rigid body + radius of curvature) provided by a set of high precision actuators. The actuated secondary mirror (approx.0.74m) is similarly positioned in six degrees of rigid body motion. The approx..70x.51m, fixed tertiary and approx. 0.17m, flat fine steering mirror complete the telescope mirror complement. The telescope is supported by a composite structure optimized for performance at cryogenic temperatures. All telescope mirrors are made of Be with substantial light-weighting (21 kg for each 1.3M primary segment). Additional Be mounting and supporting structure for the high precision (approx.10nm steps) actuators are attached to the primary segments and secondary mirror. All mirrors undergo a process of thermal stabilization to reduce stress. An extensive series of interferometric measurements guide each step of the polishing process. Final polishing must account for any deformation between the ambient temperature of polishing and the cryogenic, operational temperature. This is accomplished by producing highly precise, cryo deformation target maps of each surface which are incorporated into the final polishing cycle. All flight mirrors have now completed polishing, coating with protected Au and final cryo testing, and the telescope is on track to meet all system requirements. We here review the measured performance of the component mirrors and the predicted performance of the flight telescope.

Bowers, Charles

LUTE primary mirror materials and design study report

The major objective of the Lunar Ultraviolet Telescope Experiment (LUTE) Primary Mirror Materials and Design Study is to investigate the feasibility of the LUTE telescope primary mirror. A systematic approach to accomplish this key goal was taken by first understanding the optical, thermal, and structural requirements and then deriving the critical primary mirror-level requirements for ground testing, launch, and lunar operations. After summarizing the results in those requirements which drove the selection of material and the design for the primary mirror are discussed. Most important of these are the optical design which was assumed to be the MSFC baseline (i.e. 3 mirror optical system), telescope wavefront error (WFE) allocations, the telescope weight budget, and the LUTE operational temperature ranges. Mechanical load levels, reflectance and microroughness issues, and options for the LUTE metering structure were discussed and an outline for the LUTE telescope sub-system design specification was initiated. The primary mirror analysis and results are presented. The six material substrate candidates are discussed and four distinct mirror geometries which are considered are shown. With these materials and configurations together with varying the location of the mirror support points, a total of 42 possible primary mirror designs resulted. The polishability of each substrate candidate was investigated and a usage history of 0.5 meter and larger precision cryogenic mirrors (the operational low end LUTE temperature of 60 K is the reason we feel a survey of cryogenic mirrors is appropriate) that were flown or tested are presented.

Ruthven, Greg

Fabrication Methods for Adaptive Deformable Mirrors

Previously, it was difficult to fabricate deformable mirrors made by piezoelectric actuators. This is because numerous actuators need to be precisely assembled to control the surface shape of the mirror. Two approaches have been developed. Both approaches begin by depositing a stack of piezoelectric films and electrodes over a silicon wafer substrate. In the first approach, the silicon wafer is removed initially by plasmabased reactive ion etching (RIE), and non-plasma dry etching with xenon difluoride (XeF2). In the second approach, the actuator film stack is immersed in a liquid such as deionized water. The adhesion between the actuator film stack and the substrate is relatively weak. Simply by seeping liquid between the film and the substrate, the actuator film stack is gently released from the substrate. The deformable mirror contains multiple piezoelectric membrane layers as well as multiple electrode layers (some are patterned and some are unpatterned). At the piezolectric layer, polyvinylidene fluoride (PVDF), or its co-polymer, poly(vinylidene fluoride trifluoroethylene P(VDF-TrFE) is used. The surface of the mirror is coated with a reflective coating. The actuator film stack is fabricated on silicon, or silicon on insulator (SOI) substrate, by repeatedly spin-coating the PVDF or P(VDFTrFE) solution and patterned metal (electrode) deposition. In the first approach, the actuator film stack is prepared on SOI substrate. Then, the thick silicon (typically 500-micron thick and called handle silicon) of the SOI wafer is etched by a deep reactive ion etching process tool (SF6-based plasma etching). This deep RIE stops at the middle SiO2 layer. The middle SiO2 layer is etched by either HF-based wet etching or dry plasma etch. The thin silicon layer (generally called a device layer) of SOI is removed by XeF2 dry etch. This XeF2 etch is very gentle and extremely selective, so the released mirror membrane is not damaged. It is possible to replace SOI with silicon substrate, but this will require tighter DRIE process control as well as generally longer and less efficient XeF2 etch. In the second approach, the actuator film stack is first constructed on a silicon wafer. It helps to use a polyimide intermediate layer such as Kapton because the adhesion between the polyimide and silicon is generally weak. A mirror mount ring is attached by using adhesive. Then, the assembly is partially submerged in liquid water. The water tends to seep between the actuator film stack and silicon substrate. As a result, the actuator membrane can be gently released from the silicon substrate. The actuator membrane is very flat because it is fixed to the mirror mount prior to the release. Deformable mirrors require extremely good surface optical quality. In the technology described here, the deformable mirror is fabricated on pristine substrates such as prime-grade silicon wafers. The deformable mirror is released by selectively removing the substrate. Therefore, the released deformable mirror surface replicates the optical quality of the underlying pristine substrate.

Toda, Risaku

Gondola for High Altitude Planetary Science (GHAPS) Telescope Secondary Mirror Positioning Hexapod Issues and Alternatives

Active positioning of the GHAPS secondary telescope mirror is desired to correct for rigid body deflections due to temperature variations and gravity sag in the telescope structure that may impact optical performance. The current design concept for the secondary mirror mount uses a Commercial-Off -the-Shelf hexapod for mirror positioning and fine adjustment. The Hexapod specification states that motions as small as 0.1 microns along the optical axis and 2 microns perpendicular to the optical axis will cause optical aberrations that will require correction by repositioning the secondary mirror. In addition, the secondary mirror mount and positioning system must survive a 15g shock of parachute opening and landing during the instrument recovery operation. The secondary mirror positioning system must operate at a minimum specified temperature of -50 C. The telescope operates in the IR and the secondary mirror mount and positioning device is in the metering path between the primary and secondary mirrors. I2R losses in positioning system actuator devices, which may cause heating of the positioning system and secondary mirror, must be minimized due to the previously mentioned alignment sensitivity and the viewing spectrum of interest. The GHAPs project was cancelled on June 30, 2017. The purpose of this study is to address some of the issues identified with the hexapod secondary mirror positioning system and identify alternative approaches. This information may be used if the project is re-started at a later date.

Gondola Mirror Hexapo

Design of optical mirror structures

The structural requirements for large optical telescope mirrors was studied with a particular emphasis placed on the three-meter Large Space Telescope primary mirror. Analysis approaches through finite element methods were evaluated with the testing and verification of a number of element types suitable for particular mirror loadings and configurations. The environmental conditions that a mirror will experience were defined and a candidate list of suitable mirror materials with their properties compiled. The relation of the mirror mechanical behavior to the optical performance is discussed and a number of suitable design criteria are proposed and implemented. A general outline of a systematic method to obtain the best structure for the three-meter diffraction-limited system is outlined. Finite element programs, using the STRUDL 2 analysis system, were written for specific mirror structures encompassing all types of active and passive mirror designs. Parametric studies on support locations, effects of shear deformation, diameter to thickness ratios, lightweight and sandwich mirror configurations, and thin shell active mirror needs were performed.

Soosaar, K.

Analysis of the dynamics of thin primary mirrors for large astronomical telescopes

The NASTRAN structural analysis program was used to investigate the dynamic properties of thin primary mirrors suitable for use in large orbiting astronomical telescopes. An analysis is included of the mode shapes and modal frequencies for several thin, homogeneous, isotropic mirrors. Typical cases include two different mirror diameters, two different diameter-to-thickness ratios, and both a mirror without and a mirror with a central hole that is 22 percent of the mirror diameter. The finite-element structural model is evaluated by comparing the NASTRAN generated results with theoretical values for a simply supported, flat, circular mirror. The same model is then used for evaluating the spherical mirrors. The mode shapes and frequencies of a 0.762-meter-diameter mirror with a 60-to-1 diameter-to-thickness ratio and a three-point rigid kinematic (not overconstrained) mount are calculated and plotted for comparison with results obtained previously from the SAMIS structural analysis program for this same mirror. A static analysis is also shown for comparison with experimentally obtained influence coefficients.

Ostroff, A. J.

Primary mirror and mount technology for the Stratospheric Observatory for Infrared Astronomy (SOFIA) telescope

Candidate technologies for a lightweight primary mirror for the SOFIA telescope are evaluated for both mirror blank fabrication and polishing. Two leading candidates for the type mirror blank are considered: the frit-bonded, structured form, and the thin meniscus form. The feasible mirror is required to be very lightweight with an areal density of approximately 100 kg/sq m, have an f/ratio near 1.0, and have surface quality that permits imaging in the visible as well as the infrared. Also considered are the results of a study conducted to assess the feasibility of designing a suitable mounting system for the primary mirror. The requirements for the mount design are given both in terms of the environmental conditions and the expected optical performance. PATRAN and NASTRAN programs are used to model mirror and mounting. The sandwich-type mirror made of ultra low expansion silica with square cells in the core, is modeled using equivalent solid elements for the core. The design study produces primary mirror surface deflections in 1g as a function of mirror elevation angles. The surface is analyzed using an optical analysis program, FRINGE, to give a prediction of the mirror optical performance. Results from this analysis are included.

Melugin, Ramsey K.

SiC lightweight telescopes for advanced space applications. I - Mirror technology

A SiC based telescope is an extremely attractive emerging technology which offers the lightweight and stiffness features of beryllium, the optical performance of glass to diffraction limited visible resolution, superior optical/thermal stability to cryogenic temperatures, and the cost advantages of an aluminum telescope. SSG has developed various SiC mirrors with and without a silicon coating and tested these mirrors over temperature ranges from +50 C to -250 C. Our test results show less than 0.2 waves P-V in visible wavefront change and no hysteresis over this wide temperature range. Several SSG mirrors are representative of very lightweight SiC/Si mirrors including (1) a 9 cm diameter, high aspect ratio mirror weighing less than 30 grams and (2) a 23 cm diameter eggcrated mirror weighing less than 400 grams. SSG has also designed and analyzed a 0.6 meter SiC based, on axis, three mirror reimaging telescope in which the primary mirror weighs less than 6 kg and a 0.5 meter GOES-like scan mirror. SSG has also diamond turned several general aspheric SiC/Si mirrors with excellent cryo optical performance.

Anapol, Michael I.

Performance of The Far Ultraviolet Spectroscopic Explorer Mirror Assemblies

The Far Ultraviolet Spectroscopic Explorer is a NASA astrophysics satellite which produces high-resolution spectra in the far-ultraviolet (90.5-118.7 nm bandpass) using a high effective area and low background detectors. The observatory was launched on its three-year mission from Cape Canaveral Air Station on 24 June 1999. The instrument contains four coaligned, normal incidence, off-axis parabolic mirrors which illuminate separate Rowland circle spectrograph channels equipped with holographically ruled diffraction gratings and delay line microchannel plate detectors. The telescope mirrors have a 352 x 387 mm aperture and 2245 mm focal length and are attached to actuator assemblies, which provide on-orbit, tip, tilt, and focus control. Two mirrors are coated with silicon carbide (SiC) and two are coated with lithium fluoride over aluminum (Al:LiF). We describe mirror assembly in-flight optical and mechanical performance. On-orbit measurements of the far-ultraviolet point spread function associated with each mirror are compared to expectations based on pre-flight laboratory measurements and modeling using the Optical Surface Analysis Code and surface metrology data. On-orbit imaging data indicate that the mirrors meet their instrument-level requirement of 50 percent and 95 percent slit transmission for the high- and mid-resolution spectrograph entrance slits, respectively. The degradation of mirror reflectivity during satellite integration and test is also discussed. The far-ultraviolet reflectivity of the SiC- and AlLiF-coated mirrors decreased about six percent and three percent, respectively, between coating and launch. Each mirror is equipped with three actuators, which consist of a stepper motor driving a ball screw via a two-stage planetary gear train. We also discuss the mechanical performance of the mirror assemblies, including actuator performance and thermal effects.

Ohi, Raymond G.

Surface Figure Measurement at 20K: Silicon Carbide and Cesic Mirrors

This report presents the facility, methods, and results of testing cryogenically-cooled spherical mirrors, using standard phase-shifting interferometry, at the Goddard Space Flight Center (GSFC). Two mirrors were supplied to GSFC by the European Space Technology Center, so that GSFC could render a second, independent cryo-measurement of their surface figures at 20K. These mirrors, produced by Galileo Avionica and its partners, demonstrate the technology of silicon carbide and SiC-composite lightweighted mirrors, designed for high accuracy (10 nm rms surface figure error) at both room temperature and 20K. The two mirrors provided for testing at GSFC include one made of sintered silicon carbide (mirror blank by Bettini), and a second made of the C/Si/SiC composite known as Cesic (supplied by ECM). Both mirrors are f/2 spheres with 150 mm clear aperture, and with integral mounts. At GSFC, the mirrors will be measured first at at room temperature, making use of standard techniques, with a predicted uncertainty of 2 nm. Then each mirror will be tested in the cryostat, down to 20K: first freely supported and, second, mounted to a Cesic plate that models a Cesic optical bench. The uncertainty of the resultant surface figure error is predicted to be about 5 nm rms. Details of the uncertainty budget are discussed in a related poster. GSFC's techniques and results can be usefully compared to the measurements performed on the same two mirrors by and for Galileo Avionica, who used a somewhat different test configuration and alignment approach.

Blake, Peter

A Novel Concept for a Deformable Membrane Mirror for Correction of Large Amplitude Aberrations

Very large, light weight mirrors are being developed for applications in space. Due to launch mass and volume restrictions these mirrors will need to be much more flexible than traditional optics. The use of primary mirrors with these characteristics will lead to requirements for adaptive optics capable of correcting wave front errors with large amplitude relatively low spatial frequency aberrations. The use of low modulus membrane mirrors actuated with electrostatic attraction forces is a potential solution for this application. Several different electrostatic membrane mirrors are now available commercially. However, as the dynamic range requirement of the adaptive mirror is increased the separation distance between the membrane and the electrodes must increase to accommodate the required face sheet deformations. The actuation force applied to the mirror decreases inversely proportional to the square of the separation distance; thus for large dynamic ranges the voltage requirement can rapidly increase into the high voltage regime. Experimentation with mirrors operating in the KV range has shown that at the higher voltages a serious problem with electrostatic field cross coupling between actuators can occur. Voltage changes on individual actuators affect the voltage of other actuators making the system very difficult to control. A novel solution has been proposed that combines high voltage electrodes with mechanical actuation to overcome this problem. In this design an array of electrodes are mounted to a backing structure via light weight large dynamic range flextensional actuators. With this design the control input becomes the separation distance between the electrode and the mirror. The voltage on each of the actuators is set to a uniform relatively high voltage, thus the problem of cross talk between actuators is avoided and the favorable distributed load characteristic of electrostatic actuation is retained. Initial testing and modeling of this concept demonstrates that this is an attractive concept for increasing the dynamic range capability of electrostatic deformable mirrors.

Moore, Jim

Optically Driven Deformable Mirrors

Optically driven deformable mirrors may eventually supplant electrically driven deformable mirrors in some adaptive-optics and active-optics applications. Traditionally, the mirror facets in electrically driven deformable mirrors are actuated, variously, by means of piezoelectric, electrostrictive, microelectromechanical, liquid-crystal, or thermal devices. At least one such device must be dedicated to each facet, and there must be at least one wire carrying a control or drive signal to the device. If a deformable mirror comprises many (e.g., thousands) of facets, then wiring becomes a major problem for design, and the problem is compounded in cases of piezoelectric or other actuators for which high drive voltages are required. In contrast, in optically driven mirrors, the wiring problem is eliminated. The basic principle of actuation of an optically driven deformable mirror is to use a laser beam to actuate a material. For example, a laser beam can be used to heat a material to make the material thermally expand to displace a mirror facet. In an experiment to demonstrate this principle, the actuator was a Golay cell having a diameter of approximately equal to 6 mm and a length of approximately equal to 10 mm. The beam from a laser diode was aimed at an absorber in the cell, thereby heating the gas in the cell. A mirror mounted on a 12.5-micron-thick polyethylene terephthalate diaphragm at one end of the cell became displaced as the gas expanded against the diaphragm. In one representative pair of experiments at a laser beam power of 0.23 W, the beam was mechanically chopped at frequencies of 1 and 5 Hz. The mirror exhibited corresponding oscillating displacements having amplitudes of 373 and 83 micron, respectively

Hemmati, Hamid

Gauges for Highly Precise Metrology of a Compound Mirror

Three optical gauges have been developed for guiding the assembly and measuring precisely the reflecting surfaces of a compound mirror that comprises a corner-cube retroreflector glued in a hole on a flat mirror. In the specific application for which the gauges were developed, the compound mirror is part of a siderostat in a stellar interferometer. The flat-mirror portion of the compound mirror is the siderostat mirror; the retroreflector portion of the compound mirror is to be used, during operation of the interferometer, to monitor the location of the siderostat mirror surface relative to other optical surfaces of the interferometer. Nominally, the optical corner of the retroreflector should lie precisely on the siderostat mirror surface, but this precision cannot be achieved in fabrication: in practice, there remains some distance between the optical corner and the siderostat mirror surface. For proper operation of the interferometer, it is required to make this distance as small as possible and to know this distance within 1 nm. The three gauges make it possible to satisfy these requirements.

Gursel, Yekta

Design and Analysis of Mirror Modules for IXO and Beyond

Advancements in X-ray astronomy demand thin, light, and closely packed thin optics which lend themselves to segmentation of the annular mirrors and, in turn, a modular approach to the mirror design. The functionality requirements of such a mirror module are well understood. A baseline modular concept for the proposed International X-Ray Observatory (IXO) Flight Mirror Assembly (FMA) consisting of 14,000 glass mirror segments divided into 60 modules was developed and extensively analyzed. Through this development, our understanding of module loads, mirror stress, thermal performance, and gravity distortion have greatly progressed. The latest progress in each of these areas is discussed herein. Gravity distortion during horizontal X-ray testing and on-orbit thermal performance have proved especially difficult design challenges. In light of these challenges, fundamental trades in modular X-ray mirror design have been performed. Future directions in module X-ray mirror design are explored including the development of a 1.8 m diameter FMA utilizing smaller mirror modules. The effect of module size on mirror stress, module self-weight distortion, thermal control, and range of segment sizes required is explored with advantages demonstrated from smaller module size in most cases.

McClelland, Ryan S.

Nanolaminate Mirrors With "Piston" Figure-Control Actuators

Efforts are under way to develop a special class of thin-shell curved mirrors for high-resolution imaging in visible and infrared light in a variety of terrestrial or extraterrestrial applications. These mirrors can have diameters of the order of a meter and include metallic film reflectors on nanolaminate substrates supported by multiple distributed piezoceramic gpiston h-type actuators for micron-level figure control. Whereas conventional glass mirrors of equivalent size and precision have areal mass densities between 50 and 150 kg/sq m, the nanolaminate mirrors, including not only the reflector/ shell portions but also the actuators and the backing structures needed to react the actuation forces, would have areal mass densities that may approach .5 kg/m2. Moreover, whereas fabrication of a conventional glass mirror of equivalent precision takes several years, the reflector/shell portion of a nanolaminate mirror can be fabricated in less than a week, and its actuation system can be fabricated in 1 to 2 months. The engineering of these mirrors involves a fusion of the technological heritage of multisegmented adaptive optics and deformable mirrors with more recent advances in metallic nanolaminates and in mathematical modeling of the deflections of thin, curved shells in response to displacements by multiple, distributed actuators. Because a nanolaminate shell is of the order of 10 times as strong as an otherwise identical shell made of a single, high-strength, non-nanolaminate metal suitable for mirror use, a nanolaminate mirror can be made very thin (typically between 100 and 150 m from the back of the nanolaminate substrate to the front reflecting surface). The thinness and strength of the nanolaminate are what make it possible to use distributed gpiston h-type actuators for surface figure control with minimal local concentrated distortion (called print-through in the art) at the actuation points.

Lowman, Andrew

A Piezoelectric Unimorph Deformable Mirror Concept by Wafer Transfer for Ultra Large Space Telescopes

Future concepts of ultra large space telescopes include segmented silicon mirrors and inflatable polymer mirrors. Primary mirrors for these systems cannot meet optical surface figure requirements and are likely to generate over several microns of wavefront errors. In order to correct for these large wavefront errors, high stroke optical quality deformable mirrors are required. JPL has recently developed a new technology for transferring an entire wafer-level mirror membrane from one substrate to another. A thin membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymers. The measured peak-to-valley surface error of a transferred and patterned membrane (1 mm x 1 mm x 0.016 mm) is only 9 nm. The mirror element actuation principle is based on a piezoelectric unimorph. A voltage applied to the piezoelectric layer induces stress in the longitudinal direction causing the film to deform and pull on the mirror connected to it. The advantage of this approach is that the small longitudinal strains obtainable from a piezoelectric material at modest voltages are thus translated into large vertical displacements. Modeling is performed for a unimorph membrane consisting of clamped rectangular membrane with a PZT layer with variable dimensions. The membrane transfer technology is combined with the piezoelectric bimorph actuator concept to constitute a compact deformable mirror device with a large stroke actuation of a continuous mirror membrane, resulting in a compact A0 systems for use in ultra large space telescopes.

continuous mirror

Multilayer Active Shell Mirrors for Space Telescopes

A novel active mirror technology based on carbon fiber reinforced polymer (CFRP) substrates and replication techniques has been developed. Multiple additional layers are implemented into the design serving various functions. Nanolaminate metal films are used to provide a high quality reflective front surface. A backing layer of thin active material is implemented to provide the surface-parallel actuation scheme. Printed electronics are used to create a custom electrode pattern and flexible routing layer. Mirrors of this design are thin (< 1.0 mm), lightweight (2.7 kg/m2 ), and have large actuation capabilities. These capabilities, along with the associated manufacturing processes, represent a significant change in design compared to traditional optics. Such mirrors could be used as lightweight primaries for small CubeSat-based telescopes or as meter-class segments for future large aperture observatories. Multiple mirrors can be produced under identical conditions enabling a substantial reduction in manufacturing cost and complexity. An overview of the mirror design and manufacturing processes is presented. Predictions on the actuation performance have been made through finite element simulations demonstrating correct abilities on the order of 250−300× for astigmatic modes with only 41 independent actuators. A description of the custom metrology system used to characterize the active mirrors is also presented. The system is based on a Reverse Hartmann test and can accommodate extremely large deviations in mirror figure (> 100 µm PV) down to sub-micron precision. The system has been validated against several traditional techniques including photogrammetry and interferometry. The mirror performance has been characterized using this system, as well as closed-loop figure correction experiments on 150 mm dia. prototypes. The mirrors have demonstrated post-correction figure accuracies of 200 nm RMS (two dead actuators limiting performance).

Reverse Hartmann