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At least 73 records · Page 4

Broad beam ion source operation with four common gases

A Kaufman-type broad beam ion source, used for sputtering and etching purposes, has been operated with Ar, Kr, O2 and N2 gas inputs over a wide range of beam energies (200-1200 eV) and gas flow rates (1-10 sccm). The maximum ion beam current density for each gas saturates at about 2.5 mA/sq cm as gas flow is increased. The discharge threshold voltage necessary to produce a beam and the beam efficiency (beam current/molecular current), however, varied considerably. Kr had the lowest threshold and highest efficiency, Ar next, then N2 and O2. The ion beam current varied only weakly with beam energy for low gas flow rates, but showed a factor of two increase when the gas flow was higher.

Pak, S.↗

Ion Sources and Acceleration Mechanisms Inferred from Local Distribution Functions

This study investigates the sources of the ions up the complex and nonisotropic H(+) velocity distribution functions observed by the Geotail spacecraft on May 23, 1995, in the near-Earth magnetotail region and recently reported by Frank et al. [1996]. A distribution function observed by Geotail at -10 R(sub E) downtail is used as input for the large scale kinetic (LSK) technique to follow the trajectories of approximately 90,000 H(+) ions backward in time. Time-dependent magnetic and electric fields are taken from a global magnetohydrodynamic (MHD) simulation of the magnetosphere and its interactions with appropriate solar wind and IMF conditions. The ion population described by the Geotail distribution function was found to consist of a mixture of particles originating from three distinct sources: the ionosphere, the low latitude boundary layer (LLBL), and the high latitude plasma mantle. Ionospheric particles had direct access along field lines to Geotail, and LLBL ions convected adiabatically to the Geotail location. Plasma mantle ions, on the other hand, exhibited two distinct types of behavior. Most near-Earth mantle ions reached Geotail on adiabatic orbits, while distant mantle ions interacted with the current sheet tailward of Geotail and had mostly nonadiabatic orbits. Ions from the ionosphere, the LLBL, and the near-Earth mantle were directly responsible for the well-separated, low energy structures easily discernible in the observed and modeled distribution functions. Distant mantle ions formed the higher energy portion of the Geotail distribution. Thus, we have been successful in extracting useful information about particle sources, their relative contribution to the measured distribution and the acceleration processes that affected particle transport during this time.

Ashour-Abdalla, M.↗

Neutral ion sources in precision manufacturing

Ion figuring of optical components is a relatively new technology that can alleviate some of the problems associated with traditional contact polishing. Because the technique is non contacting, edge distortions and rib structure print through do not occur. This initial investigation was aimed at determining the effect of ion figuring on surface roughness of previously polished or ductile ground ceramic optical samples. This is the first step in research directed toward the combination of a pre-finishing process (ductile grinding or polishing) with ion figuring to produce finished ceramic mirrors. The second phase of the project is focusing on the development of mathematical algorithms that will deconvolve the ion beam profile from the surface figure errors so that these errors can be successfully removed from the optical components. In the initial phase of the project, multiple, chemical vapor deposited silicon carbide (CVD SiC) samples were polished or ductile ground to specular or near-specular roughness. These samples were then characterized to determine topographic surface information. The surface evaluation consisted of stylus profilometry, interferometry, and optical and scanning electron microscopy. The surfaces, were ion machined to depths from 0-5 microns. The finished surfaces were characterized to evaluate the effects of the ion machining process with respect to the previous processing methods and the pre-existing subsurface damage. The development of the control algorithms for figuring optical components has been completed. These algorithms have been validated with simulations and future experiments have been planned to verify the methods. This paper will present the results of the initial surface finish experiments and the control algorithms simulations.

Fawcett, Steven C.↗

Industrial ion source technology

An analytical model was developed to describe the development of a coned surface texture with ion bombardment and simultaneous deposition of an impurity. A mathematical model of sputter deposition rate from a beveled target was developed in conjuction with the texturing models to provide an important input to that model. The establishment of a general procedure that will allow the treatment of manay different sputtering configurations is outlined. Calculation of cross sections for energetic binary collisions was extened to Ar, Kr.. and Xe with total cross sections for viscosity and diffusion calculated for the interaction energy range from leV to 1000eV. Physical sputtering and reactive ion etching experiments provided experimental data on the operating limits of a broad beam ion source using CF4 as a working gas to produce reactive species in a sputtering beam. Magnetic clustering effects are observed when Al is seeded with Fe and sputtered with Ar(?) ions. Silicon was textured at a micron scale by using a substrate temperature of 600 C.

Kaufman, H. R.↗

Hydrogen hollow cathode ion source

A source of hydrogen ions is disclosed and includes a chamber having at one end a cathode which provides electrons and through which hydrogen gas flows into the chamber. Screen and accelerator grids are provided at the other end of the chamber. A baffle plate is disposed between the cathode and the grids and a cylindrical baffle is disposed coaxially with the cathode at the one end of the chamber. The cylindrical baffle is of greater diameter than the baffle plate to provide discharge impedance and also to protect the cathode from ion flux. An anode electrode draws the electrons away from the cathode. The hollow cathode includes a tubular insert of tungsten impregnated with a low work function material to provide ample electrons. A heater is provided around the hollow cathode to initiate electron emission from the low work function material.

Mirtich, M. J., Jr.↗

Ion source design for industrial applications

The more frequently used design techniques for the components of broad-beam electron bombardment ion sources are discussed. The approach used emphasizes refractory metal cathodes and permanent-magnet multipole discharge chambers. Design procedures and sample calculations are given for the discharge chamber, ion optics, the cathodes, and the magnetic circuit. Hardware designs are included for the isolator, cathode supports, anode supports, pole-piece assembly, and ion-optics supports. A comparison is made between two-grid and three-grid optics. The designs presented are representative of current technology and are adaptable to a wide range of configurations.

Kaufman, H. R.↗

Loss of atomic oxygen in mass spectrometer ion sources.

A gas beam consisting of a mixture of atomic and molecular oxygen has been directed at the ion source of a mass spectrometer like those used in sounding rockets for determining the neutral composition of the lower thermosphere. The loss of atomic oxygen on mass spectrometer surfaces was evaluated by flagging the beam in several ways and comparing the experimental results with predicted values. The results obtained suggest that in rocket flights using similar instruments the atomic oxygen densities computed assuming no-loss conditions may be low by a factor of 2.5. Studies made using a beam containing tracer O-18 indicate that carbon dioxide observed when atomic oxygen enters the source is formed in a reaction involving atomic oxygen from the beam and carbon monoxide from the surfaces bombarded.

Lake, L. R.↗

Effects on H(-) production in a multicusp ion source by mixture of H2 with H2O, NH3, CH4, N2H4, and SF6

Effects of H(-) production in a multicusp ion source are measured by separately mixing with hydrogen small amounts (0.33-10 percent) of water, ammonia, methane, and hydrazine these are molecules which produce large amounts of H(-) via dissociative attachment (DA) resonances at higher electron energies. The mixing was done in a separate reservoir, with careful measurement of individual pressures. Experimental enhancements of 1.4 and less were observed, whereas calculated enhancements, using accurate DA cross sections for ground-state H2, should have produced factors of 1.5, 3.0, 1.3, and 2.4 enhancements for water, ammonia methane, and hydrazine, respectively, at a mean electron energy of 1.0 eV in the extraction region. The difference is accounted for by including, in the enhancement calculation, vibrationally and rotationally excited H2 molecules, with v-double prime = 5-11, and J-double prime = 0-5, and the large DA cross sections for the excited H2 (v-double prime, J-double prime). The relative populations of H2 (v-double prime, J-double prime) thus obtained are found to be substantially smaller than those predicted by theoretical calculations. The effect on H(-) current was also studied by mixing small amounts of SF6 with H2. A 1.5 percent mixture was found to reduce the H(-) output by one half.

Orient, O. J.↗

A thermosphere composition measurement using a quadrupole mass spectrometer with a side energy focussing quasi-open ion source

The atomic oxygen concentration in the altitude range 130 to 240 km was determined through the use of a quadrupole spectrometer with a strongly focussing ion source. The instrument is used in the Thermosphere Probe in a manner that greatly increases the proportion of measured oxygen ions that have not experienced a surface collision and permits quantitative evaluation of surface recombination and thermalization effects which inevitably enter all spectrometer determinations. The data obtained strengthen the concept that consideration of surface effects is significant in quantifying spectrometer measurements of reactive gases, and tend to be in agreement with von Zahn's recent results.

Niemann, H. B.↗

Improved magnetron cold-cathode ion source

Cold cathode ionization source generates smaller amounts of spurious gases and has a higher sensitivity than commonly used hot-filament ion sources. Photon and X-ray background noise are reduced below detectable levels.

Roehrig, J.↗

The Operation of an Electron-Bombardment Ion Source with Various Gases

The efficiency of the electron-bombardment thrustor is approaching the maximum that can be expected. Desired lifetimes (of the order of 10,000 hr) have not yet been reached, but present knowledge indicates such lifetimes should be obtainable, The simplicity of this thrustor makes it interesting as an ion source for various laboratory experiments. Various gases have been used to determine the ion-chamber and accelerator performance for such applications.

Reader, Paul D.↗

Calculation of plasma properties in ion sources

Simple algebraic equations are developed that can be used to calculate the average primary electron density, the average primary to Maxwellian density ratio, and the average Maxwellian electron temperature in the discharge chamber of a cusped magnetic field ion source. These properties may be calculated as functions of the propellant gas flow rate and the propellant utilization efficiency. Each of the plasma properties calculated using the model agrees well with the corresponding experimental data for both argon and xenon gases over a wide range of propellant flow rates and utilization efficiencies.

Brophy, J. R.↗

Improved Ambient Pressure Pyroelectric Ion Source

The detection of volatile vapors of unknown species in a complex field environment is required in many different applications. Mass spectroscopic techniques require subsystems including an ionization unit and sample transport mechanism. All of these subsystems must have low mass, small volume, low power, and be rugged. A volatile molecular detector, an ambient pressure pyroelectric ion source (APPIS) that met these requirements, was recently reported by Caltech researchers to be used in in situ environments.

Beegle, Luther W.↗

Switching regulator emission control circuit for ion sources

An electron emission control circuit of the switching regulator type operating at 100 kHz has been developed which maintains a constant emission current within 0.1% for a cathode power demand variation of approximately 100%. The power output stage has an efficiency of 67%, and the overall efficiency is 45% when driving a thoria-coated iridium cathode having a nominal resistance at operating temperature of 2.5 ohms. Under optimum conditions, the bus power demand is 1.75 W. The circuit is useful in controlling the electron emission current of ion sources in applications which involve a substantial variation of the cathode work function, such as oxygen partial pressure measurements over a large dynamic range.

Clay, F. P., Jr.↗