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NASA NTRSDate not supplied

On-chip Broadband Load Calibrators for Characterizing Transition-Edge Sensor Bolometers

We describe the design and fabrication of on-chip broadband load calibrators for element-by- element and full circuit characterization of transition-edge sensor (TES) bolometers for cosmic microwave background (CMB) polarimetry. Fabricated in a 4 X 4 grid on a 100 mm silicon wafer, the chips allow systematic testing of individual detector circuit elements without the need for an external blackbody source. This in-situ testing approach provides rapid and efficient characterization of various pixel designs in order to optimize the optical efficiency and control of systematic effects of the detectors. In this work, we demonstrate the on-chip calibrators on the Cosmology Large Angular Scale Surveyor (CLASS) W-band pixels. In particular, we investigate the loss on microstrip transmission lines and measure the performance of various designs of TESs, magic-tees, via-less crossovers, and signal terminations. We also test a filter-bank spectrometer with eight resonators spanning 80 – 105 GHz to characterize the spectral response of circuit elements across the detector bandwidth.

Sumit Dahal↗
NASA NTRSDate not supplied

Performance of a broad-band, high-resolution, transition-edge sensor spectrometer for x-ray astrophysics

Future x-ray astrophysics experiments require multiplexed readout of high-fill-factor, kilo-pixel arrays of transition-edge sensors (TESs), with very high spectral resolution over a broad range of energies. In this paper we report on a prototype kilo pixel array of Mo/Au TESs read out with 8-column by 32-row time-division multiplexing (TDM). This system is being used to demonstrate the critical detector and readout technology for ESA’s Athena X-IFU, and when complete will used to laboratory astrophysics experiments. Our array and TDM readout has demonstrated a combined energy resolution, including > 200 pixels, of: 1.95 eV for Ti-K (4.5 keV), 1.97 eV for Mn-K (5.9 keV), 2.16 eV for Co-Kα (6.9 keV), 2.33 eV for Cu-Kα (8 keV), 3.26 eV for Br-Kα (11.9 keV). The 1 sigma error is  0.01 eV for all spectra. These results meet the broad-band resolution requirements for X-IFU.

Stephen J. Smith↗
NASA NTRS2021

Performance of a broad-band, high-resolution, transition-edge sensor spectrometer for X-ray astrophysics

Future X-ray astrophysics experiments require multiplexed readout of high fill-factor, kilo-pixel arrays of transition-edge sensors (TESs), with very high spectral resolution over a broad range of energies. In this paper we report on a prototype kilo-pixel array of Mo/Au TESs readout with 8-column by 32-row time-division multiplexing (TDM). This system is being used to demonstrate the critical detector and readout technology for ESA’s Athena X-IFU, and when complete will be used in laboratory astrophysics experiments. Our array and TDM readout have demonstrated a combined full-width-at-half-maximum energy resolution, including >200 pixels, of:1.95 eV for Ti-Ka(4.5 keV), 1.97eV for Mn-Ka(5.9 keV), 2.16 eV for Co-Kα(6.9 keV),2.33 eV for Cu-Kα(8 keV), 3.26 eV for Br-Kα(11.9 keV). The 1 sigma statistical errorsare£0.01 eV for all spectra. These results meet the broad-band resolution requirements for X-IFU with margin.

S J Smith↗
NASA NTRS2013

Comparing Transition-Edge Sensor Response Times in a Modified Contact Scheme with Different Support Beams

We present measurements of the thermal conductance, G, and effective time constants, tau, of three transition-edge sensors (TESs) populated in arrays operated from 80-87mK with T(sub C) approximately 120mK. Our TES arrays include several variations of thermal architecture enabling determination of the architecture that demonstrates the minimum noise equivalent power (NEP), the lowest tau and the trade-offs among designs. The three TESs we report here have identical Mo/Cu bilayer thermistors and wiring structures, while the thermal architectures are: 1) a TES with straight support beams of 1mm length, 2) a TES with meander support beams of total length 2mm and with 2 phononfilter blocks per beam, and 3) a TES with meander support beams of total length 2mm and with 6 phonon-filter blocks per beam. Our wiring scheme aims to lower the thermistor normal state resistance R(sub N) and increase the sharpness of the transition alpha=dlogR/dlogT at the transition temperature T(sub C). We find an upper limit of given by (25+/-10), and G values of 200fW/K for 1), 15fW/K for 2), and 10fW/K for 3). The value of alpha can be improved by slightly increasing the length of our thermistors.

SAFARI instrument↗
NASA NTRS2023

Refinement of Transition-Edge Sensor Dimensions for the X-ray Integral Field Unit on ATHENA

At NASA Goddard Space Flight Center, we have previously demonstrated a kilo-pixel array of transition-edge sensor (TES) microcalorimeters capable of meeting the energy resolution requirements of the future X-ray Integral Field Unit (X-IFU) instrument that is being developed for the Advanced Telescope for High ENergy Astrophysics (ATHENA) observatory satellite. The TES design in this array was a square device with side length of 50 μm. Here, we describe studies of TES designs with small variations of the dimensions, exploring lengths, parallel to the current direction, ranging from 75μm to 50μm and widths, perpendicular to the current direction, ranging from 50μm to 15 μm. We describe how these changes impact transition properties, thermal conductance and magnetic field sensitivity. In particular, we show that using a TES with a length of 50μm and width of 30μm may be a promising route to reduce the maximum time-derivative of the TES current in an X-ray pulse and reduce the sensitivity of the TES to magnetic field.

N A Wakeham↗
NASA NTRS2003

A Dry-Etch Process for Low Temperature Superconducting Transition Edge Sensors for Far Infrared Bolometer Arrays

The next generation of ultra-low power bolometer arrays, with applications in far infrared imaging, spectroscopy and polarimetry, utilizes a superconducting bilayer as the sensing element to enable SQUID multiplexed readout. Superconducting transition edge sensors (TES s) are being produced with dual metal systems of superconductinghormal bilayers. The transition temperature (Tc) is tuned by altering the relative thickness of the superconductor with respect to the normal layer. We are currently investigating MoAu and MoCu bilayers. We have developed a dry-etching process for MoAu TES s with integrated molybdenum leads, and are working on adapting the process to MoCu. Dry etching has the advantage over wet etching in the MoAu system in that one can achieve a high degree of selectivity, greater than 10, using argon ME, or argon ion milling, for patterning gold on molybdenum. Molybdenum leads are subsequently patterned using fluorine plasma.. The dry-etch technique results in a smooth, featureless TES with sharp sidewalls, no undercutting of the Mo beneath the normal metal, and Mo leads with high critical current. The effects of individual processing parameters on the characteristics of the transition will be reported.

Allen, Christine A.↗
NASA NTRSDate not supplied

Refinement of the Transition-edge Sensor Design for ATHENA X-IFU

The X-ray Integral Field Unit (X-IFU) instrument on the Advanced Telescope for High ENergy Astrophysics (ATHENA) is baselined to have 2376 transition-edge sensor (TES) microcalorimeter pixels in a single array. The required performance for X-IFU has been demonstrated on a kilo-pixel array of square TES’s with 50 m side length, and this is considered the baseline pixel design. However, over the last few years we have explored small modifications to this design in search of a globally optimized instrument performance. We have previously reported on investigations of extending the length of the TES’s and variations in the number of X-ray absorber support stems. Here we report on investigations of TES designs with a length of 50 m but narrower width. We will discuss the consequence of this on magnetic field sensitivity, resistive transition parameters, spectral performance, and ease of multiplexing. We will also discuss how the number and position of the absorber attachments influences the vibrational modes of the pixels, and the impact this may have on performance. Finally, we will present measurements of more substantial change options of our TES design, including more extreme TES geometries, the use of metal islands or etched holes in the silicon nitride membranes, and the position of wiring to minimize current-induced magnetic field effects. The exploration of all these changes to the design are not only useful for optimizing performance on X-IFU, but also guide our fundamental understanding of the key physics of TES microcalorimeters.

Nick Wakeham↗
NASA NTRS2021

Calibration and Testing of Small High-Resolution Transition Edge Sensor Microcalorimeters With Optical Photons

Pulses of narrow line-width optical photons can be used to calibrate and test sub-2 eV full-width at half-maximum (FWHM) energy resolution transition-edge sensor (TES) microcalorimeters at low energies (<1 keV),where it is very challenging to obtain X-ray calibration lines comparable to (or narrower than) the detector resolution. This scheme depends on the ability to resolve the number of 3 eV photons in each pulse, which we have recently demonstrated up to photon numbers of about 300. AtLTD-18 we showed preliminary results obtained with this technique on a 0.25 eV baseline resolution TES microcalorimeter designed for the ultra-high-resolution sub-array of the Lynx mission. The line-shape was well described by a simple Gaussian. However, the difficulty of delivering photons to the small 46 μm square absorbers resulted in a large thermal crosstalk signal, whose random nature is expected to rapidly degrade the observed energy resolution towards higher photon numbers/energies. We have since improved the coupling between the optical fiber and the TES absorber and report here our current results.

Felix T Jaeckel↗
NASA NTRS2004

Dual Transition Edge Sensor Bolometer for Enhanced Dynamic Range

Broadband surveys at the millimeter and submillimeter wavelengths will require bolometers that can reach new limits of sensitivity and also operate under high background conditions. To address this need, we present results on a dual transition edge sensor (TES) device with two operating modes: one for low background, ultrasensitive detection and one for high background, enhanced dynamic range detection. The device consists of a detector element with two transition temperatures (T(sub c)) of 0.25 and 0.51 K located on the same micromachined, thermally isolated membrane structure. It can be biased on either transition, and features phonon-limited noise performance at the lower T(sub c). We measure noise performance on the lower transition 7 x 10(exp -18) W/rt(Hz) and the bias power on the upper transition of 12.5 pW, giving a factor of 10 enhancement of the dynamic range for the device. We discuss the biasable range of this type of device and present a design concept to optimize utility of the device.

Chervenak, J. A.↗
NASA NTRS2020

Comparing complex impedance and bias step measurements of Simons Observatory transition edge sensors

The Simons Observatory (SO) will perform ground-based observations of the cosmic microwave background (CMB) with several small and large aperture telescopes, each outfitted with thousands to tens of thousands of superconducting aluminum manganese (AlMn) transition-edge sensor bolometers (TESs). In-situ characterization of TES responsivities and effective time constants will be required multiple times each observing-day for calibrating time-streams during CMB map-making. Effective time constants are typically estimated in the field by briefly applying small amplitude square-waves on top of the TES DC biases, and fitting exponential decays in the bolometer response. These so-called “bias step” measurements can be rapidly implemented across entire arrays and therefore are attractive because they take up little observing time. However, individual detector complex impedance measurements, while too slow to implement during observations, can provide a fuller picture of the TES model and a better understanding of its temporal response. Here, we present the results of dark TES characterization of many prototype SO bolometers and compare the effective thermal time constants measured via bias steps to those derived from complex impedance data.

Nicholas F. Cothard↗
NASA NTRS2015

Fabrication of Transition Edge Sensor Microcalorimeters for X-Ray Focal Planes

Requirements for focal planes for x-ray astrophysics vary widely depending on the needs of the science application such as photon count rate, energy band, resolving power, and angular resolution. Transition edge sensor x-ray calorimeters can encounter limitations when optimized for these specific applications. Balancing specifications leads to choices in, for example, pixel size, thermal sinking arrangement, and absorber thickness and material. For the broadest specifications, instruments can benefit from multiple pixel types in the same array or focal plane. Here we describe a variety of focal plane architectures that anticipate science requirements of x-ray instruments for heliophysics and astrophysics. We describe the fabrication procedures that enable each array and explore limitations for the specifications of such arrays, including arrays with multiple pixel types on the same array.

superconducting↗
NASA NTRSDate not supplied

Qualification of A Transition Edge Sensor Based Anti-Coincidence Detector for A Probe Class Mission

The Line Emission Mapper (or LEM) is an X-ray probe class mission aimed to study the physics of galaxy formation, with a large field-of-view, high-resolution transition-edge sensor (TES) microcalorimeter. Because of the diffuse and faint nature of LEM’s targets, a high-fidelity anticoincidence detector (anti-co) is essential to reduce instrument background below the level of sky background. Lying directly behind the LEM sensor, the anti-co will detect ~3 counts per second per square centimeter from background galactic cosmic rays and the secondary particles they induce to detect and flag any events that could be confused with a science photon in the 0.3-2 keV signal band of LEM. Our design spans an active region 4-cm in diameter. It consists of 12 quasiparticle-trap-assisted electrothermal-feedback (QET) channels, each with 100 parallel TESes with common bias lines. The TES is a narrow strip of Mo/Au bilayer. We present fabrication processes that maintain the transition temperature (T c ) in Mo/Au bilayer structures across the active region. We further present a new design based on a a-Si/W TES layer that has previously achieved reasonable uniformity in lab testing.

x-ray↗
NASA NTRS2016

Transition-Edge Sensor Pixel Parameter Design of the Microcalorimeter Array for the X-Ray Integral Field Unit on Athena

The focal plane of the X-ray integral field unit (X-IFU) for ESA's Athena X-ray observatory will consist of approximately 4000 transition edge sensor (TES) x-ray microcalorimeters optimized for the energy range of 0.2 to 12 kiloelectronvolts. The instrument will provide unprecedented spectral resolution of approximately 2.5 electronvolts at energies of up to 7 kiloelectronvolts and will accommodate photon fluxes of 1 milliCrab (90 counts per second) for point source observations. The baseline configuration is a uniform large pixel array (LPA) of 4.28 arcseconds pixels that is read out using frequency domain multiplexing (FDM). However, an alternative configuration under study incorporates an 18 by × 18 small pixel array (SPA) of 2 arcseconds pixels in the central approximately 36 arcseconds region. This hybrid array configuration could be designed to accommodate higher fluxes of up to 10 milliCrabs (900 counts per second) or alternately for improved spectral performance (less than 1.5 electronvolts) at low count-rates. In this paper we report on the TES pixel designs that are being optimized to meet these proposed LPA and SPA configurations. In particular we describe details of how important TES parameters are chosen to meet the specific mission criteria such as energy resolution, count-rate and quantum efficiency, and highlight performance trade-offs between designs. The basis of the pixel parameter selection is discussed in the context of existing TES arrays that are being developed for solar and x-ray astronomy applications. We describe the latest results on DC biased diagnostic arrays as well as large format kilo-pixel arrays and discuss the technical challenges associated with integrating different array types on to a single detector die.

Smith, S. J.↗
NASA NTRS2004

First Astronomical Use of Multiplexed Transition Edge Sensor Bolometers

We present performance results based on the first astronomical use of multiplexed superconducting bolometers. The Fabry-Perot Interferometer Bolometer Research Experiment (FIBRE) is a broadband submillimeter spectrometer that achieved first light in June 2001 at the Caltech Submillimeter Observatory (CSO). FIBRE's detectors are superconducting transition edge sensor (TES) bolometers read out by a SQUID multiplexer. The Fabry-Perot uses a low resolution grating to order sort the incoming light. A linear bolometer array consisting of 16 elements detects this dispersed light, capturing 5 orders simultaneously from one position on the sky. With tuning of the Fabry-Perot over one free spectral range, a spectrum covering Delta lambda/lambda = 1/7 at a resolution of delta lambda/lambda approx. 1/1200 can be acquired. This spectral resolution is sufficient to resolve Doppler-broadened line emission from external galaxies. FIBRE operates in the 350 m and 450 m bands. These bands cover line emission from the important star formation tracers neutral carbon (CI) and carbon monoxide (CO). We have verified that the multiplexed bolometers are photon noise limited even with the low power present in moderate resolution spectrometry.

Staguhn, J. G.↗
NASA NTRS2019

Multiabsorber Transition-Edge Sensors for X-Ray Astronomy

We are developing arrays of position-sensitive microcalorimeters for future x-ray astronomy applications. These position-sensitive devices commonly referred to as hydras consist of multiple x-ray absorbers, each with a different thermal coupling to a single-transition-edge sensor microcalorimeter. Their development is motivated by a desire to achieve very large pixel arrays with some modest compromise in performance. We report on the design, optimization, and first results from devices with small pitch pixels (<75 μm) being developed for a high-angular and energy resolution imaging spectrometer for Lynx. The Lynx x-ray space telescope is a flagship mission concept under study for the National Academy of Science 2020 decadal survey. Broadband full-width-half-maximum (FWHM) resolution measurements on a 9-pixel hydra have demonstrated ΔE(FWHM) = 2.23 ± 0.14 eV at Al-Kα, ΔE(FWHM) = 2.44 ± 0.29 eV at Mn-Kα, and ΔE(FWHM) = 3.39 ± 0.23 eV at Cu-Kα. Position discrimination is demonstrated to energies below <1 keV and the device performance is well-described by a finite-element model. Results from a prototype 20-pixel hydra with absorbers on a 50-μm pitch have shown ΔE(FWHM) = 3.38 ± 0.20 eV at Cr-Kα1. We are now optimizing designs specifically for Lynx and extending the number of absorbers up to 25/hydra. Numerical simulation suggests optimized designs could achieve ∼3 eV while being compatible with the bandwidth requirements of the state-of-the art multiplexed readout schemes, thus making a 100,000 pixel microcalorimeter instrument a realistic goal.

Smith, Stephen J.↗
NASA NTRS2017

Fabrication of Ultrasensitive Transition Edge Sensor Bolometric Detectors for HIRMES

The high resolution mid-infrared spectrometer (HIRMES) is a high resolving power (R approx. 100,000) instrument operating in the 25-122 micron spectral range and will fly on board the Stratospheric Observatory for Far-Infrared Astronomy (SOFIA) in 2019. Central ot HIRMES are its two transition edge sensor (TES) bolometric cameras, an 8x16 detector high resolution array and a 64x16 detector low resolution array. Both types of detectors consist of MoAu TES fabricated on leg-isolated Si membranes. Whereas the high resolution detectors, with noise equivalent power (NEP) approx. 2 aW/square root of (Hz), are fabricated on 0.45 micron Si substrates, the low resolution detectors, with NEP approx. 10 aW/square root of (Hz), are fabricated on 1.40 micron Si. Here we discuss the similarities and difference in the fabrication methodologies used to realize the two types of detectors.

Detectors↗
NASA NTRS2015

Fabrication of Feedhorn-Coupled Transition Edge Sensor Arrays for Measurement of the Cosmic Microwave Background Polarization

Characterization of the minute cosmic microwave background (CMB) polarization signature requires multi-frequency high-throughput precision instrument systems. We have previously described the detector fabrication of a 40 gigahertz focal plane and now describe the fabrication of a 37-element dual-polarization detector module for measurement of the CMB at 90 gigahertz. The 72-TES (Transition Edge Sensor)-based bolometers in each module are coupled to a niobium-based planar orthomode transducer with integrated band defining filters implemented in microstrip transmission line. A single crystal silicon dielectric substrate serves as microstrip dielectric and as a thermal link between the membrane isolated MoAu TES operating at 150 millikelvins and the heat bath. A short silicon leg between the heat bath and the TES bolometer is designed for ballistic phonon transport and provides improved process control and uniformity of thermal conductance in the presence of phonon scattering on roughened surfaces. Micro-machined structures are used to realize the orthomode transducer backshort, provide out of band signal rejection, and a silicon photonic choke for feedhorn coupling are described. The backshort, choke wafer, and detector wafer are indium bump-bonded to create a single 37-element dual-polarization detector module. Fourteen such hexagonally shaped modules each 80 millimeters in size comprise two focal planes. These, along with the recently delivered 40 gigahertz focal plane, will survey a large fraction of the sky as part of the Johns Hopkins University-led ground-based CLASS (Cosmology Large Angular Scale Surveyor) telescope.

Detectors↗
NASA NTRS2018

Integration of Multilevel Superconducting Buried Wiring Layers with Transition-Edge Sensor Detectors for Large Scale Arrays

Lynx, one of the four mission concepts under consideration for the next Astrophysics DecadalReview, will include a microcalorimeter array consisting of more than 100,000 pixels in a compact arrangement with absorber pitch as small as 25 microns. In order to realize the desired array scale, fine-pitch multi-level superconducting wiring with high yield, compatible with rapid expansion of our hydra absorber designs, is essential. We have demonstrated a method of integrating transition edge sensor (TES) microcalorimeters with suitable multilevel buried wiring, fabricated at MIT Lincoln Laboratory using advanced tools dedicated to superconducting circuit fabrication. The TES Mo/Au bilayer is deposited on a high-quality oxide surface created by chemical-mechanical polishing, allowing tight specifications on the TES superconducting transition and link conductivity to be achieved even though the process order has been inverted. The TESs contact the top-level niobium wiring through vias etched through silicon dioxide down to the topmost wiring layer. The article discusses the overall fabrication process, as wellas the behavior of sensors with different via designs, proximity structures, and lateral sizes. An initial iteration of the integrated fabrication process indicates that microcalorimeters fabricated in this way should meet mission specifications using a Mo/Au bilayer with a reasonable critical temperature below 100 mK.

Detector↗