Plasma probe.
Physical description, module fabrication, sensor construction and calibration details of plasma probe carried on Mariner IV
PROTON ENERGY↗
SEARCH · Engineering Papers
Results for “Sensor fabrication”
Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.
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Six component robotic force-torque sensor
The results of a two-phase contract studying the feasibility of a miniaturized six component force-torque sensor and development of a working laboratory system were described. The principle of operation is based upon using ultrasonic pulse-echo ranging to determine the position of ultrasonic reflectors attached to a metal or ceramic cover plate. Because of the small size of the sensor, this technology may have application in robotics, to sense forces and torques at the finger tip of a robotic end effector. Descriptions are included of laboratory experiments evaluating materials and techniques for sensor fabrication and of the development of support electronics for data acquisition, computer interface, and operator display.
Grahn, Allen R.↗
Metal Film Increases CCD Quantum Efficiency
Thin layer of platinum or other high-work-function metal applied to back side of rear-illuminated charge-coupled device (CCD) achieves quantum efficiency (QE)-pinned state, an ideal condition allowing sensor to achieve 100-percent internal charge-collection efficiency within its photosensitive volume. Metal layer, called flash gate, easily applied by tungsten vacuum deposition during last step of sensor fabrication.
Janesick, James R.↗
One–Step Fabrication of Nanocrystalline Nanonetwork SnO 2 Gas Sensors by Integrated Multilaser Processing
An integrated multilaser process is developed to fabricate nanocrystalline nanonetwork SnO 2 gas sensors in one integrated procedure, which combines electrodes fabrication, nanomaterials deposition, and postannealing. Interdigit electrodes are fabricated on an Au-coated fused silica substrate using a picosecond (ps) laser, which ablates the Au coating from the back of the substrate to pattern the electrodes. A novel transmitted Ps laser deposition (TPLD) process is designed to deposit SnO 2 nanonetwork on the interdigit electrodes with precise deposition area control under a close target-to-substrate distance. The obtained SnO 2 nanonetwork is in situ postannealed by a CO 2 laser to improve the crystallinity, while the nano morphology and grain size keep intact. To investigate the morphology and formation process of the nanonetwork, the microstructure of the laser-deposited SnO 2 layer is characterized. As a result, the crystallization control of CO 2 laser annealing is investigated through analyzing the Raman spectrum, X-ray diffraction (XRD) patterns, and lattice structures of the samples. By exposed to H 2 atmosphere, the fabricated gas sensor is demonstrated for H 2 monitoring.
08 HYDROGEN↗
On-demand fabrication of piezoelectric sensors for in-space structural health monitoring
Abstract Inflatable structures, promising for future deep space exploration missions, are vulnerable to damage from micrometeoroid and orbital debris impacts. Polyvinylidene fluoride-trifluoroethylene (PVDF-trFE) is a flexible, biocompatible, and chemical-resistant material capable of detecting impact forces due to its piezoelectric properties. This study used a state-of-the-art material extrusion system that has been validated for in-space manufacturing, to facilitate fast-prototyping of consistent and uniform PVDF-trFE films. By systematically investigating ink synthesis, printer settings, and post-processing conditions, this research established a comprehensive understanding of the process-structure-property relationship of printed PVDF-trFE. Consequently, this study consistently achieved the printing of PVDF-trFE films with a thickness of around 40 µ m, accompanied by an impressive piezoelectric coefficient of up to 25 pC N −1 . Additionally, an all-printed dynamic force sensor, featuring a sensitivity of 1.18 V N −1 , was produced by mix printing commercial electrically-conductive silver inks with the customized PVDF-trFE inks. This pioneering on-demand fabrication technique for PVDF-trFE films empowers future astronauts to design and manufacture piezoelectric sensors while in space, thereby significantly enhancing the affordability and sustainability of deep space exploration missions.
Instruments & Instrumentation↗
Fabrication of Silicon Sensors Based on Low-Gain Avalanche Diodes
Low-Gain Avalanche Diodes are a recently-developed class of silicon sensors. Characterized by an internal moderate gain that enhances the signal amplitude and if built on thin silicon substrates of a few tens of microns, they feature fast signals and exhibit excellent timing performance. Thanks to their fast timing they are planned to be exploited in timing detectors in High-Energy Physics experiments, for example for the upgrades of the ATLAS and CMS detectors at the High Luminosity Large Hadron Collider (HL-LHC) at CERN. However, to achieve a spatially uniform multiplication a large pixel pitch is needed, preventing a fine spatial resolution. To overcome this limitation, the AC-coupled LGAD approach was introduced. In this type of device, metal electrodes are placed over an insulator at a fine pitch, and signals are capacitively induced on these electrodes. The fabrication technology is similar for the two LGAD families, although a fine tuning of a few process parameters needs to be carefully studied. Other R&D efforts towards detectors that can simultaneously provide good time and spatial resolution, based on the LGAD concept, are under way. These efforts aim also to mitigate the loss of performance at high irradiation fluences due to the acceptor removal within the gain layer. In this paper we describe the main points in the fabrication of LGADs and AC-LGADs in a clean-room. We also discuss novel efforts carried on related topics.
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
Gas Sensors Using SiC Semiconductors and Method of Fabrication Thereof
Gas sensor devices are provided having an atomically flat silicon carbide top surface that, in turn, provides for a uniform, and reproducible surface thereof.
Gary W Hunter↗
Fabrication and testing of subminiature multi-sensor hot-wire probes
A method for the fabrication of hot-wire sensors measuring 0.6 micron in diameter and 200 microns in length is described. This method allows accurate control of sensing-element orientation, thus making it possible to produce multisensor probes. Test results obtained with a miniature sensor fabricated by this method, for the outer region of a turbulent boundary layer developing in a zero presure gradient were compared to measurements from a conventional-sized probe made in the same flow, demonstrating that, because of their improved spatial resolution, subminiature sensors can provide more accurate measurements in boundary layers than do the conventional probes.
Ligrani, P. M.↗
Wireless Passive Ceramic Sensor for Far-Field Temperature Measurement at High Temperatures
A passive wireless high-temperature sensor for far-field applications was developed for stable temperature sensing up to 1000 °C. The goal is to leverage the properties of electroceramic materials, including adequate electrical conductivity, high-temperature resilience, and chemical stability in harsh environments. Initial sensors were fabricated using Ag for operation to 600 °C to achieve a baseline understanding of temperature sensing principles using patch antenna designs. Fabrication then followed with higher temperature sensors made from (In, Sn) O2 (ITO) for evaluation up to 1000 °C. A patch antenna was modeled in ANSYS HFSS to operate in a high-frequency region (2.5–3.5 GHz) within a 50 × 50 mm2 confined geometric area using characteristic material properties. The sensor was fabricated on Al2O3 using screen printing methods and then sintered at 700 °C for Ag and 1200 °C for ITO in an ambient atmosphere. Sensors were evaluated at 600 °C for Ag and 1000 °C for ITO and analyzed at set interrogating distances up to 0.75 m using ultra-wideband slot antennas to collect scattering parameters. The sensitivity (average change in resonant frequency with respect to temperature) from 50 to 1000 °C was between 22 and 62 kHz/°C which decreased as interrogating distances reached 0.75 m.
47 OTHER INSTRUMENTATION↗
Novel Harsh Environment Materials and Fabrication Techniques for Wireless Sensor Applications (Final Report)
The overarching goal of this project is to establish a center of excellence program at the University of Maine that is focused on Harsh Environmental Materials and Fabrication Techniques for Wireless Sensor Applications. UMaine is well-positioned to build on previous successes in the areas of materials science research and sensor engineering. Since 1980, the Laboratory for Surface Science & Technology (LASST) has been a very successful interdisciplinary UMaine research center with a well-established infrastructure to investigate surfaces, interfaces, thin films, and micro/nano-fabrication. This infrastructure established through NSF, DOE, DOD, NASA, the State of Maine, and industry includes (i) a 3,500 ft2 clean room with nano/microfabrication and photolithography instrumentation, (ii) thin film synthesis, processing and characterization, (iii) surface and thin film analytical chemistry tools, and (iv) device packaging, electronic testing, wireless devices, system fabrication, and sensor test facilities. This strong foundation is the basis for a planned significant growth in R&D capacity currently underway. To that end, since the start of this project in the Fall of 2019, LASST has undergone a transition to become a new interdisciplinary center at UMaine, named the Frontier Institute for Research in Sensor Technologies (FIRST). This new focus represents a commitment and investment by UMaine that aligns with the proposed DOE-EPSCoR theme, capitalizing on the state-of-the-art instrumentation to form an energized group of faculty and students pursuing advances in sensor materials, devices, and applications.
36 MATERIALS SCIENCE↗
Centimeter-Scale Pillared-Layer Metal–Organic Framework Thin Films Mediated by Hydroxy Double Salt Intermediates for CO 2 Sensor Applications
Fabrication of metal–organic framework (MOF) thin films over macroscopic surface areas is a subject of great interest for gas sensor application platforms such as optics and microelectronics. However, a direct synthesis of MOF films at ambient conditions, in particular pillared-layer MOF films due to their anisotropic structures, remains a significant challenge. Herein, we demonstrate for the first time a facile construction of dense and continuous pillared-layer MOF thin films on a centimeter scale via an aluminum-doped zinc oxide template and hydroxy double salt (HDS) intermediates at room temperature. A series of Cu(II)-based pillared MOFs with different 1,4-benzenedicarboxylic acid (bdc) ligands were explored for optimizing MOF film formation for CO 2 sensor applications. Nonpolar ligands with lower water solubility preferentially formed crystalline pillared MOF structures from HDS intermediates. A Cu 2 (ndc) 2 (dabco) (ndc = 1,4-naphthalene-bdc; dabco = 1,4-diazabicyclo[2.2.2]octane) MOF demonstrated the most dense and uniform film growth with micrometer thickness over one square centimeter area. This synthetic approach for growing Cu 2 (ndc) 2 (dabco) MOF thin films was successfully translated toward two sensing platforms: a quartz crystal microbalance and an optical fiber sensor. These Cu 2 (ndc) 2 (dabco) MOF-coated sensors displayed sensitivity toward CO 2 and response/recovery time on the scale of seconds, even at moderate humidity levels. Finally, this work provides a road map for producing continuous and anisotropic crystalline MOF thin films over a centimeter scale area on various substrates, which will greatly facilitate their utilization in MOF-based sensor devices, among other applications.
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
Fabrication and testing of acoustic sensors for boundary layer flow transition detection
Fabrication and testing of acoustic sensors for boundary layer flow transition detection in reentry
Blanchard, B. E.↗
Fabrication of Thin Film Heat Flux Sensors
Prototype thin film heat flux sensors have been constructed and tested. The sensors can be applied to propulsion system materials and components. The sensors can provide steady state and fast transient heat flux information. Fabrication of the sensor does not require any matching of the mounting surface. Heat flux is proportional to the temperature difference across the upper and lower surfaces of an insulation material. The sensor consists of an array of thermocouples on the upper and lower surfaces of a thin insulating layer. The thermocouples for the sensor are connected in a thermopile arrangement. A 100 thermocouple pair heat flux sensor has been fabricated on silicon wafers. The sensor produced an output voltage of 200-400 microvolts when exposed to a hot air heat gun. A 20 element thermocouple pair heat flux sensor has been fabricated on aluminum oxide sheet. Thermocouples are Pt-Pt/Rh with silicon dioxide as the insulating material. This sensor produced an output of 28 microvolts when exposed to the radiation of a furnace operating at 1000 C. Work is also underway to put this type of heat flux sensor on metal surfaces.
Will, Herbert A.↗
Advanced Packaging Technology Used in Fabricating a High-Temperature Silicon Carbide Pressure Sensor
The development of new aircraft engines requires the measurement of pressures in hot areas such as the combustor and the final stages of the compressor. The needs of the aircraft engine industry are not fully met by commercially available high-temperature pressure sensors, which are fabricated using silicon. Kulite Semiconductor Products and the NASA Glenn Research Center have been working together to develop silicon carbide (SiC) pressure sensors for use at high temperatures. At temperatures above 850 F, silicon begins to lose its nearly ideal elastic properties, so the output of a silicon pressure sensor will drift. SiC, however, maintains its nearly ideal mechanical properties to extremely high temperatures. Given a suitable sensor material, a key to the development of a practical high-temperature pressure sensor is the package. A SiC pressure sensor capable of operating at 930 F was fabricated using a newly developed package. The durability of this sensor was demonstrated in an on-engine test. The SiC pressure sensor uses a SiC diaphragm, which is fabricated using deep reactive ion etching. SiC strain gauges on the surface of the diaphragm sense the pressure difference across the diaphragm. Conventionally, the SiC chip is mounted to the package with the strain gauges outward, which exposes the sensitive metal contacts on the chip to the hostile measurement environment. In the new Kulite leadless package, the SiC chip is flipped over so that the metal contacts are protected from oxidation by a hermetic seal around the perimeter of the chip. In the leadless package, a conductive glass provides the electrical connection between the pins of the package and the chip, which eliminates the fragile gold wires used previously. The durability of the leadless SiC pressure sensor was demonstrated when two 930 F sensors were tested in the combustor of a Pratt & Whitney PW4000 series engine. Since the gas temperatures in these locations reach 1200 to 1300 F, the sensors were installed in water-cooled jackets, as shown. This was a severe test because the pressure-sensing chips were exposed to the hot combustion gases. Prior to the installation of the SiC pressure sensors, two high-temperature silicon sensors, installed in the same locations, did not survive a single engine run. The durability of the leadless SiC pressure sensor was demonstrated when both SiC sensors operated properly throughout the two runs that were conducted.
Beheim, Glenn M.↗
Chemical Gas Sensors for Aeronautic and Space Applications 2
Aeronautic and Space applications require the development of chemical sensors with capabilities beyond those of commercially available sensors. Areas of most interest include launch vehicle safety monitoring emission monitoring and fire detection. This paper discusses the needs of aeronautic and space applications and the point-contact sensor technology being developed to address these needs. The development of these sensor is based on progress two types of technology: 1) Micro-machining and micro-fabrication technology to fabricate miniaturized sensors. 2) The development of high temperature semiconductors, especially silicon carbide. Sensor development for each application involves its own challenges in the fields of materials science and fabrication technology. The number of dual-use commercial applications of this micro-fabricated gas sensor technology make this area of sensor development a field of significant interest.
Hunter, G. W.↗
Multiplexable intrinsic Fabry–Perot interferometric fiber sensors for multipoint hydrogen gas monitoring
This Letter presents an approach to produce multiplexable optical fiber chemical sensor using an intrinsic Fabry–Perot interferometer (IFPI) array via the femtosecond laser direct writing technique. Using the hydrogen-sensitive palladium (Pd) alloy as a functional sensory material, Pd alloy coated IFPI devices can reproducibly and reversibly measure hydrogen concentrations with a detection limit of 0.25% at room temperature. Seven IFPI sensors were fabricated in one fiber and performed simultaneous temperature and hydrogen measurements at seven different locations. This Letter demonstrates a simple yet effective approach to fabricate multiplexable fiber optical chemical sensors for use in harsh environments.
Cao, Rongtao↗
Auxiliary Components for Kilopixel Transition Edge Sensor Arrays
We have fabricated transition edge sensor bolometer focal plane arrays sensitive to mm-submillimeter (0.1-3 THz) radiation for the Atacama Cosmology Telescope (ACT), which will probe the cosmic microwave background at 0.147,0.215, and 0.279 GHz. Central to the performance of these bolometers is a set of auxiliary resistive components. Here we discuss shunt resistors, which allow for tight optimization of bolometer time constant and sensitivity. Our shunt resistors consist of AuPd strips grown atop of interdigitated superconducting MoN, wires. We can tailor the shunt resistance by altering the dimensions of the AuPd strips and the pitch and width of the MoN, wires and can fabricate over 1000 shunts on a single 4" wafer. By modeling the resistance dependence of these parameters, a variety of different 0.77 +I-0.13 mOhm shunt resistors have been fabricated. This variety includes different shunts possessing MoN, wires with wire width equal to 1.5 and 10 microns and pitch equal to 4.5 and 26 microns, respectively. Our ability to set the resistance of the shunts hints at the scalability of our design. We have also integrated a Si02 capping layer into our shunt resistor fabrication scheme, which inhibits metal corrosion and eventual degradation of the shunt. Consequently, their robustness coupled with their high packing density makes these resistive components attractive for future kilopixel detector arrays.
Brown, Ari-David↗
Fiber waveguide sensors for intelligent materials
This report, an addendum to the six month report submitted to NASA Langley Research Center in December 1987, covers research performed by the Fiber and Electro-Optics Research Center (FEORC) at Virginia Tech for the NASA Langley Research Center, Grant NAG1-780, for the period from December 1987 to June 1988. This final report discusses the research performed in the following four areas as described in the proposal: Fabrication of Sensor Fibers Optimized for Embedding in Advanced Composites; Fabrication of Sensor Fiber with In-Line Splices and Evaluation via OTR methods; Modal Domain Optical Fiber Sensor Analysis; and Acoustic Fiber Waveguide Implementation.
Flax, A. R.↗