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Manufacturing Large Membrane Mirrors at Low Cost

Relatively inexpensive processes have been developed for manufacturing lightweight, wide-aperture mirrors that consist mainly of reflectively coated, edge-supported polyimide membranes. The polyimide and other materials in these mirrors can withstand the environment of outer space, and the mirrors have other characteristics that make them attractive for use on Earth as well as in outer space: With respect to the smoothness of their surfaces and the accuracy with which they retain their shapes, these mirrors approach the optical quality of heavier, more expensive conventional mirrors. Unlike conventional mirrors, these mirrors can be stowed compactly and later deployed to their full sizes. In typical cases, deployment would be effected by inflation. Potential terrestrial and outer-space applications for these mirrors include large astronomical telescopes, solar concentrators for generating electric power and thermal power, and microwave reflectors for communication, radar, and short-distance transmission of electric power. The relatively low cost of manufacturing these mirrors stems, in part, from the use of inexpensive tooling. Unlike in the manufacture of conventional mirrors, there is no need for mandrels or molds that have highly precise surface figures and highly polished surfaces. The surface smoothness is an inherent property of a polyimide film. The shaped area of the film is never placed in contact with a mold or mandrel surface: Instead the shape of a mirror is determined by a combination of (1) the shape of a fixture that holds the film around its edge and (2) control of manufacturing- process parameters. In a demonstration of this manufacturing concept, spherical mirrors having aperture diameters of 0.5 and 1.0 m were fabricated from polyimide films having thicknesses ranging from <20 m to 150 m. These mirrors have been found to maintain their preformed shapes following deployment.

FROM↗

Actuated Hybrid Mirror Telescope

The figure depicts the planned Actuated Hybrid Mirror Telescope (AHMT), which is intended to demonstrate a new approach to the design and construction of wide-aperture spaceborne telescopes for astronomy and Earth science. This technology is also appropriate for Earth-based telescopes. The new approach can be broadly summarized as using advanced lightweight mirrors that can be manufactured rapidly at relatively low cost. More specifically, it is planned to use precise replicated metallic nanolaminate mirrors to obtain the required high-quality optical finishes. Lightweight, dimensionally stable silicon carbide (SiC) structures will support the nanolaminate mirrors in the required surface figures. To enable diffraction- limited telescope performance, errors in surface figures will be corrected by use of mirror-shape-control actuators that will be energized, as needed, by a wave-front-sensing and control system. The concepts of nanolaminate materials and mirrors made from nanolaminate materials were discussed in several previous NASA Tech Briefs articles. Nanolaminates constitute a relatively new class of materials that can approach theoretical limits of stiffness and strength. Nanolaminate mirrors are synthesized by magnetron sputter deposition of metallic alloys and/or compounds on optically precise master surfaces to obtain optical-quality reflector surfaces backed by thin shell structures. As an integral part of the deposition process, a layer of gold that will constitute the reflective surface layer is deposited first, eliminating the need for a subsequent and separate reflective-coating process. The crystallographic textures of the nanolaminate will be controlled to optimize the performance of the mirror. The entire deposition process for making a nanolaminate mirror takes less than 100 hours, regardless of the mirror diameter. Each nanolaminate mirror will be bonded to its lightweight SiC supporting structure. The lightweight nanolaminate mirrors and SiC supporting structures will be fabricated from reusable master molds. The mirror-shape-control actuators will be low-power, high-capacitance lead magnesium niobate electrostrictive actuators that will be embedded in the SiC structures. The mode of operation of these actuators will be such that once power was applied, they will change in length and once power was removed, they will maintain dimensional stability to nanometer precision. This mode of operation will enable the use of low-power, minimally complex electronic control circuitry. The wave-front-sensing and control system will be designed and built according to a two-stage architecture. The first stage will be implemented by a Shack- Hartmann (SH) sensor subsystem, which will provide a large capture range. The second, higher-performance stage will be implemented by an image-based wave-front-sensing subsystem that will include a phase-retrieval camera (PRC), and will utilize phase retrieval and other techniques to measure wavefront error directly. Phase retrieval is a process in which multiple images of an unresolved object are iterated to estimate the phase of the optical system that acquired the images. The combination of SH and phase-retrieval sensors will afford the virtues of both a dynamic range of 105 and an accuracy of <10 nm.

Hickey, Gregory↗

Aligning Three Off-Axis Mirrors with Help of a DOE

A proposed method based on the use of a special-purpose diffractive optical element (DOE) would simplify (relative to prior methods) the alignment of three off-axis mirrors that constitute an imaging optical system. The method would exploit the fact that a DOE can be fabricated lithographically with high accuracy by electron-beam lithography in a thin film of poly(methyl methacrylate). The method would effectively transfer much of the problem of obtaining the needed accuracy from the mechanical-mirror-alignment domain to the lithographic domain. Unlike other methods that depend on specific symmetries (e.g., sphericity and/or concentricity), this method is expected to apply with equal ease and accuracy to mirrors of any configuration including aspherical, decentered mirrors. Assuming that one of the mirrors of a general three-mirror imaging optical system can serve as a reference for the alignment of the other two mirrors, such a system has 12 degrees of freedom in alignment. In the proposed method, one would use an interferometer in combination with a DOE to effect precise and relatively rapid and easy alignment of two of the mirrors with respect to each other, thus reducing the alignment task to that of the six degrees of freedom of the remaining mirror. The figure depicts a representative three-mirror off-axis imaging system, wherein the primary and tertiary mirrors (M1 and M3, respectively) are concave and the secondary mirror (M2) is convex. The DOE for aligning this system would be fabricated on the right surface of an optical flat and could be made to have either negative or positive focusing power, depending on the requirements of the specific application. The DOE could be designed to be placed at any convenient distance from M1 and M3 - again, depending on the application. The DOE would be illuminated with light coming from the left, generated by an interferometer. First, assuming the optical flat is of high quality, the plane of the DOE would be aligned perpendicular to the collimated beam by use of light reflected from the left face of the optical flat. The DOE would comprise two independent areas: one dedicated to M1, the other to M3. The portions of the collimated beam passing through those areas would be diffracted towards the corresponding mirrors. A mask, not shown in the figure, could be used to prevent light from passing through the rest of the area of the optical flat. Light rays reflected from M1 and M3 would retrace their paths through the DOE and would propagate leftward to the interferometer.

Mouroulis, Pantazis↗

Alignment Test Results of the JWST Pathfinder Telescope Mirrors in the Cryogenic Environment

After integration of the Optical Telescope Element (OTE) to the Integrated Science Instrument Module (ISIM) to become the OTIS, the James Webb Space Telescope OTIS is tested at NASAs Johnson Space Center (JSC) in the cryogenic vacuum Chamber A for alignment and optical performance. The alignment of the mirrors comprises a sequence of steps as follows: The mirrors are coarsely aligned using photogrammetry cameras with reflective targets attached to the sides of the mirrors. Then a multi-wavelength interferometer is aligned to the 18-segment primary mirror using cameras at the center of curvature to align reflected light from the segments and using fiducials at the edge of the primary mirror. Once the interferometer is aligned, the 18 primary mirror segments are then adjusted to optimize wavefront error of the aggregate mirror. This process phases the piston and tilt positions of all the mirror segments. An optical fiber placed at the Cassegrain focus of the telescope then emits light towards the secondary mirror to create a collimated beam emitting from the primary mirror. Portions of the collimated beam are retro-reflected from flat mirrors at the top of the chamber to pass through the telescope to the SI detector. The image on the detector is used for fine alignment of the secondary mirror and a check of the primary mirror alignment using many of the same analysis techniques used in the on-orbit alignment. The entire process was practiced and evaluated in 2015 at cryogenic temperature with the Pathfinder telescope.

Interferometer↗

Alignment Test Results of the JWST Pathfinder Telescope Mirrors in the Cryogenic Environment

After integration of the Optical Telescope Element (OTE) to the Integrated Science Instrument Module (ISIM) to become the OTIS, the James Webb Space Telescope OTIS is tested at NASAs Johnson Space Center (JSC) in the cryogenic vacuum Chamber A for alignment and optical performance. The alignment of the mirrors comprises a sequence of steps as follows: The mirrors are coarsely aligned using photogrammetry cameras with reflective targets attached to the sides of the mirrors. Then a multi-wavelength interferometer is aligned to the 18-segment primary mirror using cameras at the center of curvature to align reflected light from the segments and using fiducials at the edge of the primary mirror. Once the interferometer is aligned, the 18 primary mirror segments are then adjusted to optimize wavefront error of the aggregate mirror. This process phases the piston and tilt positions of all the mirror segments. An optical fiber placed at the Cassegrain focus of the telescope then emits light towards the secondary mirror to create a collimated beam emitting from the primary mirror. Portions of the collimated beam are retro-reflected from flat mirrors at the top of the chamber to pass through the telescope to the SI detector. The image on the detector is used for fine alignment of the secondary mirror and a check of the primary mirror alignment using many of the same analysis techniques used in the on-orbit alignment. The entire process was practiced and evaluated in 2015 at cryogenic temperature with the Pathfinder telescope.

OTIS↗

Measurement Uncertainty of Highly Asymmetrically Curved Elliptical Mirrors Using Multi-Pitch Slope Stitching Technique

Soft X-ray off-axis elliptical mirrors bring new challenges for X-ray mirror metrology. These highly asymmetrically curved elliptical cylindrical mirrors with a total slope range >10 mrad are extremely challenging to measure. Their total slope range exceeds the measuring range of most angular sensors used for X-ray mirror inspection. To overcome this problem, it is possible to stitch partial slope data by measuring the mirror at different pitch angles (multi-pitch angles). By revisiting the theory of the multi-pitch Nano-accuracy Surface Profiler (NSP), we derive the sampling position error on the mirror surface as a function of the mirror height profile and the measurement error of the pitch rotation center. When measuring “extreme”, highly asymmetrically curved, elliptical mirrors, the calculation of the mirror height profile with iterative reconstruction outperforms the classical “flat assumption” (i.e., assuming that the mirror sag is negligible). As demonstrated by our simulations, a proper tolerance evaluation on the measurement of pitch rotation center is needed to assess the measurement accuracy (systematic error) for these strongly aspherical mirrors using the multi-pitch NSP technique. Taking a real design of an “extreme” elliptical mirror as a case study, we conduct a Monte Carlo simulation to mimic the measurement and characterization process to analyze the impact of several error sources. With the measurement uncertainty of the pitch rotation center, the multi-pitch NSP measurement can estimate the grazing angle θ and the chief ray location x o with their uncertainties, as well as the slope residuals.

36 MATERIALS SCIENCE↗

Space Adaptation of Active Mirror Segment Concepts

This report summarizes the results of a three year effort by Blue Line Engineering Co. to advance the state of segmented mirror systems in several separate but related areas. The initial set of tasks were designed to address the issues of system level architecture, digital processing system, cluster level support structures, and advanced mirror fabrication concepts. Later in the project new tasks were added to provide support to the existing segmented mirror testbed at Marshall Space Flight Center (MSFC) in the form of upgrades to the 36 subaperture wavefront sensor. Still later, tasks were added to build and install a new system processor based on the results of the new system architecture. The project was successful in achieving a number of important results. These include the following most notable accomplishments: 1) The creation of a new modular digital processing system that is extremely capable and may be applied to a wide range of segmented mirror systems as well as many classes of Multiple Input Multiple Output (MIMO) control systems such as active structures or industrial automation. 2) A new graphical user interface was created for operation of segmented mirror systems. 3) The development of a high bit rate serial data loop that permits bi-directional flow of data to and from as many as 39 segments daisy-chained to form a single cluster of segments. 4) Upgrade of the 36 subaperture Hartmann type Wave Front Sensor (WFS) of the Phased Array Mirror, Extendible Large Aperture (PAMELA) testbed at MSFC resulting in a 40 to 5OX improvement in SNR which in turn enabled NASA personnel to achieve many significant strides in improved closed-loop system operation in 1998. 5) A new system level processor was built and delivered to MSFC for use with the PAMELA testbed. This new system featured a new graphical user interface to replace the obsolete and non-supported menu system originally delivered with the PAMELA system. The hardware featured Blue Line's new stackable processing system which included fiber optic data links, a WFS digital interface, and a very compact and reliable electronics package. The project also resulted in substantial advances in the evolution of concepts for integrated structures to be used to support clusters of segments while also serving as the means to distribute power, timing, and data communications resources. A prototype cluster base was built and delivered that would support a small array of 7 cm mirror segments. Another conceptual design effort led to substantial progress in the area of laminated silicon mirror segments. While finished mirrors were never successfully produced in this exploratory effort, the basic feasibility of the concept was established through a significant amount of experimental development in microelectronics processing laboratories at the University of Colorado in Colorado Springs. Ultimately lightweighted aluminum mirrors with replicated front surfaces were produced and delivered as part of a separate contract to develop integrated segmented mirror assemblies. Overall the project was very successful in advancing segmented mirror system architectures on several fronts. In fact, the results of this work have already served as the basic foundation for the system architectures of several projects proposed by Blue Line for different missions and customers. These include the NMSD and AMSD procurements for NASA's Next Generation Space Telescope, the HET figure maintenance system, and the 1 meter FAST telescope project.

Ames, Gregory H.↗

Long Focal Length Large Mirror Fabrication System

The goals of this ambitious program are (1) to develop systems to make large superpolished optical mirrors, (2) to develop low scatter polishing techniques using centrifugal elutriation, (3) to develop a means of measuring scatter at any point on the mirror, (4) to polish a Hindle sphere to measure the optical figure of a one meter diameter convex mandrel, and (5) to fabricate low scatter, large adaptive optic graphite filled, cyanate ester replica transfer mirrors using these mandrels. Deliverables are a 30 cm diameter superpolished composite AO mirror. We fabricated a 1/3rd meter superpolished zerodur flat mandrel and with the support of our major subcontractor, Composite Mirror Applications Inc (CMA) we have demonstrated a 30 cm lightweight cyanate ester mirror with an rms microroughness between 0.6 and 0.8 nm and 8 faceplate influence function of 5 cm. The influence function was chosen to be comparable to the atmospheric correlation coefficient r(sub 0) which is about 5 cm at sea level. There was no print-thru of the graphite fibers in the cyanate ester surface (the bane of many previous efforts to use cyanate ester mirrors). Our subcontractor has devised a means for developing a 30-50 nm thick layer of graphite free pure ester resin on the surface of the mirrors. This graphite fiber filled material has a thermal expansion coefficient in the 10(exp -8) centimeter per Kelvin range (the same range of expansion coefficient as Zerodur and ULE glasses) and does not take up water and swell, so it is a nearly ideal mirror material in these areas. Unfortunately for these 0.8mm thick faceplates, the number of plies is not enough to result in isometric coverage. Isolated figure irregularities can appear, making it necessary to go to thicker faceplates. The influence function will then only approximate the length of r(sub 0), at higher altitudes or longer wavelengths. The influence function goes as the cube of the thickness, so we are now making a faceplate optimized for an infrared wavelength, possibly that used for the AO system of the Keck telescope, instead of 0.63 microns. We have polished a 55 cm diameter mandrel to better than 1/20th wave optical figure in the visible using centrifugal elutriation. CMA has just told us that it needs to retool to get optimum mirror faceplate quality in this size, so implementing the 55 cm AO mirror may be delayed somewhat. We expect to complete our 1/3 rd meter AO mirror on time using novel piezoelectric actuators with a throw of one micrometer per volt, as compared to 0.005 micrometers per volt for conventional piezoelectric actuators. We will then demonstrate its AO performance interferometrically.

Bennett, H. E.↗

Magnetohydrodynamic Instabilities in a Simple Gasdynamic Mirror Propulsion System

The gasdynamic mirror has been proposed as a concept which could form the basis of a highly efficient fusion rocket engine. Gasdynamic mirrors differ from most other mirror type plasma confinement schemes in that they have much larger aspect ratios and operate at somewhat higher plasma densities. To evaluate whether a gasdynamic mirror could indeed confine plasmas in a stable manner for long periods of time, a small scale experimental gasdynamic mirror was built and tested. The objective of this experiment was to determine ranges of mirror ratios and plasma densities over which gasdynamic mirror could maintain stable plasmas. Theoretical analyses indicated that plasma magnetohydrodynamic instabilities were likely to occur during subsonic to supersonic flow transitions in the mirror throat region of the gasdynamic mirror. The experimental evidence based upon data derived from the Langmuir probe measurements seems to confirm this analysis. The assumption that a gasdynamic mirror using a simple mirror geometry could be used as a propulsion system, therefore, appears questionable. Modifications to the simple mirror concept are presented which could mitigate these MHD instabilities.

Emrich, William J., Jr.↗

Titanium Alloy Strong Back for IXO Mirror Segments

A titanium-alloy mirror-holding fixture called a strong back allows the temporary and permanent bonding of a 50 degree D263 glass x-ray mirror (IXO here stands for International X-ray Observatory). The strong back is used to hold and position a mirror segment so that mounting tabs may be bonded to the mirror with ultra-low distortion of the optical surface. Ti-15%Mo alloy was the material of choice for the strong back and tabs because the coefficient of thermal expansion closely matches that of the D263 glass and the material is relatively easy to machine. This invention has the ability to transfer bonded mounting points from a temporary location on the strong back to a permanent location on the strong back with minimal distortion. Secondly, it converts a single mirror segment into a rigid body with an acceptable amount of distortion of the mirror, and then maneuvers that rigid body into optical alignment such that the mirror segment can be bonded into a housing simulator or mirror module. Key problems are that the mirrors are 0.4-mm thick and have a very low coefficient of thermal expansion (CTE). Because the mirrors are so thin, they are very flexible and are easily distorted. When permanently bonding the mirror, the goal is to achieve a less than 1-micron distortion. Temperature deviations in the lab, which have been measured to be around 1 C, have caused significant distortions in the mirror segment.

Byron, Glenn P.↗

Stroboscopic Interferometer for Measuring Mirror Vibrations

Stroboscopic interferometry is a technique for measuring the modes of vibration of mirrors that are lightweight and, therefore, unavoidably flexible. The technique was conceived especially for modal characterization of lightweight focusing mirror segments to be deployed in outer space; however, the technique can be applied to lightweight mirrors designed for use on Earth as well as the modal investigation of other optical and mechanical structures. To determine the modal structure of vibration of a mirror, it is necessary to excite the mirror by applying a force that varies periodically with time at a controllable frequency. The excitation can utilize sinusoidal, square, triangular, or even asynchronous waveforms. Because vibrational modes occur at specific resonant frequencies, it is necessary to perform synchronous measurements and sweep the frequency to locate the significant resonant modes. For a given mode it is possible to step the phase of data acquisition in order to capture the modal behavior over a single cycle of the resonant frequency. In order to measure interferometrically the vibrational response of the mirror at a given frequency, an interferometer must be suitably aligned with the mirror and adjustably phase-locked with the excitation signal. As in conventional stroboscopic photography, the basic idea in stroboscopic interferometry is to capture an image of the shape of a moving object (in this case, the vibrating mirror) at a specified instant of time in the vibration cycle. Adjusting the phase difference over a full cycle causes the interference fringes to vary over the full range of motion for the mode at the excitation frequency. The interference-fringe pattern is recorded as a function of the phase difference, and, from the resulting data, the surface shape of the mirror for the given mode is extracted. In addition to the interferometer and the mirror to be tested, the equipment needed for stroboscopic interferometry includes an arbitrary-function generator (that is, a signal generator), an oscilloscope, a trigger filter, and an advanced charge-coupled-device (CCD) camera. The optical components are positioned to form a pupil image of the mirror under test on the CCD chip, so that the interference pattern representative of the instantaneous mirror shape is imaged on the CCD chip.

Stahl, H. Philip↗

Progress in the Fabrication and Testing of Telescope Mirrors for the James Webb Space Telescope

The telescope of the James Webb Space Telescope (JWST) is an f/20, three mirror anastigmat design, passively cooled (40K) in an L2 orbit. The design provides diffraction limited performance (Strehl > or = 0.8) at .=2 m. To fit within the launch vehicle envelope (Arianne V), the 6.6 meter primary mirror and the secondary mirror support structure are folded for launch, then deployed and aligned in space. The primary mirror is composed of 18 individual, 1.3 meter (flat flat) hexagonal segments, each adjustable in seven degrees of freedom (six rigid body + radius of curvature) provided by a set of high precision actuators. The actuated secondary mirror (approx.0.74m) is similarly positioned in six degrees of rigid body motion. The approx..70x.51m, fixed tertiary and approx. 0.17m, flat fine steering mirror complete the telescope mirror complement. The telescope is supported by a composite structure optimized for performance at cryogenic temperatures. All telescope mirrors are made of Be with substantial light-weighting (21 kg for each 1.3M primary segment). Additional Be mounting and supporting structure for the high precision (approx.10nm steps) actuators are attached to the primary segments and secondary mirror. All mirrors undergo a process of thermal stabilization to reduce stress. An extensive series of interferometric measurements guide each step of the polishing process. Final polishing must account for any deformation between the ambient temperature of polishing and the cryogenic, operational temperature. This is accomplished by producing highly precise, cryo deformation target maps of each surface which are incorporated into the final polishing cycle. All flight mirrors have now completed polishing, coating with protected Au and final cryo testing, and the telescope is on track to meet all system requirements. We here review the measured performance of the component mirrors and the predicted performance of the flight telescope.

Bowers, Charles↗

Lateral Beam Shifts and Depolarization Upon Oblique Reflection from Dielectric Mirrors

Abstract Dielectric mirrors comprising thin‐film multilayers are widely used in optical experiments because they can achieve substantially higher reflectance compared to metal mirrors. Here, potential problems are investigated that can arise when dielectric mirrors are used at oblique incidence, in particular for focused beams. It is found that light beams reflected from dielectric mirrors can experience lateral beam shifts, beam‐shape distortion, and depolarization, and these effects have a strong dependence on wavelength, incident angle, and incident polarization. Because vendors of dielectric mirrors typically do not share the particular layer structure of their products, several dielectric‐mirror stacks are designed and simulated, and then the lateral beam shift from two commercial dielectric mirrors and one coated metal mirror is also measured. This paper brings awareness of the tradeoffs between dielectric mirrors and front‐surface metal mirrors in certain optics experiments, and it is suggested that vendors of dielectric mirrors provide information about beam shifts, distortion, and depolarization when their products are used at oblique incidence.

Physics↗

LUTE primary mirror materials and design study report

The major objective of the Lunar Ultraviolet Telescope Experiment (LUTE) Primary Mirror Materials and Design Study is to investigate the feasibility of the LUTE telescope primary mirror. A systematic approach to accomplish this key goal was taken by first understanding the optical, thermal, and structural requirements and then deriving the critical primary mirror-level requirements for ground testing, launch, and lunar operations. After summarizing the results in those requirements which drove the selection of material and the design for the primary mirror are discussed. Most important of these are the optical design which was assumed to be the MSFC baseline (i.e. 3 mirror optical system), telescope wavefront error (WFE) allocations, the telescope weight budget, and the LUTE operational temperature ranges. Mechanical load levels, reflectance and microroughness issues, and options for the LUTE metering structure were discussed and an outline for the LUTE telescope sub-system design specification was initiated. The primary mirror analysis and results are presented. The six material substrate candidates are discussed and four distinct mirror geometries which are considered are shown. With these materials and configurations together with varying the location of the mirror support points, a total of 42 possible primary mirror designs resulted. The polishability of each substrate candidate was investigated and a usage history of 0.5 meter and larger precision cryogenic mirrors (the operational low end LUTE temperature of 60 K is the reason we feel a survey of cryogenic mirrors is appropriate) that were flown or tested are presented.

Ruthven, Greg↗

Fabrication Methods for Adaptive Deformable Mirrors

Previously, it was difficult to fabricate deformable mirrors made by piezoelectric actuators. This is because numerous actuators need to be precisely assembled to control the surface shape of the mirror. Two approaches have been developed. Both approaches begin by depositing a stack of piezoelectric films and electrodes over a silicon wafer substrate. In the first approach, the silicon wafer is removed initially by plasmabased reactive ion etching (RIE), and non-plasma dry etching with xenon difluoride (XeF2). In the second approach, the actuator film stack is immersed in a liquid such as deionized water. The adhesion between the actuator film stack and the substrate is relatively weak. Simply by seeping liquid between the film and the substrate, the actuator film stack is gently released from the substrate. The deformable mirror contains multiple piezoelectric membrane layers as well as multiple electrode layers (some are patterned and some are unpatterned). At the piezolectric layer, polyvinylidene fluoride (PVDF), or its co-polymer, poly(vinylidene fluoride trifluoroethylene P(VDF-TrFE) is used. The surface of the mirror is coated with a reflective coating. The actuator film stack is fabricated on silicon, or silicon on insulator (SOI) substrate, by repeatedly spin-coating the PVDF or P(VDFTrFE) solution and patterned metal (electrode) deposition. In the first approach, the actuator film stack is prepared on SOI substrate. Then, the thick silicon (typically 500-micron thick and called handle silicon) of the SOI wafer is etched by a deep reactive ion etching process tool (SF6-based plasma etching). This deep RIE stops at the middle SiO2 layer. The middle SiO2 layer is etched by either HF-based wet etching or dry plasma etch. The thin silicon layer (generally called a device layer) of SOI is removed by XeF2 dry etch. This XeF2 etch is very gentle and extremely selective, so the released mirror membrane is not damaged. It is possible to replace SOI with silicon substrate, but this will require tighter DRIE process control as well as generally longer and less efficient XeF2 etch. In the second approach, the actuator film stack is first constructed on a silicon wafer. It helps to use a polyimide intermediate layer such as Kapton because the adhesion between the polyimide and silicon is generally weak. A mirror mount ring is attached by using adhesive. Then, the assembly is partially submerged in liquid water. The water tends to seep between the actuator film stack and silicon substrate. As a result, the actuator membrane can be gently released from the silicon substrate. The actuator membrane is very flat because it is fixed to the mirror mount prior to the release. Deformable mirrors require extremely good surface optical quality. In the technology described here, the deformable mirror is fabricated on pristine substrates such as prime-grade silicon wafers. The deformable mirror is released by selectively removing the substrate. Therefore, the released deformable mirror surface replicates the optical quality of the underlying pristine substrate.

Toda, Risaku↗

Gondola for High Altitude Planetary Science (GHAPS) Telescope Secondary Mirror Positioning Hexapod Issues and Alternatives

Active positioning of the GHAPS secondary telescope mirror is desired to correct for rigid body deflections due to temperature variations and gravity sag in the telescope structure that may impact optical performance. The current design concept for the secondary mirror mount uses a Commercial-Off -the-Shelf hexapod for mirror positioning and fine adjustment. The Hexapod specification states that motions as small as 0.1 microns along the optical axis and 2 microns perpendicular to the optical axis will cause optical aberrations that will require correction by repositioning the secondary mirror. In addition, the secondary mirror mount and positioning system must survive a 15g shock of parachute opening and landing during the instrument recovery operation. The secondary mirror positioning system must operate at a minimum specified temperature of -50 C. The telescope operates in the IR and the secondary mirror mount and positioning device is in the metering path between the primary and secondary mirrors. I2R losses in positioning system actuator devices, which may cause heating of the positioning system and secondary mirror, must be minimized due to the previously mentioned alignment sensitivity and the viewing spectrum of interest. The GHAPs project was cancelled on June 30, 2017. The purpose of this study is to address some of the issues identified with the hexapod secondary mirror positioning system and identify alternative approaches. This information may be used if the project is re-started at a later date.

Gondola Mirror Hexapo↗

Analytical expressions of the surface shape of ‘diaboloid’ mirrors

Modern deterministic polishing processes allow fabrication of x-ray optics with almost any arbitrary aspherical surface shape. Among these optics, the so called "diaboloid"mirror is of special interest. The diaboloid mirror that converts a cylindrical wave to a spherical wave would improve focusing in x-ray beamlines implementing a diffraction element between a parabolic cylinder and a toroidal mirror. The replacement of the toroidal mirror in existing beamlines by the diaboloid mirror would mitigate aberrations. The shape of the diaboloid mirror is usually calculated numerically based on a truncated polynomial solution of the optical path problem. Here, we present an exact analytical solution for the shape of a diaboloid mirror as a function of the conjugate parameters of the mirror placed in a beamline. The derived analytical expressions for the diaboloid mirror in both the canonical and mirror-based coordinate systems are implemented in ray-tracing simulations to verify the beamline performances.

Yashchuk, Valeriy V.↗

Design of optical mirror structures

The structural requirements for large optical telescope mirrors was studied with a particular emphasis placed on the three-meter Large Space Telescope primary mirror. Analysis approaches through finite element methods were evaluated with the testing and verification of a number of element types suitable for particular mirror loadings and configurations. The environmental conditions that a mirror will experience were defined and a candidate list of suitable mirror materials with their properties compiled. The relation of the mirror mechanical behavior to the optical performance is discussed and a number of suitable design criteria are proposed and implemented. A general outline of a systematic method to obtain the best structure for the three-meter diffraction-limited system is outlined. Finite element programs, using the STRUDL 2 analysis system, were written for specific mirror structures encompassing all types of active and passive mirror designs. Parametric studies on support locations, effects of shear deformation, diameter to thickness ratios, lightweight and sandwich mirror configurations, and thin shell active mirror needs were performed.

Soosaar, K.↗