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At least 73 records · Page 4

Macro, mini, micro and nano (M(sup 3)N) technologies for the future

Microelectromechanical systems (MEMS), micro systems technologies (MST), and micromanufacturing are relatively recent phrases or acronyms that have become synonymous with the design, development, and manufacture of 'micro' devices and systems. Micromanufacturing encompasses MEMS or MST and, in addition, includes all of the processes involved in the production of micro things. Integration of mechanical and electrical components, including built-in computers, can be formed into systems which must be connected to the macroworld. Macro, mini, micro, and nano technologies are all a part of MEMS or micromanufacturing. At this point in the development of the technology, it is becoming apparent that mini systems, with micro components, could very well be the economic drivers of the technology for the foreseeable future. Initial research in the fabrication of microdevices using IC processing technology took place over thirty years ago. Anisotropic etching of silicon was used to produce piezoresistive diaphragms. Since the early 60's, there has been gradual progress in MEMS until the early 1980's when worldwide interest in the technology really started to develop. During this time high aspect ratio micromachining using x rays was started in Germany. In 1987 the concept of a 'silicon micromechanics foundry' was proposed. Since then the interest in the U.S., Germany, and Japan has increased to the point where hundreds of millions of dollars of research monies are being funneled into the technology (at least in Germany and Japan) and the technology has been classified as critical or as a technology or national importance by the U.S. government.

Friedrich, Craig R.↗

Micro-Mechanical Voltage Tunable Fabry-Perot Filters Formed in (111) Silicon

The MEMS (Micro-Electro-Mechanical-Systems) technology is quickly evolving as a viable means to combine micro-mechanical and micro-optical elements on the same chip. One MEMS technology that has recently gained attention by the research community is the micro-mechanical Fabry-Perot optical filter. A MEMS based Fabry-Perot consists of a vertically integrated structure composed of two mirrors separated by an air gap. Wavelength tuning is achieved by applying a bias between the two mirrors resulting in an attractive electrostatic force which pulls the mirrors closer. In this work, we present a new micro-mechanical Fabry-Perot structure which is simple to fabricate and is integratable with low cost silicon photodetectors and transistors. The structure consists of a movable gold coated oxide cantilever for the top mirror and a stationary Au/Ni plated silicon bottom mirror. The fabrication process is single mask level, self aligned, and requires only one grown or deposited layer. Undercutting of the oxide cantilever is carried out by a combination of RIE and anisotropic KOH etching of the (111) silicon substrate. Metallization of the mirrors is provided by thermal evaporation and electroplating. The optical and electrical characteristics of the fabricated devices were studied and show promissing results. A wavelength shift of 120nm with 53V applied bias was demonstrated by one device geometry using 6.27 micrometer air gap. The finesse of the structure was 2.4. Modulation bandwidths ranging from 91KHz to greater than 920KHz were also observed. Theoretical calculations show that if mirror reflectivity, smoothness, and parallelism are improved, a finesse of 30 is attainable. The predictions also suggest that a reduction of the air gap to 1 micrometer results in an increased wavelength tuning range of 175 nm with a CMOS compatible 4.75V.

Patterson, James D.↗

Micro-optical Distributed Sensors for Aero Propulsion Applications

The objective of this research is to develop micro-opto-mechanical system (MOMS)-based sensors for time- and space-resolved measurements of flow properties in aerodynamics applications. The measurement technique we propose uses optical resonances in dielectric micro-spheres that can be excited by radiation tunneling from optical fibers. It exploits the tunneling-induced and morphology-dependent shifts in the resonant frequencies. The shift in the resonant frequency is dependent on the size, shape, and index of refraction of the micro-sphere. A physical change in the environment surrounding a micro-bead can change one or more of these properties of the sphere thereby causing a shift in frequency of resonance. The change of the resonance frequency can be detected with high resolution by scanning a frequency-tunable laser that is coupled into the fiber and observing the transmission spectrum at the output of the fiber. It is expected that, in the future, the measurement concept will lead to a system of distributed micro-sensors providing spatial data resolved in time and space. The present project focuses on the development and demonstration of temperature sensors using the morphology-dependent optical resonances although in the latter part of the work, we will also develop a pressure sensor. During the period covered in this report, the optical and electronic equipment necessary for the experimental work was assembled and the experimental setup was designed for the single sensor temperature measurements. Software was developed for real-time tracking of the optical resonance shifts. Some preliminary experiments were also carried out to detect temperature using a single bead in a water bath.

Arnold, S.↗

Biologically Inspired Micro-Flight Research

Natural fliers demonstrate a diverse array of flight capabilities, many of which are poorly understood. NASA has established a research project to explore and exploit flight technologies inspired by biological systems. One part of this project focuses on dynamic modeling and control of micro aerial vehicles that incorporate flexible wing structures inspired by natural fliers such as insects, hummingbirds and bats. With a vast number of potential civil and military applications, micro aerial vehicles represent an emerging sector of the aerospace market. This paper describes an ongoing research activity in which mechanization and control concepts for biologically inspired micro aerial vehicles are being explored. Research activities focusing on a flexible fixed- wing micro aerial vehicle design and a flapping-based micro aerial vehicle concept are presented.

Raney, David L.↗

Optimal Micro-Jet Flow Control for Compact Air Vehicle Inlets

The purpose of this study on micro-jet secondary flow control is to demonstrate the viability and economy of Response Surface Methodology (RSM) to optimally design micro-jet secondary flow control arrays, and to establish that the aeromechanical effects of engine face distortion can also be included in the design and optimization process. These statistical design concepts were used to investigate the design characteristics of "low mass" micro-jet array designs. The term "low mass" micro-jet may refers to fluidic jets with total (integrated) mass flow ratios between 0.10 and 1.0 percent of the engine face mass flow. Therefore, this report examines optimal micro-jet array designs for compact inlets through a Response Surface Methodology.

Anderson, Bernhard H.↗

An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process

This paper reports an all-silicon fully symmetrical z-axis micro-g accelerometer that is fabricated on a single-silicon wafer using a combined surface and bulk fabrication process. The microaccelerometer has high device sensitivity, low noise, and low/controllable damping that are the key factors for attaining micro g and sub-micro g resolution in capacitive accelerometers. The microfabrication process produces a large proof mass by using the whole wafer thickness and a large sense capacitance by utilizing a thin sacrificial layer. The sense/feedback electrodes are formed by a deposited 2-3 microns polysilicon film with embedded 25-35 microns-thick vertical stiffeners. These electrodes, while thin, are made very stiff by the thick embedded stiffeners so that force rebalancing of the proof mass becomes possible. The polysilicon electrodes are patterned to create damping holes. The microaccelerometers are batch-fabricated, packaged, and tested successfully. A device with a 2-mm x 1-mm proof mass and a full bridge support has a measured sensitivity of 2 pF/g. The measured sensitivity of a 4-mm x 1-mm accelerometer with a cantilever support is 19.4 pF/g. The calculated noise floor of these devices at atmosphere are 0.23 micro g/sqrt(Hz) and 0.16 micro g/sqrt(Hz), respectively.

Non-NASA Center↗

Micro-Scale Regenerative Heat Exchanger

A micro-scale regenerative heat exchanger has been designed, optimized and fabricated for use in a micro-Stirling device. Novel design and fabrication techniques enabled the minimization of axial heat conduction losses and pressure drop, while maximizing thermal regenerative performance. The fabricated prototype is comprised of ten separate assembled layers of alternating metal-dielectric composite. Each layer is offset to minimize conduction losses and maximize heat transfer by boundary layer disruption. A grating pattern of 100 micron square non-contiguous flow passages were formed with a nominal 20 micron wall thickness, and an overall assembled ten-layer thickness of 900 microns. Application of the micro heat exchanger is envisioned in the areas of micro-refrigerators/coolers, micropower devices, and micro-fluidic devices.

Moran, Matthew E.↗

Multipurpose Fiber Injected-micro-spherical LIDAR System

A technological revolution is occurring in the field of fiber lasers. Over the past two years, the level of power has increased from approx. 100 watts to nearly 1 kilowatt. We are developing a novel fiber laser system, which is a satellite-based LIDAR transmitter of multi-lines. The system is made of a hollow fiber filled with micro-spheres doped with lasing materials. Each sphere has its inherent optical cavity, which makes the system a cavity free and in the same time, emits multi-laser lines for simultaneous multi-task operations. The system is also rugged, compact, lightweight, and durable. Our earlier studies on micro-spheres doped with different laser dyes demonstrated the emission of extremely fine laser lines of less than 3 A line-width, which are of interest for spectroscopic applications, sensing, imaging, and optical communications. Individual dye-doped micro-spheres demonstrated a lasing resonance peaks phenomenon in their fluorescence spectra of linear and nonlinear features that do not exist in the bulk dye solutions. Each individual micro-sphere acts as a laser system with inherent cavity, where the fluorescence line suffers multiple internal reflections within the micro-sphere and gains enough energy to become a laser line. Such resonance peaks are dependent on the sphere's morphology, size, shape, and its refractive index. These resonance peaks are named structural resonance, whispering modes or whispering gallery modes, creeping waves, circumferential waves, surfaces modes, and virtual modes. All of these names refer to the same phenomenon of morphology dependent resonance (MDR), which has already been described and predicted precisely by electromagnetic theory and Lorentz-Mie theory since 1908. The resonance peaks become more obvious when the particle size approaches and exceeds the wavelength of the laser used and the relative index of the particle is greater than that of the surrounding medium. Additional information is included in the original extended abstract.

Abdelayem, Hossin↗

Micro Machining Enhances Precision Fabrication

Advanced thermal systems developed for the Space Station Freedom project are now in use on the International Space Station. These thermal systems employ evaporative ammonia as their coolant, and though they employ the same series of chemical reactions as terrestrial refrigerators, the space-bound coolers are significantly smaller. Two Small Business Innovation Research (SBIR) contracts between Creare Inc. of Hanover, NH and Johnson Space Center developed an ammonia evaporator for thermal management systems aboard Freedom. The principal investigator for Creare Inc., formed Mikros Technologies Inc. to commercialize the work. Mikros Technologies then developed an advanced form of micro-electrical discharge machining (micro-EDM) to make tiny holes in the ammonia evaporator. Mikros Technologies has had great success applying this method to the fabrication of micro-nozzle array systems for industrial ink jet printing systems. The company is currently the world leader in fabrication of stainless steel micro-nozzles for this market, and in 2001 the company was awarded two SBIR research contracts from Goddard Space Flight Center to advance micro-fabrication and high-performance thermal management technologies.

Source record↗

Micro-grooved heat transfer combustor wall

A gas turbine engine hot section combustor liner is provided a non-film cooled portion of a heat transfer wall having a hot surface and a plurality of longitudinally extending micro-grooves disposed in the portion of the wall along the hot surface in a direction parallel to the direction of the hot gas flow. The depth of the micro-grooves is very small and on the order of magnitude of a predetermined laminar sublayer of a turbulent boundary layer. The micro-grooves are sized so as to inhibit heat transfer from the hot gas flow to the hot surface of the wall while reducing NOx emissions of the combustor relative to an otherwise similar combustor having a liner wall portion including film cooling apertures. In one embodiment the micro-grooves are about 0.001 inches deep and have a preferred depth range of from about 0.001 inches to 0.005 inches and which are square, rectangular, or triangular in cross-section and the micro-grooves are spaced about one width apart.

Ward, Steven D.↗

SUB 1-Millimeter Size Fresnel Micro Spectrometer

An ultra-small micro spectrometer with less than 1mm diameter was constructed using Fresnel diffraction. The fabricated spectrometer has a diameter of 750 nmicrometers and a focal length of 2.4 mm at 533nm wavelength. The micro spectrometer was built with a simple negative zone plate that has an opaque center with an ecliptic shadow to remove the zero-order direct beam to the aperture slit. Unlike conventional approaches, the detailed optical calculation indicates that the ideal spectral resolution and resolving power do not depend on the miniaturized size but only on the total number of rings. We calculated 2D and 3D photon distribution around the aperture slit and confirmed that improved micro-spectrometers below 1mm size can be built with Fresnel diffraction. The comparison between mathematical simulation and measured data demonstrates the theoretical resolution, measured performance, misalignment effect, and improvement for the sub-1mm Fresnel micro-spectrometer. We suggest the utilization of an array of micro spectrometers for tunable multi-spectral imaging in the ultra violet range.

Park, Yeonjoon↗

Methods and Devices for Micro-Isolation, Extraction, and/or Analysis of Microscale Components

Provided herein are devices and methods for the micro-isolation of biological cellular material. A micro-isolation apparatus described can comprise a photomask that protects regions of interest against DNA-destroying illumination. The micro-isolation apparatus can further comprise photosensitive material defining access wells following illumination and subsequent developing of the photosensitive material. The micro-isolation apparatus can further comprise a chambered microfluidic device comprising channels providing access to wells defined in photosensitive material. The micro-isolation apparatus can comprise a chambered microfluidic device without access wells defined in photosensitive material where valves control the flow of gases or liquids through the channels of the microfluidic device. Also included are methods for selectively isolating cellular material using the apparatuses described herein, as are methods for biochemical analysis of individual regions of interest of cellular material using the devices described herein. Further included are methods of making masking arrays useful for the methods described herein.

Kartalov, Emil P.↗

Mini-Stamp as a Micro-Display for At-A-Glance Subsystem Information for DSN Links

Operators of the Deep Space Network (DSN) attend to numerous tasks with the overall goal of providing continuous support for the world's deep space missions. This high-stakes operations environment requires operators to understand the state of the Deep Space Network and predict what will happen next. Under the Follow-the-Sun initiative which requires remote operations of the highly complex telecommunications equipment, operators will need to remain aware of the state of the entire network rather than just their own facility, and transitioning fluidly between periods of low activity and periods of high demand. I designed a micro-display for operators to see, at a glance, the state of a Deep Space Network support including its subsystems. Using in-depth user-centered and participatory design techniques to identify information requirements, I designed what I called a Postage Stamp (NTR-49720) for individual operators to be able to maintain awareness of their own assigned supports. However, under Follow the Sun, operators must remain aware of all supports. The area occupied by the Postage Stamp must shrink to allow operators to see the state of the entire system, e.g., via a Big Board posted prominently in the operations room. Micro-displays are tools for mental model re-alignment, helping operators to keep their mental models of how the system works and behaves aligned with the changing state of the complex system. Data-driven micro-displays such as the Postage Stamp and Mini-Stamp display information about the system in a consistent way. Like a traffic light, the format of the micro-display never changes: the operator always knows where to look to find a specific piece of information. The Mini-Stamp always looks like the Mini-Stamp, and all of its data fields always lie in the same place on the micro-display. Real-time data flows through the Mini-Stamp to provide information to the operator.

Holloway, Alexandra↗

Micro and Nano Systems for Space Exploration

This slide presentation reviews the use of micro and nano systems in Space exploration. Included are: an explanation of the rationales behind nano and micro technologies for space exploration, a review of how the devices are fabricated, including details on lithography with more information on Electron Beam (E-Beam) lithography, and X-ray lithography, a review of micro gyroscopes and inchworm Microactuator as examples of the use of MicroElectoMechanical (MEMS) technology. Also included is information on Carbon Nanotubes, including a review of the CVD growth process. These micro-nano systems have given rise to the next generation of miniature X-ray Diffraction, X-ray Fluorescence instruments, mass spectrometers, and terahertz frequency vacuum tube oscillators and amplifiers, scanning electron microscopes and energy dispersive x-ray spectroscope. The nanotechnology has also given rise to coating technology, such as silicon nanotip anti-reflection coating.

carbon nanotubes↗

Evaluation of the micro-carburetor

A prototype sonic, variable-venturi automotive carburetor was evaluated for its effects on vehicle performance, fuel economy, and exhaust emissions. A 350 CID Chevrolet Impala vehicle was tested on a chassis dynamometer over the 1975 Federal Test Procedure, urban driving cycle. The Micro-carburetor was tested and compared with stock and modified-stock engine configurations. Subsequently, the test vehicle's performance characteristics were examined with the stock carburetor and again with the Micro-carburetor in a series of on-road driveability tests. The test engine was then removed from the vehicle and installed on an engine dynamometer. Engine tests were conducted to compare the fuel economy, thermal efficiency, and cylinder-to-cylinder mixture distribution of the Micro-carburetor to that of the stock configuration. Test results show increases in thermal efficiency and improvements in fuel economy at all test conditions. Improve fuel/air mixture preparation is implied from the information presented. Further improvements in fuel economy and exhaust emissions are possible through a detailed recalibration of the Micro-carburetor.

Weiss, M. F.↗

Micro-elastohydrodynamic Lubrication

Conventional elastohydrodynamics, which is based on assumption of smooth surfaces, is reviewed briefly to show its insufficiency for explaining the failure processes in these contacts. For conditions approaching failure, lubrication breakdown occurs locally at asperity contacts where the lubrication behavior is controlled by micro-elastohydrodynamic lubrication (Micro-EHL). Description is given to the film formation mechanisms in micro-EHL conjunctions. An assessment is made to the level of film thickness due to normal approach and sliding of a single asperity and due to asperlty-asperlty collision between two asperities; Possible influence of the micro-EHL to incipient scuffing failure, surface crack propagation and wear are discussed.

H S Cheng↗

Conceptual design of a closed loop nutrient solution delivery system for CELSS implementation in a micro-gravity environment

This paper describes the results of a study to develop a conceptual design for an experimental, closed-loop fluid handling system capable of monitoring, controlling, and supplying nutrient solution to higher plants. The Plant Feeder Experiment (PFX) is designed to be flight tested in a micro-gravity (micro-g) environment and was developed under NASA's In-Space Technology Experiments Program (INSTEP). When flown, PFX will provide information on both the generic problems of micro-g fluid handling and the specific problems associated with the delivery of nutrient solution in a micro-g environment. The experimental hardware is designed to fit into two middeck lockers on the Space Shuttle, and incorporates several components that have previously been flight tested.

Schwartzkopf, Steven H.↗

Micro guidance and control synthesis: New components, architectures, and capabilities

New GN&C (guidance, navigation and control) system capabilities are shown to arise from component innovations that involve the synergistic use of microminiature sensors and actuators, microelectronics, and fiber optics. Micro-GN&C system and component concepts are defined that include micro-actuated adaptive optics, micromachined inertial sensors, fiber-optic data nets and light-power transmission, and VLSI microcomputers. The thesis is advanced that these micro-miniaturization products are capable of having a revolutionary impact on space missions and systems, and that GN&C is the pathfinder micro-technology application that can bring that about.

Mettler, Edward↗