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At least 73 records · Page 4

Dry etching of metallization

The production dry etch processes are reviewed from the perspective of microelectronic fabrication applications. The major dry etch processes used in the fabrication of microelectronic devices can be divided into two categories - plasma processes in which samples are directly exposed to an electrical discharge, and ion beam processes in which samples are etched by a beam of ions extracted from a discharge. The plasma etch processes can be distinguished by the degree to which ion bombardment contributes to the etch process. This, in turn is related to capability for anisotropic etching. Reactive Ion Etching (RIE) and Ion Beam Etching are of most interest for etching of thin film metals. RIE is generally considered the best process for large volume, anisotropic aluminum etching.

Bollinger, D.

Design and Engineering of LUPIN: A Test-Bed Radiofrequency Ion Source for Enhanced Neutral Beam Injection on DIII-D

The Large, Uniform Plasma for Ionizing Neutrals (LUPIN) is an RF inductively coupled plasma (ICP) chamber for demonstrating plasma performance of an RF ICP positive ion source upgrade for the DIII-D Neutral Beam Injection (NBI) system. LUPIN will be used to investigate ion source physics, including neutral gas dynamics, plasma density uniformity, interactions with Faraday shields, and power coupling to novel RF antenna designs. LUPIN has an RF generator capable of delivering 20 kW of power at 2 MHz, which is coupled into a cylindrical quartz vessel measuring 20 cm in length and 10 cm in radius. This configuration matches the power density requirements for a full-scale ion source. Target hydrogen and deuterium plasma densities exceeding 10 18 m -3 would relate to extracted ion current densities of 2100 A/m 2 for 10 s. Vacuum conductance and gas flow calculations predict a maximum achievable neutral gas flow rate of 1675 Pa·L/s at 5 Pa of He, which mimics the gas flow of the DIII-D NBI system. Designs have been developed for an internal Faraday shield to mitigate heat flux and ion sputtering on the dielectric vessel. Thermomechanical finite element simulations demonstrated the Faraday shield design to be capable of withstanding anticipated heat loads from worst-case operation scenarios. Results of upcoming experimental investigations on LUPIN will guide the design of a full-scale prototype for DIII-D integration.

Faraday shield

Structure–Function Insights into Thermoresponsive Copolymers as Lanthanide Precipitants

The synthetic toolbox for stimuli-responsive polymers has broadened to include many tunable variables, making these materials applicable in diverse technologies. However, unraveling the key composition–structure–function relationships to facilitate ground-up design remains a challenge due to the inherent dispersity in sequence and conformations for synthetic polymers. We here present a systematic study of these relationships using a model system of copolymers with a thermoresponsive (N-isopropylacrylamide) backbone in addition to metal-chelating (acrylic acid) and hydrophobic structural comonomers and evaluate their efficiency at isolating technologically critical lanthanide ions. The efficiency of lanthanide ion extraction by precipitation was quantitated with a metallochromic dye to reveal trends relating copolymer hydrophobicity to improved separations. Further, we examined the role of different hydrophobic comonomers in dictating the solution-phase conformation of the polymer in the presence and absence of lanthanide ions, and we correlated key features of the hydrophobic comonomer to extraction efficiency. Lastly, we identified how the local proximity of thermoresponsive, chelating, and hydrophobic subunits facilitates metal extraction by manipulating the copolymer sequence with multiblock polymerization. Through mechanistic analysis, we propose a binding-then-assembly process through which metal ions are coprecipitated with macromolecular chelators.

Copolymers

Continuous Electrode Inertial Electrostatic Confinement Fusion

The NIAC Phase I project on Inertial Electrostatic Confinement was a continuation of early stage research that was funded by an NSTRF. The student on the project, Andrew Chap, was funded by the NSTRF from Fall 2013 through the Summer of 2017, and then was funded on the NIAC through the completion of his PhD. A significant amount of work targeting the plasma confinement physics was the focus of his NSTRF, and over the course of that effort he developed a number of analyses and computational tools that leveraged GPU parallelization. A detailed discussion of these models can be found in his dissertation, which has been included as Appendix D in this report. As a requirement for the NSTRF, Andrew's full dissertation was submitted at the end of the program.Having developed the computational tools, a substantial amount of simulation and analyses leveraging those tools were conducted during the Fall of 2017, under the auspices of the NIAC funded research. Much of this work targeted optimization of the confinement fields, investigating their structure and the possible advantages of having them be time-varying. The results of these simulations can also be found in Appendix D.One of the main results from this research is that the density of ions electrostatically confined within the system can indeed be increased by several orders of magnitude by optimizing the radial potential distribution, and by dynamically varying these fields to maintain compressed ion bunches. An electron population can also be confined within the core by a static radial cusped magnetic field,which helps to support a greater ion density within the core. The issue with the confinement mechanism is that as the ion densities are increased toward fusion-relevant levels, the electrostatic forces generated by the confined electron population become so great that the ions are no longer energetic enough to leave the device core. As their excursions into the outer channels are diminished, the mechanism that is used to maintain their non-thermal velocity distributions becomes ineffective, and eventually the ions become fully confined within the core, where they thermalize. A possible fix to the problem comes by discarding the active ion control (a main pillar of the concept)but retaining the structure of the permanent magnet confinement of the electron population. Such cusped field confinement has been the focus of other IEC approaches (e.g. Polywell), but the high transparency of the permanent magnet structure lends itself to better ion extraction and power conversion (a second pillar of the concept). The question then becomes whether any influence on the ion evolution within the core can be achieved to slow the thermalization of the ions. Such approaches have been studied in highly idealized analytic models, but face major criticisms within the literature. While this is a possible path forward, the uncertainty in the approach did not warrant committing NIAC Phase II resources to investigating the concept at this time.

Sedwick, Raymond

Influence of Water Sorption on Ionic Conductivity in Polyether Electrolytes at Low Hydration

Ion-containing polymers are subject to a wide range of hydration conditions across electrochemical and water treatment applications. Significant work on dry polymer electrolytes for batteries and highly swollen membranes for water purification has informed our understanding of ion transport under extreme conditions. However, knowledge of intermediate conditions (i.e., low hydration) is essential to emerging applications (e.g., electrolyzers, fuel cells, and lithium extraction). Ion transport under low levels of hydration is distinct from the extreme conditions typically investigated, and the relevant physics cannot be extrapolated from existing knowledge, stifling materials design. In this study, we conducted ion transport measurements in LiTFSI-doped polyethers that were systematically hydrated from dry conditions. A semiautomated apparatus that performs parallel measurements of water uptake and ionic conductivity in thin-film polymers under controlled humidity was developed. For the materials and swelling range considered in this study (i.e., <0.07 g water/g dry polymer electrolyte), ionic conductivity depends nonlinearly on water uptake, with the initial sorbed water weakly affecting conductivity. With additional increases in swelling, more significant increases in conductivity were observed. Remarkably, changes in conductivity induced by water sorption were correlated with the number of water molecules per lithium ion, with the normalized molar conductivity of different samples effectively collapsing onto one another until this unit of hydration exceeded the solvation number of lithium ions under aqueous conditions. Furthermore, these results provide important knowledge regarding the effects of trace water contamination on conductivity measurements in polymer electrolytes and demonstrate that the lithium-ion solvation number marks a key transition point regarding the influence of water on ion transport in ion-containing polymers.

36 MATERIALS SCIENCE

Optical observations of the AMPTE artificial comet from the Northern Hemisphere

The AMPTE artificial comet of Dec. 27, 1984, developed a well-defined core (maximum size about 160 x 100 km) of cold barium ions, surrounded by a diffuse coma, 500 km in diameter, consisting of ions extracted from the core. A plasma tail extended from the core, mainly directed away from the sun. The plasma tail and diffuse coma consisted of energetic ions (above 200 eV). Confounding predictions, the artificial comet survived for barely five minutes, and the core of the comet moved southward, rather than in the direction of the solar wind.

Rees, D.

Ionisation cross sections of rare-gas atoms by electron impact

A pulsed electron beam and ion extraction method is used to measure normalized values of partial ionization cross sections for rare gases from threshold to 1000 eV. Cross sections obtained for singly ionized species are used to calibrate the mass transmission efficiency of the ion extraction/analyzer/detection system by the relative flow technique, and this mass transmission curve is then used to determine the absolute cross sections of the multiply ionized species. Total ion cross sections are found by summation of the individual partial cross sections with proper weighting for charge.

Krishnakumar, E.

Investigations of negative and positive cesium ion species

A direct test is provided of the hypothesis of negative ion creation at the anode or collector of a diode operating under conditions simulating a cesium thermionic converter. The experimental technique involves using direct ion sampling through the collector electrode with mass analysis using a quadrupole mass analyzer. Similar measurements are undertaken on positive ions extracted through the emitter electrode. Measurements were made on a variety of gases including pure cesium, helium-cesium mixtures and cesium-hydrogen as well as cesium-xenon mixtures. The gas additive was used primarily to aid in understanding the negative ion formation processes. Measurements were conducted using emitter (cathode) temperatures up to about 1000 F. The major negative ion identified through the collector was Cs(-) with minor negative ion peaks tentatively identified as H(-), H2(-), H3(-), He(-) and a mass 66. Positive ions detected were believed to be Cs(+), Cs2(+) and Cs3(+).

Chanin, L. M.

Erosion rate diagnostics in ion thrusters using laser-induced fluorescence

We have used laser-induced fluorescence (LIF) to monitor the charge-exchange ion erosion of the molybdenum accelerator electrode in ion thrusters. This real-time, nonintrusive method was implemented by operating a 30cm-diam ring-cusp thruster using xenon propellant. With the thruster operating at a total power of 5 kW, laser radiation at a wavelength of 390 nm (corresponding to a ground state atomic transition of molybdenum) was directed through the extracted ion beam adjacent to the downstream surface of the molybdenum accelerator electrode. Molybdenum atoms, sputtered from this surface as a result of charge-exchange ion erosion, were excited by the laser radiation. The intensity of the laser-induced fluorescence radiation, which is proportional to the sputter rate of the molybdenum atoms, was measured and correlated with variations in thruster operating conditions such as accelerator electrode voltage, accelerator electrode current, and test facility background pressure. We also demonstrated that the LIF technique has sufficient sensitivity and spatial resolution to evaluate accelerator electrode lifetime in ground-based test facilities.

Gaeta, C. J.

Performance of a magnetic multipole line-cusp argon ion thruster

The performance of a 17-cm diameter line-cusp ion thruster, using argon and xenon propellants, is investigated. Basic optimization of the thruster was accomplished without ion extraction and tests were conducted with small vacuum facilities and power supplies. The evaluation of the sensitivity of the performance to changes in discharge electrode configurations and the magnetic circuit is discussed. Final optimization results show that an argon propellant utilization efficiency of 0.9, at 260 W of discharge power per beam ampere, was obtained with a thruster having 20 rows of magnets and 10 tubular anodes. The average ion beam current densities were as high as 13 mA/sq cm. The results are considered to be the highest yet achieved with argon propellant.

Sovey, J. S.

Cometary particulate analyzer

A concept for determining the relative abundance of elements contained in cometary particulates was evaluated. The technique utilizes a short, high intensity burst of laser radiation to vaporize and ionize collected particulate material. Ions extracted from this laser produced plasma are analyzed in a time of flight mass spectrometer to yield an atomic mass spectrum representative of the relative abundance of elements in the particulates. Critical aspects of the development of this system are determining the ionization efficiencies for various atomic species and achieving adequate mass resolution. A technique called energy-time focus, which utilizes static electric fields to alter the length of the ion flight path in proportion to the ion initial energy, was used which results in a corresponding compression to the range of ion flight times which effectively improves the inherent resolution. Sufficient data were acquired to develop preliminary specifications for a flight experiment.

Friichtenicht, J. F.

Fabrication and testing of carbon-carbon grids for ion optics

Ion optics measuring 16.5 cm in diameter and 1.0 mm in thickness were fabricated from carbon-carbon composites that were woven from a high-tensile-modulus carbon fiber. Plate flatness varied by less than 0.05 mm. Several methods were investigated for forming ion-extraction apertures in the carbon-carbon plates, including laser machining, mechanical drilling, and conventional electric discharge machining. Tests conducted using a quartz dilatometer indicated that the coefficient of thermal expansion of the carbon-carbon plates varied between -0.51 to -1.8 x 10 exp -6/degree C at plate temperatures between 173-773 K. Sputter-erosion experiments indicate that carbon-carbon erodes at a rate approximately 25 percent below molybdenum under the same conditions. These material properties indicate that carbon-carbon may be superior to molybdenum for use as ion optics electrodes for ion engines.

Garner, Charles E.

Simulation study of high-current 7 Li 3+ beam acceleration with laser ion source and RFQ linac using direct plasma injection

Accelerator-based neutron sources (ABNS) utilizing the 7 Li(p,n) 7 Be reaction in inverse kinematics offer strong forward-directed neutron emission, making them attractive for compact and clean neutron source with low background neutrons and unwanted radiation. However, practical use of such systems requires lithium ion beam currents that exceed the capability of conventional ion accelerators by two orders of magnitude. In this study, we numerically designed and evaluated a high-current acceleration system based on a direct plasma injection scheme (DPIS), combining a laser ion source (LIS) and a radio-frequency quadrupole (RFQ) linac. The ion extraction optics and RFQ entrance were optimized using IGUN, OPERA, and GPT, demonstrating that over 1.2 A-class beam current can be injected into the RFQ. The RFQ structure was designed under realistic engineering constraints including surface field strength (Kilpatrick factor) and RF power. GPT simulations showed that a 370 mA 7 Li 3+ beam can be successfully accelerated within a ±10 % energy spread. To validate downstream compatibility, we also designed a simplified medium-energy beam transport (MEBT) section and an interdigital H-type (IH) linac, confirming successful acceleration of a 320 mA beam to the total energy of 14 MeV. These results support the feasibility of the DPIS and RFQ approach as a promising solution for compact neutron sources and other high-intensity ion beam applications.

43 PARTICLE ACCELERATORS

Compact Two-step Laser Time-of-Flight Mass Spectrometer for in Situ Analyses of Aromatic Organics on Planetary Missions

RATIONALE A miniature time-of-flight mass spectrometer has been adapted to demonstrate two-step laser desorption-ionization (LOI) in a compact instrument package for enhanced organics detection. Two-step LDI decouples the desorption and ionization processes, relative to traditional laser ionization-desorption, in order to produce low-fragmentation conditions for complex organic analytes. Tuning UV ionization laser energy allowed control ofthe degree of fragmentation, which may enable better identification of constituent species. METHODS A reflectron time-of-flight mass spectrometer prototype measuring 20 cm in length was adapted to a two-laser configuration, with IR (1064 nm) desorption followed by UV (266 nm) postionization. A relatively low ion extraction voltage of 5 kV was applied at the sample inlet. Instrument capabilities and performance were demonstrated with analysis of a model polycyclic aromatic hydrocarbon, representing a class of compounds important to the fields of Earth and planetary science. RESULTS L2MS analysis of a model PAH standard, pyrene, has been demonstrated, including parent mass identification and the onset o(tunable fragmentation as a function of ionizing laser energy. Mass resolution m/llm = 380 at full width at half-maximum was achieved which is notable for gas-phase ionization of desorbed neutrals in a highly-compact mass analyzer. CONCLUSIONS Achieving two-step laser mass spectrometry (L2MS) in a highly-miniature instrument enables a powerful approach to the detection and characterization of aromatic organics in remote terrestrial and planetary applications. Tunable detection of parent and fragment ions with high mass resolution, diagnostic of molecular structure, is possible on such a compact L2MS instrument. Selectivity of L2MS against low-mass inorganic salt interferences is a key advantage when working with unprocessed, natural samples, and a mechanism for the observed selectivity is presented.

Getty, Stephanie

Coherent Strain-Inhibiting Phase Construction of Lithium-Rich Manganese-Based Oxide Toward High Mechanochemical Stability

A layered lithium-rich manganese-based oxide cathode, containing $R\overline{3}m$ (LiTMO 2 , TM = Mn, Ni, Co) and $C2/m$ (Li 2 MnO 3 ) nanodomains, utilizes both transition metals and oxygen redox to yield substantial energy density. However, the inherent heterogeneous nature and distinct nanodomain redox chemistries of layered lithium-rich oxides will inevitably cause pernicious lattice strain and structural displacement, which can hardly be eliminated by conventional doping or coating strategies and result in accelerated performance decay. Herein, we incorporate a strain-inhibiting perovskite phase coherently grown within the layered structure to effectively restrain the displacement and lattice strain during uneven Li-ion extraction. The enhanced mechanochemical stability of the designed cathode benefits the persistent structure and reversible oxygen redox, thereby achieving high initial Coulombic efficiency and stable cycling and voltage profiles. In conclusion, our approach of lattice engineering alleviates the strain and displacement caused by inhomogeneous reactivity between heterogeneous nanodomains and promotes the development of advanced cathode materials with long durability.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH

Composite ion accelerator grids.

Ion extraction system for low voltage mercury electron bombardment thrustors using glass coating fused to perforated metal grid

Banks, B.

The radial field Kaufman thruster.

Kaufman thrustor with predominant radial field, noting electron mobility across ion extraction screen and advantages of uniform plasma distribution

Knauer, W.