Hard X-ray imaging with sub-10 nm resolution by scanning bonded 2D multilayer Laue lenses
Multilayer Laue lenses (MLLs) offer significant advantages over traditional diffractive focusing optics, such as zone plates (ZPs), in terms of efficiency and durability when focusing hard X-rays to 10 nm and below. Typically, a pair of 1D MLLs is aligned independently to achieve point focusing. This approach only permits scanning microscopy by moving the sample stage, which presents a limitation when it comes to scanning large or bulky objects at high speed. In this study, we present an experimental demonstration of scanning monolithically bonded 2D MLLs while keeping the sample stationary, effectively addressing the limitation of the sample’s size and weight. We characterized the system’s positional and angular stabilities during scanning, which are critical parameters to the nanofocusing performance of MLLs. In addition, we provided the X-ray measurement results and corresponding image resolution analysis.