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At least 703 records · Page 39
All sourcesNASA NTRSDOE OSTI
DOE OSTI2021

Mechanism of Microseismic Generation During Hydraulic Fracturing - With Evidence From HFTS 2 Observations

The objective of this study is to understand how microseismic events are generated during hydraulic fracturing, as well as the role of geomechanical conditions (i.e., stress and mechanical stratigraphy) in this process. In the industry, microseismic event clouds have been generally used as an “outer-boundary” of the “stimulated reservoir volume” (SRV). However, by comparing with other surveillance data (Low frequency Distributed Acoustic Sensing, or LF-DAS strain) in the Hydraulic Fracturing Test Site (HFTS) 2 experiment, we show that this assumption is fundamentally flawed. The HFTS 2 data has three unique observations that have not been commonly observed in other datasets: 1. Due to influence of offset pad depletion, microseismic data shows that hydraulic fractures from the child well can propagate over 3000 feet into the depleted low stress zone. 2. By comparing microseismic and horizontal fiber LF-DAS strain data, we observe that microseismic event cloud does not necessarily reflect the created hydraulic fracture volume. Particularly, the extent of microseismic event clouds near heel stages are much shorter than what is shown with LF-DAS strain data. 3. Microseismic event magnitudes are larger in the depleted regions. Through geomechanical analysis, we demonstrate that the “bedding-plane-slip” model is likely the mechanism for microseismic generation during hydraulic fracturing. Furthermore, this model successfully explains the above field observations from HFTS 2 experiment. We also provide a quantitative relationship connecting the microseismic event magnitude with fracture width increment and layer mechanical property contrast.

58 GEOSCIENCES↗
DOE OSTI2016

The microwave Hall effect measured using a waveguide tee

This paper describes a simple microwave apparatus to measure the Hall effect in semiconductor wafers. The advantage of this technique is that it does not require contacts on the sample or the use of a resonant cavity. Our method consists of placing the semiconductor wafer into a slot cut in an X-band (8–12 GHz) waveguide series tee, injecting microwave power into the two opposite arms of the tee, and measuring the microwave output at the third arm. A magnetic field applied perpendicular to the wafer gives a microwave Hall signal that is linear in the magnetic field and which reverses phase when the magnetic field is reversed. The microwave Hall signal is proportional to the semiconductor mobility, which we compare for calibration purposes with d.c. mobility measurements obtained using the van der Pauw method. We obtain the resistivity by measuring the microwave reflection coefficient of the sample. This paper presents data for silicon and germanium samples doped with boron or phosphorus. The measured mobilities ranged from 270 to 3000 cm{sup 2}/(V s).

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗
DOE OSTI2026

CHESS 2025: Crown polygons and extracted reflectance for field sampling sites

This dataset contains (1) crown polygons for each tree, meadow, and shrub site sampled in the 2025 Colorado Headwaters Ecological Spectroscopy Study (CHESS) campaign (in geojson format, .geojson) and (2) extracted reflectance, uncertainty, and shade estimates for each crown polygon from the 2018 National Ecological Observatory Network (NEON) and 2025 CHESS campaigns. (in CSV format, .csv). Additional metadata are provided in a data dictionary describing column names and definitions (dd.csv), and in a file-level metadata file (flmd.csv). Crown polygons were manually delineated for each site in the 2025 campaign using a combination of field-collected GPS data (doi:10.15485/3022418), RGB (red, green, blue) and false color reflectance mosaics (doi:10.15485/3013535), and LiDAR-derived (Light Detection and Ranging) canopy height (CHM) and digital surface (DSM) models (DOI and citation to be added upon publication). Where there was misalignment between the spectrometer- and LiDAR-derived data products, polygons prioritized alignment with the spectrometer-derived data products. Polygons were delineated conservatively to only select pixels representative of vegetation samples collected in the field. Crown polygons for 2018 are published at (doi:10.15485/1618130) and were developed using the same protocol. For each polygon, all pixels from all flightlines were extracted where the pixel centroid was contained within the polygon. For each pixel, we extracted the surface reflectance, uncertainty, and shade estimates. Details on the extracted datasets are available at (doi:10.15485/3013527, doi:10.15485/3013535). CHESS Project Description: The Colorado Headwaters Ecological Spectroscopy Study (CHESS) comprised a multi-week airborne remote sensing and field observation campaign in the Upper Gunnison Basin, Colorado, conducted in June and July of 2025. Airborne remote sensing was conducted by the National Ecological Observatory Network Airborne Observation Platform (NEON AOP), concurrent with a field campaign run by the Rocky Mountain Biological Laboratory (RMBL), the Lawrence Berkeley National Laboratory (LBNL) and SLAC National Accelerator Laboratory Watershed Function Science Focus Area (SFA), and NASA-JPL (Jet Propulsion Laboratory) Earth Surface Mineral Dust Source Investigation (EMIT) program. Between June 10 and July 18, 2025, the NEON AOP flight team collected high-resolution aerial imaging spectroscopy and Light Detection and Ranging (LiDAR) data over three domains: the Upper East River (CRBU), Almont Triangle (ALMO), and the Upper Taylor Basin (UPTA). In coordination with the flights, a field campaign acquired ground-truth observations, including observations of vegetation composition, foliar traits, forest demography, and subsurface properties in 18 core sampling areas within the domains. Additional surface water observations were taken at over 380 point locations. All CHESS campaign datasets can be found within the CHESS ESS-DIVE data portal: https://data.ess-dive.lbl.gov/portals/chess. Funding Acknowledgment: This research was carried out at the Jet Propulsion Laboratory, California Institute of Technology, under a contract with the National Aeronautics and Space Administration (80NM0018D0004) and was funded by EMIT Extended Mission Phase E Science.

2018 NEON and 2025 CHESS Campaigns↗
DOE OSTI2021

Development of in-use engine speed/torque heat maps across multiple heavy-duty commercial vehicle vocations

The U.S. Department of Energy (DOE) established the SuperTruck program with the goal of achieving brake thermal efficiency (BTE) greater than or equal to 55% as demonstrated in an operational heavy-duty (HD) diesel engine at a 65-miles-per-hour (mph) cruise point. Beyond the line-haul application, HD engines operate in a wide range of speed and torque conditions that are unlikely to yield the same efficiency under real-world operation. Thereby, the in-use engine heat maps described in this paper are a valuable tool to illustrate whether the engine-efficiency “sweet spot” matches the most frequent operating conditions. In this study, NREL developed engine heat maps to quantify the important operating points for various vocations using our Fleet DNA database of commercial fleet vehicle operations data. These heat maps clearly show that high-frequency operating points vary significantly according to vehicle vocation, while only a few of them match the sweet spot. Beyond the illustration, engine in-use heat maps can also be leveraged to build up reduced-order engine-efficiency models, needed by many rapid powertrain simulations. As case studies, nine reduced-order models – including line-haul truck, transfer truck, transit bus, transit bus with compressed natural gas (CNG) engine, drayage, refuse pickup, local delivery, utility truck, and school bus with CNG engine – using a trust-region reflective algorithm to fit the on-road data extracted based on the engine in-use heat maps.

33 ADVANCED PROPULSION SYSTEMS↗
DOE OSTI2023

Advanced Fuel Cycle Cost Basis Report: Module D1-2 LWR Pelletized MOX Fuel Fabrication

Nature of this 2021 Module update from previous AFC-CBRs: Use of U,Pu MOX life cycle cost data from late 1970s Non-proliferation Assessment Systems Analysis Program (NASAP). This archived data has been updated in 2018-2019 to reflect today’s regulatory and economic conditions and is presented in 2017. For the lower unit cost MOX fabrication case the PuO 2 from the reprocessed LWR SNF is assumed to be fabricated immediately after aqueous PUREX reprocessing, thus minimizing the time for undesirable actinide radioisotopes, from the standpoint of radiation safety, to build in. Fabricated MOX utilizing separated and multi-year stored Pu from aqueously reprocessed SNF has also been added to this Module as a second LWR MOX fabrication variant, requiring additional and more costly glovebox design and operations to protect personnel. This new NASAP-informed data augments historical data and unit cost projections appearing in the 2009 (Shropshire et al 2009), 2012 (Dixon et al 2012), and 2017 Dixon et al 2017) AFC-CBRs. The “What-it-takes” 2017 unit fabrication cost values based on the updated NASAP studies are escalated to 2020$ for this 2021 Update Report.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2015

A study of Channeling, Volume Reflection and Volume Capture of 3.35 - 14.0 GeV Electrons in a bent Silicon Crystal

We present the experimental data and analysis of experiments conducted at SLAC National Accelerator Laboratory investigating the processes of channeling, volume-reflection and volume-capture along the (111) plane in a strongly bent quasi-mosaic silicon crystal. Additionally, these phenomena were investigated at 5 energies: 3.35, 4.2, 6.3, 10.5 and 14.0 GeV with a crystal with bending radius of 0.15m, corresponding to curvatures of 0.070, 0.088, 0.13, 0.22 and 0.29 times the critical curvature respectively. We have extracted important parameters describing the channeling process such as the dechanneling length, the angle of volume reflection, the surface transmission and the widths of the distribution of channeled particles parallel and orthogonal to the plane.

ACCPHY↗
DOE OSTI2024

Increased spatial coherence length from an asymmetric crystal reflection at grazing exit

Coherent X-ray imaging is an active field at synchrotron sources. The images rely on the available coherent flux over a limited field of view. At many synchrotron beamlines a double-crystal monochromator (DCM) is employed in a standard nondispersive arrangement. For coherent diffraction imaging it is advantageous to increase the available field of view by increasing the spatial coherence length (SCL) of a beam exiting such a DCM. Here, Talbot interferometry data together with ray-tracing simulations for a (+ − − +) four-reflection experimental arrangement are presented, wherein the first two reflections are in the DCM and the final fourth reflection is asymmetric at grazing exit. Analyses of the interferometry data combined with the simulations show that compared with the beam exiting the DCM a gain of 76% in the SCL was achieved, albeit with a factor of 20 reduction in flux density, which may not be a severe penalty at a synchrotron beamline. Previous efforts reported in the literature to increase the SCL that employed asymmetric crystal diffraction at grazing incidence are also discussed. A much reduced SCL is found presently in simulations wherein the same asymmetric crystal is set for grazing incidence instead of grazing exit. In addition, the present study is compared and contrasted with two other means of increasing the SCL. These are (i) focusing the beam onto an aperture to act as a secondary source, and (ii) allowing the beam to propagate in vacuum an additional distance along the beamline.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗
DOE OSTI2021

PS3: The Pheno-Synthesis software suite for integration and analysis of multi-scale, multi-platform phenological data

Phenology is the study of recurring plant and animal life-cycle stages which can be observed across spatial and temporal scales that span orders of magnitude (e.g., organisms to landscapes). The variety of scales at which phenological processes operate is reflected in the range of methods for collecting phenologically relevant data, and the programs focused on these collections. Consideration of the scale at which phenological observations are made, and the platform used for observation, is critical for the interpretation of phenological data and the application of these data to both research questions and land management objectives. However, there is currently little capacity to facilitate access, integration and analysis of cross-scale, multi-platform phenological data. This paper reports on a new suite of software and analysis tools – the “Pheno-Synthesis Software Suite,” or PS3 – to facilitate integration and analysis of phenological and ancillary data, enabling investigation and interpretation of phenological processes at scales ranging from organisms to landscapes and from days to decades. We use PS3 to investigate phenological processes in a semi-aride, mixed shrub-grass ecosystem, and find that the apparent importance of seasonal precipitation to vegetation activity (i.e., “greenness”) is affected by the scale and platform of observation. We end by describing potential applications of PS3 to phenological modeling and forecasting, understanding patterns and drivers of phenological activity in real-world ecosystems, and supporting agricultural and natural resource management and decision-making.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2017

Synthesis and characterization of heterometallic uranyl pyridinedicarboxylate compounds

The incorporation of transition metals into hybrid uranyl materials can result in more diverse structural topologies and variations in physical and chemical properties. To explore the impact of transition metals on the uranyl cation, five uranium containing bimetallic chain compounds, [(UO{sub 2})M(PDC){sub 2}(H{sub 2}O){sub 4}]·4(H{sub 2}O) (PDC = 2,6 pyridinedicarboxylate; M = Ni{sup 2+}, Co{sup 2+}, Fe{sup 2+}, Zn{sup 2+,} and Cu{sup 2+}) were synthesized by evaporation of aqueous solutions at room temperature. The uranyl cation is complex by two PDC ligands and the transition metal cations bond to the complex to form a one-dimensional chain topology. The presence of the transition metal leads to the presence of a stronger uranyl oxo bonds as shown by the single-crystal X-ray diffraction data and the Raman spectra. Solid state diffuse reflectance UV/Visible spectra confirmed the presence of the transition metals in the structure by the broad bands that appeared at relevant wavelengths. - Graphical abstract: Synthesis and characterization of [(UO{sub 2})M(2,6 pyridinedicarboxylate)(H{sub 2}O){sub 4}]·4(H{sub 2}O) [M = Ni{sup 2+}, Co{sup 2+}, Fe{sup 2+}, Zn{sup 2+}, and Cu{sup 2+}] compounds reveals impact of transition metals in uranyl hybrid systems. Display Omitted - Highlights: • 5 heterometallic uranyl PDC compounds were synthesized and characterized by X-ray diffraction and spectroscopic techniques. • Uranyl PDC 1-D chain complexes that were linked via transition metal cations were further linked through π- πinteractions. • Structural data denotes shorter uranyl bonds in the presence of the transition metals and this is confirmed by Raman shifts. • Solid-state UV/Vis spectroscopy confirms the presence of transition metals in this system.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2014

Planck 2013 results. XXIII. Isotropy and statistics of the CMB

The two fundamental assumptions of the standard cosmological model-that the initial fluctuations are statistically isotropic and Gaussian-are rigorously tested using maps of the cosmic microwave background (CMB) anisotropy from the Planck satellite. The detailed results are based on studies of four independent estimates of the CMB that are compared to simulations using a fiducial ΛCDM model and incorporating essential aspects of the Planck measurement process. Deviations from isotropy have been found and demonstrated to be robust against component separation algorithm, mask choice, and frequency dependence. Many of these anomalies were previously observed in the WMAP data, and are now confirmed at similar levels of significance (about 3σ). However, we find little evidence of non-Gaussianity, with the exception of a few statistical signatures that seem to be associated with specific anomalies. In particular, we find that the quadrupole-octopole alignment is also connected to a low observed variance in the CMB signal. A power asymmetry is now found to persist on scales corresponding to about ℓ = 600 and can be described in the low-ℓ regime by a phenomenological dipole modulation model. However, any primordial power asymmetry is strongly scale-dependent and does not extend to arbitrarily small angular scales. Finally, it is plausible that some of these features may be reflected in the angular power spectrum of the data, which shows a deficit of power on similar scales. Indeed, when the power spectra of two hemispheres defined by a preferred direction are considered separately, one shows evidence of a deficit in power, while its opposite contains oscillations between odd and even modes that may be related to the parity violation and phase correlations also detected in the data. Although these analyses represent a step forward in building an understanding of the anomalies, a satisfactory explanation based on physically motivated models is still lacking.

79 ASTRONOMY AND ASTROPHYSICS↗
DOE OSTI2024

Parallax-corrected VISST-derived pixel-level products from satellite GOES-16

The NASA Langley group led by William Smith produced GOES-16 satellite cloud retrievals over an approximate 10 by 10 degree region over the CACTI field campaign location. These retrievals are described here: https://www.arm.gov/capabilities/vaps/visst and are available for download here . They use algorithms historically called VISST that are now referred to as SatCORPS. More information can be found in Trepte et al. (2019), Minnis et al. (2021), and Yost et al. (2021). If using this dataset, please cite these references, the CACTI VISST dataset DOI found at the download link above, and this dataset’s DOI. The CACTI VISST pixel-level retrievals are on a 2 km spatial grid and available every 15 minutes (every 10 minutes late in the campaign), producing 21,765 files for the entire field campaign between October 2018 and April 2019. They are not corrected for parallax error, which is an offset in the actual geographical location of a cloud above the surface due to the satellite viewing the cloud partly from the side off nadir. This dataset applies a correction for parallax using the location relative to the satellite and the retrieved cloud top height above the surface, which allows the dataset to be geo-located with surface-based observations. The parallax correction for each location depends on the longitude, latitude and cloud top height above ground level (AGL) for that longitude and latitude in the original VISST files. The cloud top height AGL requires first computing the surface elevation at each VISST grid point. Data from the Advanced Spaceborne Thermal Emission and Reflection (ASTER) Global Digital Elevation Map Version 3 at 30-m resolution is projected onto the VISST grid using conservative coarsening (conserving surface elevation) in the xESMF Python package. The surface elevation is then subtracted from the VISST-retrieved cloud top height above mean sea level. These cloud top heights AGL are then combined with longitude and latitude to estimate the latitude and longitude corrections. Due to variability in cloud top height, the parallax shifts produce an irregular grid of values since higher cloud tops are shifted further than lower cloud tops. A ball tree-based neighbor search with Haversine distance is performed using the Python-based scikit-learn library to find the nearest VISST grid point to each parallax correction-shifted point. The data value of the shifted point is then assigned to that VISST grid point. In this manner, the irregular geographical shifts to correct for parallax are projected back to the rectilinear VISST grid. Because relatively higher clouds should obscure lower clouds, the variable values for the highest cloud top are preferentially chosen if two or more values are assigned to a grid point. The parallax correction should be viewed as an improved but still imperfect estimation of the cloud top locations, largely because the cloud top height is an imperfect retrieval. Please see the attached README document for further information. Users are encouraged to contact the authors with any additional questions.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2026

CMIP7 Data Request: atmosphere priorities and opportunities

This paper presents a comprehensive overview of the Coupled Model Intercomparison Project Phase 7 (CMIP7) request for data unlocking key research avenues in atmospheric science and provides justification for the resources needed to produce this data. Topics within the CMIP7 Atmosphere Theme centre around processes and feedbacks in atmospheric science such as clouds, aerosols and atmospheric chemistry, atmospheric circulation, temperature variability and extremes, radiative forcings, and Earth system model evaluation. These topics are summarised in this paper as scientific “opportunities” which will be realised through CMIP7 experiments and Earth system model outputs. These opportunities were submitted by a thematic group of atmospheric science community representatives combined with an extended consultation process. The production of these variables will close key gaps and uncertainties identified during previous rounds of CMIP, and will be broadly used by scientific, policy, governmental, industry, and other communities that rely on climate model projections for research and decision making, including supporting the 7th Intergovernmental Panel on Climate Change Assessment Report (AR7). As an author group, we also reflect on the process used to collate this data request and make recommendations to future CMIP governance on implementing a consultation on this scale in the future.

58 GEOSCIENCES↗
DOE OSTI2021

An Automatic Processing Framework for In Situ Determination of Ecohydrological Root Water Content by Ground-Penetrating Radar

This report concerns Root water content (RWC) as a vital component in water flux in soil-plant-atmosphere continuum. Knowledge of RWC helps to better understand the root function and the soil-root interaction and improves water cycle modeling. However, due to the lack of appropriate methods, field monitoring of RWC is seriously constrained. In this study, we used ground-penetrating radar (GPR), a common geophysical technique, to characterize RWC of coarse roots noninvasively. An automatic GPR data processing framework was proposed to (1) identify hyperbolic root reflections and locate roots in GPR images and (2) extract waveform parameters from the reflected wave of identified roots. These waveform parameters were then used to establish an empirical model and a semiempirical model to determine RWC. We validated the developed models using GPR root data at three antenna center frequencies (500 MHz, 900 MHz, and 2 GHz) that were produced from simulation experiments (with RWC ranging from 70% to 150%) and field experiments in sandy soils (with RWC ranging from 66% to 144%). Our results show that both the empirical and the semiempirical models achieved a good performance in estimating RWC with similar accuracy, i.e., the prediction error [root-mean-square error (RMSE)] was less than 8% for the simulation data and 12% for the field data. For both models, the accuracy of RWC estimation was the highest when applied to 2-GHz data. This study renders a new opportunity to determine RWC under field conditions that enhances the application of GPR for root study and the understanding and modeling of ecohydrology in the rhizosphere.

54 ENVIRONMENTAL SCIENCES↗
DOE OSTI2014

Synthesis and structural characterisation of iron(II) and copper(II) diphosphates containing flattened metal oxotetrahedra

Single crystal and bulk polycrystalline forms of K{sub 2}MP{sub 2}O{sub 7} (M=Fe(II), Cu(II)) have been synthesised and their structures determined from single crystal X-ray diffraction data. Both compounds crystallize in the tetragonal system, space group P-42{sub 1}m. Their structures are formed from infinite sheets of linked oxopolyhedra of the stoichiometry [MP{sub 2}O{sub 7}]{sup 2−} with potassium cations situated between the layers. The MO{sub 4} tetrahedra share oxygen atoms with [P{sub 2}O{sub 7}]{sup 4−} diphosphate groups and the potassium ions have KO{sub 8} square prismatic geometry. In both compounds the M(II) centre has an unusual strongly flattened, tetrahedral coordination to oxygen, as a result of the Jahn–Teller (JT) effect for the high spin d{sup 6} Fe(II) and p-orbital mixing or a second order JT effect for d{sup 9} Cu(II) centres in four fold coordination. The uncommon transition metal ion environments found in these materials are reflected in their optical absorption spectra and magnetism data. - Graphical abstract: The structures of the tetragonal polymorphs of K{sub 2}MP{sub 2}O{sub 7}, M=Cu(II), Fe(II), consist of infinite sheets of stoichiometry [MP{sub 2}O{sub 7}]{sup 2−}, formed from linked pyrophosphate groups and MO{sub 4} tetrahedra, separated by potassium ions. In both compounds the unusual tetrahedral coordination of the M(II) centre is strongly flattened as a result of Jahn–Teller (JT) effects for high spin, d{sup 6} Fe(II) and p-orbital mixing and second-order JT effects for d{sup 9} Cu(II). Display Omitted - Highlights: • Tetrahedral copper and iron(II) coordinated by oxygen. • New layered phosphate structure. • Jahn–Teller and d{sup 10} distorted coordinations.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2020

Characterization of Partially Observed Epidemics - Application to COVID-19

This report documents a statistical method for the "real-time" characterization of partially observed epidemics. Observations consist of daily counts of symptomatic patients, diagnosed with the disease. Characterization, in this context, refers to estimation of epidemiological parameters that can be used to provide short-term forecasts of the ongoing epidemic, as well as to provide gross information for the time-dependent infection rate. The characterization problem is formulated as a Bayesian inverse problem, and is predicated on a model for the distribution of the incubation period. The model parameters are estimated as distributions using a Markov Chain Monte Carlo (MCMC) method, thus quantifying the uncertainty in the estimates. The method is applied to the COVID-19 pandemic of 2020, using data at the country, provincial (e.g., states) and regional (e.g. county) levels. The epidemiological model includes a stochastic component due to uncertainties in the incubation period. This model-form uncertainty is accommodated by a pseudo-marginal Metropolis-Hastings MCMC sampler, which produces posterior distributions that reflect this uncertainty. We approximate the discrepancy between the data and the epidemiological model using Gaussian and negative binomial error models; the latter was motivated by the over-dispersed count data. For small daily counts we find the performance of the calibrated models to be similar for the two error models. For large daily counts the negative-binomial approximation is numerically unstable unlike the Gaussian error model. Application of the model at the country level (for the United States, Germany, Italy, etc.) generally provided accurate forecasts, as the data consisted of large counts which suppressed the day-to-day variations in the observations. Further, the bulk of the data is sourced over the duration before the relaxation of the curbs on population mixing, and is not confounded by any discernible country-wide second wave of infections. At the state-level, where reporting was poor or which evinced few infections (e.g., New Mexico), the variance in the data posed some, though not insurmountable, difficulties, and forecasts were able to capture the data with large uncertainty bounds. The method was found to be sufficiently sensitive to discern the flattening of the infection and epidemic curve due to shelter-in-place orders after around 90% quantile for the incubation distribution (about 10 days for COVID-19). The proposed model was also used at a regional level to compare the forecasts for the central and north-west regions of New Mexico. Modeling the data for these regions illustrated different disease spread dynamics captured by the model. While in the central region the daily counts peaked in the late April, in the north-west region the ramp-up continued for approximately three more weeks.

59 BASIC BIOLOGICAL SCIENCES↗
DOE OSTI2017

λ/2 contamination in X-ray diffraction data – the impact of heavy atoms

The impact of very different values of f ' and f " and of absorption coefficients for the wavelengths λ and λ/2 for heavy elements, and the effect of the difference in wavelength dispersion on the profile of the corresponding Bragg reflections, are discussed with respect to the correction of diffraction data for λ/2 contamination. The impact on the results of four charge-density studies is discussed.

Chemistry↗
DOE OSTI2021

Picometer sensitivity metrology for EUV absorber phase

With growing interest in EUV attenuated phase-shift masks due to their superior image quality for applications such as dense contact and pillar arrays, it is becoming critical to model, measure, and monitor the intensity and relative phase of multilayer and absorber reflections. We present a solution based on physical modeling of reflectometry data, which can achieve single picometer phase precision and sensitivity to changes in average film thickness below one atomic monolayer. We measure absorber and multilayer reflectivity to determine thin-film parameters with a multidimensional optimization and then acquire a new measurement of either multilayer or absorber to determine perturbations in surface contamination thickness. While it is difficult to assess the accuracy of the first step, the simplicity of the second step allows us to characterize our sensitivity to changes in contamination thickness. Thus, we apply this analysis using an initial set of measurements and repeated measurements after a period of storage. For the multilayer, the total contamination growth was 1068 pm, which occurred almost exclusively during storage (1085 pm) and decreased very slightly during repeated measurements (-17 pm). For the absorber, the behavior was quite different, with a total growth of 126 pm, which occurred much less during storage (28 pm) and primarily during repeated measurements (98 pm). Ultimately, the change in relative phase (absorber minus multilayer) was -0.86 deg for the multilayer and -1.12 deg for the absorber. We estimate the precision of the surface contamination measurement to be 3σ < 6 pm for measuring thickness and 3σ < 0.2 deg for measuring phase.

36 MATERIALS SCIENCE↗