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Measurement technology for semiconductor materials, process control, and devices, is discussed. Silicon and silicon based devices are emphasized. Highlighted activities include semiinsulating GaAs characterization, an automatic scanning spectroscopic ellipsometer, linewidth measurement and coherence, bandgap narrowing effects in silicon, the evaluation of electrical linewidth uniformity, and arsenicomplanted profiles in silicon.
A 1-kW preprototype redox storage system that has undergone characterization tests and been operated as the storage device for a 5-kW (peak) photovoltaic array is described and performance data are presented. Loss mechanisms are discussed, and simple design changes leading to appreciable increases in efficiency are suggested. The effects on system performance of nonequilibrium between the predominant species of complexed chromic ion in the negative electrode reactant solution are summarized. It is noted that with the aid of the prototype system, control concepts have been shown to be valid and trouble free and some insight has been gained into interactions at the mutual interfaces of the redox system, the photovoltaic array, the load, and the control devices.
Analytical tools which characterize the polymer wear process are discussed. The devices discussed include: visual observation of polymer wear with SEM, the quantification with surface profilometry and ellipsometry, to study the chemistry with AES, XPS and SIMS, to establish interfacial polymer orientation and accordingly bonding with QUARTIR, polymer state with Raman spectroscopy and stresses that develop in polymer films using a X-ray double crystal camera technique.
A device for use in the production of semiconductors, characterized by etching in a rapidly rotating etching bath is described. The fast rotation causes the surface of the etching bath to assume the form of a paraboloid of revolution, so that the semiconductor wafer adjusted at a given height above the resting bath surface is only attacked by etchant at the edges.
A new device has been designed, constructed, and evaluated to characterize the human carotid baroreceptor-cardiac reflex response relation rapidly. This system was designed for study of reflex responses of astronauts before, during, and after space travel. The system comprises a new tightly sealing silicon rubber neck chamber, a stepping motor-driven electrodeposited nickel bellows pressure system, capable of delivering sequential R-wave-triggered neck chamber pressure changes between +40 and -65 mmHg, and a microprocessor-based electronics system for control of pressure steps and analysis and display of responses. This new system provokes classic sigmoid baroreceptor-cardiac reflex responses with threshold, linear, and saturation ranges in most human volunteers during one held expiration.
Analytical tools which characterize the polymer wear process are discussed. The devices discussed include: visual observation of polymer wear with SEM, the quantification with surface profilometry and ellipsometry, to study the chemistry with AES, XPS and SIMS, to establish interfacial polymer orientation and accordingly bonding with QUARTIR, polymer state with Raman spectroscopy and stresses that develop in polymer films using a X-ray double crystal camera technique.
The SBRC 190 cryogenic readouts were developed for use with far-infrared arrays of Ge:Sb and Ge:Ga photoconductor detectors. The SBRC 190 provides an AC-coupled CTIA (capacitance transimpedance amplifier) unit cell for each detector and multiplexes up to 32 detectors. This paper presents our test results characterizing and optimizing the performance of these novel devices. We will discuss their basic behavior in addition to describing the trade-offs inherent in different sampling strategies.
A major reliability issue for all advanced nonvolatile memory (NVM) technology devices including FRAMs is the data retention characteristics over extended period of time, under environmental stresses and exposure to total ionizing dose (TID) radiation effects. For this testing, 256 Kb FRAMs in 28-pin plastic DIPS, rated for industrial grade temperature range of -40 C to +85 C, were procured. These are two-transistor, two-capacitor (2T-2C) design FRAMs. In addition to data retention characteristics, the parts were also evaluated for imprint failures, which are defined as the failure of cells to change from a "preferred" state, where it has been for a significant period of time to an opposite state (e.g., from 1 to 0, or 0 to 1). These 256 K FRAMs were subjected to scanning acoustic microscopy (C-SAM); 1,000 temperature cycles from -65 C to +150 C; high temperature aging at 150 C, 175 C, and 200 C for 1,000 hours; highly accelerated stress test (HAST) for 500 hours; 1,000 hours of operational life test at 125 C; and total ionizing dose radiation testing. As a preconditioning, 10 K read/write cycles were performed on all devices. Interim electrical measurements were performed throughout this characterization, including special imprint testing and final electrical testing. Some failures were observed during high temperature aging test at 200 C, during HAST testing, and during 1,000 hours of operational life at 125 C. The parts passed 10 Krad exposure, but began showing power supply current increases during the dose increment from 10 Krad to 30 Krad, and at 40 Krad severe data retention and parametric failures were observed. Failures from various environmental group testing are currently being analyzed.
A major reliability issue for all advanced nonvolatile memory (NVM) technology devices including FRAMs (Ferroelectric random access memories) is the data retention characteristics over extended period of time, under environmental stresses and exposure to total ionizing dose (TID) radiation effects. For this testing, 256 Kb FRAMs in 28-pin plastic DIPS, rated for industrial grade temperature range of -40 C to +85 C, were procured. These are two-transistor, two-capacitor (2T-2C) design FRAMs. In addition to data retention characteristics, the parts were also evaluated for imprint failures, which are defined as the failure of cells to change from a "preferred" state, where it has been for a significant period of time to an opposite state (e.g., from 1 to 0, or 0 to 1). These 256 K FRAMs were subjected to scanning acoustic microscopy (C-SAM); 1,000 temperature cycles from -65 C to +150 C; high temperature aging at 150 C, 175 C, and 200 C for 1,000 hours; highly accelerated stress test (HAST) for 500 hours; 1,000 hours of operational life test at 125 C; and total ionizing dose radiation testing. As a preconditioning, 10 K read/write cycles were performed on all devices. Interim electrical measurements were performed throughout this characterization, including special imprint testing and final electrical testing. Some failures were observed during high temperature aging test at 200 C, during HAST testing, and during 1,000 hours of operational life at 125 C. The parts passed 10 Krad exposure, but began showing power supply current increases during the dose increment from 10 Krad to 30 Krad, and at 40 Krad severe data retention and parametric failures were observed. Failures from various environmental group testing are currently being analyzed.
Nonlinear pressure oscillations have been observed in liquid propellant rocket instability preburner devices. Unlike the familiar transverse mode instabilities that characterize primary combustion chambers, these oscillations appear as longitudinal gas motions with frequencies that are typical of the chamber axial acoustic modes. In several respects, the phenomenon is similar to longitudinal mode combustion instability appearing in low-smoke solid propellant motors. An important feature is evidence of steep-fronted wave motions with very high amplitude. Clearly, gas motions of this type threaten the mechanical integrity of associated engine components and create unacceptably high vibration levels. This paper focuses on development of the analytical tools needed to predict, diagnose, and correct instabilities of this type. For this purpose, mechanisms that lead to steep-fronted, high-amplitude pressure waves are described in detail. It is shown that such gas motions are the outcome of the natural steepening process in which initially low amplitude standing acoustic waves grow into shock-like disturbances. The energy source that promotes this behavior is a combination of unsteady combustion energy release and interactions with the quasi-steady mean chamber flow. Since shock waves characterize the gas motions, detonation-like mechanisms may well control the unsteady combustion processes. When the energy gains exceed the losses (represented mainly by nozzle and viscous damping), the waves can rapidly grow to a finite amplitude limit cycle. Analytical tools are described that allow the prediction of the limit cycle amplitude and show the dependence of this wave amplitude on the system geometry and other design parameters. This information can be used to guide corrective procedures that mitigate or eliminate the oscillations.
NASA Glenn Research Center is presently developing and applying a range of sensor and electronic technologies that can enable future planetary missions. These include space qualified instruments and electronics, high temperature sensors for Venus missions, mobile sensor platforms, and Microsystems for detection of a range of chemical species and particulates. A discussion of each technology area and its level of maturity is given. It is concluded that there is a strong need for low power devices which can be mobile and provide substantial characterization of the planetary environment where and when needed. While a given mission will require tailoring of the technology for the application, basic tools which can enable new planetary missions are being developed.
It is now possible to grow silicon nanowires at chosen positions and orientations by a method that involves a combination of standard microfabrication processes. Because their positions and orientations can be chosen with unprecedented precision, the nanowires can be utilized as integral parts of individually electronically addressable devices in dense arrays. Nanowires made from silicon and perhaps other semiconductors hold substantial promise for integration into highly miniaturized sensors, field-effect transistors, optoelectronic devices, and other electronic devices. Like bulk semiconductors, inorganic semiconducting nanowires are characterized by electronic energy bandgaps that render them suitable as means of modulating or controlling electronic signals through electrostatic gating, in response to incident light, or in response to molecules of interest close to their surfaces. There is now potential for fabricating arrays of uniform, individually electronically addressable nanowires tailored to specific applications. The method involves formation of metal catalytic particles at the desired positions on a substrate, followed by heating the substrate in the presence of silane gas. The figure illustrates an example in which a substrate includes a silicon dioxide surface layer that has been etched into an array of pillars and the catalytic (in this case, gold) particles have been placed on the right-facing sides of the pillars. The catalytic thermal decomposition of the silane to silicon and hydrogen causes silicon columns (the desired nanowires) to grow outward from the originally catalyzed spots on the substrate, carrying the catalytic particles at their tips. Thus, the position and orientation of each silicon nanowire is determined by the position of its originally catalyzed spot on the substrate surface, and the orientation of the nanowire is perpendicular to the substrate surface at the originally catalyzed spot.
Loss of control has been identified as the leading cause of aircraft accidents in recent years. Efforts have been made to better equip pilots to deal with these types of events, commonly referred to as upsets. A major challenge in these endeavors has been recreating the motion environments found in flight as the majority of upsets take place well beyond the normal operating envelope of large aircraft. The Environmental Tectonics Corporation has developed a simulator motion base, called GYROLAB, that is capable of recreating the sustained accelerations, or G-forces, and motions of flight. A two part research study was accomplished that coupled NASA's Generic Transport Model with a GYROLAB device. The goal of the study was to characterize physiological effects of the upset environment and to demonstrate that a sustained motion based simulator can be an effective means for upset recovery training. Two groups of 25 Air Transport Pilots participated in the study. The results showed reliable signs of pilot arousal at specific stages of similar upsets. Further validation also demonstrated that sustained motion technology was successful in improving pilot performance during recovery following an extensive training program using GYROLAB technology.
Shock layer radiation to a planetary probe's heat shield has been investigated since the 1960's, using ground tests, flight tests, and theoretical modelling. Radiometers and a spectrometer were embedded in the TPS of NASA's earlier Project FIRE II, Apollo 4 and 6, as well as PAET. PAET is particularly relevant to planetary probes since it successfully demonstrated detecting the atmospheric composition using shock-layer radiometry. The NASA Orion program and Mars 2020 include and propose for future use embedded small scale, low-mass radiometers and mini-spectrometers. Recent work used a specific COTS fiber-optic mini-spectrometer, selected for wide wavelength range for testing flexibility. In proof of concept tests, these mini-spectrometers detected the strongest Na and K spectral lines in both Arcjet test and Laser tests, with thermal radiation. Characterization and tests of the radiometer and spectrometer devices components is described.
Fabrication and Characterization Summary: For this program, the team fabricated and tested silicon thermoelectric test structures that experimentally demonstrated record thermal conductivity reduction (> 85 %) without changes in electrical properties (conductivity and Seebeck coefficient). We also demonstrated the highest ever reported energy conversion efficiency for silicon thermoelectric devices. The team developed a design for 1 cm 2 die with thousands of nanophononic metamaterial structures in the form of nanowalled membranes but were unable to solve all fabrication challenges before the end of the program. Multiple aspects of the design were submitted for patent protection. Primary challenges were related to silicon-on-insulator material quality and high-aspect-ratio etching.
Skipper Charge-Coupled Devices (Skipper-CCDs) are a leading technology in the search for sub-GeV dark matter and coherent elastic neutrino-nucleus scattering. A key background for rare-event searches with these detectors arises from "spurious charge" -- single-electron events generated when charges are transferred through the active region to the serial register, and across the serial register to the readout stage. We present a characterization of spurious charge in both the active region and the serial register of SENSEI Skipper-CCDs, and show that, in a well-shielded low-background environment, the dominant contribution originates in the serial register during Skipper readout, when horizontal clocks are held at constant voltage between pixel transfers. Motivated by this finding, we develop a "tri-level" clocking scheme in which the held-low phase is raised to an intermediate voltage during readout to suppress trap-mediated charge generation. Using the SENSEI detector near the MINOS cavern, we measure a serial-register single-electron density of $(2.9 \pm 0.1) \times 10^{-5}$ electrons/pixel/image under standard SENSEI readout conditions, reduced to $(4.0 \pm 0.4) \times 10^{-6}$ electrons/pixel/image with tri-level clocking -- a factor of $\sim$7 improvement. This technique offers a promising path to lower backgrounds in current and future Skipper-CCD experiments.
A Detector Characterization Facility (DCF), capable of measuring 2-micron detection devices and evaluating heterodyne receivers, was developed at the Marshall Space Flight Center. The DCF is capable of providing all the necessary detection parameters for design, development, and calibration of coherent and incoherent solid state laser radar (lidar) systems. The coherent lidars in particular require an accurate knowledge of detector heterodyne quantum efficient, nonlinearity properties, and voltage-current relationship as a function of applied optical power. At present, no detector manufacturer provides these qualities or adequately characterizes their detectors for heterodyne detection operation. In addition, the detector characterization facility measures the detectors DC and AC quantum efficiencies noise equivalent power and frequency response up to several GHz. The DCF is also capable of evaluating various heterodyne detection schemes such as balanced detectors and fiber optic interferometers. The design and analyses of measurements for the DCF were preformed over the previous year and a detailed description of its design and capabilities was provided in the NASA report NAS8-38609/DO77. It should also be noted that the DCF design was further improved to allow for the characterization of diffractive andholographical optical elements and other critical components of coherent lidar systems.
Superconducting thin films have long been used as phonon sensors, particularly in the field of dark matter (DM) direct detection, due to the meV-scale Cooper-pair binding energy. A novel class of these detectors based on microwave kinetic inductance detectors, dubbed Kinetic Inductance Phonon-Mediated Detectors (KIPMDs), offers an attractive architecture for microcalorimeters to probe DM down to the fermionic thermal relic mass limit of a few keV. Such a device featuring an aluminum resonator patterned onto a silicon substrate was operated at the NEXUS low-background facility at Fermilab for characterization and evaluation of its efficacy for a dark matter search. With this device we have demonstrated a resolution on the energy absorbed by the superconductor of 2.5 eV, a factor of two better than current state-of-the-art. In this talk, I will present our measurement of the energy resolution and phonon collection efficiency performed by exposing the bare substrate to a pulsed source of 470 nm photons. I will also discuss the path forward to obtaining in these devices the sub-eV resolution required to test the “Freeze-in” class of DM models. Finally, I will review other complementary efforts in our group to develop a superconducting qubit-based low-threshold detector.