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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 667 records · Page 37
All sourcesNASA NTRSDOE OSTI
NASA NTRS2012

Precipitation from Space: Advancing Earth System Science

Of the three primary sources of spatially contiguous precipitation observations (surface networks, ground-based radar, and satellite-based radar/radiometers), only the last is a viable source over ocean and much of the Earth's land. As recently as 15 years ago, users needing quantitative detail of precipitation on anything under a monthly time scale relied upon products derived from geostationary satellite thermal infrared (IR) indices. The Special Sensor Microwave Imager (SSMI) passive microwave (PMW) imagers originated in 1987 and continue today with the SSMI sounder (SSMIS) sensor. The fortunate longevity of the joint National Aeronautics and Space Administration (NASA) and Japan Aerospace Exploration Agency (JAXA) Tropical Rainfall Measuring Mission (TRMM) is providing the environmental science community a nearly unbroken data record (as of April 2012, over 14 years) of tropical and sub-tropical precipitation processes. TRMM was originally conceived in the mid-1980s as a climate mission with relatively modest goals, including monthly averaged precipitation. TRMM data were quickly exploited for model data assimilation and, beginning in 1999 with the availability of near real time data, for tropical cyclone warnings. To overcome the intermittently spaced revisit from these and other low Earth-orbiting satellites, many methods to merge PMW-based precipitation data and geostationary satellite observations have been developed, such as the TRMM Multisatellite Precipitation Product and the Climate Prediction Center (CPC) morphing method (CMORPH. The purpose of this article is not to provide a survey or assessment of these and other satellite-based precipitation datasets, which are well summarized in several recent articles. Rather, the intent is to demonstrate how the availability and continuity of satellite-based precipitation data records is transforming the ways that scientific and societal issues related to precipitation are addressed, in ways that would not be otherwise possible. These developments have taken place in parallel with the growth of an increasingly interconnected scientific environment. Scientists from different disciplines can easily interact with each other via information and materials they encounter online, and collaborate remotely without ever meeting each other in person. Likewise, these precipitation datasets are quickly and easily available via various data portals and are widely used. Within the framework of the NASA/JAXA Global Precipitation Measurement (GPM mission, these applications will become increasingly interconnected. We emphasize that precipitation observations by themselves provide an incomplete picture of the state of the atmosphere. For example, it is unlikely that a richer understanding of the global water cycle will be possible by standalone missions and algorithms, but must also involve some component of data, where model analyses of the physical state are constrained alongside multiple observations (e.g., precipitation, evaporation, radiation). The next section provides examples extracted from the many applications that use various high-resolution precipitation products. The final section summarizes the future system for global precipitation processing.

Kucera, Paul A.↗
NASA NTRS2014

Peru Water Resources: Integrating NASA Earth Observations into Water Resource Planning and Management in Perus La Libertad Region

Developing countries often struggle with providing water security and sanitation services to their populations. An important aspect of improving security and sanitation is developing a comprehensive understanding of the country's water budget. Water For People, a non-profit organization dedicated to providing clean drinking water, is working with the Peruvian government to develop a water budget for the La Libertad region of Peru which includes the creation of an extensive watershed management plan. Currently, the data archive of the necessary variables to create the water management plan is extremely limited. Implementing NASA Earth observations has bolstered the dataset being used by Water For People, and the METRIC (Mapping EvapoTranspiration at High Resolution and Internalized Calibration) model has allowed for the estimation of the evapotranspiration values for the region. Landsat 8 imagery and the DEM (Digital Elevation Model) from the Advanced Spaceborne Thermal Emission and Reflection Radiometer (ASTER) sensor onboard Terra were used to derive the land cover information, and were used in conjunction with local weather data of Cascas from Peru's National Meteorological and Hydrological Service (SENAMHI). Python was used to combine input variables and METRIC model calculations to approximate the evapotranspiration values for the Ochape sub-basin of the Chicama River watershed. Once calculated, the evapotranspiration values and methodology were shared Water For People to help supplement their decision support tools in the La Libertad region of Peru and potentially apply the methodology in other areas of need.

Padgett-Vasquez, Steve↗
NASA NTRSDate not supplied

A survey of thermocouple anomalies: mechanisms, interpretation, and mitigation

Thermocouples (TCs) are a critical diagnostic sensor for high enthalpy environments including thermal protection systems (TPS) for atmospheric re-entry, hypersonic wind tunnels, and arc jet test facilities. They are used for both evaluating facility environmental conditions (enthalpy, heat flux) as well as for measuring in-situ material thermal response under test conditions (thermal conductivity, heat capacity, B’, etc.). Consequently, accurate TC measurements are fundamental for both material and facility verification and validation (V&V). However, a number of TC anomalies have been observed in both ground tests and flight instrumentation. These anomalies are caused via various coupling mechanisms: electrostatic gradients, temperature-dependent electrical shorts, radio pickup, magnetic induction, and pressure-dependent leaks. All of these mechanisms can, if unaddressed, result in obviously compromised results or worse, non-physical measurements which appear reasonable. This work will survey known anomaly mechanisms and discuss ongoing efforts to quantify and mitigate anomaly mechanisms including anomaly modeling, diagnostics, and new TC designs/development.

thermocouple anomalies↗
NASA NTRSDate not supplied

Electromagnetic Thermocouple (TC) Anomaly Mechanisms During Atmospheric Entry

Thermocouples (TCs) are a critical diagnostic sensor for high enthalpy environments including Thermal Protection Systems (TPS) for atmospheric entry, hypersonic wind tunnels, and arc jet test facilities. They are used for both evaluating facility environmental conditions (enthalpy, and heat flux) as well as for measuring in-situ material thermal response under test conditions (thermal conductivity, heat capacity, etc.). Consequently, accurate TC measurements are fundamental for both material and facility Verification and Validation (V&V). However, a number of electromagnetic TC anomalies have been observed in both ground tests and flight instrumentations. These anomalies are caused via various coupling mechanisms: surface voltage coupling, Hall effect currents, and RF rectification. All of these mechanisms can, if unaddressed, result in obviously compromised results or worse, non-physical measurements which appear reasonable. This talk will provide an overview of each of these anomaly mechanisms and discuss ongoing efforts to quantify and mitigate them.

Magnus Haw↗
NASA NTRSDate not supplied

A Survey of Thermocouple Anomalies: Mechanisms, Interpretation, and Mitigation

Thermocouples (TCs) are a critical diagnostic sensor for high enthalpy environments including thermal protection systems (TPS) for atmospheric re-entry, hypersonic wind tunnels, and arc jet test facilities. They are used for both evaluating facility environmental conditions (enthalpy, heat flux) as well as for measuring in-situ material thermal response under test conditions (thermal conductivity, heat capacity, B’, etc.). Consequently, accurate TC measurements are fundamental for both material and facility verification and validation (V&V). However, a number of TC anomalies have been observed in both ground tests and flight instrumentation. These anomalies are caused via various coupling mechanisms: electrostatic gradients, temperature-dependent electrical shorts, radio pickup, magnetic induction, and pressure-dependent leaks. All of these mechanisms can, if unaddressed, result in obviously compromised results or worse, non-physical measurements which appear reasonable. This work will survey known anomaly mechanisms and discuss ongoing efforts to quantify and mitigate anomaly mechanisms including anomaly modeling, diagnostics, and new TC designs/development.

Thermocouple Anomalies↗
NASA NTRSDate not supplied

High Sensitive and Low Power Nanosensors for Space and Terrestrial Applications

Nanotechnology offers the ability to work at the molecular level, atom by atom, to create large structures with fundamentally new molecular organization. It is essentially concerned with materials, devices, and systems whose structures and components exhibit novel and significantly improved physical, chemical and biological properties, phenomena, and process control due to their nanoscale size. A nanosensor technology has been developed at NASA Ames using nanostructure, single walled carbon nanotubes (SWNTs). The nanosensors have achieved low detection limit of chemicals in the concentration range of ppm to ppb. Due to large surface area, low surface energy barrier and high thermal and mechanical stability, nanostructured chemical sensors offer higher sensitivity, lower power consumption and a more robust solution than most state-of-the-art systems making them attractive for space and terrestrial applications. An example of a sensor module, the first space flown nano device, will be introduced in this presentation. Such sensors have drawn attention from space community for global weather monitoring, space exploration, life search in the universe, and launch pad fuel leak detection and in-flight cabin air and life support system monitoring, and engine operation monitoring. Additionally, the wireless capability of such sensors can be leveraged to network mobile and fixed-base detection and warning systems for civilian population centers, military bases and battlefields, as well as other high-value or high-risk assets and areas in industry.

Jing Li↗
NASA NTRSDate not supplied

Developmental Hardware Testing Results and Forward Plans for the Spacecraft Water Impurity Monitor (SWIM) Organic Water Module (OWM)

We present testing results for developmental hardware of the Spacecraft Water Impurity Monitor (SWIM) Organic Water Module (OWM). SWIM-OWM will monitor spacecraft potable water and system water for trace organic contaminants. The system will detect and identify the specific organic chemical that makes up a given total organic carbon reading. We have built a first development unit (1DU) for SWIM-OWM, which directly injects aqueous water samples and detects chemicals with both a thermal conductivity detector and mass spectrometer sensor. The gas chromatography mass spectrometer (GCMS) system that comprises SWIM-OWM draws on the success of ISS-proven mass spectrometer hardware, and the demonstration of GCMS detection of trace organic contaminants in ISS cabin air. SWIM-OWM benefits from the excellent sensitivity and specificity afforded by GCMS. We have demonstrated detection of a set of chemicals relevant to both crew health and performance as well as system monitoring; these target chemicals range from light, volatile organics such as acetone and ethanol, to heavier, very non-volatile compounds such as dimethyl sulfone and o-phthalaldehyde. Direct aqueous injection was chosen for the general applicability of the technique to clean water sampling and to preclude sample pre-processing, which facilitates an on-line implementation of the SWIM-OWM when deployed in a spacecraft or habitation module. A specific advantage of direct aqueous injection when coupled with appropriate methods is that both the light, volatile organics and heavier non-volatiles can be detected from a single injection, in a single chromatogram. Results from 1DU testing will be discussed, and forward plans will be outlined for continued maturation of SWIM-OWM with the goal of implementing a technology demonstration for the purposes of maturing the engineering design and operations in an environment relevant to NASA’s future goals of exploring and setting up habitation on the Moon and Mars.

Water Monitoring↗
NASA NTRSDate not supplied

Developmental Hardware Testing Results and Forward Plans for Spacecraft Water Impurity Monitor (SWIM) Organic Water Module (OWM)

We present testing results for developmental hardware of the Spacecraft Water Impurity Monitor (SWIM) Organic Water Module (OWM). SWIM-OWM will monitor spacecraft potable water and system water for trace organic contaminants. The system will detect and identify the specific organic chemical that makes up a given total organic carbon reading. We have built a first development unit (1DU) for SWIM-OWM, which directly injects aqueous water samples and detects chemicals with both a thermal conductivity detector and mass spectrometer sensor. The gas chromatography mass spectrometer (GCMS) system that comprises SWIM-OWM draws on the success of ISS-proven mass spectrometer hardware, and the demonstration of GCMS detection of trace organic contaminants in ISS cabin air. SWIM-OWM benefits from the excellent sensitivity and specificity afforded by GCMS. We have demonstrated detection of a set of chemicals relevant to both crew health and performance as well as system monitoring; these target chemicals range from light, volatile organics such as acetone and ethanol, to heavier, very non-volatile compounds such as dimethyl sulfone and o-phthalaldehyde. Direct aqueous injection was chosen for the general applicability of the technique to clean water sampling and to preclude sample pre-processing, which facilitates an on-line implementation of the SWIM-OWM when deployed in a spacecraft or habitation module. A specific advantage of direct aqueous injection when coupled with appropriate methods is that both the light, volatile organics and heavier non-volatiles can be detected from a single injection, in a single chromatogram. Results from 1DU testing will be discussed, and forward plans will be outlined for continued maturation of SWIM-OWM with the goal of implementing a technology demonstration for the purposes of maturing the engineering design and operations in an environment relevant to NASA’s future goals of exploring and setting up habitation on the Moon and Mars.

Water Monitoring↗
DOE OSTI2023

High temperature and high pressure AlGaN/GaN electronics

Disclosed herein are devices, systems and methods useful for downhole sensors and electronics suitable for harsh thermal and mechanical environment associated with high-temperature geothermal drilling and high-temperature/high-pressure oil and gas drilling.

Ginley, David Samuel↗
DOE OSTI2023

A 4 x 4 SiPM Sensor Array with Fast Preamplified Output Engineered for the PWO Detectors of the EIC EEEMCAL

The PbWO4 scintillation detectors for the Electron-Ion Collider Electron Endcap Electromagnetic Calorimeter (EEEMCAL) cannot use vacuum photomultipler tubes due to the high magnetic field environment. We are presenting a readout solution with a 4 x 4 SiPM array directly coupled to a preamplification and summing stage. A second amplification stage with variable gain and offset adjustments is also included in the compact electronics module. The integrated power supply feeds the signal processing chain and the adjustable bias control. The parameter settings are saved locally on a EEPROM and are adjustable via the integrated communication interface through USB or RS485. The design was optimized to maximize signal collection energy resolution, for fast timing and wide dynamic range while keeping a small footprint with low power consumption and heat dissipation. The output response is fast enough to meet the 100 ? 200 ns digitization gate requirements for the detector. The electronics assembly requires no active cooling and includes a temperature sensor and a gain compensation of thermal variations which are important features for stable operation in large scale detector structures. A detector prototype was constructed with 20 mm x 20 mm x 200 mm PWO crystals affixed with individual SiPM array readouts and arranged in a 3 x 3 array. This detector was tested at the Thomas Jefferson National Accelerator Facility with 5GeV positrons. We will present the results of these detector characterization measurements.

Philip, O.↗
NASA NTRS2012

Fabrication of Silicon Backshort Assembly for Waveguide-Coupled Superconducting Detectors

The Cosmology Large Angular Scale Surveyor (CLASS) is a ground-based instrument that will measure the polarization of the cosmic microwave background to search for gravitational waves from a posited epoch of inflation early in the universe s history. We are currently developing detectors that address the challenges of this measurement by combining the excellent beam-forming attributes of feedhorns with the low-noise performance of Transition-Edge sensors. These detectors utilize a planar orthomode transducer that maps the horizontal and vertical linear polarized components in a dual-mode waveguide to separate microstrip lines. On-chip filters define the bandpass in each channel, and the signals are terminated in resistors that are thermally coupled to the transition-edge sensors operating at 150 mK.

Crowe, E.↗
DOE OSTI2022

MAGNETICALLY SUSPENDED CANNED ROTOR PUMPS FOR THE INTEGRAL MOLTEN SALT REACTOR

This project developed a molten salt pump design for small modular reactors, concentrated solar, and Gen IV nuclear reactors with a magnetically levitated rotor that can operate at temperatures of up to 700 °C. This eliminates the need for rotating seals and roller element bearings which require maintenance and are prone to failure. The pump design is also more compact than existing molten salt pump designs which require long shafts to thermally isolate the electric motor. The aims of the project are to: 1) design and test the molten salt pump, 2) develop and test a high temperature position sensor needed for magnetic bearing control, and 3) develop and test high temperature coil fabrication methods for electric motor and magnetic bearing fabrication. To develop the high temperature coils, conductor materials were analyzed for oxidation, diffusion, cladding, and resistivity. Of the candidate conductor materials that met the requirements, silver was chosen. The long-term impact of radiation on silver resistivity was analyzed by developing a model of a generic molten salt fast reactor to model the conductor irradiation in worst case scenarios. The analysis showed that increased resistivity due to transmutation of silver decreases exponentially with the reactor reflector thickness. Different electrical insulation materials were tested and the final high temperature coils developed were able to withstand conductor to ground voltages up to 1800 V before insulation breakdown. Magnetic bearings require high-precision high-speed measurements of the rotor position to operate. Current commercial position sensors can only operate up to 550 °C so a novel position sensor was developed that can operate up to 800 °C. These sensors were also designed to measure the position of the metallic rotor through a thin metallic corrosion barrier that protects that coils, insulation, and magnetic cores so that the salt containment barrier does not have any penetrations. The high-temperature sensor was tested and had comparable performance to commercially available inductive position sensors. The sensor design and signal processing has led to several invention disclosures. The magnetically levitated molten salt pump design was completed and analyzed. The chloride salt test loop at Oak Ridge National Laboratory was chosen to test the pump and the pump hydraulics and power were designed for the test loop flow and pressure requirements. Classes of motor designs that do not utilize permanent magnetic were considered for the high-temperature motor. After extensive analysis of their performance, a synchronous reluctance motor was chosen for the pump. The design was refined and analyzed to optimize performance. The magnetic bearings were designed to meet the force and frequency requirements necessary to levitate the rotor and reject disturbances from rotor imbalance, motor forces, and hydraulic forces. Compliant mounts for the position sensors were designed that would not damage the ceramic sensor components and maintain sensor alignment over a wide temperature range. A thermal hydraulic analysis of the molten salt coolant flow used to cool the rotor and stator was performed to ensure that the maximum temperature in the rotor and stator will not exceed 725 °C. The corrosion barrier and casing were designed to maintain the salt fluid boundary by using compliant features to absorb large expansion mismatches due to different coefficients of thermal expansion (CTE). Finally, the salt drain and fill systems were designed along with the pump support structure, integration with the test loop, and thermal insulation and heating. Corrosion barrier fabrication experiments were performed to assess using laser cladding to apply a sub-millimeter corrosion barrier to the surface of a Fe-Co-V magnetic core material. The cladding method showed minimal mixing between materials at their interface and withstood temperature cycling without damage to the cladding. The technology commercialization is focused on the high-temperature position sensors and there has been significant interest from the nuclear industry in utilizing these sensors along with some interest from the aerospace industry. The project also led to a research collaboration with a fusion energy industrial partner to study barriers to scaling the pump design from the kW size to the MW size. This research collaboration will also study methods to create high-temperature coils that have conductor to ground breakdown voltages above 5 kV. The successful development of high-temperature electromagnetic coils and high-temperature position sensors greatly increases the temperature limits for electromagnetic devices that don’t rely on permanent magnets. This includes electric motors, magnetic bearings, linear actuators, rotary position and velocity sensing, actuated valves, and generators to name a few. This will fill a current need in molten salt reactors, concentrated solar, and fusion energy for these critical peripheral devices needed for practical reactor designs that do not currently have commercial solutions.

Hines, J Wesley↗
DOE OSTI2025

Next Generation Sensor Development (CRADA Final Report)

B. Project Scope This was a collaborative effort between Lawrence Livermore National Security, LLC (LLNS), as manager and operator of Lawrence Livermore National Laboratory (LLNL) and The Federal Reserve Bank of San Francisco ("FRBSF" or "Participant"), to research and develop advanced processing techniques to measure the fitness and authenticity of U.S. currency. The FRBSF previously partnered with LLNL to evaluate end-of-life predictions, review sensor requirements, develop communications protocols, and perform thermal analysis. These Strategic Partnership Projects (SPP) included SPP No. L20960 - Federal Reserve Currency Technology Office Studies, SPP No. L15900 - Development of a Common Detector Interface (CDI 2.0) Specification and Hardware Simulators, and SPP No. L15610 - Limited Design Review of a Second-Generation E-Material Authentication Sensor (EMAS2).

45 MILITARY TECHNOLOGY, WEAPONRY, AND NATIONAL DEF↗
NASA NTRS2019

Early Calibration and Performance Assessments of NOAA-20 VIIRS Thermal Emissive Bands

The Visible Infrared Imaging Radiometer Suite (VIIRS) sensor aboard the NOAA-20 (previously JPSS-1) spacecraft has successfully operated since its launch in November, 2017. Similar to the first VIIRS instrument on the Suomi-NPP spacecraft, data is collected in 22 spectral bands that are calibrated by a set of onboard calibrators. This paper provides an overview of the NOAA-20 VIIRS on-orbit operation and calibration, with a particular focus on the thermal emissive bands (TEBs). Results presented in this paper include the on-orbit changes in the TEB spectral band responses, detector noise characterization, and key calibration parameters, such as the non-linear coefficients derived from the blackbody warm-up cool-down cycle. Other issues, such as the early mission long-wave infrared (LWIR) response degradation due to icing on the dewar window, and their impact on sensor calibration are also discussed. Since launch, the VIIRS instrument temperature has been stable to within ± 0.8K and the cold focal plane temperatures are well controlled with variations less than 40 mK. With the exception of the early degradation observed in the LWIR bands, the TEB gains have been stable to within 0.04% (except I5 at 0.07%). Based on the current performance, VIIRS is expected to meet its calibration requirements throughout its design lifetime.

NEdT↗
NASA NTRS2008

On Certain New Methodology for Reducing Sensor and Readout Electronics Circuitry Noise in Digital Domain

NASA Hubble Space Telescope (HST) and upcoming cosmology science missions carry instruments with multiple focal planes populated with many large sensor detector arrays. These sensors are passively cooled to low temperatures for low-level light (L3) and near-infrared (NIR) signal detection, and the sensor readout electronics circuitry must perform at extremely low noise levels to enable new required science measurements. Because we are at the technological edge of enhanced performance for sensors and readout electronics circuitry, as determined by thermal noise level at given temperature in analog domain, we must find new ways of further compensating for the noise in the signal digital domain. To facilitate this new approach, state-of-the-art sensors are augmented at their array hardware boundaries by non-illuminated reference pixels, which can be used to reduce noise attributed to sensors. There are a few proposed methodologies of processing in the digital domain the information carried by reference pixels, as employed by the Hubble Space Telescope and the James Webb Space Telescope Projects. These methods involve using spatial and temporal statistical parameters derived from boundary reference pixel information to enhance the active (non-reference) pixel signals. To make a step beyond this heritage methodology, we apply the NASA-developed technology known as the Hilbert- Huang Transform Data Processing System (HHT-DPS) for reference pixel information processing and its utilization in reconfigurable hardware on-board a spaceflight instrument or post-processing on the ground. The methodology examines signal processing for a 2-D domain, in which high-variance components of the thermal noise are carried by both active and reference pixels, similar to that in processing of low-voltage differential signals and subtraction of a single analog reference pixel from all active pixels on the sensor. Heritage methods using the aforementioned statistical parameters in the digital domain (such as statistical averaging of the reference pixels themselves) zeroes out the high-variance components, and the counterpart components in the active pixels remain uncorrected. This paper describes how the new methodology was demonstrated through analysis of fast-varying noise components using the Hilbert-Huang Transform Data Processing System tool (HHT-DPS) developed at NASA and the high-level programming language MATLAB (Trademark of MathWorks Inc.), as well as alternative methods for correcting for the high-variance noise component, using an HgCdTe sensor data. The NASA Hubble Space Telescope data post-processing, as well as future deep-space cosmology projects on-board instrument data processing from all the sensor channels, would benefit from this effort.

Kizhner, Semion↗
DOE OSTI2022

In-Situ Sensing and Dynamics Predictions for Electrothermally-Actuated Soft Robot Limbs

Untethered soft robots that locomote using electrothermally-responsive materials like shape memory alloy (SMA) face challenging design constraints for sensing actuator states. At the same time, modeling of actuator behaviors faces steep challenges, even with available sensor data, due to complex electrical-thermal-mechanical interactions and hysteresis. This article proposes a framework for in-situ sensing and dynamics modeling of actuator states, particularly temperature of SMA wires, which is used to predict robot motions. A planar soft limb is developed, actuated by a pair of SMA coils, that includes compact and robust sensors for temperature and angular deflection. Data from these sensors are used to train a neural network-based on the long short-term memory (LSTM) architecture to model both unidirectional (single SMA) and bidirectional (both SMAs) motion. Predictions from the model demonstrate that data from the temperature sensor, combined with control inputs, allow for dynamics predictions over extraordinarily long open-loop timescales (10 min) with little drift. Prediction errors are on the order of the soft deflection sensor’s accuracy. This architecture allows for compact designs of electrothermally-actuated soft robots that include sensing sufficient for motion predictions, helping to bring these robots into practical application.

Sabelhaus, Andrew P.↗
NASA NTRS2005

Development and Ground-Test Validation of Fiber Optic Sensor Attachment Techniques for Hot Structures Applications

Fiber Optic Strain Measurements: a) Successfully attached silica fiber optic sensors to both metallics and composites; b) Accomplished valid EFPI strain measurements to 1850 F; c) Successfully attached EFPI sensors to large scale hot-structures; and d) Attached and thermally validated FBG bond and epsilon(sub app). Future Development a) Improve characterization of sensors on C-C and C-SiC substrates; b) Apply application to other composites such as SiC-SiC; c) Assist development of interferometer based Sapphire sensor currently being conducted under a Phase II SBIR; and d) Complete combined thermal/mechanical testing of FBG on composite substrates in controlled laboratory environment.

Piazza, Anthony↗
NASA NTRS2007

Review of Polyimides Used in the Manufacturing of Micro Systems

Since their invention, polyimides have found numerous uses in MicroElectroMechanical Systems (MEMS) technology. Polyimides can act as photoresist, sacrificial layers, structural layers, and even as a replacement for silicon as the substrate during MEMS fabrication. They enable fabrication of both low and high aspect ratio devices. Polyimides have been used to fabricate expendable molds and reusable flexible molds. Development of a variety of devices that employ polyimides for sensor applications has occurred. Micro-robotic actuator applications include hinges, thermal actuators and residual stress actuators. Currently, polyimides are being used to create new sensors and devices for aerospace applications. This paper presents a review of some of the many uses of polyimides in the development of MEMS devices, including a new polyimide based MEMS fabrication process.

Wilson, William C.↗