Temporal evolution of nanoporous layer in off-normally ion irradiated GaSb
Room temperature irradiation of GaSb by 60 keV Ar{sup +}-ions at an oblique incidence of 60° leads to simultaneous formation of a nanoporous layer and undulations at the interface with the underlying substrate. Interestingly, with increasing ion fluence, a gradual embedding of the dense nanoporous layer takes place below ridge-like structures (up to the fluence of 1 × 10{sup 17} ions cm{sup −2}), which get extended to form a continuous layer (at fluences ≥4 × 10{sup 17} ions cm{sup −2}). Systematic compositional analyses reveal the co-existence of Ga{sub 2}O{sub 3} and Sb{sub 2}O{sub 3} in the surface layer. The results are discussed in terms of a competition between ion-induced defect accumulation and re-deposition of sputtered atoms on the surface.