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At least 667 records · Page 37

Monte Carlo Dropout Uncertainty Quantification of Long Short-Term Memory Autoencoder Anomaly Detection in a Liquid Sodium Cold Trap

Advanced high-temperature fluid reactors, such as sodium-cooled fast reactors (SFRs) and molten salt–cooled reactors (MSCRs), require coolant purification systems to prevent fluid contamination and local freezing that can lead to plugging. Liquid sodium purification can be achieved with a cold trap, where the sodium temperature is reduced to a near-freezing point to precipitate out impurities. Automation of monitoring of the cold trap performance with machine learning algorithms can aid in early detection of incipient anomalies. An efficient approach to loss-of-coolant–type anomaly detection in a cold trap monitored with more than two dozen thermal-hydraulic sensors consists of a long short-term memory (LSTM) autoencoder. This work develops the uncertainty quantification of the LSTM autoencoder performance for cold trap anomaly detection using the Monte Carlo (MC) dropout method. The MC dropout methodology creates a distribution of sister distributions that all slightly differ from each other because of random neurons being turned off for testing. The variances of the sister network distributions are used to make an uncertainty interval. Our analysis shows that the uncertainty in the autoencoder performance is largest near the peak of the anomaly signal. Using the MC dropout method, we investigate the uncertainty in the anomaly detection with missing sensor inputs. This capability allows the reactor operator to evaluate resilience of the anomaly detection system and to make informed decisions about continuity of operation in the event of sensor failure.

22 GENERAL STUDIES OF NUCLEAR REACTORS↗

Additive Manufacturing of Controlled Porous Elastomeric Nanocomposites for Enhanced Sensing Function

Sensors manufactured using piezoresistive elastomeric nanocomposites have a wide range of applications in many fields such as structural health monitoring, robotics, and biomedical industries. Additive manufacturing of these sensors, achieved using Direct Ink Writing (DIW), has provided numerous advantages including increased sensitivity and the fabrication of complex geometry. However, solid sensors manufactured either additively or using conventional methods, display a greater level of hysteresis, especially at strains higher than 10%, which limits their sensitivity. The solid sensors also display a greater level of piezoresistive relaxation where the resistance change with time either in a static or dynamic loading environment. Porosity can be introduced in the form of varying infill patterns and densities to reduce bulk material effects. In this paper, a lattice structure with four infill densities are investigated, and the samples are printed using a grid infill pattern. The fabricated samples are characterized using a scanning electron microscope (SEM) to validate the microstructural features and layer bonding. The pressure-sensing capability of each sensor is investigated using cyclic compression loading at various strain levels. Sensing results show that an increase in sensitivity, as well as a decrease in hysteresis with an increase in porosity, compared to solid samples (100% in-fill). The highest porosity was measured to be 62.3% with a corresponding 112% increase in the gauge factor compared to the solid bulk. These results indicate that introducing porosity using DIW is a sensible strategy to improve the piezoresistive performance of nanocomposites and to allow for the tunability of sensing capacity in pressure sensors

Sukati, Musa↗

Simulation and Experimental Results of Interdigital Capacitor (IDC) Sensors to Monitor Insulation Degradation of Cables

The efficacy of using interdigital capacitor (IDC) sensors to monitor cable insulation aging was studied through electromagnetic simulations and experimental measurements. Simulation results on both planar and conformal dielectric materials indicated that IDCs on thin substrates and with conducting backplanes provide superior performance in terms of higher capacitance. An airgap study showed that even a very small airgap between the sensor and the cable’s insulation results in significant reduction in capacitance; therefore, airgaps should be minimized. Finally, cables that underwent accelerated aging exposure in an oven were tested using fabricated IDC sensors. Measurement results showed a 12.5% increase in capacitance when the IDC was pressed against the insulation versus a 91.3% increase in capacitance when the IDC was pressed against the jackets of the cables for cable specimens ranging from unaged to aged 35 days.

Cable NDE, Interdigital Capacitance↗

Passive Temperature Sensors for Nuclear Applications

Thermocouples are generally used to provide real-time temperature indications in instrumented tests performed at material and test reactors. Passive temperature monitors, such as Silicon Carbide (SiC) and melt wires, may be included in such tests as an independent technique of detecting peak temperatures experienced during irradiation. In less expensive static (drop-in) capsule tests, which have no leads attached for real-time data transmission, melt wires, and SiC temperature monitors (TMs) are essentially the only possibility for peak temperature indication. A melt wire involves placing materials (wires) of a known composition and melting temperature in a test. An inventory is maintained at Material Science Laboratory (MSL) for melt wires ranging in temperatures from 30°C to 1500°C. Unfortunately, melt wires are limited in that it can only detect whether a single temperature is or is not exceeded (melt wire melted or not). SiC TMs, which can also be used to detect peak irradiation temperatures, are advantageous because a single monitor can allow to determine the peak temperature reached within a relatively broad range (100 – 1200°C) resulting in accuracies within ±20°C. Irradiation temperature is determined by measuring a property change after isochronal annealing or during a continuously monitored annealing process using specialized equipment at MSL. Recent research has produced a passive monitor known as sublime temperature monitor. This passive sensor has the capability of recording temperature gradients and pinpointing exactly where a temperature is located along that gradient. Long measurement lengths are achieved with very high accuracy in the location of desired temperature measurements (±2 mm over a 1 m span); however, this sensor has not been deployed in a nuclear reactor. This article will focus only on passive temperature sensors currently being researched and implemented under the Advanced Sensors and Instrumentation (ASI) program at Idaho National Laboratory (INL).

11 - NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

Comparison and Discussion on Shortcircuit Protections for Silicon-Carbide MOSFET Modules: Desaturation Versus Rogowski Switch-Current Sensor

Survivability of silicon-carbide (SiC) mosfet modules during short circuit (SC) is essential for modern power electronics systems due to large economic implications. SiC mosfet modules exhibit narrow SC withstand times and generally much lower SC robustness than silicon (Si) insulated-gate bipolar transistors (IGBTs). This puts a critical concern on their utilization, further stressing the importance of reliable protection. This article presents a comprehensive analysis and discussion on the SiC mosfet module SC protection and performance comparison between conventional desaturation detection, previously used for Si IGBT protection, and Rogowski switch-current sensor (RSCS) detection. In addition, this article presents the experimental design for soft turn-off as a reaction to the SC detection to avoid excessive overshoots during the abrupt turn-off of the SC current. To perform different types of SC with various fault inductances on different temperatures, and for the sake of fair comparison under the same conditions, a gate-driver unit for 1.2 kV SiC mosfet half-bridge modules is developed containing both detection methods. The results demonstrate that both methods are successful in protecting the module in all SC types, with superiority of the RSCS detection and concerns for desaturation detection in high-inductance and high dc-bus voltage SC events.

42 ENGINEERING↗

Robust Chemiresistive Behavior in Conductive Polymer/MOF Composites

Metal-organic frameworks (MOFs) are promising materials for gas sensing but are often limited to single-use detection. A hybridization strategy is demonstrated synergistically deploying conductive MOFs (cMOFs) and conductive polymers (cPs) as two complementary mixed ionic-electronic conductors in high-performing stand-alone chemiresistors. This work presents significant improvement in i) sensor recovery kinetics, ii) cycling stability, and iii) dynamic range at room temperature. The effect of hybridization across well-studied cMOFs is demonstrated based on 2,3,6,7,10,11-hexahydroxytriphenylene (HHTP) and 2,3,6,7,10,11-hexaiminotriphenylene (HITP) ligands with varied metal nodes (Co, Cu, Ni). A comprehensive mechanistic study is conducted to relate energy band alignments at the heterojunctions between the MOFs and the polymer with sensing thermodynamics and binding kinetics. The findings reveal that hole enrichment of the cMOF component upon hybridization leads to selective enhancement in desorption kinetics, enabling significantly improved sensor recovery at room temperature, and thus long-term response retention. This mechanism is further supported by density functional theory calculations on sorbate–analyte interactions. It is also found that alloying cPs and cMOFs enables facile thin film co-processing and device integration, potentially unlocking the use of these hybrid conductors in diverse electronic applications.

36 MATERIALS SCIENCE↗

Improved guided-wave acoustic defect detection and localization in pipes under varying temperature conditions using deep learning

Early defect detection in pipelines is critical across industries, particularly in the oil and gas sector, where failures result in significant maintenance costs and operational disruptions. Acoustic guided-wave techniques are widely used for nondestructive evaluation of pipeline defects due to their long-distance propagation capability. However, environmental variations, sensitivity limitations, and complex signal interpretation challenges limit the effectiveness of traditional signal processing approaches with guided-wave signals. Recent advances in deep learning methods have demonstrated remarkable success in solving complex real-world problems in many fields. In particular, deep-learning-based signal processing holds substantial promise to overcome limitations and challenges of conventional signal processing. This study presents a deep learning framework for pipeline inspection using acoustic guided-wave signals under temperature varying environments. The proposed framework employs a dual-path one-dimensional convolutional autoencoder that combines defect detection, localization, and temperature prediction functions. The proposed system utilizes multi-mode and broadband acoustic waves with an optimized number of sensors that provide high accuracy while retaining practical simplicity. Experimental validation is performed on a carbon steel pipe. The results indicate exceptional defect detection accuracy and precise defect localization with a mean absolute error of 66 mm. The proposed technique also predicts the effective average temperature of the pipe with a mean absolute error of 0.2°C. Comparative analysis shows superior performance of the proposed method over a traditional method previously developed by the authors' team. These results highlight the potential of integrating deep learning methods into guided-wave pipeline inspection systems to improve reliability under varying environmental conditions.

42 ENGINEERING↗

Steam generator model design parameter sensitivity study for small modular reactor system

Here, this study focuses on design parameter sensitivity studies pertaining to several Once-Through Steam Generator (OTSG) model cases both with and without a riser using python and advanced risk assessment and optimization tool, i.e. Risk Analysis Virtual Environment (RAVEN) developed at Idaho National Laboratory (INL), to support a Small Modular Reactor (SMR) system. The presented Steam Generator (SG) python-based model is a mathematical representation of a steam-generating unit for a Pressurized Water Reactor (PWR)-type SMR system, including fluid flow and heat transfer equations, models, and correlations. Design studies involve changing the model’s input design parameters (e.g., temperature, pressure, mass flow rate) to observe the resulting effects on the output of the system, such as the Heat Transfer Coefficient (HTC), Reynolds number, Nusselt number, and heat transfer performance. Sensitivity studies analyze the degree to which system output and/or desired parameters (e.g., HTC or heat transfer performance) are sensitive to changes in the input parameters. By using RAVEN, detailed design parametric sensitivity studies. Six input parameters—namely, the pressure, temperature, and mass flow rate for the inlet of the primary-side (hot fluid) and secondary-side (cold fluid) of the SG—were randomly perturbed via RAVEN’s Monte Carlo Sampler module, using uniform distributions (i.e., ±1%, ±5% and ±10 % relative changes) for 600 samples. The analysis results give valuable insights into SG system performance, and provide justification for further research and development such as optimized sensor placement, design verification, validation, and optimization.

21 SPECIFIC NUCLEAR REACTORS AND ASSOCIATED PLANTS↗

High-bandwidth frequency domain multiplexed readout of transition-edge sensors for neutrinoless double beta decay searches

The next-generation of cryogenic neutrinoless double-beta decay experiments require increasingly fast readout in order to improve background discrimination. These experiments, operated as cryogenic calorimeters at ∼ 10 mK, are usually read out by high-impedance neutron transmutation doped (NTD) thermistors, which provide good energy resolution, but are limited by ∼ 1 ms response times. Superconducting detectors, such as transition-edge sensors (TESs) with a time resolution of ∼ 100 μs, offer superior timing performance over NTD semiconductor bolometers. To make this technology viable for an application to a thousand or more channels, multiplexed readout is necessary in order to minimize the thermal load and radioactive contamination induced by the readout. Frequency-domain multiplexing readout (fMUX) for TESs, previously developed at Berkeley Lab and McGill University, is currently in use for mm-wave telescopes with detector sampling rates in the order of 100 Hz. We demonstrate a new readout system, based on the McGill/Berkeley digital fMux readout, to satisfy the higher bandwidth and noise requirements of the next generation of TES-instrumented cryogenic calorimeters. Each multiplexing readout module comprises 10 superconducting resonators in the 1–5 MHz range and a DC superconducting quantum interference device (DC-SQUID), interfaced to high-speed field programmable gate array (FPGA)-based electronics for digital signal processing and low-latency SQUID feedback. The new readout samples detectors at 156 kHz, three orders of magnitude faster than its cosmology-oriented predecessor, and demonstrates a stable feedback bandwidth of 3 kHz in a real TES-based system.

47 OTHER INSTRUMENTATION↗

Hurtado summer 2025 REDWOODS PWFS code

This release includes code developed by Benjamin Gerard and Joel Hurtado in summer 2025 to model the performance of different modes of the reflective three-sided pyramid wavefront sensor instrument within the REDWOODS module of the Shane Adaptive Optics system at Lick observatory.

Gerard, BenjaminL [Lawrence Livermore National Lab↗

Precision Timing in CMS at the HL-LHC: Current Progress on Validation and Production

During the High Luminosity phase of LHC, up to 200 proton-proton collisions per bunch crossing will bring severe challenges for event reconstruction. To mitigate pileup effects, an extended upgrade program of the CMS experiment is expected. Among which, a new timing layer, the MIP Timing Detector (MTD), will be integrated between the tracker and the calorimeters. With a time resolution of 30-60 ps, the MTD will enable 4D vertexing, bringing significant improvements in track-to-vertex association and object identification. The MTD is composed of two subsystems based on different technologies: the Barrel Timing Layer (BTL) consists of LYSO:Ce scintillating crystals readout by SiPMs, and the Endcap Timing Layer (ETL) is made of Low-Gain Avalanche Diodes. The BTL is currently under production, while ETL sensor prototyping and validation are ongoing. Recent system tests have confirmed the performance of the full acquisition chain. This talk will provide an overview of the MTD design, along with the physics motivation, and the current status of BTL construction and ETL development.

Safdari, Murtaza [Fermilab] (ORCID:000000018323731↗

Active Optical Control with Machine Learning: A Proof of Concept for the Vera C. Rubin Observatory

Abstract The Active Optics System of the Vera C. Rubin Observatory (Rubin) uses information provided by four wave front sensors to determine deviations between the reconstructed wave front and the ideal wave front. The observed deviations are used to adjust the control parameters of the optical system to maintain image quality across the 3.°5 field of view. The baseline approach from the project is to obtain amplitudes of the Zernike polynomials describing the distorted wave front from out-of-focus images collected by the wave front sensors. These Zernike amplitudes are related via an “influence matrix” to the control parameters necessary to correct the wave front. In this paper, we use deep-learning methods to extract the control parameters directly from the images captured by the wave front sensors. Our neural net model uses anti-aliasing pooling to boost performance, and a domain-specific loss function to aid learning and generalization. The accuracy of the control parameters derived from our model exceeds Rubin requirements even in the presence of full-moon background levels and mis-centering of reference stars. Although the training process is time consuming, model evaluation requires only a few milliseconds. This low latency should allow for the correction of the optical configuration during the readout and slew interval between successive exposures.

Astronomy & Astrophysics↗

Forced Diffusion Chamber Monitoring of Soil CO2 Fluxes from 2019 to Present at NGEE Arctic Teller Site, Mile Marker 27, Alaska

Soil CO2 efflux was monitored at the NGEE Arctic Teller Site, Mile Marker 27, in Alaska. Monitoring was performed beginning in June 2019 using EOSense forced diffusion soil CO2 flux sensors at up to six sites characterized by varying vegetation cover, topographic position, and soil temperature and moisture. Dataset includes measurements of soil CO2 flux and chamber temperature. Time interval between measurements ranges from 5 minutes to 3 hours. Included are EOSense chamber locations as *.kml and *.png files, six *.csv files with measurements, and two *.csv reporting format files.The Next-Generation Ecosystem Experiments: Arctic (NGEE Arctic), was a research effort to reduce uncertainty in Earth System Models by developing a predictive understanding of carbon-rich Arctic ecosystems and feedbacks to climate. NGEE Arctic was supported by the Department of Energy's Office of Biological and Environmental Research.The NGEE Arctic project had two field research sites: 1) located within the Arctic polygonal tundra coastal region on the Barrow Environmental Observatory (BEO) and the North Slope near Utqiagvik (Barrow), Alaska and 2) multiple areas on the discontinuous permafrost region of the Seward Peninsula north of Nome, Alaska.Through observations, experiments, and synthesis with existing datasets, NGEE Arctic provided an enhanced knowledge base for multi-scale modeling and contributed to improved process representation at global pan-Arctic scales within the Department of Energy's Earth system Model (the Energy Exascale Earth System Model, or E3SM), and specifically within the E3SM Land Model component (ELM).

54 ENVIRONMENTAL SCIENCES↗

Design, Construction, and Field Validation of a Blown-In Fiberglass Wall System in a Cold, Wet, and Windy Climate

In the Native Village of Tununak, located on Nelson Island in Southwest Alaska,buildings are exposed to wind-driven rain and snow throughout the year. The Cold Climate Housing Research Center (CCHRC) and Knauf Insulation partnered with the community in 2018 to design a residence for a public safety officer. Construction began in fall 2021 and is scheduled to conclude in summer 2022. The house will use integrated trusses with floor, attic, and wall cavities filled with blown-in fiberglass insulation. Hygrothermal models of the building envelope system demonstrate that the high ambient moisture load will wet the outer edges of the insulation annually regardless of the extent and integrity of exterior weather sealing measures; blown-in fiberglass is expected to be more resilient to this wetting than blown-in cellulose. To verify this, researchers will embed temperature, relative humidity, and moisture sensors in the two windward walls of the house to monitor the ability of the blown-in fiberglass insulation to dry out after wetting events that may have occurred during the transport of the insulation to the building site, storage of the insulation on site, construction process, or after installation in the wall. Sensors will remain in place for two years,documenting the wall's performance over time and verifying the design's potential for use in buildings located in climates where the chance for moisture damage is high. Here, we describe the wall system , design criteria, and the results from the hygrothermal modeling. We share details on the monitoring system's components and the planned management and analysis of data. Finally, we explain how the experiences and data from this project will inform future builds in similar locations.

building design↗

Lithium-Ion Battery Diagnostics Using Electrochemical Impedance via Machine-Learning

Diagnosing battery states such as health, state-of-charge, or temperature is crucial for ensuring the safety and reliability of electrochemical energy storage systems. While some states, such as temperature, may be measured using cheap sensors, accurate diagnosis of battery health metrics usually requires time-consuming performance measurements, making them infeasible for use in real-world operation. These health metrics can be measured during lab-testing and then estimated on-line using predictive life models or via state observer algorithms such as Kalman filters, but these predictive methods should be supplemented by actual measurement of battery health whenever possible to ensure reliability. Rapid measurement of battery health may be done by various types of fast diagnostic techniques such as electrochemical impedance spectroscopy (EIS), which can be performed in only a few minutes and require only a fraction of the energy and power needed for a full charge and discharge measurement. But there is a substantial challenge for estimating battery health using EIS data, as EIS is sensitive to cell temperature, state-of-charge, current, and resting time in addition to health. Thus, utilizing EIS data to predict battery capacity requires correcting for all these additional variables, a task that is extremely difficult to handle analytically. This talk utilizes machine-learning methods to estimate the effectiveness of battery capacity prediction from EIS data, leveraging a data set of hundreds of EIS measurements recorded at varying temperature and state-of-charge throughout a 500-day aging study of 32 commercial, large-format NMC-Graphite lithium-ion batteries. Using EIS as input to machine-learning models is complicated by the nonlinear response of impedance to battery health, temperature, and state-of-charge, as well as the collinearity between the impedance response at neighboring frequencies, which can easily lead to overfit models. To train robust models, features from EIS data need to be extracted from the data or some subset of critical frequencies selected. Many approaches for extracting and selecting features from EIS data from electrochemical analysis and machine-learning fields were identified for analysis: using the entire raw spectra; selection of one, two, or many frequencies from the entire spectra; selecting interesting points from the EIS measurement using domain knowledge; fitting EIS with an equivalent-circuit model; calculating statistics on the raw impedance values; and reducing the dimensionality of the data using unsupervised linear (principal component analysis) and non-linear (uniform manifold approximation and projection) methods. These approaches were rigorously compared using a machine-learning pipeline approach, training linear, Gaussian process, and random forest regression models and quantifying performance using cross-validation as well as a held-out test set. An artificial neural network model trained on the raw spectra was also tested. Promising pipelines were fine-tuned via Bayesian hyperparameter optimization using cross-validation loss and training with class-specific weights to counter data set imbalance. The most reliable method for utilizing impedance in this work was the selection of two optimal frequencies through an exhaustive search, resulting in about 2% mean absolute error on test data for both Gaussian process and random forest model architectures. Interrogation of a variety of models reveals critical frequencies of 100 Hz and 103 Hz for this data set, though the optimal set of frequencies is not necessarily intuitive, i.e., the best performing models are not simply those that use impedance at frequencies that have the highest correlation to the relative discharge capacity. The best performing model is an ensemble model, which is able to predict battery capacity with 1.9% mean absolute error for unseen cells using impedance recorded at a variety of temperatures and states-of-charge.

battery↗

Evaluation of HPK n + - p planar pixel sensors for the CMS Phase-2 upgrade

To cope with the challenging environment of the planned high luminosity upgrade of the Large Hadron Collider (HL-LHC), scheduled to start operation in 2029, CMS will replace its entire tracking system. The requirements for the tracker are largely determined by the long operation time of 10 years with an instantaneous peak luminosity of up to 7.5 × 10 34 cm –2 s –1 in the ultimate performance scenario. Depending on the radial distance from the interaction point, the silicon sensors will receive a particle fluence corresponding to a non-ionizing energy loss of up to $\Phi_{\text {eq}}$ = 3.5 × 10 16 cm –2 . Here this paper focuses on planar pixel sensor design and qualification up to a fluence of $\Phi_{\text {eq}}$ = 1.4 × 10 16 cm –2 . For the development of appropriate planar pixel sensors an R&D program was initiated, which includes $n^+ -p$ sensors on 150 mm (6”) wafers with an active thickness of 150 μm with pixel sizes of 100 × 25 μm 2 and 50 × 50 μm 2 manufactured by Hamamatsu. Single chip modules with ROC4Sens and RD53A readout chips were made. Irradiation with protons and neutrons, as well was an extensive test beam campaign at DESY were carried out. This paper presents the investigation of various assemblies mainly with ROC4Sens readout chips. It demonstrates that multiple designs fulfill the requirements in terms of breakdown voltage, leakage current and efficiency. The single point resolution for 50 × 50 μm 2 pixels is measured as 4.0 μm for non-irradiated samples, and 6.3 μm after irradiation to $\Phi_{\text {eq}}$ = 7.2 × 10 15 cm –2 .

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Irradiation Testing of Ultrasonic Transducers

Ultrasonic technologies offer the potential for high accuracy and resolution in-pile measurement of numerous parameters, including geometry changes, temperature, crack initiation and growth, gas pressure and composition, and microstructural changes. Many Department of Energy-Office of Nuclear Energy (DOE-NE) programs are exploring the use of ultrasonic technologies to provide enhanced sensors for in-pile instrumentation during irradiation testing. For example, the ability of single, small diameter ultrasonic thermometers (UTs) to provide a temperature profile in candidate metallic and oxide fuel would provide much needed data for validating new fuel performance models. Other efforts include an ultrasonic technique to detect morphology changes (such as crack initiation and growth) and acoustic techniques to evaluate fission gas composition and pressure. These efforts are limited by the lack of existing knowledge of ultrasonic transducer material survivability under irradiation conditions. To address this need, the Pennsylvania State University (PSU) was awarded an Advanced Test Reactor National Scientific User Facility (ATR NSUF) project to evaluate promising magnetostrictive and piezoelectric transducer performance in the Massachusetts Institute of Technology Research Reactor (MITR) up to a fast fluence of at least 1021 n/cm2 (E> 0.1 MeV). This test will be an instrumented lead test; and real-time transducer performance data will be collected along with temperature and neutron and gamma flux data. By characterizing magnetostrictive and piezoelectric transducer survivability during irradiation, test results will enable the development of novel radiation tolerant ultrasonic sensors for use in Material and Test Reactors (MTRs). The current work bridges the gap between proven out-of-pile ultrasonic techniques and in-pile deployment of ultrasonic sensors by acquiring the data necessary to demonstrate the performance of ultrasonic transducers

Daw, J.↗

Thin-Entrance Window Process for Soft X-Ray Sensors

New free electron lasers, such as SLAC’s LCLS-II, will provide unique scientific imaging opportunities. In order to fully utilize these facilities, we need to develop detectors with shallow entrance windows that will enable detection of soft x-rays from 250 eV to 1.5 KeV. Achieving adequately shallow entrance windows is challenging because the high temperature anneal needed to activate the dopant also drives the dopant profile deeper, growing the region that is insensitive to soft x-rays. A new microwave annealing technology provides an efficient way to achieve shallow entrance windows in fully depleted high-resistivity silicon sensors. The microwave anneal technique can activate dopants at low substrate temperature, with minimal dopant diffusion, and can be used to fabricate both n-type and p-type entrance windows. SRP and SIMS measurements were used to verify dopant activation with negligible dopant diffusion. We then applied the microwave anneal process to a planar sensor wafer, using the new process to create the backside diode contact. Electrical test of the resulting sensors shows good reverse bias characteristics. The sensors have been bump-bonded to a read-out ASIC and used successfully to measure an Fe-55 x-ray spectrum. Process and device simulations were performed to characterize the quantum efficiency of the entrance window for soft x-rays. This technique is useful for other sensor applications requiring a shallow entrance window, including detectors for UV photons, low energy ions and low energy electrons.

47 OTHER INSTRUMENTATION↗