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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 667 records · Page 37
All sourcesNASA NTRSDOE OSTI
DOE OSTI2025

Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography

Defect reduction remains a critical objective in the integrated circuit manufacturing process, particularly within the highly re-entrant lithography modules where minimizing defects is crucial. Defects at the wafer edge can contaminate lithography modules and downstream processing equipment, leading to redistribution onto the wafer surface and adversely affecting overall device yield. A persistent challenge in the resist coating process is the formation of resist edge beads, driven by the strong Van der Waals attraction of excess photoresist (PR) to itself and the underlying substrate. The edge bead removal (EBR) process is a standard cleaning step designed to eliminate these edge beads and prevent potential contamination. Here, in this study, we identify the sources of EBR induced defects and additional EBR process encroachment toward edge patterning during the EBR cleaning process. This study provides a comprehensive study aimed at optimizing the EBR cleaning process to effectively eliminate EBR-induced defects, thereby enhancing overall device yield. Specifically, we identify three primary defects induced by the EBR cleaning process: rainbow-type, finger-shaped, and teardrop-type defects. Our experimental study reveals that in addition to EBR rinse time, PR cast time is crucial parameters contributing to the formation of these defects. By properly optimizing the PR cast time and EBR rinse time, we were able to remove nearly 100 % of dense clusters of defects that were easily visible even at low magnification optical microscopy throughout the wafer edge. We observed that shorter PR casting times shows edge defects caused by inefficient EBR process because of insufficient time for PR to fully settle causing superfluous PR to continue flowing toward wafer edge during EBR clearing step, leading to partial removal of PR at the wafer edge and the formation of rainbow defects. Proper optimization of both PR casting time and EBR chemistries dispense time is essential to resolve these defects, ensuring efficient EBR cleaning process and improved overall device yield.

42 ENGINEERING↗
DOE OSTI2013

An experimental statistical analysis of stress projection factors in BCC tantalum

Crystallographic slip planes in body centered cubic (BCC) metals are not fully understood. In polycrystals, there are additional confounding effects from grain interactions. This paper describes an experimental investigation into the effects of grain orientation and neighbors on elastic–plastic strain accumulation. In situ strain fields were obtained by performing digital image correlation (DIC) on images from a scanning electron microscope (SEM) and from optical microscopy. These strain fields were statistically compared to the grain structure measured by electron backscatter diffraction (EBSD). Spearman rank correlations were performed between effective strain and six microstructural factors including four Schmid factors associated with the <111> slip direction, grain size, and Taylor factor. Modest correlations (~10%) were found for a polycrystal tension specimen. The influence of grain neighbors was first investigated by re-correlating the polycrystal data using clusters of similarly-oriented grains identified by low grain boundary misorientation angles. Second, the experiment was repeated on a tantalum oligocrystal, with through-thickness grains. Much larger correlation coefficients were found in this multicrystal due to the dearth of grain neighbors and subsurface microstructure. Finally, a slip trace analysis indicated (in agreement with statistical correlations) that macroscopic slip often occurs on {110}<111> slip systems and sometimes by pencil glide on maximum resolved shear stress planes (MRSSP). These results suggest that Schmid factors are suitable for room temperature, quasistatic, tensile deformation in tantalum as long as grain neighbor effects are accounted for.

36 MATERIALS SCIENCE↗
DOE OSTI2015

In-situ investigation of stress-induced martensitic transformation in Ti–Nb binary alloys with low Young's modulus [In-situ high-energy X-ray diffraction investigation on stress-induced martensitic transformation in Ti-Nb binary alloys]

Microstructure evolution, mechanical behaviors of cold rolled Ti-Nb alloys with different Nb contents subjected to different heat treatments were investigated. Here, optical microstructure and phase compositions of Ti-Nb alloys were characterized using optical microscopy and X-ray diffractometre, while mechanical behaviors of Ti-Nb alloys were examined by using tension tests. Stress-induced martensitic transformation in a Ti-30. at%Nb binary alloy was in-situ explored by synchrotron-based high-energy X-ray diffraction (HE-XRD). The results obtained suggested that mechanical behavior of Ti-Nb alloys, especially Young's modulus was directly dependent on chemical compositions and heat treatment process. According to the results of HE-XRD, α"-V1 martensite generated prior to the formation of α"-V2 during loading and a partial reversible transformation from α"-V1 to β phase was detected while α"-V2 tranformed to β completely during unloading.

36 MATERIALS SCIENCE↗
DOE OSTI2018

Biaxial creep performance of CWSR Zircaloy-4 cladding at emulated off-normal conditions of interim dry storage facility

In this study, biaxial creep behavior of hydrided Zircaloy-4 cladding was tested at 500 degrees C. Creep-life was inversely proportional to H-concentration up to 750 wppm. The weakening through hydride reorientation of hydrided specimens was not observed by optical microscopy. The power-law stress exponents and the TEM observation supported the high-temperature climb mechanism dominated the creep behavior in secondary stage.

36 MATERIALS SCIENCE↗
DOE OSTI2019

Creep behavior of Alloy 709 at 700 °C

Alloy 709 is an austenitic stainless steel with potential for structural applications in sodium-cooled fast reactors. In this study, creep tests on Alloy 709 specimens were performed at a temperature of 700°C under applied stresses in the range of 125 to 250 MPa. Here, the alloy exhibited a brief primary, insignificant secondary and prolonged tertiary creep stages. A Norton stress exponent (n) of ~6 was obtained from the creep plots. Microstructural analyses were carried out for both as-received and crept specimens using optical microscopy, electron backscattered diffraction, and transmission electron microscopy. The microstructures of the as-received and crept specimens were compared. The mode of fracture was transgranular as revealed by scanning electron microscopy of the creep-ruptured specimens. Thermodynamic and precipitation modeling was performed in order to obtain information on the phase types and the kinetics of precipitation for the sigma-phase and the M 23 C 6 carbide. Based on the creep data, microstructural observations and relevant modeling, creep deformation and failure mechanisms at the considered temperature are elucidated.

36 MATERIALS SCIENCE↗
DOE OSTI2020

Build orientation, surface roughness, and scan path influence on the microstructure, mechanical properties, and flexural fatigue behavior of Ti–6Al–4V fabricated by electron beam melting

In the present work, microstructure and fatigue behavior of Electron Beam Melted (EBM) Ti–6Al–4V have been systematically studied. Fatigue behavior was investigated using four-point bend tests of rectangular bars with internal features fabricated with different build orientations, scan paths, and surface conditions. Microstructural variations were evaluated by optical microscopy and Vickers micro-hardness indentations, both of which were found to be consistent throughout the build and within ranges reported in the literature. The fatigue performance of the EBM material was comparable to wrought Ti–6Al–4V when the loading direction was parallel to the build direction, but severely limited when loaded perpendicular to the build direction or if surface roughness defects were present. Scanning electron microscopy and interrupted fatigue tests were utilized to characterize fracture surfaces, failure mechanisms, crack initiation, and propagation behavior. Crack initiation sites in the vertically-oriented specimens were identified to be melt-related defects formed by insufficient melting.

36 MATERIALS SCIENCE↗
DOE OSTI2021

Prediction of softening kinetics and recrystallization texture in non-isothermally annealed bulged tubes using CPFEM and CA models

A hierarchically coupled cellular automata (CA) model, crystal plasticity finite element method (CPFEM), and thermal finite element (FE) model is developed to predict the softening kinetics of the bulged steel tube during non-isothermal annealing. Through the developed model, the kinetics of softening mechanisms including static recovery (SRV) and static recrystallization (SRX), as well as the recrystallization texture are predicted. Later, the Johnson-Mehl-Avrami-Kohnogorov (JMAK) model based on the predicted SRX data is developed to interpret the recrystallization behavior of the material. To perform this study, diverse experimental tests including tube hydroforming (THF), annealing, uniaxial tensile test, hardness test, as well as microstructure observations through optical microscopy and Electron Backscatter Diffraction (EBSD) tests on steel tube are performed. The obtained experimental data are utilized to calibrate and verify the implemented CPFEM model for simulation of THF process, thermal FE model for prediction of the local temperature over annealing time, and CA algorithm for modeling of the softening kinetics and texture evolution throughout the annealing process. The study shows that the predicted deformation characteristics, softening kinetics, recrystallization texture and temperature profile during non-isothermal annealing are in good agreement with experimental data. During the annealing process, a total of four stages for the kinetics of softening mechanisms is observed: No softening; SRV only; SRV dominant; and SRX dominant. During the progress of SRX, the behavior of recrystallization is abruptly changed, confirming that two different mechanisms are controlling the kinetics of transformation.

36 MATERIALS SCIENCE↗
DOE OSTI2022

Spall damage mechanisms in laser powder bed fabricated stainless steel 316L

This paper reports on spall damage mechanisms in laser powder bed fusion (LPBF) fabricated stainless steel 316L (SS316L) subjected to uniaxial, strain plate-impact loading and explores failure evolution with increasing impact velocity and peak pressure. Analysis of velocimetry profiles reveals a heterogeneous failure response with several different failure mechanisms activated during impact and resulting spall. The analysis is supported by optical microscopy and electron backscattered diffraction (EBSD) observation of soft recovered impacted samples, which show evidence of localized nano-twinning, twin growth, severe grain rotation, and grain refinement along the spall plane, in addition to pore nucleation, coalescence, and growth. Furthermore, the observed failure mechanisms, including crack formation and propagation along high angle grain boundaries (HAGBs), are not consistently indicative of ductile fracture typical of wrought stainless steel.

36 MATERIALS SCIENCE↗
DOE OSTI2024

Hydrogen embrittlement of Zircaloy-4 fabricated by ultrasonic additive manufacturing

Ultrasonic additive manufacturing (UAM) was successfully applied to the zirconium material system to create a planar geometry. Following fabrication, SS-J3 type tensile specimens of the UAM and wrought Zircaloy-4 with a nominal gage section of 5×1.2×0.75 mm were machined for hydriding studies and mechanical testing. The SS-J3 type tensile specimens were gas-charged with hydrogen using a custom system that precisely controls hydrogen gas flow rate, hydrogen partial pressure, and temperature. To avoid altering the UAM material, the maximum process temperature was limited to 550°C. Using different initial hydrogen gas pressures and flow rates, various hydrogen contents (70–1755 wppm) were achieved for Zircaloy-4 specimens. Tensile testing shows that, regardless of hydrogen content, all UAM specimens measured yield strengths in the range of 557±16 MPa and ultimate tensile strengths of 660±4MPa. However, total elongation clearly decreased as a function of increasing hydrogen content. Further, at the lowest hydrogen content, the total plastic elongation measured 21.5%, and this value decreased to less than 2% when the hydrogen content was increased to 1000 wppm. Cross-sectional optical microscopy images revealed that the hydride distributions are randomly oriented. For the low hydrogen content specimen, these randomly distributed hydrides are isolated from each other. A sandwiched structure, consisting of high-density and low-density layers, was also observed for the specimens with hydrogen content between 200 and 400 wppm. As the hydrogen content increases, the hydrides diffuse into the low-density hydride layers to form a network across the whole specimen. Although the tensile properties of UAM and wrought Zircaloy-4 exhibit the same behavior with increasing hydrogen content, the distinctions in grain orientations led to differences in the hydride orientations at low and intermediate hydrogen concentrations.

36 MATERIALS SCIENCE↗
DOE OSTI2024

Integration of layered group IV selenides: From SnSe–SnSe 2-x S x core-shell crystals to complex (SnSe–SnSe 2-x S x )-GeSe van der waals heterostructures

The layered semiconductor tin selenide (SnSe) has received extensive interest due to its promising thermoelectric and ferroelectric properties. Integrating SnSe with other layered crystals in heterostructures can enable the modification of charge- and thermal transport, electrical polarization, and other properties such as chemical stability, optoelectronics, and photonics. Here, we demonstrate the vapor transport synthesis of single-crystalline SnSe monochalcogenide flakes that are spontaneously encapsulated in a thin layered SnSe 2-x S x dichalcogenide shell. In a second growth step, such SnSe-SnSe 2-x S x heterostructures are integrated with the monochalcogenide GeSe, which is laterally stitched to the SnSe side facets while preserving the dichalcogenide shell across the basal facets. This architecture is confirmed by optical microscopy, electron microscopy and diffraction, energy dispersive X-ray and Raman spectroscopies, as well as cathodoluminescence spectroscopy. Furthermore, the results extend our capabilities for materials integration by forming complex heterostructures with both vertical van der Waals interfaces and covalent lateral interfaces between layered semiconductors.

2D layered crystals↗
DOE OSTI2014

Microscopic analysis of irradiated AGR-1 coated particle fuel compacts

The AGR-1 experiment involved irradiation of 72 TRISO-coated particle fuel compacts to a peak compact-average burnup of 19.5% FIMA with no in-pile failures observed out of 3 x 105 total particles. Irradiated AGR-1 fuel compacts have been cross-sectioned and analyzed with optical microscopy to characterize kernel, buffer, and coating behavior. Six compacts have been examined, spanning a range of irradiation conditions (burnup, fast fluence, and irradiation temperature) and including all four TRISO coating variations irradiated in the AGR-1 experiment. The cylindrical specimens were sectioned both transversely and longitudinally, then polished to expose from 36 to 79 individual particles near midplane on each mount. The analysis focused primarily on kernel swelling and porosity, buffer densification and fracturing, buffer–IPyC debonding, and fractures in the IPyC and SiC layers. Characteristic morphologies have been identified, 981 particles have been classified, and spatial distributions of particle types have been mapped. No significant spatial patterns were discovered in these cross sections. However, some trends were found between morphological types and certain behavioral aspects. Buffer fractures were found in 23% of the particles, and these fractures often resulted in unconstrained kernel protrusion into the open cavities. Fractured buffers and buffers that stayed bonded to IPyC layers appear related to larger pore size in kernels. Buffer–IPyC interface integrity evidently factored into initiation of rare IPyC fractures. Fractures through part of the SiC layer were found in only four classified particles, all in conjunction with IPyC–SiC debonding. Compiled results suggest that the deliberate coating fabrication variations influenced the frequencies of IPyC fractures and IPyC–SiC debonds.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗
DOE OSTI2018

Comparison of characterization methods for differently atomized nickel-based alloy 625 powders

The deployment of additive manufacturing depends on the quality of the produced part, specifically the absence of internal defects, impurities and compositional gradient. In this paper, differently atomized nickel-based alloy 625 powder particles were systematically characterized with different methods and results were compared. Powder properties were studied to understand the effect of different atomization methods on the properties of the powder particles. Morphology, shape and size of water and argon atomized powders were observed using optical microscopy, scanning electron microscopy and micro-computed X-ray tomography (μCT); μCT with different resolution and sample setup. As expected, water atomized powder particles have irregular morphology in contrast to spherical gas atomized particles. Phase and elemental analysis were conducted with X-ray diffraction and energy dispersive spectroscopy; thermal properties were measured with differential scanning calorimetry. Gas atomized powder shows composition and melting temperature close to nominal bulk alloy 625. Particle size analysis was carried out using sieving, laser particle size analysis and μCT. It is found that the average particle size obtained from μCT depends on scan resolution. Additionally, porosity of the powders was observed in SEM micrographs and investigated in detail using μCT. In conclusion, μCT with higher resolution results in collecting accurate shape, size, porosity and morphology of the powder particles. Finally, considering the large number of particles that can be investigated with μCT and ability to observe internal porosity, μCT is found to be an appropriate if not superior substitution for other powder characterization methods such as optical/electron microscopies, sieving and laser particle size analysis if time of characterization is not a concern.

36 MATERIALS SCIENCE↗
DOE OSTI2026

Effect of 316 stainless steel powder processing conditions on microstructure

One parameter that has both economic and performance effects in the manufacturing of steel parts is the powder feedstock used. 316 L steel powder can be produced through water atomization or gas atomization, where both the powder size and the atomization process determine the cost of powder feedstock. Gas atomized powder is spherical and has a lower oxygen content than water atomized powder, making it the preferred choice for performance, but comes at a higher financial cost. Here, in this study, various 316 L powder batches are characterized to understand physical properties and microstructural variations. Density and flowability were determined using gas pycnometry and Hall flow tests. Powder morphology and porosity were qualitatively analyzed via optical microscopy and scanning electron microscopy, Finally, transmission electron microscopy was used to determine changes in phases present. Spherical gas atomized powder of 30–100 μm contained Mn$-$Si rich oxides both on the surface and within the matrix. Meanwhile, irregular water atomized powder 30 μm in diameter contained silicon oxides without manganese. All powder particles contained a nickel rich cellular structure which was shown to support the formation of additional phases. While literature has observed general microstructural features across 316 L powder particles, transmission electron microscopy (TEM) in this study has identified variations in precipitation and cell structures. Information regarding morphology, flowability, density, and phase distributions can be applied to understand variations in part consolidation, which will in turn show which powder aspects are significant for production.

Chemical segregation↗
DOE OSTI2016

Fabrication and testing of antimony doped bismuth tri-iodide semiconductor gamma-ray detectors

We fabricated antimony (Sb) doped bismuth tri-iodide (BiI 3 ) radiation detectors from large single crystals that were grown using the modified vertical Bridgman technique. Detectors were prepared by subjecting the crystal surfaces to different mechanical and chemical treatments. Surface quality of the detectors was evaluated using optical microscopy. The influence of surface quality on detector performance was analyzed by measuring the leakage current for each of the detectors. The radiation response of the detectors was measured using an Americium ( 241 Am) gamma-ray source at room temperature. The first successful use of BiI 3 detectors for gamma-ray spectroscopy is reported here with energy resolution of 7.5% at 59.5 keV. The mobility-lifetime product for electrons was also estimated to be about 5.2 x 10 -4 cm 2 /V.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
DOE OSTI2019

Novel use of a hand-held laser induced breakdown spectroscopy instrument to monitor hydride corrosion in uranium

With a compact hand-held laser-induced breakdown spectroscopy (LIBS) instrument, studies were performed on specimens of uranium charged with controlled hydrogen concentrations for a qualitative evaluation of hydride corrosion. Four samples of depleted uranium with two different starting microstructures (cast and rolled) were used for this study. The hydrogen charged samples (rolled 1.8 wppm H and cast 14 wppm H by weight) are representative of the pre-corrosion states with hydrides distributed throughout the bulk. In-depth LIBS measurements were carried out, after the thick surface corrosion layer was removed, by applying 100 laser pulses from sample surface into the bulk on five different sample locations. Three additional areas on each sample were investigated by laser ablation using a 12-point grid approach. The atomic emission signals of elemental uranium, carbon, hydrogen, and oxygen were identified and analyzed. All four samples showed similar uranium and carbon concentrations, as expected. Hydrogen content was consistent with each sample's specification, such that the hydrogen charged samples exhibited higher hydrogen concentration than their references. Both specimens charged with hydrogen showed elevated oxygen content as well, due to rapid oxidation of uranium and uranium hydrides. The oxidation process was facilitated by the laser ablation and plasma plume's high temperature effects on the sample combined with the glovebox environment. The uranium surface damage produced by laser ablation was quantitatively evaluated by optical microscopy.

36 MATERIALS SCIENCE↗
DOE OSTI2022

Weather aging effects on modified asphalt with rubber-polyethylene composites

Weather aging may cause more severe degradation on asphalt than thermal-oxidative aging due to the synergistic effect among oxygen, heat, ultraviolet (UV) radiation, and moisture. This study aimed to investigate weather aging effects and anti-aging mechanisms on asphalt modified with rubber-polyethylene (PE) composites. The modified binder blends and asphalt mixtures were subjected to outdoor weather aging. Dynamic shear rheometer (DSR), Fourier transform infrared spectroscopy (FTIR), Gel permeation chromatography (GPC), and optical microscopy tests were adopted to characterize the rheological properties, aging resistance, polymer degradation, and anti-aging mechanisms of modified binder blends, respectively. Mixture performance tests including Asphalt Pavement Analyzer (APA) and Ideal-CT tests were used to evaluate rutting and cracking resistance of asphalt mixtures. Results showed that weather aging can cause more severe aging to asphalt binders than pressure aging vessel (PAV) due to the severe degradation of PE particles. Rubber-PE composites alloyed with an extruder proved to stabilize PE particles in asphalt and significantly improve the aging resistance of modified binder blends. Furthermore, the enhanced aging resistance is attributed to the dispersion of PE particles and carbon black released by soluble rubbers.

Aging resistance↗
DOE OSTI2023

Accumulation of microplastics in soil after long-term application of biosolids and atmospheric deposition

Land-applied biosolids can be a considerable source of microplastics in soils. Previous studies reported microplastics accumulation in soils from biosolid application, however, little is known about the contribution of atmospherically deposited microplastics to agricultural soils. In this study, we quantified and characterized microplastics in soils that have been amended with biosolids over the past 23 years. We also collected atmospheric deposition samples to determine the amount and type of plastics added to soils through atmospheric input over a period of about 2 years. Soil samples were taken from a replicated field trial where biosolids have been applied at rates of 0, 4.8, 6.9, and 9.0 t/ha every second crop. The biosolids were anaerobically digested and dewatered, and were applied by spreading onto the soil surface. Soil and atmospheric samples were extracted for microplastics by Fenton's reaction to remove organic matter followed by flotation in a zinc chloride solution to separate plastic from soil particles. Samples were analyzed for microplastics by optical microscopy and Laser Direct Infrared Imaging Analysis (LDIR). The mean number of microplastics identified from biosolids samples was 12,000 particles/kg dry biosolids. The long-term applications of biosolids to the soil led to mean plastics concentrations of 383, 500, and 361 particles/kg dry soil in the 0–10 cm depth for low, medium, and high biosolids application rates, respectively. These plastic concentrations were not significantly different from each other, but significantly higher than those found in non biosolids-amended soil (117 particles/kg dry soil). The dominant plastic types by number found in biosolids were polyurethane, followed by polyethylene, and polyamide. The most abundant plastics in soil samples were polyurethane, polyethylene terephthalate, polyamide, and polyethylene. Atmospheric deposition contributed to 15 particles/kg dry soil per year and was mainly composed of polyamide fibers. In conclusion, this study shows that long-term application of biosolids led to an accumulation of microplastics in soil, but that atmospheric deposition also contributes a considerable input of microplastics.

54 ENVIRONMENTAL SCIENCES↗