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645 records · Page 36

Recent progress in atomic-scale controlled plasma processing

Atomic-scale control in plasma processing is becoming increasingly critical for fabricating of advanced semiconductor devices, particularly as the industry shifts toward three-dimensional (3D) architectures and high-aspect-ratio (HAR) structures. This review presents a comprehensive overview of recent developments in atomic-scale controlled plasma processes, organized along two key directions: the hierarchical structure of plasma–surface interactions and the generational evolution of atomic layer processing (ALP) technologies. We examined the gas phase, where molecular design enables selective generation of ions and radicals; the boundary layer, where transport phenomena govern species delivery into nanoscale features, and the surface, where temperature-dependent reactions and cyclic processing determine etching selectivity and precision. Building on this foundation, we outline five generations of ALP—from thermal atomic layer deposition to transport-aware, temporally and structurally decoupled processes—highlighting the increasing sophistication of process control. The review further explores the transition from empirical recipe development to science-based, data-driven methodologies. By integrating quantum-chemical modeling, advanced diagnostics, and machine learning, we demonstrated how predictive models can link plasma species composition to process outcomes, enabling autonomous and adaptive control strategies. Finally, this review discusses the broader societal implications of plasma process innovation through the E4 quartet: energy and resource efficiency, environmental sustainability, evolutionary advancement, and educational promotion. These principles guide the development of sustainable and intelligent atomic-scale manufacturing technologies that are not only technically advanced but also socially responsible.

Ishikawa, Kenji [Nagoya Univ. (Japan)] (ORCID:0000↗

Progress report on analytic and numerical studies of x-ray-induced impulse

In a variety of high-energy-density (HED) systems, x-rays of a given energy are used to generate shockwaves, bulk motion, and impulse in materials. As radiation energy is deposited within the material, the material is heated. The number of photons of a certain wavelength absorbed is determined by the spectral intensity of the radiation and the material’s opacity evaluated at that wavelength. This heating results in a pressure increase dictated by the material’s equation of state. Depending on the intensity of the absorbed radiation, it may also cause the material to change phase into a liquid, gas, or plasma. The increased pressure drives the heated surface layer to blow off, imparting impulse and sending a compressive wave into the bulk of the material. Additionally, the compression wave interacts with the solid boundary of the material, resulting in a tensile wave that may cause the material to spall. The impulse generated by the deposition of x-ray energy within the sample can be modeled using purely analytical methods, e.g. the Bethe, Bade, Averell, and Yost (BBAY) model. However, the blow-off process is rather complicated, and proper modeling efforts must account for material ejected by spallation, vaporization, jetting, and plasma ablation. For this reason, analytical models have an unclosed term describing the final energy of the blown-off material Ef(z). Prior modeling efforts have arbitrarily fixed this at some value or modeled it using a limiting set of thermodynamic assumptions. The work we are currently performing uses validated simulations using sophisticated photon transport, equation of state, and strength models/data to provide a fit for Ef(z) that is useful for predictive calculation of impulse. We will apply our methodology and show results for different materials and x-ray sources. This work is particularly useful for the design of experiments studying x-ray impulse generation. The present report is outlined as follows. Section 1.2 describes a series of HED experiments investigating x-ray-generated impulse in materials. Section 1.3 describes the computational approach we employ in this study, and presents validation results against the aforementioned experiments. Section 1.4 introduces analytical models for impulse generation, as well as our method for utilizing impulse from simulations to close the models. We discuss the concept of impulse-spectrum sensitivity, it’s application to uncertainty quantification, and derive a very useful analytical expression for it in 1.5. We then summarize recent progress in this project and discuss future work in section 1.6.

36 MATERIALS SCIENCE↗

Causes of fuel–ablator mix inferred from modeling of monochromatic time-gated radiography of OMEGA cryogenic implosions

Here, we present evidence, in the context of OMEGA cryogenic target implosions, that laser imprint, known to be capable of degrading laser-direct-drive target performance, plays a major role in generating fuel–ablator mix. OMEGA cryogenic target implosions show a performance boundary correlated with acceleration-phase shell stability; for sufficiently low adiabats (where the adiabat is the ratio of the pressure to the Fermi pressure) and high in-flight aspect ratios (IFAR's), the neutron-weighted shell areal density and neutron yield relative to the clean simulated values sharply decline. Direct evidence of Rayleigh–Taylor fuel–ablator mixing was previously obtained using a Si Heα backlighter driven by an ~20-ps short pulse generated by OMEGA EP. The shadow cast by the shell shortly prior to stagnation, as diagnosed using backlit radiographs, shows a softening near the limb, which is evidence of an ablator–fuel mix region for a low-adiabat implosion (α ~ 1.9, IFAR = 14) but not for a moderate adiabat implosion (α ~ 2.5, IFAR = 10). We find good agreement between experimental and synthetic radiographs in simulations that model laser imprint and account for uncertainty in the initial ablator thickness. Furthermore, we further explore the role of other mechanisms such as classical instability growth at the fuel–ablator interface, species concentration diffusion, and long-wavelength drive and target asymmetries.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Characterizing the negative triangularity reactor core operating space with integrated modeling

Negative triangularity (NT) has received renewed interest as a fusion reactor regime due to its beneficial power-handling properties, including low scrape-off layer power and a larger divertor wetted area that facilitates simple divertor integration. NT experiments have also demonstrated core performance on par with positive triangularity (PT) high confinement mode (H-mode) without edge-localized modes (ELMs), encouraging further study of an NT reactor core. In this work, we use integrated modeling to scope the operating space around two NT reactor strategies. The first is the high-field, compact fusion pilot plant concept Modular, Adjustable, NT ARC (MANTA) and the second is a low field, high aspect ratio concept based on work by Medvedev et al. By integrating equilibrium, core transport, and edge ballooning instability models, we establish a range of operating points with less than 50 MW scrape-off layer power and fusion power comparable to PT H-mode reactor concepts. Heating and seeded impurities are leveraged to accomplish the same fusion performance and scrape-off layer exhaust power for various pressure edge boundary conditions. Scans over these pressure edge conditions accommodate any current uncertainty of the properties of the NT edge and show that the performance of an NT reactor will be extremely dependent on the edge pressure. The high-field case is found to enable lower scrape-off layer power because it is capable of reaching high fusion powers at a relatively compact size, which allows increased separatrix density without exceeding the Greenwald density limit. Adjustments in NT shaping exhibit small changes in fusion power, with an increase in fusion power density seen at weaker NT. Infinite-n ballooning instability models indicate that an NT reactor core can reach fusion powers comparable to leading PT H-mode reactor concepts while remaining ballooning-stable. Seeded krypton is leveraged to further lower scrape-off layer power since NT does not have a requirement to remain in H-mode while still maintaining high confinement. We contextualize the NT reactor operating space by comparing to popular PT H-mode reactor concepts, and find that NT exhibits competitive ELM-free performance with these concepts for a variety of edge conditions while maintaining relatively low scrape-off layer power.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Dependence of the boundary heat flux width on core and edge profiles in Alcator C-Mod

This work presents new evidence that the heat flux width, λ q , in the Alcator C-Mod tokamak scales with the edge electron pressure, as observed in the ASDEX Upgrade (AUG) tokamak, but the scaling with volume-averaged pressure, $\bar{p}$, from the plasma stored energy, is a better predictor of λ q in Alcator C-Mod than the edge electron pressure. These previous studies, which find that λ q decreases with increasing plasma pressure, imply that a high performance core at high pressure will lead to challenging heat and particle exhaust due to very small λ q . This concern has led to our significant enlargement of the C-Mod database with the electron density, temperature, and pressure profile data from the Thomson scattering and electron cyclotron emission diagnostics. Using the C-Mod database augmented with new profile data, we find that λ q decreases with increasing edge electron pressure as ${\lambda }_{q}\propto {p}_{\mathrm{e},95}^{-0.26}$, similar to results from AUG, and showing the strength of cross-machine comparisons. We also find that ${\lambda }_{q}\propto {p}_{\mathrm{e},\mathrm{c}\mathrm{o}\mathrm{r}\mathrm{e}}^{-0.56}$, consistent with the original finding from C-Mod that the heat flux width scales as ${\bar{p}}^{-0.48}$. The scalings of λ q with separatrix pressure and gradient scale length are found to match the AUG results qualitatively. The C-Mod scalings with edge plasma quantities have more scatter than the $\bar{p}$ scaling, and, importantly, show different trends for H-modes relative to L- and I-mode. Furthermore, investigating the source of this discrepancy presents an opportunity for further study that may improve our ability to predict the heat flux width in different confinement scenarios in the pursuit of optimizing core-edge performance in future reactors.

Alcator C-Mod↗

Erosion of focus rings in capacitively coupled plasma etching reactors

In plasma etching reactors, the structure surrounding the wafer, often called a focus ring (FR), plays an important role in maintaining uniform fluxes of reactants across the wafer. The FR is typically made of dielectric materials. During the plasma etching process, the sheath that forms over the wafer to accelerate ions anisotropically into the surface extends over the FR. Electrical charging of the FR modifies the sheath relative to that over the wafer. On the one hand, one wants the sheath to be uniform across the wafer-FR boundary to enable uniform fluxes to the edge of the wafer. On the other hand, maintaining a high voltage sheath over the FR will erode the FR, which is undesirable as the FR is a consumable component that must be periodically replaced in high volume manufacturing. In this work, we computationally investigated the consequences of dielectric constant ε of the FR materials on erosion of the FR. The series capacitance of the FR and its underlying structure is typically smaller than that of the wafer and its underlying structure. As a result, the FR charges quickly relative to the wafer, which then reduces the voltage across the sheath on top of the FR. The ion energy and angular distributions (IEADs) striking the FR are, therefore, generally lower in energy with a broader angular distribution. With ε = 2, the ion energies striking the middle to the outer edge of the FR are 30–180 eV, whereas for ε = 100, the ion energies are 120–380 eV. At the transition between the wafer and the FR, there is a skew in the IEAD as large as 15° that results from the difference in sheath thickness above the wafer and the FR. This skew and the erosion rate across the FR are functions of the dielectric constant of the FR material. With low ε, the FR charges quickly, less plasma is produced above the FR, and there is less voltage across the sheath that results in less FR erosion. Increasing ε of the FR produces a higher sheath voltage as well as higher ion fluxes over the FR, which increases erosion, while the skew at the edge of the wafer is less severe. Further, the material of the subsurface portion of the FR, which dominates its capacitance, is an important consideration in the design of the substrate assembly.

36 MATERIALS SCIENCE↗

Characterizing impurity sourcing and transport in the high temperature boundary of DIII-D wide pedestal QH-mode plasmas

Wide Pedestal QH-mode (WPQH) plasmas in the DIII-D tokamak show a sheath limited SOL, where electron density and temperature remain nearly constant along field lines from the midplane to the divertor. Consequently, parallel gradients are weak. The first Langmuir probe measurements in this regime point to a high sheath temperature with target electron temperature T e up to ~150 eV, leading to high carbon self-sputtering. Midplane carbon densities from SOLPS-ITER modeling of these plasmas in a double-null configuration fall far below experimental measurements unless full drifts are activated. In the drift-dependent SOLPS-ITER modeling, anomalous poloidally uniform, radially varying transport is adjusted to match measured radial electron temperature and density profiles in the pedestal and SOL region. The resulting carbon density (C6+) matches measured carbon densities just inside the separatrix. The C2+ density near the outer strike point is also consistent with spectroscopic imaging. With the ion B×∇B drift towards the X-point, carbon in the lower divertors is redistributed from the private flux region to the high field side (HFS) and pushed upstream in the SOL by poloidal E×B drifts. The B × ∇B drift dominates the radial flow of carbon as it moves upstream. Simulations with reversed toroidal field (ion B × ∇B drift away from the X-point) show a radically different behavior, where carbon accumulates on the low field side in lower divertors, and is pushed towards the HFS in the upper divertors, indicating a strong effect of particle drifts on impurity distribution. In double-null configurations which are usually used in WPQH plasmas, these drift effects tend to counterbalance, so that the carbon density and Z eff are reduced at the outer mid-plane only modestly, by around 7% in the modeling. Further predictive modeling indicates that the carbon density can be significantly reduced by an order of magnitude by implementing a single-null shape with reversed toroidal field.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Exploration of Sn 70 Li 30 alloy as possible material for flowing liquid metal plasma facing components

As an advanced alternative to solid materials, Liquid Metals (LM) may offer more resilient and feasible Plasma Facing Components (PFCs). Particularly, regarding the unavoidable material erosion/degradation produced by particle/heat fluxes in future fusion devices where much longer duty cycles are expected. Furthermore, configurations that propose a flowing LM surface can add the advantage of a continuously fresh and clean layer facing the plasma. Although lithium is the most widely tested option, tin-lithium (SnLi) alloys have been proposed to attempt to combine the positive characteristics of both pure elements and ameliorate the specific issues of lithium. In this work, the potential use of Sn70Li30 alloy in such flowing concepts has been explored by addressing several preliminary and mandatory aspects for its utilization. Key issues such as wettability and compatibility of the alloy with relevant substrates have been studied in a multidisciplinary approach. The data obtained from deposited liquid tin-lithium droplets indicates approximate wetting temperatures of 360 °C, 390 °C and 405 °C for the fresh alloy on 316 stainless steel, molybdenum, and tungsten, respectively. However, the alloy contamination appeared to strongly affect the wetting characteristics of materials, increasing their wetting temperature by ~130 °C in the worst observed cases. Interestingly, in some instances, the instability of the liquid alloy surface was observed in the form of sudden gaseous ejection. The deposited droplets were posteriorly characterized in terms of absolute composition and depth profile by Inductively Coupled PlasmaOptical Emission Spectroscopy (ICP-OES) and Secondary Ion Mass Spectrometry (SIMS-ToF). Additionally, the nature and composition of the boundaries between the substrates and alloy microparticles was investigated by Scanning Electron Microscopy (SEM), Energy Dispersive X-Ray Spectroscopy (EDS), and 3D Laser microscopy. The overall results of this post-mortem characterization revealed that first signs of corrosion induced by both alloy elements (lithium-chromium association and iron-tin intermetallic mixing) were present on 316 stainless steel after short exposures (≤3 h) at temperatures lower than 550 °C. Conversely, molybdenum and tungsten showed good compatibility with the alloy in equivalent conditions. The global implications of these results are finally addressed, focusing on the future perspectives and the more viable scenarios for the eventual utilization of these alloys in flowing liquid metal configurations.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Purpose, Design, and Analysis of the NSTX-U Centerstack Casing Lateral Support Shims

The National Spherical Torus Experiment Upgrade (NSTX-U) centerstack casing surrounds the central magnet core of NSTXU. It provides the inner vacuum boundary of the plasma chamber and supports the radially inboard plasma facing components lining the plasma chamber. The casing is supported like a cantilever, fixed at the lower flange by a connection to the TF Bundle through a G-10 ring. It is flexibly supported at the top by bellows, and insulated shims intended to react the largest part of the inventory of the disruption loads at the upper support, thereby protecting the upper and lower connections from excessive loads. A large part of the qualification of the casing and tiles requires addressing and quantifying disruption loads. These have been estimated based on extensions of the behavior of NSTX during its run period roughly 15 years ago. Structural qualification of the Upgrade used these estimates of the loading as input to calculations to demonstrate adequacy for a “most probable” disruption. The estimates are included in a requirements document to guide conservative design of all components loaded by disruptions. However, the changes made for the upgrade made the extrapolation of disruption behavior uncertain. Disruptions include axisymmetric loading from axisymmetric currents induced in the vessel shells. In addition, more complex currents called Halo currents are a result of plasma poloidal currents impinging on the casing. The halo currents add another layer of uncertain behavior and net lateral loading to the casing. As a result, NSTX-U is equipped with a number of instruments intended to assess the nature and severity of disruptions. The casing shims are required for lateral support of the casing, but these have also been converted to load cells to provide another measure of the magnitude of symmetric and asymmetric loading. Some of the logic in the development of the requirements document are presented. Electromagnetic analysis of axisymmetric and halo loading is described. Global simulations of the casing transient dynamic response, and local analysis and testing of the shim/load cell are included. The shim load cells and other instrumentation will be an important guide in planning NSTX-U experiments beyond its next run period expected in late 2026 or early 2027.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Experimental study of extended timescale dynamics of a plasma wakefield driven by a self-modulated proton bunch

Plasma wakefield dynamics over timescales up to 800 ps, approximately 100 plasma periods, are studied experimentally at the Advanced Wakefield Experiment (AWAKE). The development of the longitudinal wakefield amplitude driven by a self-modulated proton bunch is measured using the external injection of witness electrons that sample the fields. In simulation, resonant excitation of the wakefield causes plasma electron trajectory crossing, resulting in the development of a potential outside the plasma boundary as electrons are transversely ejected. Trends consistent with the presence of this potential are experimentally measured and their dependence on wakefield amplitude are studied via seed laser timing scans and electron injection delay scans.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Structural and Electrocatalytic Studies of Pulsed Laser Deposited Epitaxial RuO 2 Thin Films

Two sets of high-quality epitaxial ruthenium oxide (RuO 2 ) thin films with different thicknesses were synthesized in situ on cost-competitive sapphire substrates by using a pulsed laser deposition technique. The first set of films, with a thickness of 40 nm and a sheet resistance of 15.7 Ω/□, was prepared using 2100 laser pulses, while the second set of films, with a thickness of 87 nm and a sheet resistance of 6.7 Ω/□, was prepared using 4800 laser pulses. All other deposition parameters were kept the same. The post-deposition structural and morphological measurements showed that both sets of films grew at the same growth rate, had the same crystallinity, similar grain boundary density, and slightly different surface roughness. The thicker RuO 2 films achieved an overpotential of 280 mV for the oxygen evolution reaction at a current density of 100 μA/cm 2 , comparable to or exceeding the performance of films grown on more expensive substrates. Comparatively, the thinner RuO 2 films, which have a significantly higher charge transfer resistance (250 Ω versus 100 Ω for thick films), display a higher overpotential of 320 mV. These results indicate that the lower electrical resistance of thicker films promotes charge transfer through the film body, leading to superior electrocatalytic properties.

charge-transfer↗

A Numerical Model for the Dynamics of Pickup Ions Outside the Heliopause and IBEX “Ribbon” Observation

The leading mechanism for the origin of the Interstellar Boundary Explorer (IBEX) “ribbon” of enhanced energetic neutral atoms (ENAs) from the outer heliosphere is the so-called secondary ENA process. In this mechanism, neutralized ions escape the heliosphere, and after several times of charge exchange collision,s some propagate back toward Earth in directions nearly perpendicular to the local interstellar magnetic field. However, the physical processes governing the distribution of the pickup ions (PUIs) outside the heliopause are still unclear. In this study, we build a new global model of the IBEX ribbon, where a key component is to calculate the dynamics of the PUIs outside the heliopause by solving the gyrophase-averaged focused transport equations on top of the background magnetohydrodynamic-kinetic model for the heliosphere-interstellar medium interaction. We discuss how the properties of the simulated ribbon change with different scattering parameters and show simulation results of the ENA sky maps, ribbon centers, ribbon profiles at several azimuthal slices, the ribbon ENA source region, and the velocity distribution of PUIs in the ENA source region for different scattering frequencies. Our results show that the model can provide reasonable ribbon sky maps comparable to the observed ribbon when the PUI mean free path is on the order of several thousand astronomical units.

79 ASTRONOMY AND ASTROPHYSICS↗

Tritium Transport Modeling at the Pore Scale in Ceramic Breeder Materials Using TMAP8

Fusion reactors depend on the blanket material to breed and release tritium at the same rate or faster than it is consumed by the fusion reaction. Cellular ceramic breeders (CCBs) are dense materials that can maintain a high tritium breeding ratio while promoting tritium release because of highly connected pores. Assessing the tritium breeding capabilities of these materials requires a combination of extensive experimental and modeling efforts. In this work, we develop and calibrate a multiphysics model of tritium transport. This novel model accounts for ceramic and pore diffusion, trapping and detrapping, and several surface reactions at the pore surface. We perform a sensitivity analysis and calibrate the model by comparing its predictions against experimental measurements of deuterium absorption. The calibrated model is then used to model tritium absorption in samples with different pore microstructures to investigate the effect of pore interconnectivity on tritium absorption. The model is part of the development of the multiscale, multiphysics framework for tritium transport [i.e., the Tritium Migration Analysis Program (TMAP8)], which is itself built on top of the finite-element multiphysics framework multiphysics object-oriented simulation environment (MOOSE). This study demonstrates some of TMAP8’s capabilities and is the first step toward assessing the tritium breeding capabilities of ceramic breeder material designs.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

TRANSP-TGLF core predictive modeling of the JET DT baseline scenario

In recent years, an intense modeling activity has been focused on preparing and analyzing the second JET Deuterium–Tritium (D–T) experimental campaign DTE2. Among the numerous scientific outcomes of this campaign was the unique opportunity to test and validate the state of the art of modeling tools with fusion-relevant DT plasmas using the full metallic ITER-like wall in different scenarios. This work reports on the core predictive modeling of plasma density, electron and ion temperatures (n e , T e , T i ) performed using TRANSP (Pankin et al 2025 Comput. Phys. Commun. 312 109611) coupled with Trapped Gyro-Landau Fluid (TGLF)-SAT2 (Kinsey et al 2008 Phys. Plasmas 15 055908), (Staebler et al 2021 Nucl. Fusion 61 116007) for the JET D–T baseline scenario (I p = 3.5 MA, q 95 = 3, β N < 2, with pellet pacing) (Garzotti et al 2025 Plasma Phys. Control. Fusion 67 075011). The sensitivity to different input parameters, as the $\vec{E}$ x $\vec{B}$ shear parameterization and the values of the kinetic quantities at the boundary of the prediction domain (ρ = 0.85) has been assessed, identifying the confidence interval of the prediction results. In particular, the dependence of the electron density profile on the particle source parameters has been studied, identifying the ionization source as the main cause for the density gradient under-prediction obtained by TRANSP-TGLF, reported in (Hyun-Tae et al 2023 Nucl. Fusion 63 112004).

JET↗

Toward Verification of RANS Simulations of the T-Tube Modular Divertor Using Large Eddy Simulations of Impinging Turbulent Plane Jets

Turbulent impinging jets have been proposed to cool high heat flux plasma-facing components such as the solid tungsten target plates of the divertor in long-pulse magnetic fusion energy reactors. In particular, the T-tube modular divertor, originally developed by the ARIES Team, consists of two concentric cylindrical tubes where helium flows through a slot in the inner tube, forming an approximately planar jet that impinges upon and cools the inner surface of the pressure boundary (namely, the outer tube) and the ~15-cm 2 plasma-facing W target. The objective of this work is to demonstrate that large eddy simulations (LESs) accurately simulate the thermal transport in canonical flows that comprise the cooling flow in the T-tube, as well as validate temperatures from LES with experimental measurements in a simplified T-tube geometry. Wall‑resolved LESs, validated by experimental data and verified by direct numerical simulations (DNSs), provide benchmark data for two canonical flows in the T‑tube, namely, planar impinging and wall jets, for Reynolds numbers Re B = 4 × 10 3 to 2 × 10 4 . Our LES results are within 4% to 12% root-mean-square error (RMSE) of surface Nusselt number distributions (Nu) from experiments and DNSs. The validated LES results are then used as the ground truth to evaluate four Reynolds‑averaged Navier-Stokes (RANS) turbulence closures, namely, the k‑ω SST, realizable k‑ε, GEKO, and γ‑SST models. The k‑ω SST model has the best overall performance in terms of heat transfer, giving surface Nu within 12% RMSE of the LES results for high‑ReB impinging jets and reduced overprediction in the wall‑jet region. The GEKO model with default constants has the next best performance, providing slightly better Nu predictions for low ReB impinging jets (versus k-ω SST) but worse overall performance over the full range of ReB studied here. The realizable k‑ε turbulence model significantly overestimates turbulence near the stagnation point, while the γ‑SST model suppresses near‑wall production, biasing the simulations toward simulating laminar surface heat transfer. Simulations of the simplified T‑tube show that LES and RANS simulations with the k‑ω SST model give nearly identical average heat transfer coefficients (HTCs) over the impingement surface. The realizable k‑ε model predicts significantly lower wall temperatures due to overestimation of HTC in the outlet flow.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗