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At least 649 records · Page 36

Effect of fabrication processes on BaTiO 3 capacitor properties

There is an increasing desire to utilize complex functional electronic materials such as ferroelectrics in next-generation microelectronics. As new materials are considered or introduced in this capacity, an understanding of how we can process these materials into those devices must be developed. Here, the effect of different fabrication processes on the ferroelectric and related properties of prototypical metal oxide (SrRuO 3 )/ferroelectric (BaTiO 3 )/metal oxide (SrRuO 3 ) heterostructures is explored. Two different types of etching processes are studied, namely, wet etching of the top SrRuO 3 using a NaIO 4 solution and dry etching using an Ar + -ion beam (i.e., ion milling). Polarization-electric-field hysteresis loops for capacitors produced using both methods are compared. For the ion-milling process, it is found that the Ar + beam can introduce defects into the SrRuO 3 /BaTiO 3 /SrRuO 3 devices and that the milling depth strongly influences the defect level and can induce a voltage imprint on the function. Realizing that such processing approaches may be necessary, work is performed to ameliorate the imprint of the hysteresis loops via ex situ “healing” of the process-induced defects by annealing the ferroelectric material in a barium-and-oxygen-rich environment via a chemical-vapor-deposition-style process. This work provides a pathway for the nanoscale fabrication of these candidate materials for next-generation memory and logic applications.

36 MATERIALS SCIENCE↗

Impact of Drying on Meso- and Nanoscale Structures of Citrus Fiber: A Study by SFG, ATR-IR, XRD, and DLS

Citrus fibers are a sidestream of the pectin extraction process from citrus peel. This sidestream can be converted into a functional ingredient through a shear-induced homogenization process. One technical challenge with this material is that dehydration and subsequent rehydration result in reduction of viscosity compared to the original product. In this study, various drying methods were compared with never-dried fibers to investigate the structural changes underlying the viscosity loss. Infrared and X-ray diffraction analyses confirmed no changes in chemical composition and crystalline structure of citrus fibers. Here, the dynamic light scattering and sum frequency generation analyses of citrus fiber suspension showed that the rehydration process could not fully disperse aggregated fibers, which appears to be the main cause for the viscosity loss.

09 BIOMASS FUELS↗

Overview of Upcoming Process Improvement Efforts at the Saltstone Facilities at the Savannah River Site - 20474

The Saltstone Facilities at the Savannah River Site (SRS) process and dispose of low activity salt solution waste generated by other liquid waste facilities. Today in the Liquid Waste System (LWS), approximately 125 million liters of salt waste remain to be processed. The Saltstone Production Facility (SPF) receives the decontaminated salt waste, which is mixed with dry feeds consisting of cement, fly ash and slag to produce the saltstone. The mixed slurry is pumped to the Saltstone Disposal Units (SDUs) for safe disposal in the Saltstone Disposal Facility (SDF). To support continuous Salt Waste Processing Facility (SWPF) operations at annual processing volumes many times higher than present, significant modifications are required to ensure that the SPF has the capacity to support the throughput of salt waste. These changes include several infrastructure upgrades that are being worked through the Enhanced Low Activity Waste Disposal (ELAWD) project. In addition to infrastructure upgrades, Savannah River Remediation (SRR), the Savannah River Site's Liquid Waste Contractor for the U.S. Department of Energy, has identified a flowsheet improvement opportunity of implementing a cement-free saltstone formulation to eliminate cement from the current three component formulation. This two-component formulation would simplify the procurement, transport, off-loading, and storage of the premix materials, and increase the storage capacity for the individual components. This flowsheet, when implemented, will reduce operational risk and improve throughput necessary to achieve disposal rates necessary for SWPF operations. Research has been completed to confirm the feasibility of this formulation, with the new cement-free flowsheet expected to be implemented in the next few years. Improvements have also been identified downstream of the SPF to increase SDU utilization. Specifically, a concentrated effort has taken place to raise the fill height in SDU 6 to the full disposal height, 13 meters, to maximize the usage of each SDU in support of the liquid waste disposal mission. This improvement has been made through additional thermal modeling and improved process understanding to create a SDU flammability model and control strategy more representative of facility operations. This work will allow for the completion of construction and operational readiness for SDU 7 while filling SDU 6 to ensure there is no lapse in available space once SWPF starts up. A summary of these improvements as they relate to increased throughput will be provided along with associated status. (authors)

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

Application and utilization of a space chamber for the drying and decontamination of books, documents and other materials

Truckloads of materials such as rare books, papers, engineering drawings, blue prints, art work, leather objects such as shoes, and clothing were successfully dried, decontaminated and impregnated against future infestation by microorganisms in a large 12 x 24 foot vacuum chamber designed originally for testing unmanned spacecraft. The process is unique in that it allows either frozen or wet material, soaked by some castastrophic event to be dried and sterilized in the same chamber with a minimum of handling and transportation.

Koesterer, M. G.↗

Capture of Iodine from Nuclear-Fuel-Reprocessing Off-Gas: Influence of Aging on a Reduced Silver Mordenite Adsorbent after Exposure to NO/NO 2

Iodine radioisotopes released during nuclear fuel reprocessing must be removed from the off-gas stream before discharge. One promising material for iodine capture is reduced silver mordenite (Ag 0 Z). Nevertheless, the adsorbent’s capacity will degrade, or age, over time when the material is exposed to other off-gas constituents. Though the overall impact of aging is known, the underlying physical and chemical processes are not. To examine these processes, Ag 0 Z samples were prepared and aged in 2% NO 2 in dry air and in 1% NO in N 2 gas streams at 150 °C for up to six months. Aged samples were then characterized using scanning electron microscopy, X-ray diffraction, Raman spectroscopy, and X-ray absorption spectroscopy. These techniques show that aging involves two overarching processes: (i) oxidation of the silver nanoparticles present in Ag 0 Z and (ii) migration of oxidized silver into the mordenite’s inner network. Silver on the nanoparticle’s surface is oxidized through adsorption of O 2 , NO, and NO 2 . Additionally, Raman spectroscopy and X-ray absorption spectroscopy indicate that nitrates are the primary products of this adsorption. Most of these nitrates migrate into the interior of the mordenite and exchange at framework binding sites, returning silver to its unreduced state (AgZ). The remaining nitrates exist at a persistent concentration without aggregating into bulk-phase AgNO 3 . X-ray absorption spectroscopy results further indicate that iodine adsorption occurs on not just Ag 0 Z but also on AgZ and a portion of the nitrates in the system. AgZ adsorbs a sizable quantity of iodine early in the aging process, but its capacity drops rapidly over time. For well-aged samples, nitrates are responsible for up to 95% of mordenite’s iodine capacity. Overall, these results have enhanced our understanding of the aging process in silver mordenite and are expected to guide the development of superior adsorbents for the capture of radioactive iodine from reprocessing off-gas.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

Limitations in Representation of Physical Processes Prevents Successful Simulation of PM2.5 During KORUS-AQ

High levels of fine particulate matter (PM2.5) pollution in East Asia often exceed local air quality standards. Observations from the Korea United States-Air Quality (KORUS-AQ) field campaign in May and June 2016 showed that development of extreme pollution (haze) occurred through a combination of long-range transport and favorable meteorological conditions that enhanced local production of PM2.5. Atmospheric models often have difficulty simulating PM2.5 chemical composition during haze, which is of concern for the development of successful control measures. We use observations from KORUS-AQ to examine the ability of the GEOS-Chem chemical transport model to simulate PM2.5 composition throughout the campaign and identify the mechanisms driving the pollution event. At the surface, the model underestimates sulfate by -64% but overestimates nitrate by +36%. The largest underestimate in sulfate occurs during the pollution event, where models typically struggle to generate elevated sulfate concentrations due to missing heterogeneous chemistry in aerosol liquid water in the polluted boundary layer. Hourly surface observations show that the model nitrate bias is driven by an overestimation of the nighttime peak. In the model, nitrate formation is limited by the supply of nitric acid, which is biased by +100% against aircraft observations. We hypothesize that this is due to a large missing sink, which we implement here as a factor of five increase in dry deposition. We show that the resulting increased deposition velocity is consistent with observations of total nitrate as a function of photochemical age. The model does not account for factors such as the urban heat island effect or the heterogeneity of the built-up urban landscape resulting in insufficient model turbulence and surface area over the study area that likely results in insufficient dry deposition. Other species such as NH3 could be similarly affected but were not measured during the campaign. Nighttime production of nitrate is driven by NO2 hydrolysis in the model, while observations show that unexpectedly elevated nighttime ozone (not present in the model) should result in N2O5 hydrolysis as the primary pathway. The model is unable to represent nighttime ozone due to an overly rapid collapse of the afternoon mixed layer and excessive titration by NO. We attribute this to missing nighttime heating driving deeper nocturnal mixing that would be expected to occur in a city like Seoul. This urban heating is not considered in air quality models run at large enough scales to treat both local chemistry and long-range transport. Key model failures in simulating nitrate, mainly overestimated daytime nitric acid, incorrect representation of nighttime chemistry, and an overly shallow and insufficiently turbulent nighttime mixed layer, exacerbate the model’s inability to simulate the buildup of PM2.5 during haze pollution. To address the underestimate in sulfate most evident during the haze event, heterogeneous aerosol uptake of SO2 is added to the model which previously only considered aqueous production of sulfate from SO2 in cloud water. Implementing a simple parameterization of this chemistry improves the model abundance of sulfate but degrades the SO2 simulation implying that emissions are underestimated. We find that improving model simulations of sulfate has direct relevance to determining local vs. transboundary contributions to PM2.5. During the haze pollution event, the inclusion of heterogeneous aerosol uptake of SO2 decreases the fraction of PM2.5 attributable to long-range transport from 66% to 54%. Locally-produced sulfate increased from 1% to 25% of locally-produced PM2.5, implying that local emissions controls would have a larger effect than previously thought. However, this additional uptake of SO2 is coupled to the model nitrate prediction which affects the aerosol liquid water abundance and chemistry driving sulfate-nitrate-ammonium partitioning. An additional simulation of the haze pollution with heterogeneous uptake of SO2 to aerosol and simple improvements to the model nitrate simulation results in 30% less sulfate due to 40% less nitrate and aerosol water, and results in an underestimate of sulfate during the haze event. Future studies need to better consider the impact of model physical processes such as dry deposition and nighttime boundary layer mixing on the simulation of nitrate and the effect of improved nitrate simulations on the overall simulation of secondary inorganic aerosol (sulfate+nitrate+ammonium) in East Asia. Foreign emissions are rapidly changing, increasing the need to understand the impact of local emissions on PM2.5 in South Korea to ensure continued air quality improvements.

Katherine R. Travis↗

The Effect of the Saharan Air Layer on the Formation of Hurricane Isabel (2003) Simulated with AIRS Data

The crucial physics of how the atmosphere really accomplishes the tropical cyclogenesis process is still poorly understood. The presence of the Saharan Air Layer (SAL), an elevated mixed layer of warm and dry air that extends from Africa to the tropical Atlantic and contains a substantial amount of mineral dust, adds more complexity to the tropical cyclogenesis process in the Atlantic basin. The impact of the SAL on tropical cyclogenesis is still uncertain. Karyampudi and Carlson (1988) conclude that a strong SAL can potentially aid tropical cyclone development while Dunion and Velden (2004) argue that the SAL generally inhibits tropical cyclogenesis and intensification. Advancing our understanding of the physical mechanisms of tropical cyclogenesis and the associated roles of the SAL strongly depends on the improvement in the observations over the data-sparse ocean areas. After the Atmospheric Infrared Sounder (AIRS), the Advanced Microwave Sounding Unit (AMSU), and the microwave Humidity Sounder of Brazil (HSB) were launched with the NASA Aqua satellite in 2002, new data products retrieved from the AIRS suite became available for studying the effect of the warm, dry air mass associated with the SAL (referred to as the thermodynamic effect). The vertical profiles of the AIRS retrieved temperature and humidity provide an unprecedented opportunity to examine the thermodynamic effect of the SAL. The observational data can be analyzed and assimilated into numerical models, in which the model thermodynamic state is allowed to relax to the observed state from AIRS data. The objective of this study is to numerically demonstrate that the thermodynamic effect of the SAL on the formation of Hurricane Isabel (2003) can be largely simulated through nudging of the AIRS data.

Wu, iguang↗

Sensitivity of Single-Scattering Properties to Precipitation Particle Meltwater Geometry for GPM Passive Microwave and Radar Remote Sensing Applications

The objective of the current work is to describe the microwave single-scattering properties of partially melted ice-phase precipitation particles using physically-based computational methods, taking into full account the varied geometries of the initially “dry” ice particles and the distributions of liquid water that develop during the melting process. Ultimately, the bulk properties of ensembles of these partially-melted particles will be included in “scattering tables” to support radar and combined radar-radiometer remote sensing of precipitation. A meshless Lagrangian melting procedure (snowMELT) based on smoothed-particle hydrodynamics is applied to both spherical and finely-structured ice particle models to describe the full evolution of the particles from dry ice particles to liquid drops. The melting of spherical ice particles using snowMELT is compared to an alternative continuum physics model to validate melt times and internal thermodynamics. The discrete dipole approximation is then utilized to calculate the single-scattering properties of different mixed-phase particles throughout the melting process. The sensitivities of particle single-scattering properties to thermodynamic and hydrodynamic assumptions in snowMELT are explored, and the implications for combined radar-radiometer precipitation remote sensing from GPM are discussed.

William S Olson↗

Automated Ply-By-Ply Lamination and in-Situ Consolidation of Dry Carbon Fiber Non-Crimp Fabrics for High-Rate Aircraft Manufacturing of Structural Aircraft Components

NASA’s Hi-Rate Composites Aircraft Manufacturing (HiCAM) program addresses market needs to advance structural aircraft composite manufacturing technologies to significantly increase production rates. Dry, non-crimp fabric (NCF) carbon materials infused with advanced resin systems offer a promising solution to these manufacturing demands. Northrop Grumman’s Automated Stiffener Forming (ASF) technology has been adapted for ply-by-ply, in-situ processing of NCF materials. The modular ASF process accommodates flexibility in the laminate stacking, while allowing for ply drops, ply additions, and yaw, pitch, and roll in the laminate geometry. To adapt the ASF process for NCF materials, heating technologies and roller compaction processes were designed and tested on representative structural aircraft part geometries. Key success criteria for the ASF process with NCF materials is forming quality and preform compaction. Trials were performed with multiple NCF materials: unidirectional up to quad-axial formats. The NCF constituents, veils, stitching, and binders, were evaluated with the ASF process. The material performance in the ASF process and the resulting preform quality are presented.

dry carbon fiber materials↗

The role of gas flow distributions on CO 2 mineralization within monolithic cemented composites: coupled CFD-factorial design approach

The carbonation kinetics of monolithic cementing composites are strongly affected by gas transport which is, in turn, influenced by microstructural resistances and the presence of liquid water within pore networks. The non-uniform gas flow distribution within the CO 2 mineralization reactor can impart mass transfer resistance in the monolith microstructure, which affects the uptake of CO 2 (“carbonation”) of the cementing composites. This paper demonstrates how the gas spatial distribution (velocity and flow rate; quantified by CFD analysis) and processing conditions (temperature, relative humidity, and flow rate; quantified by factorial design) affect drying and carbonation, and in turn, the engineering properties of a representative ‘monolithic’ carbonate-cemented concrete component (i.e., herein concrete masonry unit: CMUs, also known as concrete block). It is shown that the gas flow distribution affects drying front penetration and results in moisture and carbonation gradients within the monolith. Particularly, variations in drying kinetics caused by non-uniformity of the contacting gas velocity impose gradients in moisture saturation, which results in increasing microstructural resistance to CO 2 transport. The resultant non-uniform carbonate-mineral formation (i.e., carbonate cementation), if not controlled, can produce gradients in mechanical properties and may alter failure patterns upon loading. Finally, these insights inform the optimal design of gas flow distribution systems and processing conditions within CO 2 mineralization reactors for the manufacturing of low-CO 2 concrete components using CO 2 -dilute industrial flue gas streams.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Geomorphic and Aqueous Chemistry of a Portion of the Upper Rio Tinto System, Spain

Observations from the two Mars rovers, Spirit and Opportunity, combined with discoveries of extensive hydrated sulfate deposits from OMEGA and CRISM show that aqueous deposition and alteration involving acidic systems and sulfate deposition has been a key contributor to the martian geologic record. Rio Tinto, Spain, provides a process model for formation of sulfates on Mars by evaporation of acidic waters within shallow fluvial pools, particularly during dry seasons. We present results from a detailed investigation of an upper portion of the Rio Tinto, focusing on geomorphology, clastic sediment transport, and acidic aqueous processes. We also lay out lessons-learned for under-standing sulfate formation and alteration on Mars.

Osburn, M. R.↗

Mining Air for Fuels and Fine Chemicals

The Intergovernmental Panel on Climate Change’s 2021 report underscores that Direct Air Capture (DAC) is an essential component to limiting global warming to 2 °C, yet separating CO 2 from air and its subsequent concentration for conversion into carbon neutral fuels/chemicals or permanent storage remains energy intensive and costly. Further, most DAC technologies rely on repetitive capture and release cycles that reduces the amount of time the DAC materials are able to collect CO 2 and increases wear and tear. Moisture swing (MS) sorption within anion exchange materials utilizes differences in relative humidity to capture and concentrate CO 2 up to 500-fold with negligible energy inputs and low-cost sorbents. Molecular modeling predicts that membranes with a dry and wet side would actively transport CO 2 from its dry side to its wet side against a counter flow of H 2 O evaporating on the dry side, however, existing MS materials are too brittle to be processed into membranes to test this hypothesis. This project brought together experts in DAC materials and design, techno-economic analysis and project management at Arizona State University (ASU), polymer processing at University of Texas at Austin (UTA) and modeling gas transport and exchange at Norther Arizona University (NAU) to develop hollow fiber membranes that use energy from water evaporation to continuously pump CO 2 from air against a concentration gradient to the membranes interior and requiring significantly less energy than current DAC technologies. While this project did not meet its ultimate objectives of demonstrating an active CO 2 pumping membrane, a number of key accomplishments were made in developing low-cost, flexible anion exchange membranes (AEM) at 3.5 m 2 scale, characterizing the ionic and molecular transport within MS materials, and developing several analytical and mathematical models of the MS and pumping process leading to new fundamental knowledge about key rate limiting steps of CO 2 flux in anion exchange membranes at low water activity. Technoeconomic models show that if CO 2 fluxes ≥ 25 µmol CO 2 m -2 s -1 (membrane surface area) are achieved that cost ≤ $\$$100/tonne CO 2 captured, purified and compressed to pipeline quality is possible. The knowledge gained in this research will guide future research in developing new materials toward overcoming these rate limiting steps that in turn could enable transformative and disruptive DAC technologies needed for capturing gigatons of CO 2 per year needed to limiting global warming to 2 °C.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Sustainable Conversion of Carbon Dioxide and Shale Gas to Green Acetic Acid via a Thermochemical Cyclic Redox Scheme (Final Report)

The large-scale production of commodity chemicals relies heavily on the combustion of fossil fuels. As a result, enormous amounts of carbon dioxide (CO 2 ) are emitted which severely affects the global climate. The challenges for CO 2 utilization reside in the high stability of CO 2 molecules relative to the products, which requires the addition of significant external energy and overcoming slow and/or unfavorable reaction kinetics/thermodynamics. Chemical looping dry reforming of methane (CLDRM), also known as a hybrid redox process (HRP), is a promising alternative that allows the utilization of CO 2 and domestic shale gas resources to produce commodity chemicals. HRP works in two steps: In the first step, a redox catalyst reacts with methane to yield synthesis gas with a H 2 /CO ratio near 2:1, which is suitable for methanol and Fischer–Tropsch synthesis. The reduced redox catalyst then reacts with an oxidizing agent, such as CO 2 , to yield CO. In comparison to conventional thermochemical CO 2 splitting approaches, the use of methane as the reducing agent in HRP can significantly lower the operating temperature for CO 2 splitting.

03 NATURAL GAS↗

Management of the Three Mile Island, Unit 2, Accident Corium and Severely Damaged Fuel Debris

The Three Mile Island, Unit Two (TMI-2) pressurized water reactor core melted down in 1979 due to an untimely combination of maintenance problems that led to a loss of feedwater, followed by a series of operational misunderstandings and errors. The melted core recovery process required development of a wide array of tools. After approximately three years of water management and other cleanup actions, the first views of the core revealed a much higher degree of damage than previously expected. Approximately 62 metric tons of the core had melted, leaving only 42 of the 177 fuel assemblies standing with a majority of rods intact. The core to be recovered was composed of loose debris and a solidified mass of formerly molten fuel. Robotic tools that had been designed for the task were of limited effectiveness due to the range of material types and phases. Over a period of several years, the central melt was broken up, primarily by use of a core-boring drill originally designed to acquire samples through the depth of the debris field. The broken pieces were loaded into specially designed debris canisters by use of long-handled pick-and-place tools and suctioned into baffled knockout canisters using an airlift vacuum system. A remotely operable underwater plasma arc torch was developed for removal of the lower core support structure to be able to retrieve the fuel pieces and secondary melt that had accumulated on the bottom reactor vessel head. Canister design played a central role in defining the initial retrieval process and later affected transportation, interim wet and its current interim dry storage. Due to concerns about the potential for radiolysis of residual water in the debris and other canister material, the canisters were fitted with hydrogen recombiner catalyst units to prevent a buildup of flammable gas and potential pressurization. To confirm the effectiveness of the recombiners during shipping, eight dewatered canisters were kept sealed for up to 205 days with periodic sampling of the headspace gas. The highest hydrogen value (9 vol%) was observed in a canister held for 147 days while the longest stored canister resulted in a 5% hydrogen concentration. The oxygen concentration never exceeded 0.5 %, and the primary backfill was >80% argon, meaning there was no flammability risk. Radiolytic hydrogen was also observed in wet pool storage, where the vented canisters discharged a portion of the water backfill as a result of gas production. The 344 canisters (268 fuel debris, 62 filter, and 12 knockout type) were dewatered, loaded in groups of seven into a double barrier shipping cask, and transported to the U.S. Department of Energy site in Idaho for 10 years of pool storage.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

Exergy Analysis of a Convective Heat Pump Dryer Integrated with a Membrane Energy Recovery Ventilator

To increase energy efficiency, heat pump dryers and membrane dryers have been proposed to replace conventional fossil fuel dryers. Both conventional and heat pump dryers require substantial energy for condensing and reheating, while “active” membrane systems require vacuum pumps that are insufficiently developed. Lower temperature dehumidification systems make efficient use of membrane energy recovery ventilators (MERVs) that do not need vacuum pumps, but their high heat losses and lack of vapor selectivity have prevented their use in industrial drying. In this work, we propose an insulating membrane energy recovery ventilator for moisture removal from drying exhaust air, thereby reducing sensible heat loss from the dehumidification process and reheating energy. The second law analysis of the proposed system is carried out and compared with a baseline convective heat pump dryer. Irreversibilities in each component under different ambient temperatures (5–35 °C) and relative humidity (5–95%) are identified. At an ambient temperature of 35 °C, the proposed system substantially reduces sensible heat loss (47–60%) in the dehumidification process, resulting in a large reduction in condenser load (45–50%) compared to the baseline system. The evaporator in the proposed system accounts for up to 59% less irreversibility than the baseline system. A maximum of 24.5% reduction in overall exergy input is also observed. The highest exergy efficiency of 10.2% is obtained at an ambient condition of 35 °C and 5% relative humidity, which is more than twice the efficiency of the baseline system under the same operating condition.

Balaraman, Anand (ORCID:0000000218355788)↗

Environmental control of lunar samples in the Lunar Receiving Laboratory

The contamination controls used in the Lunar Receiving Laboratory during the processing of lunar samples are described. Initially, the lunar sample containers were opened and the material was examined in a vacuum complex with approximated lunar surface conditions. The process of examining and distributing the samples from this vacuum complex was time consuming. During both Apollo 11 and 12 missions portions of the lunar samples were processed for allocation in a small sterile glove box in a dry nitrogena atmosphere. After Apollo 12 a new system was installed based upon the experience gained from the small glove box. The system uses dry nitrogen as an environmental blanket and has the capability of being sterilized and of maintaining this sterility.

Reynolds, M. A.↗

A study of native oxides of beta-SiC using Auger electron spectroscopy

Thermal and anodic oxide films of beta-SiC are analyzed using Auger electron spectroscopy. Auger depth-composition profiles are obtained in order to determine the chemical composition of the oxide films. The position and shape of silicon spectral peaks are used to estimate the chemical bonding of the oxide constituents. It is found that the wet thermal oxide is almost stoichiometric but contains about 14 pct C. Dry oxide, on the other hand, has less than 3 pct C but is highly nonstoichiometric. The C content in the anodic oxide is 12 pct. Anodic oxide films, like dry-oxide films, are nonstoichiometric. A model of the SiC oxidation process is presented.

Chaudhry, M. Iqbal↗