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At least 631 records · Page 35
All sourcesNASA NTRSDOE OSTI
DOE OSTI2026

Multi-diagnostic characterization of laser-produced tin plasmas for EUV lithography

We present a comprehensive characterization of laser-produced tin (Sn) plasmas relevant to extreme ultraviolet (EUV) lithography using a multi-diagnostic suite integrated into the new experimental platform, “SparkLight.” Tin plasmas are generated by irradiating a continuously moving tin-coated wire with laser pulses (1064 nm, 10 ns, up to 5.7 × 10 10 W/cm 2 ) and probed via coherent Thomson scattering, laser interferometry, and EUV emission spectroscopy. Thomson scattering measurements reveal electron temperatures and densities that decay with distance from the target. Densities derived from Thomson scattering are cross-validated against laser interferometry, showing excellent agreement. Correlating the results of these laser diagnostics with spatially resolved EUV spectroscopy suggests that the bulk of useful EUV emission originates within 150 μm of the target and is generated under suboptimal plasma conditions. This work demonstrates a practical integrated approach for plasma characterization in EUV source development.

Musikhin, S. [Princeton Plasma Physics Laboratory ↗
NASA NTRS2000

Inception of Snapover and Gas Induced Glow Discharges

Ground based experiments of the snapover phenomenon were conducted in the large vertical simulation chamber at the Glenn Research Center (GRC) Plasma Interaction Facility (PIF). Two Penning sources provided both argon and xenon plasmas for the experiments. The sources were used to simulate a variety of ionospheric densities pertaining to a spacecraft in a Low Earth Orbital (LEO) environment. Secondary electron emission is believed responsible for dielectric surface charging, and all subsequent snapover phenomena observed. Voltage sweeps of conductor potentials versus collected current were recorded in order to examine the specific charging history of each sample. The average time constant for sample charging was estimated between 25 and 50 seconds for all samples. It appears that current drops off by approximately a factor of 3 over the charging time of the sample. All samples charged in the forward and reverse bias directions, demonstrated hysteresis. Current jumps were only observed in the forward or positive swept voltage direction. There is large dispersion in tile critical snapover potential when repeating sweeps on any one sample. The current ratio for the first snapover region jumps between 2 and 4.6 times, with a standard deviation less than 1.6. Two of the samples showed even larger current ratios. It is believed the second large snapover region is due to sample outgassing. Under certain preset conditions, namely at the higher neutral gas background pressures, a perceptible blue-green glow was observed around the conductor. The glow is believed to be a result of secondary electrons undergoing collisions with an expelled tenuous cloud of gas, that is outgassed from the sample. Spectroscopic measurements of the glow discharge were made in an attempt to identify specific lines contributing to the observed glow.

Galofaro, J. T.↗
NASA NTRS2004

Near Space Tracking of the EM Phenomena Associated with the Main Earthquakes

Searching for electromagnetic (EM) phenomena originating in the Earth's crust prior to major earthquakes (M>5) are the object of this exploratory study. We present the idea of a possible relationship between: (1) electro-chemical and thermodynamic processes in the Earth's crust and (2) ionic enhancement of the atmosphere/ionosphere with tectonic stress and earthquake activity. The major source of these signals are proposed to originate from electromagnetic phenomenon which are responsible for these observed pre-seismic processes, such as, enhanced IR emission, also born as thermal anomalies, generation of long wave radiation, light emission caused by ground-to-air electric discharges, Total Electron Content (TEC) ionospheric anomalies and ionospheric plasma variations. The source of these data will include: (i) ionospheric plasma perturbations data from the recently launched DEMETER mission and currently available TEC/GPS network data; (ii) geomagnetic data from ORSTED and CHAMP; (iii) Thermal infra-red (TIR) transients mapped by the polar orbiting (NOAA/AVHRR, MODIS) and (iv) geosynchronous weather satellites measurements of GOES, METEOSAT. This approach requires continues observations and data collecting, in addition to both ground and space based monitoring over selected regions in order to investigate the various techniques for recording possible anomalies. During the space campaign emphasis will be on IR emission, obtained from TIR (thermal infrared) satellites, that records land/sea surface temperature anomalies and changes in the plasma and total electron content (TEC) of the ionosphere that occur over areas of potential earthquake activity.

Ouzounov, Dimitar↗
NASA NTRS1994

Neutral cloud theory of the Jovian nebula: Anomalous ionization effect of superthermal electrons

The standard model of the Jovian nebula postulates that its particle source is the extended cloud of neutral sulfur and oxygen atoms that escape from the satellite Io and become ionized through electron impact from the corotating plasma. Its energy source is the gyroenergy acquired by newly formed pickup ions as they are swept up to corotation velocity by the planetary magnetic field. Elastic collisions between plasma ions and electrons cool the ions and heat the electrons, while inelastic collisions cool the electrons and excite the ions to radiate intense line emission, which is the primary energy-loss mechanism for the plasma. This neutral cloud theory of the Io plasma torus, as it has come to be known, has been the subject of recent critcism which asserts that the theory cannot account for the observed charge state of the plasma which features O(+) and S(2+) as the dominant ions. It is shown in this work that the inclusion of a small population of super-thermal electrons is required to achieve the correct ion partitioning among various charge states. It is also argued that the anomalous ionization effect of the superthermal electrons is responsible for the overall spatial bifurcation of the nebula into a hot multiply charged plasma region outside of 5.7 Jovian radii and a cool singly ionized plasma inside this distance.

Barbosa, D. D.↗
NASA NTRS1986

Differential Very Long Baseline Interferometry for 50 nanoradian deep space navigation - Results from quasar pair experiments

Deep space tracking experiments completed at JPL have demonstrated a 50-nanoradian angular positioning accuracy with wideband differential Very Long Baseline Interferometry (delta VLBI). This meets the stringent navigation requirements of NASA's Galileo mission, scheduled for launch in May 1986 and for encounter with Jupiter in December 1988. Pairs of extragalactic radio sources (quasars) with well-known coordinates were used to simulate deep space navigation passes in which quasar-spacecraft pairs are observed. This paper discusses the accuracy of the delta VLBI technique and how it is affected by source separations, source elevations, source strengths, solar plasma and ionosphere. Several observation strategies are discussed and one is shown to be especially effective in minimizing these major error sources.

Trinkle, B. K.↗
DOE OSTI2024

Temporal pre-pulse shaping in dual pulse laser produced plasma for the optimization of the EUV source in tin microdroplet system

Dual-laser beams interacting with small droplets of liquid tin are currently the most efficient systems for producing the 13.5 nm EUV photon radiation source required for the next generation microchips. Usually, EUV light is produced during the second main-pulse stage, while the pre-pulse (PP) is used for target preparation, i.e., droplet preheating, vaporization, and target deformation. However, the PP laser energy can be utilized more efficiently if the EUV producing plasma is being developed during the PP stage as well. In this work, we study the ways of optimization of the PP laser temporal shape to achieve conditions for maximum EUV output during the pre-pulse. The size of the deformed droplet is kept optimized for the following main laser pulse. Our simulations showed a significant increase in the EUV output at the pre-pulse stage when a ramping profile is used for the laser temporal shape. Using the ramped square pre-pulse produces 24% gain in the EUV output in comparison with the standard Gaussian temporal profile (i.e., regular Nd:YAG shape) for the same energy of the laser pulse.

36 MATERIALS SCIENCE↗
NASA NTRS1991

Sources of field-aligned currents in the auroral plasma

Data from the Dynamics Explorer 1 High Altitude Plasma Instrument (HAPI) and magnetometer are used to investigate the sources of field-aligned currents in the nightside auroral zone. It is found that the formula developed by S. Knight predicts the field-aligned current density fairly accurately in regions where a significant potential drop can be inferred from the HAPI data; there are, however, regions in which the proportionality between potential drop and field-aligned current does not hold. In particular, occurrences of strong upward field-aligned current associated not with inverted-V events but instead with suprathermal bursts are noted. In addition, upward field-aligned currents are often observed to peak near the edges of inverted-V events, rather than in the center as would be predicted by Knight.

Marshall, J. A.↗
DOE OSTI2023

Effects of oxidant gas for atomic layer deposition on crystal structure and fatigue of ferroelectric Hf x Zr 1-x O 2 thin films

TiN/Hf x Zr 1-x O 2 (HZO)/TiN capacitors were prepared using two types of HZO films fabricated by atomic layer deposition using H 2 O or O 2 plasma as an oxidant gas, and post-deposition annealing at 400 °C was performed before the TiN top-electrode fabrication. The ferroelectric orthorhombic phase was dominantly formed for the O 2 plasma-based capacitor due to the strongly oxidizing source of O 2 plasma, resulted in higher remanent polarization (2P r = 20 µC/cm 2 ) than that (13 µC/cm 2 ) of the H 2 O-based capacitor. The fatigue properties for the O 2 plasma-based capacitor were improved by 14 % after 106 cycles compared to the H 2 O-based capacitor. This could be attributed to an oxygen-rich interface reaction layer (IRL) including TiO x between the HZO film and TiN bottom-electrode for the O 2 plasma-based capacitor. In conclusion, based on these results, superior 2P r and fatigue properties can be obtained using O 2 plasma-based HZO films.

36 MATERIALS SCIENCE↗
NASA NTRS1990

Ion cyclotron bands in VLF saucers

In the wideband VLF data obtained by the polar orbiting DE-1 satellite over the polar night ion trough region of the upper ionosphere, conspicuous frequency-band structures are found to occur both in absorption and emission, particularly associating with VLF saucers. The attenuation bands indicate that the ions of atomic hydrogen from the polar ionosphere are accelerated by the ac electric fields of VLF waves oscillating normal to the static magnetic field, analogous to a cyclotron accelerator. The observed frequencies of the cyclotron harmonics suggest that the acceleration is taking place in the layer below the satellite at a geocentric distance of less than about 1.5 earth radii. This example indicates the existence of upward propagating hiss at those altitudes inside the auroral zone. On the other hand, the frequency shifts of the emission bands are attributed to a combination of two different types of Doppler shift, one due to the orbital motion of the satellite and the other due to the upward motion of the medium at the emission source. This indicates the existence of an upward plasma flow at the source, with a velocity of the order of 20 km/s inside the saucer. The amount of this frequency shift decreases with increasing harmonic order, indicating a higher phase velocity for the electrostatic waves of higher harmonic order.

Maeda, Kaichi↗
NASA NTRS1995

The history of re-connection and the concept of the solar wind plasma with relatively small electrical conductivity

Petschek's 're-connection' model, aspiring to be universal, treated as a boundary problem meets unresolvable difficulties connected with impossibility to specify correctly boundary and initial conditions. This problem was incorrectly formulated. Hence, ineradicable logarithmic singularities occurred on the boundary surfaces. Attempts to eliminate them by incorporating the finite electrical conductivity are incorrect. This should lead to the change in the equation type, boundary condition type and in consequence to the change in solutions. Besides, the slow mode shocks cannot be driven by small internal source. As an alternative a new plasma concept is suggested. The state of fully ionized plasma in space depends completely on the entropy of the plasma heating source and on the process in which plasma is involved. The presumptive source of the solar wind creation - the induction electric field of the solar origin - has very low entropy. The state of plasma should be very far from the thermodynamic equilibrium. Debye's screening is not complete. The excitation of the powerful resonant self-consistent electric fields in plasma provides low electric conductivity. The MHD problems should be treated in frameworks of dissipative theories.

Chertkov, A. D.↗
NASA NTRS1992

X-ray flares from runaway pair production in active galactic nuclei

The hard X-ray spectrum of AGNs is nonthermal, probably arising from an electron-positron pair cascade, with some emission reflected off relatively cold matter. There has been interest in models on which protons are accelerated and create relativistic electrons on interaction with a local radiation field. It is shown here that a sufficient column density of protons can lead to runaway pair production: photons generated by the relativistic pairs are the targets for the protons to produce more pairs. This can produce X-ray fluxes with the characteristics observed in AGN. The model predicts the maximum ratio of luminosity to source size as well as their spectrum in the early phases. The same mechanism may also be able to create the knots of synchrotron-radiating pair plasma seen in sources such as 3C273.

Kirk, J. G.↗
NASA NTRS1985

Substorm effects on the plasma sheet ion composition on March 22, 1979 (CDAW 6)

One of the potentially most useful aspects of mass spectroscopy in magnetospheric research is related to the ability to distinguish between ions of solar wind and terrestrial origins. Knowing the source of the plasmas in various regions and under various geomagnetic conditions is crucial in improving the understanding of particle flows in the magnetosphere. Sharp et al. (1982) found that the plasma sheet ions in the 0.1- to 16-keV/e range, were predominantly of solar wind origin during low geomagnetic activity, while there was a large terrestrial component during active times. This paper presents a set of data from March 22, 1979. The reported investigation represents the first detailed case study of the relation between geomagnetic substorm activity and the ion composition in the plasma sheet. A decrease in solar wind ion flow at ISEE 1 and the subsequent increase in the flow of ionospheric ions is interpreted as evidence of a fundamental change in the particle flow pattern following the start of substorm activity.

Lennartsson, W.↗
NASA NTRS2002

Controlling Electron Backstreaming Phenomena Through the Use of a Transverse Magnetic Field

DEEP-SPACE mission propulsion requirements can be satisfied by the use of high specific impulse systems such as ion thrusters. For such missions. however. the ion thruster will be required to provide thrust for long periods of time. To meet the long operation time and high-propellant throughput requirements, thruster lifetime must be increased. In general, potential ion thruster failure mechanisms associated with long-duration thrusting can be grouped into four areas: (1) ion optics failure; (2) discharge cathode failure; (3) neutralizer failure; and (4) electron backstreaming caused by accelerator grid aperture enlargement brought on by accelerator grid erosion. The work presented here focuses on electron backstreaming. which occurs when the potential at the center of an accelerator grid aperture is insufficient to prevent the backflow of electrons into the ion thruster. The likelihood of this occurring depends on ion source operation time. plasma density, and grid voltages, as accelerator grid apertures enlarge as a result of erosion. Electrons that enter the gap between the high-voltage screen and accelerator grids are accelerated to the energies approximately equal to the beam voltage. This energetic electron beam (typically higher than 1 kV) can damage not only the ion source discharge cathode assembly. but also any of the discharge surfaces upstream of the ion acceleration optics that the electrons happen to impact. Indeed. past backstreaming studies have shown that near the backstreaming limit, which corresponds to the absolute value of the accelerator grid voltage below which electrons can backflow into the thruster, there is a rather sharp rise in temperature at structures such as the cathode keeper electrode. In this respect operation at accelerator grid voltages near the backstreaming limit is avoided. Generally speaking, electron backstreaming is prevented by operating the accelerator grid at a sufficiently negative voltage to ensure a sufficiently negative aperture center potential. This approach can provide the necessary margin assuming an expected aperture enlargement. Operation at very negative accelerator grid voltages, however, enhances ion charge-exchange and direct impingement erosion of the accelerator grid. The focus of the work presented here is the mitigation of electron backstreaming by the use of a magnetic field. The presence of a magnetic field oriented perpendicular to the thruster axis can significantly decrease the magnitude of the backflowing electron current by significantly reducing the electron diffusion coefficient. Negative ion sources utilize this principle to reduce the fraction of electrons in the negative ion beam. The focus of these efforts has been on the attenuation of electron current diffusing from the discharge plasma into the negative ion extraction optics by placing the transverse magnetic field upstream of the extraction electrodes. In contrast. in the case of positive ion sources such as ion thrusters, the approach taken in the work presented here is to apply the transverse field downstream of the ion extraction system so as to prevent electrons from flowing back into the source. It was found in the work presented here that the magnetic field also reduces the absolute value of the electron backstreaming limit voltage. In this respect. the applied transverse magnetic field provides two mechanisms for electron backstreaming mitigation: (1) electron current attenuation and (2) backstreaming limit voltage shift. Such a shift to less negative voltages can lead to reduced accelerator grid erosion rates.

Foster, John E.↗
DOE OSTI2020

Improved core-edge compatibility using impurity seeding in the small angle slot (SAS) divertor at DIII-D

Impurity seeding studies in the slot divertor (SAS) at DIII-D have revealed a strong relationship between the detachment onset and pedestal characteristics with both target geometry and impurity species. N 2 seeding in the slot has led to the first simultaneous observation of detachment on the entire suite of boundary diagnostics viewing the SAS without degradation of core confinement. SOLPS-ITER simulations with D+C+N, full cross-field drifts and n-n collisions activated are performed for the first time in DIII-D to interpret the behavior. This illustrates a strong effect of divertor configuration and plasma drifts on the recycling source distribution with significant consequences on plasma flows. Flow reversal is found for both main ions and impurities affecting strongly the impurity transport and providing an explanation for the observed dependence on strike point location of the detachment onset and impurity leakage found in the experiments. Matched discharges with either nitrogen or neon injection show that while nitrogen does not significantly affect the pedestal, neon leads to increased pedestal pressure gradient and improved pedestal stability. Little nitrogen penetrates in the core, but a great amount of neon is found in the pedestal consistent with the different ionization potentials of the two impurities. This research demonstrates that neutral and impurity distributions in the divertor can be controlled through variations in strike point locations in a fixed baffle structure. Divertor geometry combined with impurity seeding enables mitigated divertor heat flux balancing core contamination and thus leading to enhanced divertor dissipation and improved core-edge compatibility which are essential for ITER and for future fusion reactors.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
NASA NTRS1977

Transfer of polarized radiation in self-absorbed synchrotron sources. II - Treatment of inhomogeneous media and calculation of emergent polarization

As an extension of previous treatments of polarized radiation transfer in homogeneous synchrotron sources, a transfer procedure is derived, based on the coupled-wave formulation, which allows consideration of inhomogeneous sources. It is shown that plasma characteristic wave eccentricities in a source must be fairly large unless Faraday rotation per absorption depth is very large, and that coupling between characteristic waves can be strong in inhomogeneous self-absorbed sources. Calculations are made of the polarized radiation emergent from a source with a boundary of finite thickness. It is found that neglect of propagation effects in the source boundary introduces no significant errors at optically thin frequencies, but that below the self-absorption turnover the emergent polarization may depend significantly upon such effects. In particular, the sign of the circular polarization and the linear polarization position angle depend upon the absorption depth in the boundary region.

Jones, T. W.↗
NASA NTRS1991

Consequences of wave-particle interactions on chaotic acceleration

The recent model of Ashour-Abdalla et al. (1991) has proposed that the earth's plasma sheet can be formed by chaotic acceleration in a magnetotail-like field configuration. The ion velocity distributions created by chaotic acceleration have unstable features and represent robust free energy sources for kinetic plasma waves that can modify the original distributions. In the plasma sheet boundary layer, field-aligned ion beamlets are formed which drive a host of instabilities creating a broadbanded noise spectrum and cause thermal spreading of the beamlets. In addition, there is strong heating of any cold background plasma that may be present. In the central plasma sheet, ion antiloss cone distributions are created which are unstable to very low frequency waves that saturate by filling the antiloss cone.

Schriver, David↗
NASA NTRS1991

Plasma transport in the Io torus - The importance of microscopic diffusion

This paper considers the question of whether the distribution of mass in the Io plasma torus is consistent with the concept of interchange eddy transport. Specifically, the flux tube content exhibits a gradual decrease with increasing radial distance from the source near Io without any evidence for substantial density irregularity associated with the plasma source or loss. Using a simple one-dimensional numerical model to simulate macroscopic interchange eddy transport, it is demonstrated that this smooth equilibrium distribution of mass can occur but only with the inclusion of a minimal level of small scale microscopic mixing at a rate approaching Bohm diffusion. Otherwise, the system exhibits a chaotic appearance which never approaches an equilibrium distribution. Various physical mechanisms for the microscopic diffusion process which is required to provide a sufficiently rapid mixing of material between the macroscopic eddies are discussed.

Mei, YI↗
DOE OSTI2021

Electron generation and multiplication at the initial stage of nanosecond breakdown in water

Electrical breakdown of liquid dielectrics under nanosecond pulsed high voltage has been investigated extensively in the last decade. Prior studies have focused on either experimental characterization of the breakdown process and discharge plasma or formulation/verification of the electrostrictive cavitation mechanism of the breakdown initiation. There remain knowledge gaps toward a clear physical picture of how the first plasma is generated in a region saturated by nanoscale cavities created by electrostrictive forces in inhomogeneous fields at the nanosecond timescale. Initial plasma results from the multiplication of primary electrons that gain energy collisionlessly in the cavities to cause collisional ionization of water molecules on the cavity walls. This paper quantitatively discusses the possible sources of primary electrons that seed the plasma discharge. Electron detachment from hydroxide is shown to be the most probable and sustainable electron source. Using numerical modeling, this study demonstrates the plausibility of an electron multiplication mechanism involving two neighboring cavities. The drift of hydrated electrons from one cavity to the next is the rate-limiting step and sets the minimum electric field requirement. Furthermore, this work will inform subsequent experimental studies and have implications in various applications such as plasma sources in biomedical applications, cavitation study, and insulation of pulsed power equipment.

42 ENGINEERING↗