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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 631 records · Page 35
All sourcesNASA NTRSDOE OSTI
DOE OSTI2016

Ultra-High Resolution Ion Mobility Separations Utilizing Traveling Waves in a 13 m Serpentine Path Length Structures for Lossless Ion Manipulations Module

We report the development and initial evaluation of a 13-m path length Structures for Lossless Manipulations (SLIM) module for achieving high resolution separations using traveling waves (TW) with ion mobility (IM) spectrometry. The TW SLIM module was fabricated using two mirror-image printed circuit boards with appropriately configured RF, DC and TW electrodes and positioned with a 2.75-mm inter-surface gap. Ions were effective confined between the surfaces by RF-generated pseudopotential fields and moved losslessly through a serpentine path including 44 “U” turns using TWs. The ion mobility resolution was characterized at different pressures, gaps between the SLIM surfaces, TW and RF parameters. After initial optimization the SLIM IM-MS module provided about 5-fold higher resolution separations than present commercially available drift tube or traveling wave IM-MS platforms. Peak capacity and peak generation rates achieved were 246 and 370 s-1, respectively, at a TW speed of 148 m/s. The high resolution achieved in the TW SLIM IM-MS enabled e.g., isomeric sugars (Lacto-N-fucopentaose I and Lacto-N-fucopentaose II) to be baseline resolved, and peptides from a albumin tryptic digest much better resolved than with existing commercial IM-MS platforms. The present work also provides a foundation for the development of much higher resolution SLIM devices based upon both considerably longer path lengths and multi-pass designs.

Environmental Molecular Sciences Laboratory↗
DOE OSTI2024

Approaching Angstrom-Scale Resolution in Lithography Using Low-Molecular-Mass Resists (<500 Da)

Resists that enable high-throughput and high-resolution patterning are essential in driving the semiconductor technology forward. The ultimate patterning performance of a resist in lithography is limited because of the trade-off between resolution, line-width roughness, and sensitivity; improving one or two of these parameters typically leads to a loss in the third. As the patterned feature sizes approach angstrom scale, the trade-off between these three metrics becomes increasingly hard to resolve and calls for a fundamental rethinking of the resist chemistry. Low-molecular-mass monodispersed metal-containing resists of high atom economy can provide not only very high resolution but also very low line-width roughness without sacrificing sensitivity. Here we describe a modular metal-containing resist platform (molecular mass <500 Da) where a molecular resist consists of just two components: a metal and a radical initiator bonded to it. This simple system not only is amenable to high-resolution electron beam lithography (EBL) and extreme ultraviolet lithography (EUVL) but also unites them mechanistically, giving a consolidated perspective of molecular and chemical processes happening during exposure. Irradiation of the resist leads to the production of secondary electrons that generate radicals in the initiator bonded to metal. This brings about an intramolecular rearrangement and causes solubility switch in the exposed resist. We demonstrate record 1.9–2.0 nm isolated patterns and 7 nm half-pitch dense line-space features over a large area using EBL. With EUVL, 12 nm half-pitch line-space features are shown at a dose of 68 mJ/cm 2 . In both of these patterning techniques, the line-width roughness was found to be ≤2 nm, a record low value for any resist platform, also leading to a low-performance trade-off metric, Z factor, of 0.6 × 10 –8 mJ·nm 3 . With the ultimate resolution limited by instrumental factors, potential patterning at the level of a unit cell can be envisaged, making low-molecular-mass resists best poised for angstrom-scale lithography.

77 NANOSCIENCE AND NANOTECHNOLOGY↗
DOE OSTI2023

Vertical Resolution Impacts Explicit Simulation of Deep Convection

Abstract The aggregation of tropical convection greatly influences the mean‐state of the atmosphere, altering humidity distributions, total atmospheric radiative cooling, and cloud amounts. Although studies have demonstrated the sensitivity of convective aggregation to horizontal resolution and domain size, few studies have explored the impact of vertical resolution on convective aggregation. Here, we investigate the impact of vertical resolution on simulations of deep convection and convective aggregation using the System for Atmospheric Modeling convection resolving model. We analyze simulations of tropical radiative‐convective equilibrium with varying vertical levels (32, 64, 128, and 256) across small (100 km), medium (700 km) and large (1,500 km) domains. We demonstrate that relative humidity and cloud fraction decrease with increasing vertical resolution as a result of reduced turbulent mixing. Vertical resolution also influences the occurrence of, onset time, and equilibrium intensity of aggregated convection, and also appears to affect the sensitivity of convective aggregation to domain size. Understanding how simulated convection aggregates, as well as its simulated sensitivity to model formulation, is critical for making and interpreting future predictions of global climate change.

Meteorology & Atmospheric Sciences↗
DOE OSTI2016

In-line three-dimensional holography of nanocrystalline objects at atomic resolution

We report that resolution and sensitivity of the latest generation aberration-corrected transmission electron microscopes allow the vast majority of single atoms to be imaged with sub-Ångstrom resolution and their locations determined in an image plane with a precision that exceeds the 1.9-pm wavelength of 300 kV electrons. Such unprecedented performance allows expansion of electron microscopic investigations with atomic resolution into the third dimension. Here we show a general tomographic method to recover the three-dimensional shape of a crystalline particle from high-resolution images of a single projection without the need for sample rotation. The method is compatible with low dose rate electron microscopy, which improves on signal quality, while minimizing electron beam-induced structure modifications even for small particles or surfaces. Lastly, we apply it to germanium, gold and magnesium oxide particles, and achieve a depth resolution of 1–2 Å, which is smaller than inter-atomic distances.

36 MATERIALS SCIENCE↗
DOE OSTI2023

Resolution-enhanced X-ray fluorescence microscopy via deep residual networks

Abstract Multimodal hard X-ray scanning probe microscopy has been extensively used to study functional materials providing multiple contrast mechanisms. For instance, combining ptychography with X-ray fluorescence (XRF) microscopy reveals structural and chemical properties simultaneously. While ptychography can achieve diffraction-limited spatial resolution, the resolution of XRF is limited by the X-ray probe size. Here, we develop a machine learning (ML) model to overcome this problem by decoupling the impact of the X-ray probe from the XRF signal. The enhanced spatial resolution was observed for both simulated and experimental XRF data, showing superior performance over the state-of-the-art scanning XRF method with different nano-sized X-ray probes. Enhanced spatial resolutions were also observed for the accompanying XRF tomography reconstructions. Using this probe profile deconvolution with the proposed ML solution to enhance the spatial resolution of XRF microscopy will be broadly applicable across both functional materials and biological imaging with XRF and other related application areas.

36 MATERIALS SCIENCE↗
DOE OSTI2018

Quartz-based flat-crystal resonant inelastic x-ray scattering spectrometer with sub-10 meV energy resolution

Continued improvement of the energy resolution of resonant inelastic x-ray scattering (RIXS) spectrometers is crucial for fulfilling the potential of this technique in the study of electron dynamics in materials of fundamental and technological importance. In particular, RIXS is the only alternative tool to inelastic neutron scattering capable of providing fully momentum resolved information on dynamic spin structures of magnetic materials, but is limited to systems whose magnetic excitation energy scales are comparable to the energy resolution. The state-of-the-art spherical diced crystal analyzer optics provides energy resolution as good as 25 meV but has already reached its theoretical limit. For this study, we demonstrate a novel sub-10 meV RIXS spectrometer based on flat-crystal optics at the Ir-L3 absorption edge (11.215 keV) that achieves an analyzer energy resolution of 3.9 meV, very close to the theoretical value of 3.7 meV. In addition, the new spectrometer allows efficient polarization analysis without loss of energy resolution. The performance of the instrument is emonstrated using longitudinal acoustical and optical phonons in diamond, and magnon in Sr 3 Ir 2 O 7 . The novel sub-10 meV RIXS spectrometer thus provides a window into magnetic materials with small energy scales.

36 MATERIALS SCIENCE↗
DOE OSTI2024

Multiscale in-situ characterization of static recrystallization using dark-field X-ray microscopy and high-resolution X-ray diffraction

Abstract Dark-field X-ray microscopy (DFXM) is a high-resolution, X-ray-based diffraction microstructure imaging technique that uses an objective lens aligned with the diffracted beam to magnify a single Bragg reflection. DFXM can be used to spatially resolve local variations in elastic strain and orientation inside embedded crystals with high spatial (~ 60 nm) and angular (~ 0.001°) resolution. However, as with many high-resolution imaging techniques, there is a trade-off between resolution and field of view, and it is often desirable to enrich DFXM observations by combining it with a larger field-of-view technique. Here, we combine DFXM with high-resolution X-ray diffraction (HR-XRD) applied to an in-situ investigation of static recrystallization in an 80% hot-compressed Mg–3.2Zn–0.1Ca wt.% (ZX30) alloy. Using HR-XRD, we track the relative grain volume of > 8000 sub-surface grains during annealing in situ. Then, at several points during the annealing process, we “zoom in” to individual grains using DFXM. This combination of HR-XRD and DFXM enables multiscale characterization, used here to study why particular grains grow to consume a large volume fraction of the annealed microstructure. This technique pairing is particularly useful for small and/or highly deformed grains that are often difficult to resolve using more standard diffraction microstructure imaging techniques.

36 MATERIALS SCIENCE↗
DOE OSTI2013

Unified treatment and measurement of the spectral resolution and temporal effects in frequency-resolved sum-frequency generation vibrational spectroscopy (SFG-VS)

The emergence of sub-wavenumber high-resolution broadband sum-frequency generation vibrational spectroscopy (HR-BBSFG-VS) [Velarde et al., J. Chem. Phys., 2011, 135, 241102] has offered new opportunities in obtaining and understanding the spectral lineshape and temporal effects on the surface vibrational spectroscopy. Particularly, the high accuracy in the HR-BBSFG-VS spectral lineshape measurement provides detailed information on the complex coherent vibrational dynamics through spectral measurement. Here we present a unified formalism of the theoretical and experimental approaches for obtaining the accurate lineshape of the SFG response, and then present a analysis on the higher and lower spectral resolution SFG spectra as well as their temporal effects of the cholesterol molecules at the air/water interface. With the high spectral resolution and accurate lineshape, it is shown that the parameters from the sub-wavenumber resolution SFG spectra can be used not only to understand but also to quantitatively reproduce the temporal effects in the lower resolution SFG measurement. These not only provide a unified picture in understanding both the frequency-domain and the time-domain SFG response of the complex molecular interface, but also provide novel experimental approaches that can directly measure them.

Environmental Molecular Sciences Laboratory↗
DOE OSTI2021

High-resolution x-ray radiography with Fresnel zone plates on the University of Rochester’s OMEGA Laser Systems

Experiments performed at the Laboratory for Laser Energetics with a continuous-wave (cw) x-ray source and on the OMEGA and OMEGA EP Laser Systems have utilized a Fresnel zone plate (FZP) to obtain x-ray images with a spatial resolution as small as ~1.5 μm. Such FZP images were obtained with a charge-coupled device or a framing camera at energies ranging from 4.5 keV to 6.7 keV using x-ray line emission from both the cw source and high-intensity, laser-beam–illuminated metal foils. In all cases, the resolution test results are determined from patterns and grids backlit by these sources. Here, the resolutions obtained are shown to be due to a combination of the spectral content of the x-ray sources and detector resolution limited by the magnification of the images (14× to 22×). High-speed framing cameras were used to obtain FZP images with frame times as short as ~30 ps. Double-shell implosions on OMEGA were backlit by laser-irradiated Fe foils, thus obtaining a framing-camera–limited, FZP-image resolution of ~3 μm–4 μm.

47 OTHER INSTRUMENTATION↗
DOE OSTI2022

High-resolution Compton spectroscopy using x-ray microcalorimeters

X-ray Compton spectroscopy is one of the few direct probes of the electron momentum distribution of bulk materials in ambient and operando environments. Herein, we report high-resolution inelastic x-ray scattering experiments with high momentum and energy transfer performed at a storage-ring-based high-energy x-ray light source facility using an x-ray transition-edge sensor (TES) microcalorimeter detector. The performance was compared with a silicon drift detector (SDD), an energy-resolving semiconductor detector, and Compton profiles were measured for lithium and cobalt oxide powders relevant to lithium-ion battery research. Spectroscopic analysis of the measured Compton profiles demonstrates the high-sensitivity to the low- Z elements and oxidation states. The line shape analysis of the measured Compton profiles in comparison with computed Hartree–Fock profiles is usually limited by the resolution of the semiconductor detector. We have characterized an x-ray TES microcalorimeter detector for high-resolution Compton scattering experiments using a bending magnet source at the Advanced Photon Source with a double crystal monochromator, providing monochromatic photon energies near 27.5 keV. The momentum resolution below 0.16 atomic units (a.u.) was measured, yielding an improvement of more than a factor of 7 over a state-of-the-art SDD for the same scattering geometry. Furthermore, the lineshapes of narrow valence and broad core electron profiles of sealed lithium metal were clearly resolved using an x-ray TES compared to smeared and broadened lineshapes observed when using the SDD. High-resolution Compton scattering using the energy-resolving area detector shown here presents new opportunities for spatial imaging of electron momentum distributions for a wide class of materials with applications ranging from electrochemistry to condensed matter physics.

47 OTHER INSTRUMENTATION↗
DOE OSTI2021

Study of SXR/EUV radiation of exploded foils and wires with spectral, spatial and temporal resolution simultaneously on KING electric discharge facility.

The results of studies of the soft X-ray and extreme ultraviolet (SXR/EUV) radiation of thin flat aluminum foils and wires under the explosion in an electric discharge on the compact high-current KING generator are presented. These studies were based on the SXR/EUV spectroscopy with a spectral resolution of 6 Å, a temporal resolution of 5 ns and a spatial resolution of 200 μm. To study the plasma radiation of exploded foils and wires in the SXR/EUV range, we used a transmission diffraction grating spectrograph which in combination with two additional slits provided spectral and spatial resolution. The spectrograph was coupled with a 4-frame recorder based on a microchannel plate for providing temporal resolution. The analysis and comparison of the spectral, spatial, temporal, and energy characteristics of the SXR/EUV radiation of plasma formed under the explosion of foils and wires of a similar mass made of aluminum was carried out. Here, the spectra were calculated as well and the plasma parameters and their changes in time and space were estimated on the basis of these calculations and comparison with relevant experimental results. Experiments have shown that when foils explode, a single intense source of SXR/EUV radiation is formed with radiated energy in the range of 10-20 J and a power of up to 100 MW in the quantum energy range from 30 to 250 eV. At the same time, the radiation power under the explosion of foils turned out to be about twice above the power under the explosion of wires of comparable mass.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2013

Adaptive resolution simulation of salt solutions

We present an adaptive resolution simulation of aqueous salt (NaCl) solutions at ambient conditions using the adaptive resolution scheme. Our multiscale approach concurrently couples the atomistic and coarse-grained models of the aqueous NaCl, where water molecules and ions change their resolution while moving from one resolution domain to the other. We employ standard extended simple point charge (SPC/E) and simple point charge (SPC) water models in combination with AMBER and GROMOS force fields for ion interactions in the atomistic domain. Electrostatics in our model are described by the generalized reaction field method. The effective interactions for water–water and water–ion interactions in the coarse-grained model are derived using structure-based coarse-graining approach while the Coulomb interactions between ions are appropriately screened. To ensure an even distribution of water molecules and ions across the simulation box we employ thermodynamic forces. We demonstrate that the equilibrium structural, e.g. radial distribution functions and density distributions of all the species, and dynamical properties are correctly reproduced by our adaptive resolution method. Our multiscale approach, which is general and can be used for any classical non-polarizable force-field and/or types of ions, will significantly speed up biomolecular simulation involving aqueous salt.

74 ATOMIC AND MOLECULAR PHYSICS↗
DOE OSTI2026

High-resolution mountain topography can inform global snow vulnerability estimates

Snow is changing globally. Computationally intensive snow reanalysis products and downscaled climate model projections allow for the estimation of historical and projected changes in snow over ∼4–10 km resolutions, but these resolutions are coarse relative to the scales needed for water supply and flood planning. Fine-scale digital elevation models (DEMs) are widely available but are underutilized to make first-order assessments of snow vulnerability. Here, we leverage DEMs at a 7.5 arc s (∼250 m) resolution, combining these with historical freezing level height estimates from ERA-5 to derive estimates of changes in the snow-receiving area (SRA) and its variability across global mountain ranges. Results show estimated SRA declines in 29% (1.9 million km2) of the global mountain area from 1982–2020; 66% of the mountainous areas had no change over the historical period. At +1.5 °C of warming relative to the pre-industrial control, global mountain SRA would decline by 9.5% (1.0 million km2) relative to recent conditions. This loss would be approximately doubled with +2 °C of warming. In a +4 °C warming scenario, an additional 34% (3.6 million km2) of SRA would be lost beyond the +2 °C case. Across individual mountain ranges, SRA losses can occur nonlinearly with warming, with some locations that have historically had relatively minor SRA losses at risk of substantially larger losses in warmer climates. Analysis using coarser-resolution DEMs can underestimate or overestimate SRA and its rate of loss, with the largest impacts in relatively warm, low-elevation mountain ranges. Results of this work provide estimates of projected loss in SRA at policy-relevant warming levels; inform the resolutions needed for process-based snow modeling; identify snow vulnerability hotspots; and provide a new integrated approach to snow vulnerability assessment that is achievable at global scales and highlights potential nonlinearities from recent trends to a variety of future warming scenarios.

climate, mountains↗
DOE OSTI2014

The Potential for Bayesian Compressive Sensing to Significantly Reduce Electron Dose in High Resolution STEM Images

The use of high resolution imaging methods in the scanning transmission electron microscope (STEM) is limited in many cases by the sensitivity of the sample to the beam and the onset of electron beam damage (for example in the study of organic systems, in tomography and during in-situ experiments). To demonstrate that alternative strategies for image acquisition can help alleviate this beam damage issue, here we apply compressive sensing via Bayesian dictionary learning to high resolution STEM images. These experiments successively reduce the number of pixels in the image (thereby reducing the overall dose while maintaining the high resolution information) and show promising results for reconstructing images from this reduced set of randomly collected measurements. We show that this approach is valid for both atomic resolution images and nanometer resolution studies, such as those that might be used in tomography datasets, by applying the method to images of strontium titanate and zeolites. As STEM images are acquired pixel by pixel while the beam is scanned over the surface of the sample, these post acquisition manipulations of the images can, in principle, be directly implemented as a low-dose acquisition method with no change in the electron optics or alignment of the microscope itself.

compressive sensing↗
DOE OSTI2020

Quantifying resolution in cosmological N- body simulations using self-similarity

ABSTRACT We demonstrate that testing for self-similarity in scale-free simulations provides an excellent tool to quantify the resolution at small scales of cosmological N-body simulations. Analysing two-point correlation functions measured in simulations using abacus , we show how observed deviations from self-similarity reveal the range of time and distance scales in which convergence is obtained. While the well-converged scales show accuracy below 1 per cent, our results show that, with a small force softening length, the spatial resolution is essentially determined by the mass resolution. At later times, the lower cut-off scale on convergence evolves in comoving units as a−1/2 (a being the scale factor), consistent with a hypothesis that it is set by two-body collisionality. A corollary of our results is that N-body simulations, particularly at high red-shift, contain a significant spatial range in which clustering appears converged with respect to the time-stepping and force softening but has not actually converged to the physical continuum result. The method developed can be applied to determine the resolution of any clustering statistic and extended to infer resolution limits for non-scale-free simulations.

79 ASTRONOMY AND ASTROPHYSICS↗
DOE OSTI2016

Avalanche statistics from data with low time resolution

Extracting avalanche distributions from experimental microplasticity data can be hampered by limited time resolution. We compute the effects of low time resolution on avalanche size distributions and give quantitative criteria for diagnosing and circumventing problems associated with low time resolution. We show that traditional analysis of data obtained at low acquisition rates can lead to avalanche size distributions with incorrect power-law exponents or no power-law scaling at all. Furthermore, we demonstrate that it can lead to apparent data collapses with incorrect power-law and cutoff exponents. We propose new methods to analyze low-resolution stress-time series that can recover the size distribution of the underlying avalanches even when the resolution is so low that naive analysis methods give incorrect results. We test these methods on both downsampled simulation data from a simple model and downsampled bulk metallic glass compression data and find that the methods recover the correct critical exponents.

97 MATHEMATICS AND COMPUTING↗
DOE OSTI2025

Deep Learning Super-Resolution X-Ray Computed Tomography Algorithms for Additive Manufacturing

Industrial X-ray computed tomography (XCT) is a nondestructive method for inspection and characterization of additively manufactured (AM) materials and parts. In practice, the resolution of XCT can be limited by factors such as detector binning, restricted field of view for large-scale objects, system blur, motion during scanning, and acquisition settings. These limitations can reduce the detectability of critical flaws such as pores, cracks, and lack of fusion. Super-resolution (SR) techniques offer a promising solution for improving the effective resolution and image quality of XCT reconstructions without the need for expensive hardware upgrades or laborious, time-consuming scans. In particular, deep learning-based SR methods have garnered attention in recent years as powerful tools for reconstructing high-resolution volumes from low-resolution inputs. In this work, a novel deep learning-based SR method is proposed for XCT scans of AM parts, and compared against several existing state-of-the-art (SOTA) methods. The proposed method, Simurgh-SR, is built on the pre-existing Simurgh framework and consists of a 2.5D U-Net trained to map low-quality inputs containing noise and artifacts to high-quality reconstructions characterized by higher flaw contrast, better noise texture, and reduced artifacts. The experimental results demonstrate superior performance of Simurgh-SR in performing 4× SR on real industrial XCT scans of thick 316L components, enhancing the structural similarity score and peak signal-to-noise ratio (>7dB) compared to the LR counterpart while improving the F1-score for flaw detection by more than 2.3× when compared to alternative SOTA SR methods. This improvement enables more accurate and significantly faster characterization of metal AM components. Additionally, Simurgh-SR was trained for both 2X and 4X SR and performs effectively at both levels, enabling the use of a single model for various SR factors.

Rahman, Obaid [ORNL] (ORCID:0000000277810840)↗
DOE OSTI2019

Next generation of extreme-resolution electron beam lithography

In top down nanofabrication research facilities around the world, the direct-write high-resolution patterning tool of choice is overwhelmingly electron beam lithography. Remarkably small features can be written in a variety of polymeric resists [V. R. Manfrinato et al., Nano Lett. 14, 4406 (2014); V. R. Manfrinato, A. Stein, L. Zhang, Y. Nam, K. G. Yager, E. A. Stach, and C. T. Black, Nano Lett. 17, 4562 (2017)]. However, this technology, which in this article the authors will refer to as conventional electron beam lithography (CEBL), is reaching its practical resolution and precision limits [V. R. Manfrinato et al., Nano Lett. 14, 4406 (2014)]. Hydrogen depassivation lithography (HDL) [J. N. Randall, J. W. Lyding, S. Schmucker, J. R. Von Ehr, J. Ballard, R. Saini, and Y. Ding, J. Vac. Sci. Technol. B 27, 2764 (2009); J. N. Randall, J. B. Ballard, J. W. Lyding, S. Schmucker, J. R. Von Ehr, R. Saini, H. Xu, and Y. Ding, Microelectron. Eng. 87, 955 (2010)] is a different version of electron beam lithography that is not limited in resolution and precision in the way that CEBL is. It uses a cold field emitter, a scanning tunneling microscope (STM) tip, to deliver a small spot of electrons on a Si (100) 2 × 1 H-passivated surface to expose a self-developing resist that is a monolayer of H adsorbed to the Si surface. Subnanometer features [S. Chen, H. Xu, K. E. J. Goh, L. Liu, and J. N. Randall, Nanotechnology 23, 275301 (2012)], and even the removal of single H atoms can be routinely accomplished [M. A. Walsh and M. C. Hersam, Annu. Rev. Phys. Chem. 60, 193 (2009)]. It is known that the H desorption process at low biases is a multielectron process [E. Foley, A. Kam, J. Lyding, and P. Avouris, Phys. Rev. Lett. 80, 1336 (1998)], but the tunneling distribution of the electrons from the STM tip to the Si surface lattice is not known. The authors have developed a simple model that demonstrates that the combination of two highly nonlinear processes creates a much higher contrast exposure mechanism than CEBL. Currently, HDL has been used almost exclusively on the Si (100) surface and has a limited number of pattern transfer techniques including Si and Ge patterned epitaxy, selective atomic layer deposition of TiO2 followed by reactive ion etching [J. B. Ballard, T. W. Sisson, J. H. G. Owen, W. R. Owen, E. Fuchs, J. Alexander, J. N. Randall, and J. R. Von Ehr, J. Vac. Sci. Technol. B 31, 06FC01 (2013)], and selective deposition of dopant atoms for quantum devices and materials [Workshop on 2D Quantum MetaMaterials held at NIST, Gaithersburg, MD, April 25–26, 2018, edited by J. Owen and W. P. Kirk]. While the throughput of HDL is very low, going parallel in a big way appears promising [J. N. Randall, J. H. G. Owen, J. Lake, R. Saini, E. Fuchs, M. Mahdavi, S. O. R. Moheimani, and B. C. Schaefer, J. Vac. Sci. Technol. B 36, 6 (2018)]. However, the most exciting aspect of HDL is its atomic-scale resolution and precision, which is key to nanoscale research. The authors see HDL emerging as the ultimate high-resolution patterning tool in top down nanofabrication research facilities.

42 ENGINEERING↗