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At least 631 records · Page 35

Fabrication of ultrathin suspended membranes from atomic layer deposition films

In this report, ultrathin films suspended as freestanding membranes are critical to many microelectronic and materials science applications. However, fabrication methods are currently limited in either their flexibility, due to material selectivity issues during the final membrane release, or their scalability. Here, we demonstrate a novel fabrication process for suspending ultrathin films with thicknesses as low as 4 nm and lateral dimensions up to 20 x 1000 μm from a variety of materials grown by atomic layer deposition. A silicon nitride membrane serves as the support for a sacrificial polymer layer and an ultrathin atomic layer deposition film which, after plasma etching, will form the membrane. The high chemical selectivity between atomic layer deposition-grown transition metal nitrides and oxides and the sacrificial polymer means that ultrathin films of a variety of materials can be released without damage using a single process. Electrically conductive titanium nitride membranes can be produced by this method and are of significant interest for electron microscopy applications. Electron transparency of titanium nitride membranes was found to be ~14% higher than silicon nitride of the same thickness, and of similar conductivity to graphite, meaning that ultrathin, conductive, and electron transparent membranes can be fabricated at scale. These membranes are ideal supports for electron and photon characterization techniques, as well as microelectromechanical system applications that require a conductive membrane.

36 MATERIALS SCIENCE↗

Self-aligned fabrication of vertical, fin-based structures

Modern power devices rely on complex, three-dimensional, vertical designs to increase their power density, ease their thermal management, and improve their reliability. However, fabrication techniques have historically relied on 2D processes for patterning lateral features. This work presents a new technology that uses multiple steps of angled depositions to fabricate self-aligned vertical, fin-based devices that avoid fundamental lithography resolution and alignment limitations. The fabrication flows of two devices, the self-aligned vertical finFET and the high-κ dielectric fin diode, are presented to demonstrate how angled depositions can readily achieve transistors with submicrometer, vertical gates in a source-first process and also create high-aspect ratio GaN fins with a record 70:1 aspect ratio.

Perozek, Joshua (ORCID:0000000251519131)↗

Fabrication of model ultrafiltration membranes with uniform, high aspect ratio pores

Here, in this manuscript, we report the facile fabrication of large-area model membranes with highly uniform and high aspect ratio pores with diameters <20 nm. These membranes are useful for fundamental investigations of separation by size exclusion in the ultrafiltration regime, where species to be separated from solution have dimensions of 1–100 nm. Such investigations require membranes with narrow pores and high aspect ratios such that the Hagen–Poiseuille equation is followed, enabling well-known models such as the hindered transport model to be evaluated and other affecting factors to be ignored. We demonstrate that the sub-20 nm pores in the membrane are of sufficiently high aspect ratio such that water flux through the membrane is consistent with the Hagen–Poiseuille equation. The fabrication relies on self-assembling block copolymers to form uniform, densely packed patterns with sub-20 nm resolution, sequential infiltration synthesis to convert the block copolymer in situ into a mask with adequate contrast to etch pores with an aspect ratio >5, and low-resolution photolithography to transfer the pattern over a large area into a silicon nitride membrane. Model membranes with narrow pore-size distribution fabricated in this way provide the means to investigate parameters that impact size-selective ultrafiltration separations such as the relationships between solute or particle size and pore size, their distributions, and rejection profiles, and, therefore, test the validity or limits of separation models.

Chen, Wen↗

Fabrication of a glancing-angle-deposited distributed polarization rotator for ultraviolet applications

Glancing-angle–deposited thin films are used to fabricate half-wave plates in a 1-D striped geometry, forming alternating regions of linearly polarized light on a single 100-mm-diam substrate. MgO is selected for fabricating the birefringent films for use in vacuum, based on its formation of isolated columns that avoid potential tensile-stress failure of the porous film. While large-area tests have shown high defect densities for fluences <10 J/cm 2 , small-spot laser-damage testing has shown resistance to fluences up to 30 J/cm 2 (351-nm, 5-ns pulse). Here, an amorphous silica film is investigated to match the optical thickness in the intermediate regions in an effort to fabricate a polarization-control device to reduce focal-point modulation (“beam smoothing”) in high-intensity laser systems. Ongoing efforts to improve the laser-damage threshold and minimize optical losses caused by scatter are essential to realizing a practical device. Scalability of the process to meter-scale substrates is also explored.

47 OTHER INSTRUMENTATION↗

SU-E-T-419: Fabricating Cerrobend Grids with 3D Printing for Spatially Modulated Radiation Therapy: A Feasibility Study

Purpose: Grid therapy has promising applications in the radiation treatment of bulky and large tumors. However, research and applications of grid therapy is limited by the accessibility of the specialized blocks that produce the grid of pencil-like radiation beams. In this study, a Cerrobend grid block was fabricated using a 3D printing technique. Methods: A grid block mold was designed with divergent tubes following beam central rays. The mold was printed using a resin with the working temperature below 230 °C. The melted Cerrobend liquid at 120°oC was cast into the resin mold to yield a block with a thickness of 7.4 cm. The grid had a hexagonal pattern, with each pencil beam diameter of 1.4 cm at the iso-center plane; the distance between the beam centers was 2 cm. The dosimetric properties of the grid block were studied using radiographic film and small field dosimeters. Results: the grid block was fabricated to be mounted at the third accessory mount of a Siemens Oncor linear accelerator. Fabricating a grid block using 3D printing is similar to making cutouts for traditional radiotherapy photon blocks, with the difference being that the mold was created by a 3D printer rather than foam. In this study, the valley-to-peak ratio for a 6MV photon grid beam was 20% at dmax, and 30% at 10 cm depth, respectively. Conclusion: We have demonstrated a novel process for implementing grid radiotherapy using 3D printing techniques. Compared to existing approaches, our technique combines reduced cost, accessibility, and flexibility in customization with efficient delivery. This lays the groundwork for future studies to improve our understanding of the efficacy of grid therapy and apply it to improve cancer treatment.

60 APPLIED LIFE SCIENCES↗

Poster - 38: On the physical and dosimetric properties of 3D printed electron bolus fabricated using polylactic acid

Purpose: 3D printing technology could simplify and improve electron bolus fabrication. The purpose of this study was to characterize the density, dimensional accuracy, uniformity, and attenuation of PLA boluses fabricated with a low-cost 3D printer. Methods: Several solid square slabs were printed with specific requested dimensions and 100% infill using different fill patterns. These pieces were imaged using an x-ray flat panel imager in order to check for uniformity of the prints. Percentage depth doses (PDDs) were measured downstream of the slabs in solid water using a parallel plate chamber and compared to measurements in water in order to characterize attenuation. The dimensions of the PLA slabs were measured using digital calipers. The slabs were also weighed to find their density. Results: The fill pattern used to create boluses can affect the attenuation of the bolus. Fill patterns should be chosen carefully and quality assurance should be done for each printed piece. PLA causes the electron PDD to shift towards shallower depths, compared to water, by 1.7 mm for each centimeter of PLA. Agreement with design dimensions was within 1 mm in the plane of the printer bed, and within 1/3 of a millimeter (roughly the thickness of a single layer), perpendicular to the printer bed. Average density was in the range 1.20 – 1.22. Conclusions: 3D printing shows great promise for use in fabricating electron bolus. This work indicates that printed PLA can be a suitable material provided the increased attenuation is properly accounted for.

60 APPLIED LIFE SCIENCES↗

Ultrafast dense DNA functionalization of quantum dots and rods for scalable 2D array fabrication with nanoscale precision

Scalable fabrication of two-dimensional (2D) arrays of quantum dots (QDs) and quantum rods (QRs) with nanoscale precision is required for numerous device applications. However, self-assembly–based fabrication of such arrays using DNA origami typically suffers from low yield due to inefficient QD and QR DNA functionalization. In addition, it is challenging to organize solution-assembled DNA origami arrays on 2D device substrates while maintaining their structural fidelity. Here, we reduced manufacturing time from a few days to a few minutes by preparing high-density DNA-conjugated QDs/QRs from organic solution using a dehydration and rehydration process. We used a surface-assisted large-scale assembly (SALSA) method to construct 2D origami lattices directly on solid substrates to template QD and QR 2D arrays with orientational control, with overall loading yields exceeding 90%. Our fabrication approach enables the scalable, high fidelity manufacturing of 2D addressable QDs and QRs with nanoscale orientational and spacing control for functional 2D photonic devices.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

Scalable fabrication of Chip-integrated 3D-nanostructured electronic devices via DNA-programmable assembly

DNA-based self-assembly methods have demonstrated powerful and unique capabilities to encode nanomaterial structures through the prescribed placement of inorganic and biological nanocomponents. However, the challenge of selectively growing DNA superlattices on specific locations of surfaces and their integration with conventional nanofabrication has hindered the fabrication of three-dimensional (3D) DNA-assembled functional devices. Here, we present a scalable nanofabrication technique that combines bottom-up and top-down approaches for selective growth of 3D DNA superlattices on gold microarrays. This approach allows for the fabrication of self-assembled 3D-nanostructured electronic devices. DNA strands are bound onto the gold arrays, which anchor DNA origami frames and promote ordered framework growth on the specific areas of the surface, enabling control of the lateral placement and orientation of superlattices. DNA frameworks selectively grown on the pads are subsequently templated to nanoscale silica and tin oxide (SnO x ) that follow the architecture, as confirmed by structural and chemical characterizations. The fabricated SnO x superlattices are integrated into devices that demonstrate photocurrent response.

36 MATERIALS SCIENCE↗

Semiconductor Structures with a one-dimensional quantum channel and in-plane side gates fabricated by pulse force nanolithography

Quasi-one-dimensional semiconductor structures with a variable longitudinal potential profile are fabricated by pulse power nanolithography, which is carried out using an atomic force microscope. Structures are fabricated on the basis of AlGaAs/GaAs heterostructures with a deep (130 nm from the surface) twodimensional electron gas. The channel potential profile is formed with the help of sectioned in-plane gates formed on both channel sides. The electrical parameters of the structures measured at temperatures down to 1.5 K confirmed the efficiency of the applied method to fabricate insulating regions with lateral sizes of ~10 nm.

36 MATERIALS SCIENCE↗

Degradation Mechanisms in Advanced MEAs for PEM Water Electrolyzers Fabricated by Reactive Spray Deposition Technology

Proton exchange membrane water electrolyzers (PEMWEs) have demonstrated enormous potential as the next generation hydrogen production technology. The main challenges that the state-of-the-art PEMWEs are currently facing are excessive cost and poor durability. Understanding the failure modes in PEMWEs is a key factor for improving their durability, lowering the precious metal loading, and hence cost reduction. Here, reactive spray deposition technology (RSDT) has been used to fabricate a membrane electrode assembly (MEA) with one order of magnitude lower Pt and Ir catalyst loadings (0.2–0.3 mg PGM cm –2 ) in comparison to the precious metal loadings in the stat-of-the-art commercial MEAs (2–3 mg PGM cm –2 ). As fabricated MEA with an active area of 86 cm 2 , has been tested for over 5000 h at steady-state conditions that are typical for an industrial hydrogen production system. Herein, we present and discuss the results from a comprehensive post-test analysis of the MEA of interest. The main degradation mechanisms, governing the performance loss in the RSDT fabricated MEA with ultra-low precious metal loadings, have been identified and discussed in detail. All failure modes are critically compared and the main degradation mechanism with the highest impact on the MEA performance loss among the others is identified.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Random adaptive tool path for zonal optics fabrication

Deterministic optics fabrication using sub-aperture tools has been vital for manufacturing precision optical surfaces. The fabrication process requires the tool influence function and the tool path to calculate the dwell time that guides the tool to bring surface quality within tight design tolerances. Widely used spiral and raster paths may leave excess waviness from the tool path, and the unavoidable constant removal layer is added to obtain positive dwell time. This waviness can be removed by either using smaller tools sequentially or randomizing the tool path. However, the existing tool-path solutions can hardly adapt to different surface aperture shapes and localized surface errors. Process efficiency and accuracy are also not well considered in tool-path planning. We propose an innovative zonal Random Adaptive Path (RAP) to solve these problems in this study. Firstly, RAP can be flexibly adapted to different surface aperture shapes by introducing part boundary. Secondly, an average threshold strategy is used in the RAP planning to improve efficiency, enabling the surface errors to be selectively corrected. Finally, the threshold is performed in several passes within one processing cycle, each with its RAP, until the desired residual is achieved. The performance of the proposed RAP is studied by comparing it with the conventional tool paths. The results demonstrated that RAP takes the least processing time and achieves the best surface quality, which verifies the effectiveness of RAP in deterministic optics fabrication.

36 MATERIALS SCIENCE↗

Oxygen Effects on Solidification Behavior of Gas Tungsten Arc–Welded Laser Powder Bed Fusion–Fabricated 304L Stainless Steel

ct The laser – powder bed fusion (L-PBF) process inherently accumulates interstitial gas elements during powder fabrication and laser deposition processes. Such elements can lead to localized variations in the weld pool and affect the solidification behavior (when compared with its wrought equivalent), in addition to chemical micro-segregation within the fabricated material. This study was conducted to characterize the solidification behavior of gas tungsten arc welds made on L-PBF 304L stainless steel. The effect of surface active elements on the local solidification rates was studied. An emphasis was placed on the role local solidification rates and temperature gradients throughout the weld play on the resultant weld solidification structure and micro-segregation. It was determined that gas tungsten arc welds on L-PBF 304L stainless steel exhibited a vermicular ferrite solidification structure compared to a mix of vermicular and lathy ferrite structure in wrought 304L. The varying thermal gradients affected the solidification modes and partitioning of elements leading to fluctuations of micro-segregation in the L-PBF 304L. Macroscopically, such partitioning affected the surface tension within the weld pool, producing asymmetric weld pool geometries. The compositional differences between wrought and L-PBF fabricated 304L stainless steels resulted in irregular solidification behaviors during welding affecting the final weld microstructure.

36 MATERIALS SCIENCE↗

Fabrication and testing of high-performance all-metal neutron guides and axisymmetric mirrors by electrochemical replication

Neutron scattering is one of the most useful methods of studying the structure of matter, with applications to biomedical, structural, magnetic and energy-related materials. Neutron-scattering instruments are installed around research reactors or accelerator-based neutron sources, and neutron guides are critical components of these facilities. They are neutron-transport optical devices consisting of state-of-the-art mirrors often tens of meters long. Here we demonstrate a novel fabrication method of all-metallic neutron guides and axisymmetric mirrors by electroplating from precision mandrels. The process allows for the fabrication of single-piece all-metal guides of prismatic and axisymmetric shapes. We also demonstrate supermirror guides and axisymmetric focusing supermirrors produced with the same technology. We present the fabrication and tests of the multilayer-coated replicated guides and optic and show that the mandrel is reproduced with high fidelity and reliability. Furthermore, such supermirror optics will provide game-changing improvements in neutron techniques.

36 MATERIALS SCIENCE↗

Data for: Ultrasonic characterization of material heterogeneities in stainless steel parts fabricated by powder bed fusion

These are the raw ultrasonic waveform files and nanoindentation measurements for three additively manufactured 316L stainless steel components with different fabrication parameters. Each part's length is divided into four segmented regions where their fabrication energy densities change. Part V+ begins at 33 J/mm^3 and increases in energy density by 3 J/mm^3 with each segment. Part C remains at a constant 33 J/mm^3 throughout the part. Part V- begins at 33 J/mm^3 and decreases in energy density by 3 J/mm^3 with each segment. We have found that the ultrasonic waves in regions with higher energy densities will traverse more quickly, as shown by the shorter time of flight, and vice versa. Similarly, nanoindentation measurements of reduced modulus and hardness follow this trend. We have measured the direction in which the parts were fabricated (build direction) and the segmented regions that are perpendicular to the build direction (transverse directions). The build direction longitudinal wave velocity measurements are considerably lower than their transverse direction counterparts, indicating anisotropy between the two directions. In Part C, we have removed material from one of its surfaces and recorded its ultrasonic and nanoindentation measurements with each material removal iteration. Changes in the material properties are more prominent by nanoindentation, suggesting material heterogeneity between the part's surface and interior. The README.txt file has information on how to navigate the files and process the data.

Anisotropy↗

Structurally Doped Graphenoid Materials: Characterization and Fabrication

The purpose of this work was to establish the feasibility of patterning graphene to induce an electronic band gap, to characterize the material to verify the electronic properties, and to fabricate devices. The main objectives of this work are: (1) pattern graphene material to induce an electronic band gap, (2) characterize the patterned graphene material to verify it’s properties, and (3) fabricate electronic devices from the patterned graphene material. We developed an approach based on nanoimprint lithography to pattern nanometer scale features in single-layer graphene, and demonstrated the approach through structural and optical characterization of the patterned material. Roadblocks in performing nanoimprint lithography on graphene were identified and surmounted with new process developments. An approach for fabricating complete electronic devices was also implemented. These accomplishments establish nanoimprint lithography as an important wafer-scale approach for patterning of graphene. These results are important for DOE and LM applications in electronics and optoelectronics that could harness the properties of graphene.

36 MATERIALS SCIENCE↗

Final Report: Development of a CW NCRF Photoinjector using Solid Freeform Fabrication

The development of very high duty cycle, high gradient photoinjectors is critical for the next generation of accelerator systems, such as X-ray free-electron lasers (FELs), inverse Compton scattering (ICS) sources, energy recovery linacs (ERLs), injectors for linear colliders, as well as a variety of industrial systems for homeland security applications. NCRF photoinjectors have a proven track record at generating the high-quality beams necessary for these applications, however they are limited in large part to relatively low duty cycles due to ohmic wall looses. Thus a key issue for high average power, normal conducting, photoinjectors is effective structure cooling [9]. The fabrication of current high average-power photoinjectors relies on conventional design and fabrication techniques with many limitations. Advances in Solid Freeform Fabrication (SFF) technology may make it possible to design and produce near net-shape copper structures for the next generation of very high rep rate, high gradient radio frequency (RF) photoinjectors. RF and thermal-management optimized geometries could be fully realized without the usual constraints and compromises of conventional machining techniques*. Further advances in SFF and powder metallurgy (P/M) techniques, with the ability to fine tune material properties, may soon make it possible to produce monolithic, thermally robust RF structures faster and cheaper than ever before.

Frigola, Pedro↗

CDMS Detector Fabrication Improvements and Low Energy Nuclear Recoil Measurements in Germanium

As the CDMS (Cryogenic Dark Matter Search) experiment is scaled up to tackle new dark matter parameter spaces (lower masses and cross-sections), detector production efficiency and repeatability becomes ever more important. A dedicated facility has been commissioned for SuperCDMS detector fabrication at Texas A&M University (TAMU). The fabrication process has been carefully tuned using this facility and its equipment. Production of successfully tested detectors has been demonstrated. Significant improvements in detector performance have been made using new fabrication methods, equipment, and tuning of process parameters. This work has demonstrated the capability for production of next generation CDMS SNOLAB detectors. Additionally, as the dark matter parameter space is probed further, careful calibrations of detector response to nuclear recoil interactions must be performed in order to extract useful information (in relation to dark matter particle characterzations) from experimental results. A neutron beam of tunable energy is used in conjunction with a commercial radiation detector to characterize ionization energy losses in germanium during nuclear recoil events. Data indicates agreement with values predicted by the Lindhard equation, providing a best-t k-value of 0.146.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Stormwater Pollution Prevention Plan for the TA-03-38 Metals Fabrication Shop, Los Alamos National Laboratory, Revision 3, January 2018

This Storm Water Pollution Prevention Plan (SWPPP) was developed in accordance with the provisions of the Clean Water Act (33 U.S.C. §§1251 et seq., as amended), and the Multi-Sector General Permit for Storm Water Discharges Associated with Industrial Activity (U.S. EPA, June 2015) issued by the U.S. Environmental Protection Agency (EPA) for the National Pollutant Discharge Elimination System (NPDES) and using the industry specific permit requirements for Sector AA-Fabricated Metal Products as a guide. This SWPPP applies to discharges of stormwater from the operational areas of the TA-03-38 Metals Fabrication Shop at Los Alamos National Laboratory. Los Alamos National Laboratory (also referred to as LANL or the “Laboratory”) is owned by the Department of Energy (DOE), and is operated by Los Alamos National Security, LLC (LANS). Throughout this document, the term “facility” refers to the TA-03-38 Metals Fabrication Shop and associated areas. The current permit expires at midnight on June 4, 2020.

54 ENVIRONMENTAL SCIENCES↗