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At least 613 records · Page 34

Effect of dielectric wall temperature on plasma plume in an argon atmospheric pressure discharge

In this letter, the effect of the dielectric wall temperature on the length and volume of an atmospheric pressure plasma jet (APPJ) is investigated using a single-electrode configuration driven with an AC power supply. To distinguish the APPJ status from the argon flow rate, the three modes, laminar, transition, and turbulent, are separated. When the dielectric wall is heated, the APPJ length and volume are enhanced. Also, the transition regions remarkably expand over a large range of flow rates. The results indicate that different factors contribute to the expansion of the transition region. The increase in the radial and axial velocities is the main cause of the expansion of the transition region to the low-velocity region. The expansion to the high-velocity region is dominantly induced by a change in the viscosity.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Electron heating mode transition induced by ultra-high frequency in atmospheric microplasmas for biomedical applications

The electron heating mode transition induced by ultra-high frequency in atmospheric-pressure microplasmas was investigated using particle-in-cell simulation with a Monte Carlo collision. Interestingly, this discharge mode transition is accompanied by non-monotonic evolution of electron kinetics such as effective electron temperature, plasma density, and electron energy on the electrode. In this study, the highest flux of energetic electrons ({epsilon} > 4 eV) usable for tailoring the surface chemistry in atmospheric microplasmas is obtained at the specific frequency (400 MHz), where an optimal trade-off is established between the amplitude of sheath oscillations and the power coupled to electrons for sub-millimeter dimensions (200 {mu}m).

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Measurement of the sheath capacitance of a planar probe

The sheath capacitance was measured on a planar probe dc-biased with respect to the plasma potential using the phase sensitive detection method in the region separated from the rf discharge plasmas by an immersed grid. It was observed that the sheath capacitance was negative when the collecting electrode of the probe was positioned downward toward the grid and biased near the plasma potential. This indicates that a double sheath had built up near the probe electrode. This tendency can be explained by the sheath capacitance, which is calculated using Poisson's equation with a non-zero electrical field and an ion velocity condition at the sheath edge.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Dynamical level-crossing model for the time-dependent electron emission from dielectric surfaces in symmetric dielectric barrier discharges

In field emission plasmas, electrons that initiate plasma formation come from the surface of a metallic electrode, or wall, with emission controlled by the electron-work function of the wall, and can be computed via the Fowler-Nordheim formula. Impinging ions modify the rate at which electrons leave the surface, and are accounted via the coefficient of secondary electron emission. However, in the case of dielectric surfaces, the microscopic mechanism by which electrons are emitted is not as well understood. While simulations of dielectric barrier discharge plasmas assume an initial density of electrons in a time-dependent simulation, whether the presence of electrons is a necessary ambient condition or whether it is a result of emission from a surface is not clear. This is particularly relevant in the context of micro and nanoscale plasma generators when surface-related effects become more important. Here we consider electron emission from dielectric surfaces in the context of dielectric barrier discharges. The configuration of interest consists of two parallel-plate metallic electrodes, each covered by a dielectric layer. Assuming that the initial electrons for plasma formation arise from the surface, we compute the rate of charge transfer from surfaces, which is a necessary, but not sufficient, condition for plasma formation. This paper presents the application of the theory of nonadiabatic transitions (dynamical level crossing) to the problem of electron emission from dielectric surfaces in dielectric barrier discharges. Furthermore, the microscopic model of electron transfer described here has potential applications in the design of micro and nanoscale plasma generators.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Research Activities at Plasma Research Laboratory at NASA Ames Research Center

In order to meet NASA's requirements for the rapid development and validation of future generation electronic devices as well as associated materials and processes, enabling technologies are being developed at NASA-Ames Research Center using a multi-discipline approach. The first step is to understand the basic physics of the chemical reactions in the area of plasma reactors and processes. Low pressure glow discharges are indispensable in the fabrication of microelectronic circuits. These plasmas are used to deposit materials and also etch fine features in device fabrication. However, many plasma-based processes suffer from stability and reliability problems leading to a compromise in performance and a potentially increased cost for the semiconductor manufacturing industry. Although a great deal of laboratory-scale research has been performed on many of these processing plasmas, little is known about the gas-phase and surface chemical reactions that are critical in many etch and deposition processes, and how these reactions are influenced by the variation in operating conditions. Such a lack of understanding has hindered the development of process models that can aid in the scaling and improvement of plasma etch and deposition systems. Our present research involves the study of such plasmas. An inductively-coupled plasma (ICP) source in place of the standard upper electrode assembly of the Gaseous Electronics Conference (GEC) radio-frequency (RF) Reference Cell is used to investigate the discharge characteristics. This ICP source generates plasmas with higher electron densities and lower operating pressures than obtainable with the original parallel-plate version of the GEC Cell. This expanded operating regime is more relevant to new generations of industrial plasma systems being used by the microelectronics industry. The research goal is to develop an understanding of the physical phenomena involved in plasma processing and to measure much needed fundamental parameters, such as gas phase and surface reaction rates, species concentration, temperature, ion energy distribution, and electron number density.

Sharma, S. P.↗

Characteristics of a Direct Current-driven plasma jet operated in open air

A DC-driven plasma jet has been developed to generate a diffuse plasma plume by blowing argon into the ambient air. The plasma plume, showing a cup shape with a diameter of several centimeters at a higher voltage, is a pulsed discharge despite a DC voltage is applied. The pulse frequency is investigated as a function of the voltage under different gap widths and gas flow rates. Results show that plasma bullets propagate from the hollow needle to the plate electrode by spatially resolved measurement. A supposition about non-electroneutral trail of the streamer is proposed to interpret these experimental phenomena.

36 MATERIALS SCIENCE↗

Measuring Magnetic Fields in Collisionless Experiments

Magnetic field and electron density diagnostics are critical tools in the characterization of high energy density laboratory plasmas. These plasma environments are complex and the magnetic fields and electron densities often exhibit significant spatial and temporal variation leading to significant challenges in these measurements. Even the most promising technique, Zeeman splitting, faces challenges under plasma conditions where broadening due to high density and temperature is greater than the Zeeman splitting. Here we propose and describe a diagnostic based on Zeeman broadening. The Zeeman broadening diagnostic relies on measuring the widths of multiplet components simultaneously. The method does not depend on resolved lines, but rather on measuring the difference in the widths of multiplet lines. Experiments were performed at the University of Nevada, Reno, Nevada Terawatt Facility (NTF). The Zeeman broadening diagnostic gathered visible broadened multiplet spectra from laser produced plasmas, and plasmas generated from wire-arrays driven by the Zebra z-pinch pulsed power apparatus. The laser produced plasma, created by the Leopard pulsed laser (I>1014 W/cm 2 ), evolved in an external magnetic field (B<40T) generated by current driven through a solid electrode by the Zebra current pulse. For laser produced plasmas, observation of the magnetic field radial profile showed that the external field completely diffuses into the plasma after approximately 100 ns. Further, as the plasma continues to evolve, the field profiles within the plasma develop modulations that do not map the external field profile. For the wire array experiments, radial electron density, and magnetic field, profiles were measured. Here the Zeeman splitting was not resolved and the magnetic fields were determined from the difference between the widths of the multiplet line profiles. Thus, it has been demonstrated that Zeeman broadening may be used as a magnetic field diagnostic.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Operation of the ORNL High Particle Flux Helicon Plasma Source

A high power, high particle flux rf-based helicon plasma source has been constructed at ORNL and operated at power levels up to 30 kW. High-density hydrogen and helium plasmas have been produced. The source has been designed as the basis for a linear plasma materials interaction (PMI) test facility that will generate particle fluxes {Gamma}{sub p}10{sup 23} m{sup -3} s{sup -1}, and utilize additional ion and electron cyclotron heating to produce high parallel (to the magnetic field) heat fluxes of {approx}10 MW/m{sup 2}. An rf-based source for PMI research is of interest because high plasma densities are generated with no internal electrodes, allowing true steady state operation with minimal impurity generation. The ORNL helicon source has a diameter of 15 cm and to-date has operated at a frequency f = 13.56 MHz, with magnetic field strength |B| in the antenna region up to {approx}0.15 T. Maximum densities of 3x10{sup 19} m{sup -3} in He and 2.5x10{sup 19} m{sup -3} in H have been achieved. Radial density profiles have been seen to be dependent on the axial |B| profile.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Preparation of dielectric coating of variable dielectric constant by plasma polymerization

A plasma polymerization process for the deposition of a dielectric polymer coating on a substrate comprising disposing of the substrate in a closed reactor between two temperature controlled electrodes connected to a power supply is presented. A vacuum is maintained within the closed reactor, causing a monomer gas or gas mixture of a monomer and diluent to flow into the reactor, generating a plasma between the electrodes. The vacuum varies and controls the dielectric constant of the polymer coating being deposited by regulating the gas total and partial pressure, the electric field strength and frequency, and the current density.

Hudis, M.↗

Cutoff effects of electron velocity distribution to the properties of plasma parameters near the plasma-sheath boundary

The plasma properties under high thermodynamic non-equilibrium condition, established due to the presence of electrically biased electrode, are investigated. Assumption of electron cut-off velocity distribution function (VDF), as done by Andrews and Varey in their investigations of the sheath region [J. Phys. A 3, 413 (1970)], has been extended here to both plasma and sheath regions. Analytic expressions for the moments of electron VDF, as well as for the electron screening temperature function dependence on the plasma-sheath local potential are derived. In deriving the ion velocity distribution the ''standard'' assumption of strict plasma quasineutrality, or equivalently vanishing of the plasma Debye length, is employed, whereas the ions are assumed to be generated at rest over the plasma region. However, unlike the standard approach of solving the plasma equation, where pure Boltzmann electron density profile is used, here we employ modified Boltzmann's electron density profile, due to cutoff effect of the electron velocity distribution. It is shown that under these conditions the quasineutrality equation solution is characterised by the electric field singularity for any negative value of the electrode bias potential as measured with respect to the plasma potential. The point of singularity i.e., the plasma length and its dependence on the electrode bias and sheath potential is established for the particular case of ionization profile mechanism proportional to the local electron density. Relevant parameters for the kinetic Bohm criterion are explicitly calculated for both ions and electrons, for arbitrary electrode bias.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

SUMMA hot-ion plasma heating research at NASA Lewis Research Center

The SUMMA superconducting magnetic mirror facility and the associated hot-ion plasma research were described. SUMMA is characterized by intense magnetic fields and a large-diameter working bore (41 cm diameter) with room-temperature access. The goal of the plasma research program is to produce steady-state plasmas of fusion reactor densities and temperatures (but not confinement times). The program includes electrode development to produce a hot, dense, large-volume, steady-state plasma and diagnostics development to document the plasma properties. SUMMA and its hot-ion plasma are ideally suited to develop advanced plasma diagnostics methods. Two such methods whose requirements are well matched to SUMMA are: (1) heavy ion beam probing to measure plasma space potential; and (2) submillimeter wavelength laser Thomson scattering to measure local ion temperature.

Reinmann, J. J.↗

SUMMA hot-ion plasma heating research at NASA Lewis Research Center

This report describes the SUMMA superconducting magnetic mirror facility at the NASA Lewis Research Center and the hot-ion plasma research conducted therein. SUMMA is characterized by intense magnetic fields (designed for 8.6 T at the mirrors) and a large-diameter working bore (41 cm diameter) with room-temperature access. The goal of the plasma research program is to produce steady-state plasmas of fusion reactor densities and temperatures (but not confinement times). The program includes electrode development to produce a hot, dense, large-volume, steady-state plasma and diagnostics development to document the plasma properties. SUMMA and its hot-ion plasma are ideally suited to develop advanced plasma diagnostics methods. Two such methods whose requirements are well matched to SUMMA are: (1) heavy ion beam probing to measure plasma space potential, and (2) submillimeter wavelength laser Thomson scattering to measure local ion temperature. Two NASA University Grants were established to identify major requirements for developing these two diagnostic techniques in SUMMA.

Reinmann, J. J.↗

Boride Based Electrode Materials with Enhanced Stability Under Extreme Conditions for MHD Direct Power Extraction. Final Scientific Report

Coal power currently makes up almost 40% of global electricity production. This method of extracting energy from coal can be added to any coal plant, improving its energy output. Not only would this prepare us to keep up with the ever-increasing energy demands but it could also allow us to significantly cut the greenhouse gas emissions for the coal power industry. Hafnium diboride (HfB 2 ), Zirconium diboride (ZrB 2 ), and their solid solution mixtures were studied, primarily for electrode coating applications in coal-fired magnetohydrodynamic (MHD) direct power extraction plants. MHD works by directly extracting current from superheated plasma flame (2725 °C) seeded with potassium salts. Obviously, the electrodes near this flame are subject to extreme temperatures and corrosive environments. The coating material needs to protect the electrodes from salt corrosion, oxidation, and melting, while still providing electrical conductivity. Transition metal diborides have many of the desired properties but need improvement for oxidation resistance above 1200 °C. Two main methods of oxidation resistance improvements were investigated during this research. The first was through electrochemical anodization, a process where a thin protective oxide layer is grown on the surface to prevent further detrimental oxidation at high temperatures. Several solutions, voltages, and methods were used to find an oxide layer that would protect at high temperatures. The second method was to use various additives and mixture ratios to improve densification and oxidation resistance. Ratios of HfB 2 and ZrB 2 tested were 1:4, 1:1, 4:1 and 1:1 with additives of Ta, Hf, and Zr metals, bringing the boron to metal ratio down to 1.86. Additionally, 1.8 mol% Gd 2 O 3 and LaB 6 were added to the 1:1 ratio HfB 2 -ZrB 2 . Hydrogen evolution reaction kinetics were also investigated to shed some light on the ability of these materials to resist corrosion. Aqueous corrosion tests were also performed in several solutions of different pH. The 1:1 ratio solution added with LaB 6 gave the best overall results both in high temperature and room temperature aqueous experiments. Further work will be needed to evaluate the efficacy of these materials for such applications.

01 COAL, LIGNITE, AND PEAT↗

Diagnostic for Plasma Enhanced Chemical Vapor Deposition and Etch Systems

In order to meet NASA's requirements for the rapid development and validation of future generation electronic devices as well as associated materials and processes, enabling technologies ion the processing of semiconductor materials arising from understanding etch chemistries are being developed through a research collaboration between Stanford University and NASA-Ames Research Center, Although a great deal of laboratory-scale research has been performed on many of materials processing plasmas, little is known about the gas-phase and surface chemical reactions that are critical in many etch and deposition processes, and how these reactions are influenced by the variation in operating conditions. In addition, many plasma-based processes suffer from stability and reliability problems leading to a compromise in performance and a potentially increased cost for the semiconductor manufacturing industry. Such a lack of understanding has hindered the development of process models that can aid in the scaling and improvement of plasma etch and deposition systems. The research described involves the study of plasmas used in semiconductor processes. An inductively coupled plasma (ICP) source in place of the standard upper electrode assembly of the Gaseous Electronics Conference (GEC) radio-frequency (RF) Reference Cell is used to investigate the discharge characteristics and chemistries. This ICP source generates plasmas with higher electron densities (approximately 10(exp 12)/cu cm) and lower operating pressures (approximately 7 mTorr) than obtainable with the original parallel-plate version of the GEC Cell. This expanded operating regime is more relevant to new generations of industrial plasma systems being used by the microelectronics industry. The motivation for this study is to develop an understanding of the physical phenomena involved in plasma processing and to measure much needed fundamental parameters, such as gas-phase and surface reaction rates. species concentration, temperature, ion energy distribution, and electron number density. A wide variety of diagnostic techniques are under development through this consortium grant to measure these parameters. including molecular beam mass spectrometry (MBMS). Fourier transform infrared (FTIR) spectroscopy, broadband ultraviolet (UV) absorption spectroscopy, a compensated Langmuir probe. Additional diagnostics. Such as microwave interferometry and microwave absorption for measurements of plasma density and radical concentrations are also planned.

Cappelli, Mark A.↗

High Altitude Re-entry Plasma Emulation Experiment (HARPEE)

A table-top apparatus has recently been constructed at the NASA Glenn Research Center to investigate potential solutions for the radio-frequency communication blackout problem -- experienced by landing modules during high-speed atmospheric entry. This customized plasma chamber was designed to emulate Earth-based atmospheric entry plasmas with electron densities in the range of 10^16 m^-3 to 10^19 m^-3. The system makes use of a 40-kHz, perforated coaxial electrode pair to generate a disk-shaped, static plasma with an approximate diameter and thickness of 405 mm and 100 mm, respectively. A translatable Langmuir probe was employed to characterize the radial profile of electron temperature and density as a function the 40-kHz power (< 1 kW) and dry-nitrogen flow rate (< 160 SCCM).

plasma↗

Comparison of electrical and optical characteristics in gas-phase and gas-liquid phase discharges

This paper presents an AC-excited argon discharge generated using a gas-liquid (two-phase) hybrid plasma reactor, which mainly consists of a powered needle electrode enclosed in a conical quartz tube and grounded deionized water electrode. The discharges in the gas-phase, as well as in the two-phase, exhibit two discharge modes, i.e., the low current glow-like diffuse mode and the high current streamer-like constrict mode, with a mode transition, which exhibits a negative resistance of the discharges. The optical emission spectral analysis shows that the stronger diffusion of the water vapor into the discharge region in the two-phase discharges boosts up the generation of OH (A–X) radicals, and consequently, leads to a higher rotational temperature in the water-phase plasma plume than that of the gas-phase discharges. Both the increase of the power input and the decrease of the argon flow rate result in the increase of the rotational temperature in the plasma plume of the water-phase discharge. The stable two-phase discharges with a long plasma plume in the water-phase under a low power input and gas flow rate may show a promising prospect for the degradation of organic pollutants, e.g., printing and dyeing wastewater, in the field of environmental protection.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Spectrally filtered ps–ns emission dynamics of atmospheric-pressure nanosecond pulsed plasmas

The temporal dynamics of atmospheric-pressure nanosecond pulsed plasma discharges in a pin-to-pin electrode configuration are studied using streak-camera line imaging of the interelectrode gap with a time resolution as short as ~25 ps. Discharge emission initiates homogeneously throughout the interelectrode gap with no detectable streamer propagation and then temporally decays in two distinct phases. Plasma emission bands attributed to various electronic transitions are tracked for single discharges in air and N 2 . Spectral filtering of the excited molecular states reveals that the N 2 (C–B) and N 2 (B–A) emission bands evolve in distinct early and late phases, respectively, with a time separation of ~15–20 ns. Furthermore, significant differences in the temporal dynamics of plasma discharges in air and N2 are observed. High levels of excited-state atomic oxygen and NO appear after the initial decay of the N 2 (C) state and coincide primarily with the latter phases of plasma evolution in air environments. From temporal traces of discharge emission, the formation and relaxation timescales of the electronically excited states of N 2 are quantified in pure N2 and air environments with sub-nanosecond resolution. The streak-OES (optical emission spectroscopy) technique enables quantitative time-resolved studies of key chemical species for model validation in ultra-short-pulsed plasmas.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Electron plasma dynamics during autoresonant excitation of the diocotron mode

Chirped-frequency autoresonant excitation of the diocotron mode is used to move electron plasmas confined in a Penning-Malmberg trap across the magnetic field for advanced plasma and antimatter applications. Plasmas of 10{sup 8} electrons, with radii small compared to that of the confining electrodes, can be moved from the magnetic axis to ≥90% of the electrode radius with near unit efficiency and reliable angular positioning. Translations of ≥70% of the wall radius are possible for a wider range of plasma parameters. Details of this process, including phase and displacement oscillations in the plasma response and plasma expansion, are discussed, as well as possible extensions of the technique.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗