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At least 613 records · Page 34

10 nm gap bowtie plasmonic apertures fabricated by modified lift-off process

Bowtie plasmonic apertures, with gap sizes down to 11 nm and silver film thickness of up to 150 nm (aspect ratio ∼14:1), were fabricated on a silicon nitride membrane. Transmission spectra feature the aperture resonances ranging from 470 to 687 nm, with quality factors around 10. The mode area of the smallest gap aperture is estimated to be as small as 0.002 (λ/n)2 using numerical modeling. Importantly, our fabrication technique, based on an e-beam lithography and a lift-off process, is scalable which allows fabrication of many devices in parallel over a relatively large area. We believe that the devices demonstrated in this work will find application in studying and engineering light-matter interactions.

Huang, I-Chun↗

Toward the fabrication of a 5- μm -resolution Wolter microscope for the National Ignition Facility (invited)

Advancements in computer-controlled polishing, metrology, and replication have led to an x-ray mirror fabrication process that is capable of producing high-resolution Wolter microscopes. Here, we present the fabrication and test of a nickel–cobalt replicated full-shell x-ray mirror that was electroformed from a finely figured and polished mandrel. This mandrel was designed for an 8-m source-to-detector-distance microscope, with 10× magnification, and was optimized to reduce shell distortions that occur within 20 mm of the shell ends. This, in combination with an improved replication tooling design and refined bath parameters informed by a detailed COMSOL Multiphysics® model, has led to reductions in replication errors in the mirrors. Mandrel surface fabrication was improved by implementing a computer-controlled polishing process that corrected the low-frequency mandrel figure error and achieved <2.0 nm RMS convergence error. X-ray tests performed on a pair of mirror shells replicated from the mandrel have demonstrated <10 μm full-width at half-maximum (FWHM) spatial resolution. Here, we discuss the development process, highlight results from metrology and x-ray testing, and define a path for achieving a program goal of 5 μm FWHM resolution.

47 OTHER INSTRUMENTATION↗

Fabrication of the Metal Particle in Plastic Bead Target for the LLE Ultra-Strong Spherical Shock Campaign

The challenge of fabricating a shock convergence target is embedding the metal particle at the center of a plastic bead with ≤ 10 µm concentricity between the metal particle and plastic bead. Two types of the metal particle in plastic bead target were fabricated for the UltraSSS campaign; 1) a metal particle 50 µm in diameter embedded in the center of a 430 µm diameter plastic bead and 2) the same metal particle and 430 µm diameter plastic bead with an embedded conical shield with the metal particle located at the tip of the conical shield. We describe the fabrication of these two target types; it will include the selection of the plastic bead material, how the metal particle was embedded in the plastic material, how the metal particle was attached to the end of the cone, how the plastic material was machined into a bead 430 µm in diameter and how X-ray images were used to establish the particle position in the plastic material and how it was then used for final metrology to determine the concentricity of the metal particle with respect to the plastic bead and the metal particle position with respect to the tip of the conical shield.

36 MATERIALS SCIENCE↗

Evolution of the Design and Fabrication of Astrophysics Targets for Turbulent Dynamo (TDYNO) Experiments on OMEGA

Although the overall function of a campaign’s primary target design may remain unchanged, the components and structure often evolve from one shot day to the next to better meet experimental goals. The target fabrication engineer’s involvement in this evolution can be important for advising modifications in order to improve and simplify assembly at the same time. Highly complex targets are constructed by General Atomics (GA) for astrophysics experiments conducted by the University of Chicago at the OMEGA laser facility. Several novel target components are fabricated, precision-assembled, and extensively measured in support of this campaign, and have evolved over the last three years to improve both the science and assembly. Examples include unique laser machined polyimide grids to enhance plasma mixing at target center, precision micromachined cylindrical shields that also act as component spacers, drawn glass target supports to suspend physics packages at critical distances, and tilted pinholes for collimated proton radiography. Target component fabrication and evolution details for this turbulent dynamics (TDYNO) campaign are presented, along with precision-assembly techniques, metrology methods, and considerations for future TDYNO experiments on OMEGA.

42 ENGINEERING↗

Progress Toward Fabrication of Machined Metal Shells for the First Double-Shell Implosions at the National Ignition Facility

The double-shell platform fielded at the National Ignition Facility requires developments in new machining techniques and robotic assembly stations to meet the experimental specifications. Current double-shell target designs use a dense high-Z inner shell, a foam cushion, and a low-Z outer shell. The design requires that the inner shell be gas filled using a fill tube. This tube impacts the entire machining and assembly design. Other intermediate physics designs have to be fielded to answer physics questions and advance the technology to be able to fabricate the full point design in the near future. One of these intermediate designs is a mid-Z imaging design. The methods of designing, fabricating, and characterizing each of the major components of an imaging double shell are discussed with an emphasis on the fabrication of the machined outer metal shell.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Fiber-optic bolometer with low detection limit fabricated using thermal release tape and precise laser heating

Fiber-optic bolometers (FOBs) based on a fiber-tipped silicon Fabry–Perot (FP) interferometric temperature sensor and a gold disk absorber have been shown to be an attractive alternative to conventional resistive bolometers for plasma radiation measurement in fusion devices. Either a high-finesse FP or a low-finesse FP can be used, each with trade-offs between noise performance and fabrication complexity. In this paper, we present an FOB design that overcomes these limitations by combining a low-finesse long silicon FP cavity with a large gold disk absorber to achieve enhanced sensitivity and noise performance without increasing the fabrication complexity and the time constant. We also demonstrated a fabrication method for the sensor head facilitated by thermal release tape and precise laser heating. Our FOB demonstrates a temperature resolution of 0.08 mK, a cooling time constant of 230 ms, and a noise equivalent power density of 0.015 W m −2 . This represents an eightfold improvement over previous high-finesse FOBs and 26-fold improvement over previous low-finesse FOBs with similar demodulation bandwidths and similar cooling time constants.

Fabry–Perot interferometer↗

Fabrication and radio frequency test of large-area MgB 2 films on niobium substrates

Magnesium diboride (MgB 2 ) is a promising candidate material for superconducting radio frequency (RF) cavities because of its higher transition temperature and critical field compared with niobium. To meet the demand of RF test devices, the fabrication of large-area MgB 2 films on metal substrates is needed. Here, in this work, high quality MgB 2 films with 50 mm diameter were fabricated on niobium by using an improved HPCVD system at Peking University, and RF tests were carried out at SLAC National Accelerator Laboratory. The transition temperature is approximately 39.6 K and the RF surface resistance is about 120 μΩ at 4 K and 11.4 GHz. Finally, the fabrication processes, surface morphology, DC superconducting properties and RF tests of these large-area MgB 2 films are presented.

36 MATERIALS SCIENCE↗

Design, fabrication, and testing of diamond axicons for X-ray microscopy applications

This work presents the design, fabrication, and experimental validation of a refractive diamond axicon for X-ray beam shaping. The diamond axicon was developed to overcome the limitations of polymer-based axicons particularly for application in Transmission X-ray Microscopy (TXM) systems, offering superior mechanical strength, thermal stability, and radiation resistance, making it ideal for synchrotron applications. The axicon was fabricated using femtosecond laser ablation and tested at 11 keV under various coherence conditions. Results demonstrated that the axicon efficiently transformed the X-ray beam into a ring-shaped profile with over 80% transmission. Simulations confirmed the experimental findings and highlighted the potential for further improvements. This work paves the way for the use of diamond axicons in next-generation synchrotron facilities, with future efforts focusing on optimizing fabrication and testing the axicon in full TXM systems.

Samadi, Nazanin↗

Rapid curing dynamics of PEG-thiol-ene resins allow facile 3D bioprinting and in-air cell-laden microgel fabrication

Thiol-norbornene photoclick hydrogels are highly efficient in tissue engineering applications due to their fast gelation, cytocompatibility, and tunability. In this work, we utilized the advantageous features of polyethylene glycol (PEG)-thiol-ene resins to enable fabrication of complex and heterogeneous tissue scaffolds using 3D bioprinting and in-air drop encapsulation techniques. We demonstrated that photoclickable PEG-thiol-ene resins could be tuned by varying the ratio of PEG-dithiol to PEG norbornene to generate a wide range of mechanical stiffness (0.5–12 kPa) and swelling ratios. Importantly, all formulations maintained a constant, rapid gelation time (<0.5 s). We used this resin in biological projection microstereolithography (BioPµSL) to print complex structures with geometric fidelity and demonstrated biocompatibility by printing cell-laden microgrids. Moreover, the rapid gelling kinetics of this resin permitted high-throughput fabrication of tunable, cell-laden microgels in air using a biological in-air drop encapsulation apparatus (BioIDEA). We demonstrated that these microgels could support cell viability and be assembled into a gradient structure. This PEG-thiol-ene resin, along with BioPµSL and BioIDEA technology, will allow rapid fabrication of complex and heterogeneous tissues that mimic native tissues with cellular and mechanical gradients. The engineered tissue scaffolds with a controlled microscale porosity could be utilized in applications including gradient tissue engineering, biosensing, and in vitro tissue models.

36 MATERIALS SCIENCE↗

Impact of inoculation practices on microbiota assembly and community stability in a fabricated ecosystem

Studying plant-microbe-soil interactions is challenging due to their high complexity and variability in natural ecosystems. While fabricated ecosystems provide opportunities to recapitulate aspects of these systems in reduced complexity and controlled environments, inoculation can be a significant source of variation. To tackle this, we evaluated how different bacteria inoculation practices and plant harvesting time points affect the reproducibility of a microbial synthetic community (SynCom) in association with the model grass Brachypodium distachyon. We tested three microbial inoculation practices: seed inoculation, transplant inoculation, and seedling inoculation; and two harvesting points: early (14-day-old plants) and late (21 days post-inoculation). We grew our plants and bacterial strains in sterile devices (EcoFABs) and characterized the microbial community from root, rhizosphere, and sand using 16S ribosomal RNA gene sequencing. The results showed that inoculation practices significantly affected the rhizosphere microbial community only when harvesting at an early time point but not at the late stage. As the SynCom showed a persistent association with B. distachyon at 21 days post-inoculation regardless of inoculation practices, we assessed the reproducibility of each inoculation method and found that transplant inoculation showed the highest reproducibility. Moreover, plant biomass was not adversely affected by transplant inoculation treatment. We concluded that bacteria inoculation while transplanting coupled with a later harvesting time point gives the most reproducible microbial community in the EcoFAB-B. distachyon-SynCom fabricated ecosystem and recommend this method as a standardized protocol for use with fabricated ecosystem experimental systems.

59 BASIC BIOLOGICAL SCIENCES↗

Achieving a near-ideal silicon crystal neutron interferometer using submicrometer fabrication techniques

Perfect-crystal neutron interferometry, which is analogous to Mach-Zehnder interferometry, uses Bragg diffraction to form interfering neutron paths. The measured phase shifts can be used to probe many types of interactions whether it be nuclear, electromagnetic, gravitational, or topological in nature. For a perfect-crystal interferometer to preserve coherence, the crystal must possess a high degree of dimensional tolerance as well as being relatively defect-free with minimal internal stresses. In the past, perfect-crystal neutron interferometers have been produced by a two-step process. First, a resin diamond wheel would be used to remove excess material and shape the interferometer. Afterword, the crystal would be etched to remove surface defects and elevate strains. This process has had limitations in terms of repeatability and in maximizing the final contrast, or fringe visibility, of the interferometer. We have tested various fabrication and post-fabrication techniques on a single perfect-crystal neutron interferometer and measured the interferometer's performance at each step. Here we report a robust, nonetching fabrication process with high final contrast. For the interferometer used in this work, we achieved contrasts of greater than 90% several times and ultimately finished with an interferometer that has 92% contrast and a uniform phase distribution. Published by the American Physical Society 2024

Huber, M. G. (ORCID:0000000237958445)↗

Silicon Photonic Switch Fabrics: Technology and Architecture

We present that photonic switching technologies show potential for transforming communication networks across diverse markets from long-haul to short-reach distance scales due to their large bandwidth density, high energy efficiency, and potential for low cost. In recent years, numerous outstanding advancements have been made in scaled silicon photonic switching fabrics: spanning a variety of manufacturing platforms and packaging methods, relying on different switching mechanisms, and assembled on-chip in a diverse mixture of loosely related architectures. This work reviews the current approaches employed by leading researchers in this area, and surveys the state of the art in achieved performance at both the technological and the architectural level. Specifically, we consider thermo-optic, electrooptic, and MEMS-based switch actuation embedded in Mach Zehnder interferometer, ring resonator, and directional coupler based silicon photonic switches. We define common metrics and compare performances. We outline critical requirements for constructing scaled switch fabrics from elementary cells. Lastly, we investigate similarities and differences between a number of commonly utilized topologies. And, we survey recent accomplishments in scaled switch fabrics at the chip and package level. Moving these demonstrations from research to product will require many further advancements, and we highlight areas that we believe will be critical for market adoption.

97 MATHEMATICS AND COMPUTING↗

High Efficient THz Emission From Unbiased and Biased Semiconductor Nanowires Fabricated Using Electron Beam Lithography

Besides having perfect control on structural features, such as vertical alignment and uniform distribution by fabricating the wires via e-beam lithography and etching process, we also investigated the THz emission from these fabricated nanowires when they are applied DC bias voltage. To be able to apply a voltage bias, an interdigitated gold (Au) electrode was patterned on the high-quality InGaAs epilayer grown on InP substrate bymolecular beam epitaxy. Afterwards, perfect vertically aligned and uniformly distributed nanowires were fabricated in between the electrodes of this interdigitated pattern so that we could apply voltage bias to improve the THz emission. As a result, we achieved enhancement in the emitted THz radiation by ~four times, about 12 dB increase in power ratio at 0.25 THz with a DC biased electric field compared with unbiased NWs.

Biased emission↗

Investigations Towards Ultra-Low Cost Nb 3 Sn SRF Fabrication via Melt Casted Bronze Route Processing

Here, a novel approach to fabricating Nb 3 Sn SRF cavities and other RF components using an ultra-low-cost melt casting fabrication process has been investigated. This simple, low cost melt casting technique has the potential to be used to fabricate nearly any superconducting Nb3Sn structure using either the Bronze Route (BR), Internal Tin (IT), External Tin (ET) processes as well as normal conducting pure copper (Cu) cavities. Most of the heat treated samples that were examined using SEM/EDX seemed to show a reasonable correlation of T c onset and transition width (ΔT c ) of the ingots initial/starting Sn content to the desired stoichiometric Nb 3 Sn phase, where the lower starting Sn content coupons resulted in lower T c 's with broader transition widths and the higher starting Sn coupons resulted in higher T c 's with narrower ΔT c ’s. The best samples had T c onsets ~17-18 K and ΔT c 's < 2 K. Two samples were further tested for RF surface resistance (R s ) and Quality Factor (Q) at JLAB. Here, these RF measurements were performed at 7.4 GHz using a calorimetric technique and showed two transitions, one at ~ 8 K and another at ~ 14 K; values of R s were at least two orders of magnitude higher than similar high quality Nb 3 Sn films directly deposited substrates by JLAB and with another superconducting transition close to the superconducting transition temperature of niobium. Substantial improvements in the processing variables ranging from higher quality of the initial ingots with higher Sn content, to better electropolishing and reaction heat treatment regimens will be necessary to realize improved RF performance metrics.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗

Irradiation-induced Degradation of Surface Acoustic Wave Devices Fabricated on Bulk AlN

Here, recent work to evaluate the prospects for surface acoustic wave (SAW) devices fabricated on bulk aluminum nitride (AlN) for elevated temperature and radiation environments is reported and discussed. The design and fabrication of an array of SAW devices using commercial wafers is described, including the non-standard fabrication approach taken to overcome the stress-induced warpage of the 50 mm diameter AlN substrates. Radio frequency performance characterization of the SAW devices, with resonance frequencies ranging from 0.5 GHz to 1.5 GHz, is described. The linear temperature coefficient of frequency (TCF) near room temperature was measured and is compared to theoretical results from other investigators. Further, the effects of 8 MeV Al ion irradiation at 300°C and 500°C to damage levels of 0.01, 0.1 and 1 displacements per atom (dpa), as a proxy for neutron irradiation, was investigated. The ion irradiation damage was observed to decrease the SAW resonant frequency, and this effect is characterized and discussed. Significant degradation in the conductivity of the Ti/Al electrodes of the SAW devices was also observed and characterized. These experimental results provide a basis for further investigation of the prospects for development of SAW sensor devices in bulk AlN material for application in elevated temperature and radiation environments.

36 MATERIALS SCIENCE↗

All Solution‐Based Fabrication of Copper Oxide Thin Film/Cobalt‐Doped Zinc Oxide Nanowire Heterojunctions

Versatile and intriguing solution‐based processes are utilized to synthesize nanostructured materials for device applications to reduce material production and device fabrication costs. This study presents results on the fabrication and characterization of copper oxide (CuO) coated cobalt‐doped zinc oxide nanowires (Co‐doped ZnO NW s)‐based heterojunction diodes prepared by a two‐step synthesis route through combined hydrothermal growth and sol–gel spin coating. Highly dense, well‐ordered, undoped, and Co‐doped ZnO NW s were successfully grown by hydrothermal method. Complementary CuO thin films were synthesized by sol–gel method and subsequently coated onto both undoped and Co‐doped ZnO NW s through spin‐coating technique. Enhanced diode properties with a rectification ratio of 10 3 at ±2 V and an ideality factor of n = 2.4 (in dark) were obtained for Co‐doped ZnO NW s‐based heterojunction diodes. The obtained results demonstrated that the investigated heterojunction diode structure fabricated by facile and cost‐effective solution‐based processes can be a promising candidate for the next generation optoelectronic devices.

Aksoy Akgul, Funda↗

Design and Fabrication of Ta filled microcavites in the delay paths of SAW devices for improved power transfer

The authors report the design and fabrication of a surface acoustic wave (SAW) device with improved power transfer due to modification of its delay path. Typically, SAW delay-line devices suffer from relatively high insertion loss (IL) (similar to 10-30 dB). Our approach is to incorporate an array of microcavities, having square cross-sectional area (lambda/2 x lambda/2) and filled with tantalum, within the delay path to maximize acoustic confinement to the surface and reduce IL. To determine the effectiveness of the cavities without expending too many resources and to explain trends found in actual devices, a finite element model of a SAW device with tantalum filled cavities having various depths was utilized. For each depth simulated, IL was decreased compared to a standard SAW device. Microcavities 2.5 mu m deep filled with tantalum showed the best performance (Delta IL = 17.93 dB). To validate simulated results, the authors fabricated a SAW device on ST 90 degrees-X quartz with microcavities etched into its delay path using deep reactive ion etching and filled with tantalum. Measurement of fabricated devices showed inclusion of tantalum filled microcavities increased power transfer compared to a device without cavities. (C) 2015 American Vacuum Society.

Richardson, Mandek↗

Electron-beam-evaporated thin films of hafnium dioxide for fabricating electronic devices

Thin films of hafnium dioxide (HfO 2 ) are widely used as the gate oxide in fabricating integrated circuits because of their high dielectric constants. In this paper, the authors report the growth of thin films of HfO 2 using e-beam evaporation, and the fabrication of complementary metal-oxide semiconductor (CMOS) integrated circuits using this HfO 2 thin film as the gate oxide. The authors analyzed the thin films using high-resolution transmission electron microscopy and electron diffraction, thereby demonstrating that the e-beam-evaporation-grown HfO 2 film has a polycrystalline structure and forms an excellent interface with silicon. Accordingly, we fabricated 31-stage CMOS ring oscillator to test the quality of the HfO 2 thin film as the gate oxide, and obtained excellent rail-to-rail oscillation waveforms from it, denoting that the HfO 2 thin film functioned very well as the gate oxide.

42 ENGINEERING↗