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At least 595 records · Page 33
All sourcesNASA NTRSDOE OSTI
DOE OSTI2025

Molecular Layer Deposited Aluminum‐Based Hybrid Resist for High‐Resolution Nanolithography and Direct Ultra‐High Aspect Ratio Pattern Transfer

Inorganic-containing hybrid photoresists are critical for next-generation extreme ultraviolet (EUV) lithography and angstrom-era semiconductor miniaturization. However, associated conventional solution processing struggles to achieve ultrathin, uniform films with high conformality and compositional control, limiting overall patterning performance. Here, this study reports the systematic lithographic patterning characterization of an Al-based hybrid resist synthesized via vapor-phase molecular layer deposition (MLD), using the trimethylaluminum (TMA) metal precursor and the hydroquinone (HQ) aromatic organic linker. The resist supports both sub-20 nm high-resolution nanolithography and virtually infinite silicon plasma etch selectivity. Lithographic performance studied using electron beam lithography (EBL) as a proxy for EUV shows that, under an optimized process adopting post-exposure bake, the resist achieves the best resolution of 15.4 nm linewidth under stringent 1:1 line-space high-density patterning—limited only by the minimum beam size of the EBL system. The resist also shows wide dose latitude and balanced performance in resolution, roughness, and sensitivity. The infinite silicon etch selectivity, stemming from spontaneous aluminum oxyfluoride passivation layer formation, enables fabrication of micrometer-tall, 40 nm-wide silicon nanofin structures using only a ≈30 nm-thick resist layer, without no hard mask. These results highlight the potential of MLD-based hybrid resists for developing next-generation resist materials for micro/nanoelectronics manufacturing.

36 MATERIALS SCIENCE↗
NASA NTRS2019

GOES-R Solar UltraViolet Imager Extended Coronal Imaging

GOES-16 and GOES-17 each hosts a Solar UltraViolet Imager (SUVI) that images the Sun in six extreme ultraviolet (EUV) wavelengths: 9.4 nm, 13.1nm, 17.1nm, 19.5nm, 28.4nm, and 30.4nm. The SUVI is nominally Sun-pointed and has a four-minute imaging sequence covering all the channels and meeting the dynamic range requirements. Based on the SUVI capabilities observed on-orbit, a campaign to image the extended solar corona was undertaken in 2018. This was performed by off-pointing the SUVI line-of-sight to the left and right of the Sun and producing a composite image by stitching together the off-pointed and the Sun-centered images. The imaging area in the composite is about three times the nominal image area in the East-West direction (about 5 RSun versus 1.8 RSun for nominal images). The campaign was conducted in February (4 hours), June (72 hours), and August-September of 2018 (5 weeks). Results from the campaign indicated the presence of solar corona to three solar radii, even in the quiet Sun part of the solar cycle. NOAA can operationalize this concept by tasking the SUVI on one of GOES-E and GOES-W. Such long-term operation will provide data that is needed to establish the much needed connectivity between the EUV and white light coronagraph data for the CME events.

Extended Coronal↗
NASA NTRS1975

Mass absorption coefficients of Parylene N at soft X-ray and vacuum-ultraviolet wavelengths

Parylene N was selected as a bandpass filter for the extreme-ultraviolet telescope, flown on the Apollo-Soyuz Test Project in July 1975. The telescope measures stellar and diffuse cosmic radiation in the wavelength region from 45 to 170 A. In connection with this application, a systematic study was conducted of the mass absorption coefficient of the Parylene N. The results of the study for the wavelength region from 44 to 2536 A are reported.

Stern, R.↗
DOE OSTI2024

Ultrafast electronic relaxation pathways of the molecular photoswitch quadricyclane

Abstract The light-induced ultrafast switching between molecular isomers norbornadiene and quadricyclane can reversibly store and release a substantial amount of chemical energy. Prior work observed signatures of ultrafast molecular dynamics in both isomers upon ultraviolet excitation but could not follow the electronic relaxation all the way back to the ground state experimentally. Here we study the electronic relaxation of quadricyclane after exciting in the ultraviolet (201 nanometres) using time-resolved gas-phase extreme ultraviolet photoelectron spectroscopy combined with non-adiabatic molecular dynamics simulations. We identify two competing pathways by which electronically excited quadricyclane molecules relax to the electronic ground state. The fast pathway (<100 femtoseconds) is distinguished by effective coupling to valence electronic states, while the slow pathway involves initial motions across Rydberg states and takes several hundred femtoseconds. Both pathways facilitate interconversion between the two isomers, albeit on different timescales, and we predict that the branching ratio of norbornadiene/quadricyclane products immediately after returning to the electronic ground state is approximately 3:2.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
NASA NTRS2022

Imaging the End-to-End Dynamics of the Global Solar Wind-Magnetosphere Interaction

Much of what we know about the solar wind’s interaction with the Earth’s magnetosphere has been gained from isolated in situ measurements by single or multiple spacecraft. Based on their observations, we know that reconnection, whether on the dayside magnetopause or deep within the Earth’s magnetotail, controls the flow of solar wind energy into and through the global system. We know that nightside activity provides the energized particles that power geomagnetic storms. But by their very nature these isolated in situ measurements cannot provide an instantaneous global view of the entire system or its cross-scale dynamics. As a result, we don’t know which mode of reconnection prevails on the dayside magnetopause or within the magnetotail as a function of solar wind and geomagnetic conditions. We don’t know which mode or modes of nightside activity supply the most energized particles to the ring current. Nor do we know the dominant loss mode for ring current decay: precipitation, magnetopause outflow, or charge exchange with neutrals. Nor do we know how processes deep within the magnetosphere provide feedback to those happening in the outer magnetosphere. The answers to these questions could have an impact far beyond magnetospheric physics, since magnetic reconnection, particle acceleration, and charge-exchange are fundamental plasma processes that operate at other planets and throughout the universe. Comprehensive end-to-end global imaging of the key micro, meso-, and macro-scale plasma structures that comprise the magnetosphere will provide the answers to these questions via observations with a spatial resolution that exceeds anything possible with in situ measurements. Each proposed interaction mechanism generates a diagnostic plasma structure or boundary signature. Global, end-to-end, imaging provides the pathway to understanding the system as a whole, its constituent parts, and its cross-scale processes on a continuous basis, as needed to quantify the flow of solar wind energy through the global magnetospheric system. The significance of each mechanism is the product of its amplitude and occurrence rate. This white paper describes how a comprehensively-instrumented single spacecraft in a high-latitude circular polar orbit can provide the essential observations needed to track and quantify the flow of solar wind energy through the magnetosphere, including the solar wind plasma and magnetic field input, the magnetopause location in soft X-rays, the auroral oval in far ultraviolet, the ring current in energetic neutrals, the plasmasphere in extreme ultraviolet, the exosphere in Lyman-, the microstructure of the nightside auroral oval in ground-based all sky cameras, and the magnetic perturbations of ionospheric current patterns seen by ground-based magnetometers.

D G Sibeck↗
NASA NTRS1993

Primary results from the Berkeley EUV airglow rocket spectrometer: O I and N2 FUV/EUV dayglow in the thermosphere and lower exosphere

The Berkeley extreme-ultraviolet airglow rocket spectrometer (BEARS) made spectroscopic measurements of far and extreme UV, atomic oxygen emissions from a Black Brandt XII (12.041 WT) sounding rocket launched from Wallops Island, Virginia, on September 30, 1988. BEARS' primary instrument, a near-normal Rowland mount spectrometer, measured several atomix oxygen and molecular nitrogen dayglow features at high spectral resolution (1.5 A): O I (989, 1027, 1304, and 1356 A); and N2 Lyman-Birge-Hopfield (4, 0) and (3, 0) bands at 1325 and 1354 A. The instrument collected over 800 s of data spanning altitudes of 150 - 963 km with look directions between 95 deg and 125 deg from zenith. We have analyzed the data using electrons and radiative transport models in a forward modeling approach. The model and data are generally in good agreement. However, there are some discrepancies, which are discussed in terms of remote sensing capabilities and improvements to the models.

Cotton, Daniel M.↗
NASA NTRS2001

Extreme Convection Conditions for the Plasmasphere

The IMAGE Extreme Ultraviolet (EUV) imager has now observed the plasmasphere under conditions of extreme erosion. Surprisingly, the plasmasphere is sometimes found to almost disappear. Global EUV images are used together with dynamic plasmasphere modeling to describe the convection electric field necessary to produce observed thermal plasma distributions under extreme conditions. These results will be compared with established measures of subauroral electric fields.

Gallagher, D. L.↗
NASA NTRS1995

Medium-resolution far-ultraviolet spectroscopy of PKS 2155-304

Using the Berkeley spectrometer of the Orbiting Retrievable Far and Extreme Ultraviolet Spectrometer (ORFEUS) we observed the 87-117 nm UV spectrum of the BL Lac object PKS 2155-304 with about 0.5 A resolution. In addition to the expected interstellar lines we detected higher quantum number counterparts of the intergalactic Lyman alpha lines discovered earlier with IUE and the Hubble Space Telescope (HST) in the direction of PKS 2155-304. The Lyman discontinuities indicate for three of the redshifted clouds a combined H I column density of 2-5 x 10(exp 16)/sq cm, while the column density for another cloud appears to be well below 5 x 10(exp 15)/sq cm. No siginificant O VI absorption in the galactic halo toward PKS 2155-304 could be detected from our data. Assuming that saturation effects are negligible for these weak features, we obtain for the O VI column density toward PKS 2155-304 a 3 sigma upper limit of 2.7 x 10(exp 14)/sq cm.

Appenzeller, I.↗
NASA NTRS1980

Galactic and extragalactic contributions to the far-ultraviolet background

Data from the 1350-1550 A bandpass channel of the 2.5-deg angular resolution extreme-ultraviolet telescope on the Apollo-Soyuz mission have been analyzed for stellar and airglow radiation contributions for the galactic latitude range above 30 deg. At intermediate latitudes, the resulting diffuse background is found to be correlated with the neutral hydrogen column density as determined by 21 cm radio data. This result, together with the observed anisotropy and mean intensity of the radiation field, is consistent with the hypothesis that scattering of galactic-plane starlight off dust grains having an albedo of 0.5 and a phase function coefficient of 0.5 is the primary source of the observed radiation field at the intermediate latitudes. The background intensity near the poles is, however, higher than expected from the H I column density and extinction measurements.

Paresce, F.↗
NASA NTRS1987

Observations made with the International Ultraviolet Explorer

Observations were made with the International Ultraviolet Explorer of two quite diverse astronomical objects. The first is an extremely ultraviolet excess star projected near the globular cluster M5. The second is a previously unrecognized but very bright starburst galaxy. Each of these objects is discussed in detail.

Margon, Bruce↗
NASA NTRS1986

Stellar observations with the Voyager EUV objective grating spectrograph

During the periods of interplanetary cruise the Voyager ultraviolet spectrometers are used to provide unique and otherwise unobtainable observations in the extreme ultraviolet (EUV, 500 to 1200) and the far ultraviolet (FUV, 912 to 1220 A). These observations include the spectra of hot stellar sources as well as emission from the interplanetary medium. Recent results of note include: (1)Extensive spectrophotometric coverage of a superoutburst of the dwarf nova VW Hydri, which showed a clear 1/2 day delay in the outburst at 1000 A relative to that observed in the optical and a curious dip in the FUV light curve near maximum light. The Voyager observations were part of a comprehensive and highly successful campaign involving EXOSAT, IUE and ground based observations of this dwarf nova; (2)A comprehensive study of Be star spectra and variability. These results show the critical importance of FUV observations in the study of the effects of stellar rotation in hot stars; (3)The detection of a strong O VI absorption feature in the spectrum of the PG 1159-like object H1504+65. This detection along with the optical identification of weak O IV lines was a key to the interpretation of this object; which is of extremely high (>150,000K) temperature and appears to be a unique example of a stellar atmosphere devoid of H and He; (4)An analysis of an extremely long duration spectrum of the EUV and FUV sky background, which establishes important new upper limits on both continuum and line emission. This result also provide the first detection of interplanetary Lyman gamma.

Holberg, J. B.↗
NASA NTRS1992

Galileo Ultraviolet Spectrometer experiment

The Galileo ultraviolet spectrometer experiment uses data obtained by the Ultraviolet Spectrometer (UVS) mounted on the pointed orbiter scan platform and from the Extreme Ultraviolet Spectrometer (EUVS) mounted on the spinning part of the orbiter with the field of view perpendicular to the spin axis. The UVS is a Ebert-Fastie design that covers the range 113-432 nm with a wavelength resolution of 0.7 nm below 190 and 1.3 nm at longer wavelengths. The UVS spatial resolution is 0.4 deg x 0.1 deg for illuminated disk observations and 1 deg x 0.1 deg for limb geometries. The EUVS is a Voyager design objective grating spectrometer, modified to cover the wavelength range from 54 to 128 nm with wavelength resolution 3.5 nm for extended sources and 1.5 nm for point sources and spatial resolution of 0.87 deg x 0.17 deg. The EUVS instrument will follow up on the many Voyager UVS discoveries, particularly the sulfur and oxygen ion emissions in the Io torus and molecular and atomic hydrogen auroral and airglow emissions from Jupiter. The UVS will obtain spectra of emission, absorption, and scattering features in the unexplored, by spacecraft, 170-432 nm wavelength region. The UVS and EUVS instruments will provide a powerful instrument complement to investigate volatile escape and surface composition of the Galilean satellites, the Io plasma torus, micro- and macro-properties of the Jupiter clouds, and the composition structure and evolution of the Jupiter upper atmosphere.

Hord, C. W.↗
NASA NTRS1993

Vacuum ultraviolet instrumentation for solar irradiance and thermospheric airglow

A NASA sounding rocket experiment was developed to study the solar extreme ultraviolet (EUV) spectral irradiance and its effect on the upper atmosphere. Both the solar flux and the terrestrial molecular nitrogen via the Lyman-Birge-Hopfield bands in the far ultraviolet (FUV) were measured remotely from a sounding rocket on October 27, 1992. The rocket experiment also includes EUV instruments from Boston University (Supriya Chakrabarti), but only the National Center for Atmospheric Research (NCAR)/University of Colorado (CU) four solar instruments and one airglow instrument are discussed here. The primary solar EUV instrument is a 1/4 meter Rowland circle EUV spectrograph which has flown on three rockets since 1988 measuring the solar spectral irradiance from 30 to 110 nm with 0.2 nm resolution. Another solar irradiance instrument is an array of six silicon XUV photodiodes, each having different metallic filters coated directly on the photodiodes. This photodiode system provides a spectral coverage from 0.1 to 80 nm with about 15 nm resolution. The other solar irradiance instrument is a silicon avalanche photodiode coupled with pulse height analyzer electronics. This avalanche photodiode package measures the XUV photon energy providing a solar spectrum from 50 to 12,400 eV (25 to 0.1 nm) with an energy resolution of about 50 eV. The fourth solar instrument is an XUV imager that images the sun at 17.5 nm with a spatial resolution of 20 arc-seconds. The airglow spectrograph measures the terrestrial FUV airglow emissions along the horizon from 125 to 160 nm with 0.2 nm spectral resolution. The photon-counting CODACON detectors are used for three of these instruments and consist of coded arrays of anodes behind microchannel plates. The one-dimensional and two-dimensional CODACON detectors were developed at CU by Dr. George Lawrence. The pre-flight and post-flight photometric calibrations were performed at our calibration laboratory and at the Synchrotron Ultraviolet Radiation Facility (SURF) at the National Institute of Standards and Technology (NIST) in Gaithersburg, Maryland.

Woods, Thomas N.↗
DOE OSTI2022

A localized view on molecular dissociation via electron-ion partial covariance

Inner-shell photoelectron spectroscopy provides an element-specific probe of molecular structure, as core-electron binding energies are sensitive to the chemical environment. Short-wavelength femtosecond light sources, such as Free-Electron Lasers (FELs), even enable time-resolved site-specific investigations of molecular photochemistry. Here, we study the ultraviolet photodissociation of the prototypical chiral molecule 1-iodo-2-methylbutane, probed by extreme-ultraviolet (XUV) pulses from the Free-electron LASer in Hamburg (FLASH) through the ultrafast evolution of the iodine 4d binding energy. Methodologically, we employ electron-ion partial covariance imaging as a technique to isolate otherwise elusive features in a two-dimensional photoelectron spectrum arising from different photofragmentation pathways. The experimental and theoretical results for the time-resolved electron spectra of the 4d 3/2 and 4d 5/2 atomic and molecular levels that are disentangled by this method provide a key step towards studying structural and chemical changes from a specific spectator site.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2020

Demonstration of a ring-FEL as an EUV lithography tool

In this work, we present the required structure and function of a ring-FEL as a radiation source for extreme ultraviolet radiation lithography (EUVL). A 100 m-long straight section that conducts an extremely low emittance beam from a fourth-generation storage ring can increase the average power at 13.5 nm wavelength to up to 1 kW without degrading the beam in the rest of the ring. Here, simulation results for a ring-FEL as a EUVL source are described.

07 ISOTOPE AND RADIATION SOURCES↗
NASA NTRS1984

IUE observations of DQ Herculis and its nebula, and the nature of the cold nova shells

The nebula ejected in the 1934 outburst of the classical nova DQ Her is remarkable for its unprecedentedly low temperature of Te 500 K as measured by Williams et al. (1978). In this paper, IUE observations are combined with Steward optical spectra. It is confirmed that the gas is quite cold. It is further shown that the gas is ionized by the radiation field of the central object. X-ray, ultraviolet, optical and infrared observations of the underlying binary are combined with the extreme-ultraviolet continuum deduced from the level of ionization of the nebula to obtain a composite energy distribution for the central object. This energy distribution bears no resemblance to that predicted by theoretical models of accretion disks. Photoionization models of the nebula using the deduced continuum, as well as theoretical accretion disk continua, are presented to show that the low electron temperature is the result of the very high metal abundances which characterize nova shells. Infrared fine-structure lines are efficient coolants, and low temperatures are achieved for a wide variety of radiation fields. The implications of these results for nebulae surrounding other old novae are discussed.

Ferland, G. J.↗
NASA NTRS1984

Voyager EUV and FUV Observations

The Voyager 1 and 2 ultraviolet spectrometers are sensitive over the wavelength range 500 to 1700 A. In the extreme ultraviolet (EUV), at wavelengths shortward of the Lyman limit (912 A), Voyager observations detected emission from three out of a sample of 11 nearly hot DA white dwarfs. These observations imply very low HI column densities in the directions of the three stars detected. In the far ultraviolet (FUV), at wavelengths between 912 and 1200 A, Voyager observations of O and B stars can be used to study interstellar reddening at the shortest wavelengths and to provide useful estimates of interstellar H2 column densities.

Holberg, J. B.↗
NASA NTRS1997

Wave propagation in the chromosphere and transition region

The results from a joint observing program involving the solar ultraviolet measurement of emitted radiation (SUMER), the coronal diagnostic spectrometer (CDS) and the extreme-ultraviolet imaging telescope (EIT) onboard the Solar and Heliospheric Observatory (SOHO) are presented. These operations were coordinated with ground-based observations at the vacuum tower telescope at Izana (Tenerife). The purpose was to characterize the wave propagation properties in the solar atmosphere, from the photosphere through the chromosphere into the transition region.

Steffens, S.↗