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At least 595 records · Page 33
All sourcesNASA NTRSDOE OSTI
DOE OSTI2016

SU-F-J-125: Effects of Couch Position Variability On Dosimetric Accuracy with An MRI-Guided Co-60 Radiation Therapy Machine

Purpose: Magnetic resonance imaging (MRI) guidance in radiation therapy brings real-time imaging and adaptive planning into the treatment vault where it can account for interfraction and intrafraction movement of soft tissue. The only commercially-available MRI-guided radiation therapy device is a three-head 60Co and MRI system with an integrated treatment planning system (TPS). An up to 20% attenuation of the beam by the couch is well modeled in the TPS. However, variations in the patient’s day-to-day position introduce discrepancies in the actual couch position relative its location as modeled in the treatment plan. For this reason, our institution avoids plans with beams that pass through or near the couch edges. This study looks at plans without restriction on beam angles and investigates the effects of couch shift by simulating shifts of the couch relative to the patient, in order to determine whether couch edge avoidance restrictions can be lifted. Methods: A total of 27 plans from 23 patients were investigated. Couch shifts of 1 and 2 cm were introduced in combinations of lateral and vertical direction to simulate variations in patient positioning on the couch giving 16 shifted plans per reference plan. The shift values of 1 and 2 cm were based on shifts recorded in 320 treatment fractions. Results: Measured couch attenuation versus TPS modeled agreed within 2.1%. Planning Target Volume (PTV) D95 changed less than 1% for 1 and 2 cm couch shifts in only the x-direction and less than 3% for all directions. Conclusion: The dosimetry of all plans with shifts up to ±2 cm was within reasonable clinical tolerances. Robustness of a plan to couch shifts can be tested in the TPS. Inclusion of beams traversing the couch edges should be considered if an improvement in plan quality or delivery time can be achieved.

60 APPLIED LIFE SCIENCES↗
DOE OSTI2016

SU-F-T-303: Quantification of MLC Positioning Accuracy in VMAT Delivery of Head and Neck Cancer Treatment

Purpose: Knowing MLC leaf positioning error over the course of treatment would be valuable for treatment planning, QA design, and patient safety. The objective of the current study was to quantify the MLC positioning accuracy for VMAT delivery of head and neck treatment plans. Methods: A total of 837 MLC log files were collected from 14 head and neck cancer patients undergoing full arc VMAT treatment on one Varian Trilogy machine. The actual and planned leaf gaps were extracted from the retrieved MLC log files. For a given patient, the leaf gap error percentage (LGEP), defined as the ratio of the actual leaf gap over the planned, was evaluated for each leaf pair at all the gantry angles recorded over the course of the treatment. Statistics describing the distribution of the largest LGEP (LLGEP) of the 60 leaf pairs including the maximum, minimum, mean, Kurtosis, and skewness were evaluated. Results: For the 14 studied patients, their PTV located at tonsil, base of tongue, larynx, supraglottis, nasal cavity, and thyroid gland with volume ranging from 72.0 cm{sup 3} to 602.0 cm{sup 3}. The identified LLGEP differed between patients. It ranged from 183.9% to 457.7% with a mean of 368.6%. For the majority of the patients, the LLGEP distributions peaked at non-zero positions and showed no obvious dependence on gantry rotations. Kurtosis and skewness, with minimum/maximum of 66.6/217.9 and 6.5/12.6, respectively, suggested relatively more peaked while right-skewed leaf error distribution pattern. Conclusion: The results indicate pattern of MLC leaf gap error differs between patients of lesion located at similar anatomic site. Understanding the systemic mechanisms underlying these observed error patterns necessitates examining more patient-specific plan parameters in a large patient cohort setting.

60 APPLIED LIFE SCIENCES↗
DOE OSTI2016

SU-G-IeP2-10: Lens Dose Reduction by Patient Position Modification During Neck CT Exams

Purpose: Irradiation of the lens during a neck CT may increase a patient’s risk of developing cataracts later in life. Radiologists and technologists at the National Institutes of Health Clinical Center (NIHCC) have developed new CT imaging protocols that include a reduction in scan range and modifying neck positioning using a head tilt. This study will evaluate the efficacy of this protocol in the reduction of lens dose. Methods: We retrieved CT images of five male patients who had two sets of CT images: before and after the implementation of the new protocol. The lens doses before the new protocol were calculated using an in-house CT dose calculator, National Cancer Institute dosimetry system for CT (NCICT), where computational human phantoms with no head tilt are included. We also calculated the lens dose for the patient CT conducted after the new protocol by using an adult male computational phantom with the neck position deformed to match the angle of the head tilt. We also calculated the doses to other radiosensitive organs including the globes of the eye, brain, pituitary gland and salivary glands before and after head tilt. Results: Our dose calculations demonstrated that modifying neck position reduced dose to the lens by 89% on average (range: 86–96%). Globe, brain, pituitary and salivary gland doses also decreased by an average of 65% (51–95%), 38% (−8–66%), 34% (−43–84%) and 14% (13–14%), respectively. The new protocol resulted in a nearly ten-fold decrease in lens dose. Conclusion: The use of a head tilt and scan range reduction is an easy and effective method to reduce radiation exposure to the lens and other radiosensitive organs, while still allowing for the inclusion of critical neck structures in the CT image. We are expanding our study to a total of 10 males and 10 females.

60 APPLIED LIFE SCIENCES↗
DOE OSTI2016

Poster - 35: Monitoring patient positioning during deep inspiration breath hold with a distance measuring laser

Purpose: The accuracy of treatment delivery for left breast/chest wall patients using deep inspiration breath hold (DIBH) is being monitored using a distance measuring laser (DML) Methods: A commercially available DML (DLS-C15, Dimetix) was mounted behind a Varian TrilogyTM linac. Relative to the machine isocenter, the laser from the beam was offset by 8 cm to the left and by 1 cm in the superior direction. This position was selected because this point is situated on the sternum for the majority of the left breast/chest-wall patients treated at our institution. The Varian Real-Time Positioning Management™ (RPM) guided DIBH treatments at our institution is delivered by placing the system’s tracking block on the patient’s abdomen. The treatment beam is enabled only when the block is in between a predefined abdomen motion range as determined during the CT simulation process. A LabVIEW program was developed to record both beam status (i.e. on/off) and distance measurements. In this study the DML was only used to monitor the position of a single point on the chest and no clinical decisions/adjustments were made based on these measurements. Results and Conclusions: Thus far, 34 fractions have been recorded for 4 patients. As such, the performance of our DIBH treatment technique cannot be fairly evaluated at this point. However, deviations between expected and measured distances have been observed and if these are found to be reproducible, then modifications in our treatment procedures and policies will have to take place.

60 APPLIED LIFE SCIENCES↗
DOE OSTI2019

Structure and Mechanism of LcpA, a Phosphotransferase That Mediates Glycosylation of a Gram-Positive Bacterial Cell Wall-Anchored Protein

ABSTRACT The widely conserved LytR-CpsA-Psr (LCP) family of enzymes in Gram-positive bacteria is known to attach glycopolymers, including wall teichoic acid, to the cell envelope. However, it is undetermined if these enzymes are capable of catalyzing glycan attachment to surface proteins. In the actinobacterium Actinomyces oris , an LCP homolog here named LcpA is genetically linked to GspA, a glycoprotein that is covalently attached to the bacterial peptidoglycan by the housekeeping sortase SrtA. Here we show by X-ray crystallography that LcpA adopts an α-β-α structural fold, akin to the conserved LCP domain, which harbors characteristic catalytic arginine residues. Consistently, alanine substitution for these residues, R149 and R266, abrogates GspA glycosylation, leading to accumulation of an intermediate form termed GspA LMM , which is also observed in the lcpA mutant. Unlike other LCP proteins characterized to date, LcpA contains a stabilizing disulfide bond, mutations of which severely affect LcpA stability. In line with the established role of disulfide bond formation in oxidative protein folding in A. oris , deletion of vkor , coding for the thiol-disulfide oxidoreductase VKOR, also significantly reduces LcpA stability. Biochemical studies demonstrated that the recombinant LcpA enzyme possesses pyrophosphatase activity, enabling hydrolysis of diphosphate bonds. Furthermore, this recombinant enzyme, which weakly interacts with GspA in solution, catalyzes phosphotransfer to GspA LMM . Altogether, the findings support that A. oris LcpA is an archetypal LCP enzyme that glycosylates a cell wall-anchored protein, a process that may be conserved in Actinobacteria , given the conservation of LcpA and GspA in these high-GC-content organisms. IMPORTANCE In Gram-positive bacteria, the conserved LCP family enzymes studied to date are known to attach glycopolymers, including wall teichoic acid, to the cell envelope. It is unknown if these enzymes catalyze glycosylation of surface proteins. We show here in the actinobacterium Actinomyces oris by X-ray crystallography and biochemical analyses that A. oris LcpA is an LCP homolog, possessing pyrophosphatase and phosphotransferase activities known to belong to LCP enzymes that require conserved catalytic Arg residues, while harboring a unique disulfide bond critical for protein stability. Importantly, LcpA mediates glycosylation of the surface protein GspA via phosphotransferase activity. Our studies provide the first experimental evidence of an archetypal LCP enzyme that promotes glycosylation of a cell wall-anchored protein in Gram-positive bacteria.

59 BASIC BIOLOGICAL SCIENCES↗
DOE OSTI2013

Identification and codon reading properties of 5-cyanomethyl uridine, a new modified nucleoside found in the anticodon wobble position of mutant haloarchaeal isoleucine tRNAs

Most archaea and bacteria use a modified C in the anticodon wobble position of isoleucine tRNA to base pair with A but not with G of the mRNA. This allows the tRNA to read the isoleucine codon AUA without also reading the methionine codon AUG. To understand why a modified C, and not U or modified U, is used to base pair with A, we mutated the C34 in the anticodon of Haloarcula marismortui isoleucine tRNA (tRNA2 Ile) to U, expressed the mutant tRNA in Haloferax volcanii, and purified and analyzed the tRNA. Ribosome binding experiments show that although the wild-type tRNA2 Ile binds exclusively to the isoleucine codon AUA, the mutant tRNA binds not only to AUA but also to AUU, another isoleucine codon, and to AUG, a methionine codon. The G34 to U mutant in the anticodon of another H. marismortui isoleucine tRNA species showed similar codon binding properties. Binding of the mutant tRNA to AUG could lead to misreading of the AUG codon and insertion of isoleucine in place of methionine. This result would explain why most archaea and bacteria do not normally use U or a modified U in the anticodon wobble position of isoleucine tRNA for reading the codon AUA. Biochemical and mass spectrometric analyses of the mutant tRNAs have led to the discovery of a new modified nucleoside, 5-cyanomethyl U in the anticodon wobble position of the mutant tRNAs. 5-Cyanomethyl U is present in total tRNAs from euryarchaea but not in crenarchaea, eubacteria, or eukaryotes.

5-cyanomethyl uridine↗
DOE OSTI2018

Final CRADA Report for Enhanced and Miniaturized Wireless Valve Position Indicator Prototype

Most operating nuclear power plants (NPPs) in the United States have received approval to extend their operating licenses to 60 years. Now the nuclear industry is preparing to extend operating licenses to 80 years. While NPPs are preparing for extensions (60 years and beyond), the nuclear industry is facing a unique economic sustainability challenge in the current energy market. According to the Nuclear Energy Institute (NEI), generating costs of U.S. reactors have risen by 28% over the last 12 years, which is impacting the competitiveness of nuclear power in a market being increasingly penetrated by natural gas and renewable energy. This is partly because of the fact that the present nuclear work practice is dependent on a large technical staff which results in high operation and maintenance (O&M) costs, accounting for approximately 66% of the total operating cost. To address these concerns and abide by the NEI’s “Delivering the Nuclear Promise Initiative,” the U.S. utilities are embracing digitalization of their work practice to lower the O&M costs and increase productivity and efficiency while maintaining a safe and reliable operation. To address these above-mentioned concerns, Idaho National Laboratory (INL) researchers (proposal team) have developed a wireless valve position indication (VPI) sensor system that can be retrofitted on three main manual valve types (extendible to other manual valve types) to replace manual valve position verification with digital verification and enable online monitoring of manual valves. The developed technology 1) is evaluated for electromagnetic interference, 2) has a low power consuming and miniaturized electronic board, 3) is mounted on adjustable and reconfigurable sensor mounting unit that can fit on an actual flow-loop (at Idaho State University-ISU) to enable online monitoring of manual valve types without any valve body modification, and 4) ensures robust, secure, and reliable real-time communication of manual valve position.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗
NASA NTRS1984

Determination of the gram-positive bacterial content of soils and sediments by analysis of teichoic acid components

Many gram-positive bacteria form substituted polymers of glycerol and ribitol phosphate esters known as teichoic acids. Utilizing the relative specificity of cold concentrated hydrofluoric acid in the hydrolysis of polyphosphate esters it proved possible to quantitatively assay the teichoic acid-derived glycerol and ribitol from gram-positive bacteria added to various soils and sediments. The lipids are first removed from the soils or sediments with a one phase chloroform-methanol extraction and the lipid extracted residue is hydrolyzed with cold concentrated hydrofluoric acid. To achieve maximum recovery of the teichoic acid ribitol, a second acid hydrolysis of the aqueous extract is required. The glycerol and ribitol are then acetylated after neutralization and analyzed by capillary gas-liquid chromatography. This technique together with measures of the total phospholipid, the phospholipid fatty acid, the muramic acid and the hydroxy fatty acids of the lipopolysaccharide lipid A of the gram-negative bacteria makes it possible to describe the community structure environmental samples. The proportion of gram-positive bacteria measured as the teichoic acid glycerol and ribitol is higher in soils than in sediments and increases with depth in both.

Ribitol/analogs & derivatives↗
NASA NTRS2009

Estimating Accurate Relative Spacecraft Angular Position from DSN VLBI Phases Using X-Band Telemetry or DOR Tones

At present spacecraft angular position with Deep Space Network (DSN) is determined using group delay estimates from very long baseline interferometer (VLBI) phase measurements employing differential one way ranging (DOR) tones. As an alternative to this approach, we propose estimating position of a spacecraft to half a fringe cycle accuracy using time variations between measured and calculated phases as the Earth rotates using DSN VLBI baseline(s). Combining fringe location of the target with the phase allows high accuracy for spacecraft angular position estimate. This can be achieved using telemetry signals of at least 4-8 MSamples/sec data rate or DOR tones.

x-band telemetry↗
NASA NTRS2011

Modeling Kepler Transit Light Curves as False Positives: Rejection of Blend Scenarios for Kepler-9, and Validation of Kepler-9 d, a Super-Earth-Size Planet in a Multiple System

Light curves from the Kepler Mission contain valuable information on the nature of the phenomena producing the transit-like signals. To assist in exploring the possibility that they are due to an astrophysical false positive we describe a procedure (BLENDER) to model the photometry in terms of a blend rather than a planet orbiting a star. A blend may consist of a background or foreground eclipsing binary (or star-planet pair) whose eclipses are attenuated by the light of the candidate and possibly other stars within the photometric aperture. We apply BLENDER to the case of Kepler-9 (KIC 3323887), a target harboring two previously confirmed Saturn-size planets (Kepler-9 b and Kepler-9 c) showing transit timing variations, and an additional shallower signal with a 1.59 day period suggesting the presence of a super-Earth-size planet. Using BLENDER together with constraints from other follow-up observations we are able to rule out all blends for the two deeper signals and provide independent validation of their planetary nature. For the shallower signal, we rule out a large fraction of the false positives that might mimic the transits. The false alarm rate for remaining blends depends in part (and inversely) on the unknown frequency of small-size planets. Based on several realistic estimates of this frequency, we conclude with very high confidence that this small signal is due to a super-Earth-size planet (Kepler-9 d) in a multiple system, rather than a false positive. The radius is determined to be 1.64(exp)(sub-14),R, and current spectroscopic observations are as yet insufficient to establish its mass.

PLANETARY SYSTEMS↗
NASA NTRS2014

A Linear Programming Approach to Routing Control in Networks of Constrained Nonlinear Positive Systems with Concave Flow Rates

We consider control design for positive compartmental systems in which each compartment's outflow rate is described by a concave function of the amount of material in the compartment.We address the problem of determining the routing of material between compartments to satisfy time-varying state constraints while ensuring that material reaches its intended destination over a finite time horizon. We give sufficient conditions for the existence of a time-varying state-dependent routing strategy which ensures that the closed-loop system satisfies basic network properties of positivity, conservation and interconnection while ensuring that capacity constraints are satisfied, when possible, or adjusted if a solution cannot be found. These conditions are formulated as a linear programming problem. Instances of this linear programming problem can be solved iteratively to generate a solution to the finite horizon routing problem. Results are given for the application of this control design method to an example problem. Key words: linear programming; control of networks; positive systems; controller constraints and structure.

Positive Systems↗
NASA NTRS2017

Kepler Planet Reliability Metrics: Astrophysical Positional Probabilities for Data Release 25

This document is very similar to KSCI-19092-003, Planet Reliability Metrics: Astrophysical Positional Probabilities, which describes the previous release of the astrophysical positional probabilities for Data Release 24. The important changes for Data Release 25 are:1. The computation of the astrophysical positional probabilities uses the Data Release 25 processed pixel data for all Kepler Objects of Interest.2. Computed probabilities now have associated uncertainties, whose computation is described in x4.1.3.3. The scene modeling described in x4.1.2 uses background stars detected via ground-based high-resolution imaging, described in x5.1, that are not in the Kepler Input Catalog or UKIRT catalog. These newly detected stars are presented in Appendix B. Otherwise the text describing the algorithms and examples is largely unchanged from KSCI-19092-003.

APP↗
NASA NTRSDate not supplied

Utilizing Experimental-based Line Positions for Semi-empirical IR Line Lists

Molecular IR line lists computed from semi-empirically refined ab initio potential energy surface and high quality ab initio dipole moment surface may have line position accuracy typically within 0.01 - 0.05 cm−1. For high resolution spectroscopy databases, it is necessary to integrate the computed theoretical IR intensities with the line positions accurately determined from experiments and (or) reliably derived from Effective Hamiltonian models. However, it is not a trivial task, and the choices in reality are heavily contingent upon the coverage, consistency, and accuracy of the data available for a specific molecule or isotopologue. We will present several approaches applied to recent Ames IR line lists of CO 2 1, N 2 O 2 , and OCS to demonstrate how challenging such integration may become, and what we have learned From these projects. Discussions will focus on the relation between each different scenario and the corresponding choice or solution, including their advantages and limits, how the semi-empirical IR line lists can help, and what else may be needed for future improvements. We will emphasize that the “Theory+Experiment” synergy may still play significant role in the determination of the best line positions.

Effective Hamiltonian models↗
DOE OSTI2012

Beam Position and Phase Monitors Characterized and Installed in the LANSCE CCL

The Los Alamos Neutron Science Center - Risk Mitigation Project is in the process of replacing older Coupled-Cavity-Linac (CCL) Beam-Position Monitors (BPMs) with newer Beam Position and Phase Monitors (BPPMs) and their associated electronics and cable plants. In many locations, these older BPMs include a separate Delta-T loop for measuring the beam's central phase and energy. Thirty-one BPPMs have been installed and many have monitored the charged particle beam. The installation of these newer BPPMs is the first step to installing complete BPPM measurement systems. Prior to the installation, a characterization of each BPPM took place. The characterization procedure includes a mechanical inspection, a vacuum testing, and associated electrical tests. The BPPM electrical tests for all four electrodes include contact resistance measurements, Time Domain Reflectometer (TDR) measurements, relative 201.25-MHz phase measurements, and finally a set of position-sensitive mapping measurements were performed which included associated fitting routines. This paper will show these data for a typical characterized BPPM.

43 PARTICLE ACCELERATORS↗
DOE OSTI2012

A wire scanner system for characterizing the BNL energy recovery LINAC beam position monitor system

A stepper motor controlled wire scanner system has recently been modified to support testing of the Brookhaven National Laboratory (BNL) Collider-Accelerator department's Energy Recovery Linac (ERL) beam position monitor (BPM) system. The ERL BPM consists of four 9.33 mm diameter buttons mounted at 90 degree spacing in a cube with 1.875 inch inside diameter. The buttons were designed by BNL and fabricated by Times Microwave Systems. Libera brilliance single pass BPM electronic modules with 700 MHz bandpass filter, manufactured by Instrumentation Technologies, will be used to measure the transverse beam positions at 14 locations around the ERL. The wire scanner assembly provides the ability to measure the BPM button response to a pulsed wire, and evaluate and calibrate the Libera position measurement electronics. A description of the wire scanner system and test result data will be presented.

43 PARTICLE ACCELERATORS↗
DOE OSTI2012

Development of Electronics for the ATF2 Interaction Point Region Beam Position Monitor

Nanometer resolution beam position monitors have been developed to measure and control beam position stability at the interaction point region of ATF2. The position of the beam has to be measured to within a few nanometers at the interaction point. In order to achieve this performance, electronics for the low-Q IP-BPM was developed. Every component of the electronics have been simulated and checked on the bench and using the ATF2 beam. We will explain each component and define their working range. Then, we will show the performance of the electronics measured with beam signal. ATF2 is a final focus test beam line for ILC in the framework of the ATF international collaboration. The new beam line was constructed to extend the extraction line at ATF, KEK, Japan. The first goal of ATF2 is the acheiving of a 37 nm vertical beam size at focal point (IP). The second goal is to stabilize the beam at the focal point at a few nanometer level for a long period in order to ensure the high luminosity. To achieve these goals a high resolution IP-BPM is essential. In addition for feedback applications a low-Q system is desirable.

43 PARTICLE ACCELERATORS↗
DOE OSTI2018

Design and Performance Testing of a Linear Array of Position-Sensitive Virtual Frisch-Grid CdZnTe Detectors for Uranium Enrichment Measurements

Abstract— Arrays of position-sensitive virtual Frisch-grid CdZnTe (CZT) detectors with enhanced energy resolution have been proposed for spectroscopy and imaging of gamma-ray sources in different applications. The flexibility of the array design, which can employ CZT crystals with thicknesses up to several centimeters in the direction of electron drift, allows for integration into different kinds of field-portable instruments. These can include small hand-held devices, compact gamma cameras and large field-of-view imaging systems. In this work, we present results for a small linear array of such detectors optimized for the low-energy region, 50-400 keV gamma-rays, which is principally intended for incorporation into hand-held instruments. There are many potential application areas for such instruments, including uranium enrichment measurements, storage monitoring, dosimetry and other safeguards-related tasks that can benefit from compactness and isotope-identification capability. The array described here provides a relatively large area with a minimum number of readout channels, which potentially allows the developers to avoid using an ASIC-based electronic readout by substituting it with hybrid preamplifiers followed by digitizers. The array prototype consists of six (5x5.7x25 mm3) CZT detectors positioned in a line facing the source to achieve a maximum exposure area (~10 cm2). Each detector is furnished with 5 mm-wide charge-sensing pads placed near the anode. The pad signals are converted into X-Y coordinates for each interaction event, which are combined with the cathode signals (for determining the Z coordinates) to give 3D positional information for all interaction points. This information is used to correct the response non-uniformity caused by material inhomogeneity, which therefore allows the usage of standard-grade (unselected) CZT crystals, while achieving high-resolution spectroscopic performance for the instrument. In this presentation we describe the design of the array, the results from detailed laboratory tests, and preliminary results from measurements taken during a field test.

36 MATERIALS SCIENCE↗
DOE OSTI2023

Vapor‐Phase Infiltrated Organic–Inorganic Positive‐Tone Hybrid Photoresist for Extreme UV Lithography

Abstract Continuing extreme downscaling of semiconductor devices, essential for high performance and energy efficiency of future microelectronics, hinges on extreme ultraviolet lithography (EUVL) and addressing associated challenges. One of such challenges is a need for improved EUV photoresists featuring simultaneously high sensitivity, resolution, and etch selectivity. Here, a new, positive‐tone, organic–inorganic hybrid EUV photoresist is demonstrated that delivers a high‐resolution EUVL and electron‐beam lithography (EBL) patterning capability combined with high sensitivity and etch resistance. The new resist, poly(methyl methacrylate) infiltrated with indium oxide (PMMA‐InO x ), is synthesized via vapor‐phase infiltration (VPI), a material hybridization technique derived from atomic layer deposition. The weak binding of the gaseous indium precursor, trimethylindium, to the carbonyl group in PMMA allows the synthesis of hybrids with inorganic content distributed uniformly in the resist, enabling high EUVL and EBL sensitivities (18 mJ cm −2 and 300 µC cm −2 , respectively) and high‐resolution positive‐tone EUVL patterning (e.g., 40 nm half‐pitch line‐space and 50 nm diameter contact hole patterns) with high Si etch selectivity (>30–40). The low exposure doses required to pattern the PMMA‐InO x hybrid resist, high etch resistance, and processing strategies, which are developed, can pave the way for using infiltration‐synthesized hybrid thin films as reliable positive‐tone EUV photoresists for future semiconductor patterning.

36 MATERIALS SCIENCE↗