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At least 577 records · Page 32

Pioneer 10 ultraviolet photometer observations at Jupiter encounter

A two-channel extreme ultraviolet photometer on Pioneer 10 was used to investigate hydrogen and helium emissions from the atmosphere of Jupiter and emissions associated with the Galilean satellites. The hydrogen Lyman alpha signal observed from Jupiter corresponded to 400 R in brightness. By using the results of Wallace and Hunten (1973), the eddy diffusion coefficient is found to be K = 3 x 10 to the (8 plus or minus 1) power. The He I 584-A emission rate was found to be 5.1 R. The radiative transfer problem for the resonantly scattered He I emissions was investigated in the coherent approximation. With these results, the observed brightness, and the derived eddy diffusion coefficient the He/H2 ratio in the mixing region of the atmosphere was found to be equal to 0.18 minus 0.12 or plus 0.46. Emissions attributed to H I Lyman alpha were found at the orbital radius of Io and appear to be due to resonance scattering by a toroidal cloud of H in orbit around Jupiter.

Carlson, R. W.↗

Ultraviolet Observations of Phoebe from the Cassini UVIS

Observations of Saturn's distant moon Phoebe were made at far-ultraviolet (FUV) (1100-1900 A) and extreme-ultraviolet (EUV) (600-1100 A) wavelengths by the Cassini Ultraviolet Imaging Spectrograph (UVIS) during the Cassini spacecraft flyby on June 11, 2004. These are the first UV spectra of Phoebe and the first detection of water ice on a Solar System surface using FUV wavelengths. The characteristics of water ice in the FUV are presented, and Hapke models are used to interpret the spectra in terms of composition and grain size; the use of both areal and intimate mixing models is explored. Non-ice species used in these models include carbon, ice tholin, Triton tholin, poly-HCN and kerogen. Satisfactory disk-integrated fits are obtained for intimate mixtures of approx.10% H2O plus a non-ice species. Spatially resolved regions of higher (approx.20%) and lower (approx.5%) H2O ice concentrations are also detected. Phoebe does not display any evidence of volatile activity. Upper limits on atomic oxygen and carbon are 5 x 10(exp 11) and 2 x 10(exp 12) atoms/sq. cm, respectively, for solar photon scattering. The UVIS detection of water ice on Phoebe, and the ice amounts detected, are consistent with IR measurements and contribute to the evidence for a Phoebe origin in the outer Solar System rather than in the main asteroid belt.

UV spectroscopy↗

A Chapman-Layers Ionspheric Model for Mars

A numerical model (CLIMM) is developed that adopts functions of two Chapman layers to compute Mars ionospheric electron densities at given local solar zenith angle and height. Electron density profiles derived from Mars Global Survey (MGS)-to-Earth radio occultation measurements collected during 1998 through 2005 are used to fit the model. The present model does not include variations with solar extreme ultraviolet (EUV) radiation cycles and seasons, and may have increased errors at lower latitudes. A more sophisticated model taking into account these variations is being developed and will be available in the future.

solar extreme ultraviolet (EUV)↗

Nondetection of Helium in the Upper Atmospheres of Three Sub-Neptune Exoplanets

We present a search for helium in the upper atmospheres of three sub-Neptune-sized planets to investigate the origins of these ubiquitous objects. The detection of helium for a low-density planet would be strong evidence for the presence of a primary atmosphere accreted from the protoplanetary nebula because large amounts of helium are not expected in the secondary atmospheres of rocky planets. We used Keck+NIRSPEC to obtain high-resolution transit spectroscopy of the planets GJ 1214b, GJ 9827d, and HD 97658b around the 10833 Å He triplet feature. We did not detect helium absorption for any of the planets despite achieving a high level of sensitivity. We used the nondetections to set limits on the planets’ thermosphere temperatures and atmospheric loss rates by comparing grids of 1D models to the data. We also performed coupled interior structure and atmospheric loss calculations, which suggest that the bulk atmospheres (winds) of the planets would be at most modestly enhanced (depleted) in helium relative to their primordial composition. Our lack of detections of the helium triplet for GJ 1214b and GJ 9827d is highly inconsistent with the predictions of models for the present-day mass loss on these planets. Higher signal-to-noise data would be needed to detect the helium feature predicted for HD 97658b. We identify uncertainties in the extreme-ultraviolet fluxes of the host stars and the lack of detailed mass-loss models specifically for cool and metal-enhanced atmospheres as the main limitations to the interpretation of our results. Ultimately, our results suggest that the upper atmospheres of sub-Neptune planets are fundamentally different from those of gas giant planets.

79 ASTRONOMY AND ASTROPHYSICS↗

Implications of Abiotic Oxygen Buildup for Earth-like Complex Life

One of the chief paradoxes of molecular oxygen (O{sub 2}) is that it is an essential requirement for multicellular eukaryotes on Earth while simultaneously posing a threat to their survival via the formation of reactive oxygen species. In this paper, the constraints imposed by O{sub 2} on Earth-like complex life are invoked to explore whether worlds with abiotic O{sub 2} inventories can harbor such organisms. By taking the major O{sub 2} sources and sinks of Earth-like planets into account using a simple model, it is suggested that worlds that receive time-averaged X-ray and extreme ultraviolet fluxes that are ≳10 times higher than Earth might not be capable of hosting complex lifeforms because the photolysis of molecules such as water may lead to significant O{sub 2} buildup. Methods for testing this hypothesis by searching for anticorrelations between biosignatures and indicators of abiotic O{sub 2} atmospheres are described. In the event, however, that life successfully adapts to high-oxygen environments, these worlds could permit the evolution of large and complex organisms.

79 ASTRONOMY AND ASTROPHYSICS↗

Comparison of the spatial statistics of random and defined-sequence photoresist films

The resolution-line edge roughness-sensitivity tradeoff has motivated the exploration of potential improvements using defined sequence polymers and polymer-bound photoacid generators and quenchers. We characterize the internal structures of positive tone photoresist polymer films formed from defined sequence polymers and compare them with random copolymers of the same composition. We model their imaging to connect initially to developable film structures. We use a polymer packing algorithm to simulate films of diverse compositions and locations of photoacid generators and quenchers, using the composition of an ESCAP photoresist. We use a simple extreme ultraviolet exposure-deprotection algorithm to model developable image formation within them. In all cases, the spatial distribution of chemical moieties in the film for defined sequence polymers is nearly indistinguishable from random copolymers. We evaluate several exposure-deprotection scenarios and find that a defined sequence copolymer has a distinctive developable image under certain circumstances. The use of defined sequence polymers within a photoresist layer does not automatically result in improved imaging; however, they do have some characteristics different from random polymers of the same composition. Further study of these characteristics may provide a route to improved control over the nanoscale imaging process.

36 MATERIALS SCIENCE↗

Galileo ultraviolet spectrometer experiment - Initial Venus and interplanetary cruise results

The Galileo Extreme Ultraviolet Spectrometer obtained a spectrum of Venus atmospheric emissions in the 55.0- to 125.0-nm wavelength region. Emissions of helium (58.4 nm), ionized atomic oxygen (83.4 nm), and atomic hydrogen (121.6 nm), as well as a blended spectral feature of atomic hydrogen (Lyman-beta) and atomic oxygen (102.5 nm), were observed at 3.5-nm resolution. During the Galileo spacecraft cruise from Venus to earth, Lyman-alpha emission from solar system atomic hydrogen (121.6 nm) was measured. The dominant source of the Lyman-alpha emission is atomic hydrogen from the interstellar medium. A model of Galileo observations at solar maximum indicates a decrease in the solar Lyman-alpha flux near the solar poles. A strong day-to-day variation also occurs with the 27-day periodicity of the rotation of the sun.

Hord, C. W.↗

A Lyα Transit Left Undetected: the Environment and Atmospheric Behavior of K2-25b

K2-25b is a Neptune-sized exoplanet (3.45R {sub ⊕}) that orbits its M4.5 host with a period of 3.48 days. Due to its membership in the Hyades Cluster, the system has a known age (727 ± 75 Myr). K2-25b’s youth and its similarities with Gl 436b suggested that K2-25b could be undergoing strong atmospheric escape. We observed two transits of K2-25b at Lyα using HST/STIS in order to search for escaping neutral hydrogen. We were unable to detect an exospheric signature, but placed an upper limit of (R {sub p}/R {sub ⋆})∣{sub Ly α} < 0.56 at 95% confidence by fitting the light curve of the Lyα red wing, or < 1.20 in the blue wing. We reconstructed the intrinsic Lyα profile of K2-25 to determine its Lyα flux, and analyzed XMM-Newton observations to determined its X-ray flux. Based on the total X-ray and extreme ultraviolet irradiation of the planet (8763 ± 1049 erg s{sup −1} cm{sup −2}), we estimated the maximum energy-limited mass-loss rate of K2-25b to be 10.6{sub −6.13}{sup +15.2}×10{sup 10} g s{sup −1} (0.56M {sub ⊕} per 1 Gyr), five times larger than the similarly estimated mass-loss rate of Gl 436b (2.2 × 10{sup 10} g s{sup −1}). The photoionization time is about 3 hr, significantly shorter than Gl 436b’s 14 hr. A nondetection of a Lyα transit could suggest K2-25b is not significantly losing its atmosphere, or factors of the system are resulting in the mass loss being unobservable (e.g., atmosphere composition or the system’s large high-energy flux). Further observations could provide more stringent constraints.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Infrared nanospectroscopy characterization of metal oxide photoresists

Implementation of extreme ultraviolet (EUV) lithography in high-volume semiconductor manufacturing requires a reliable and scalable EUV resist platform. A mechanistic understanding of the pros and cons of different EUV resist materials is critically important. However, most material characterization methods with nanometer resolution use an x-ray photon or electron beam as the probe, which often cause damage to the photoresist film during measurement. Here, we illustrated the use of non-destructive infrared nanospectroscopy [or nano-Fourier-Transform infrared spectroscopy (nano-FTIR)] to obtain spatially resolved composition information in patterned photoresist films. Further, clear evidence of exposure-induced chemical modification was observed at a spatial resolution down to 40 nm, well below the diffraction limit of infrared light. With improvements, such a nano-FTIR technique with nanoscale spatial resolution, chemical sensitivity, and minimal radiation damage can be a promising candidate for the fundamental study of material properties relevant to EUV lithography.

36 MATERIALS SCIENCE↗

Direct reconstruction of isolated XUV or soft x-ray attosecond pulses from high-harmonic generation streaking spectra

Characterization of an isolated attosecond pulse (IAP) in the extreme ultraviolet (XUV) or soft x-ray (SXR) region is essential for its applications. Here we propose to retrieve an IAP in the time domain directly through the modulation of high-harmonic generation (HHG) spectra in the presence of a time-delayed intense few-cycle infrared or mid-infrared laser. The retrieval algorithm is derived based on the strong-field approximation and an extended quantitative rescattering model. We show that both isolated XUV pulses with a narrow spectral bandwidth and isolated SXR pulses with a broad bandwidth can be well characterized through the HHG streaking spectra. Such an all-optical method for characterizing the IAP differs from the commonly used approach based on the streaked photoelectron spectra that would require electron spectrometers. We check the robustness of the retrieval method by changing the dressing laser or by adjusting the steps of time delay. We also show that the XUV pulse can be accurately retrieved by treating the HHG streaking spectra calculated from solving the time-dependent Schrödinger equation for single atoms as the ‘experimental’ data.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Approaching Angstrom-Scale Resolution in Lithography Using Low-Molecular-Mass Resists (<500 Da)

Resists that enable high-throughput and high-resolution patterning are essential in driving the semiconductor technology forward. The ultimate patterning performance of a resist in lithography is limited because of the trade-off between resolution, line-width roughness, and sensitivity; improving one or two of these parameters typically leads to a loss in the third. As the patterned feature sizes approach angstrom scale, the trade-off between these three metrics becomes increasingly hard to resolve and calls for a fundamental rethinking of the resist chemistry. Low-molecular-mass monodispersed metal-containing resists of high atom economy can provide not only very high resolution but also very low line-width roughness without sacrificing sensitivity. Here we describe a modular metal-containing resist platform (molecular mass <500 Da) where a molecular resist consists of just two components: a metal and a radical initiator bonded to it. This simple system not only is amenable to high-resolution electron beam lithography (EBL) and extreme ultraviolet lithography (EUVL) but also unites them mechanistically, giving a consolidated perspective of molecular and chemical processes happening during exposure. Irradiation of the resist leads to the production of secondary electrons that generate radicals in the initiator bonded to metal. This brings about an intramolecular rearrangement and causes solubility switch in the exposed resist. We demonstrate record 1.9–2.0 nm isolated patterns and 7 nm half-pitch dense line-space features over a large area using EBL. With EUVL, 12 nm half-pitch line-space features are shown at a dose of 68 mJ/cm 2 . In both of these patterning techniques, the line-width roughness was found to be ≤2 nm, a record low value for any resist platform, also leading to a low-performance trade-off metric, Z factor, of 0.6 × 10 –8 mJ·nm 3 . With the ultimate resolution limited by instrumental factors, potential patterning at the level of a unit cell can be envisaged, making low-molecular-mass resists best poised for angstrom-scale lithography.

77 NANOSCIENCE AND NANOTECHNOLOGY↗

Vapor‐Phase Infiltrated Organic–Inorganic Positive‐Tone Hybrid Photoresist for Extreme UV Lithography

Abstract Continuing extreme downscaling of semiconductor devices, essential for high performance and energy efficiency of future microelectronics, hinges on extreme ultraviolet lithography (EUVL) and addressing associated challenges. One of such challenges is a need for improved EUV photoresists featuring simultaneously high sensitivity, resolution, and etch selectivity. Here, a new, positive‐tone, organic–inorganic hybrid EUV photoresist is demonstrated that delivers a high‐resolution EUVL and electron‐beam lithography (EBL) patterning capability combined with high sensitivity and etch resistance. The new resist, poly(methyl methacrylate) infiltrated with indium oxide (PMMA‐InO x ), is synthesized via vapor‐phase infiltration (VPI), a material hybridization technique derived from atomic layer deposition. The weak binding of the gaseous indium precursor, trimethylindium, to the carbonyl group in PMMA allows the synthesis of hybrids with inorganic content distributed uniformly in the resist, enabling high EUVL and EBL sensitivities (18 mJ cm −2 and 300 µC cm −2 , respectively) and high‐resolution positive‐tone EUVL patterning (e.g., 40 nm half‐pitch line‐space and 50 nm diameter contact hole patterns) with high Si etch selectivity (>30–40). The low exposure doses required to pattern the PMMA‐InO x hybrid resist, high etch resistance, and processing strategies, which are developed, can pave the way for using infiltration‐synthesized hybrid thin films as reliable positive‐tone EUV photoresists for future semiconductor patterning.

36 MATERIALS SCIENCE↗

Scattered Light in the Hinode/EIS and SDO/AIA Instruments Measured from the 2012 Venus Transit

Observations from the 2012 transit of Venus are used to derive empirical formulae for long- and short-range scattered light at locations on the solar disk observed by the Hinode Extreme ultraviolet Imaging Spectrometer (EIS) and the Solar Dynamics Observatory Atmospheric Imaging Assembly (AIA) instruments. Long-range scattered light comes from the entire solar disk, while short-range scattered light is considered to come from a region within 50” of the region of interest. The formulae were derived from the Fe XII 195.12 Å emission line observed by EIS and the AIA 193 Å channel. A study of the weaker Fe XIV 274.20 Å line during the transit and a comparison of scattering in the AIA 193 Å and 304 Å channels suggests the EIS scattering formula applies to other emission lines in the EIS wavebands. Both formulae should be valid in regions of fairly uniform emission such as coronal holes and quiet Sun, but may be less accurate for faint areas close (around 100”) to bright active regions. The formula for EIS is used to estimate the scattered light component of Fe XII λ195.12 for seven on-disk coronal holes observed between 2010 and 2018. Scattered light contributions of 56%–100% are found, suggesting that these features are dominated by scattered light, consistent with earlier work of Wendeln & Landi. Emission lines from the S X and Si X ions—formed at the same temperature as Fe XII and often used to derive the first ionization potential bias from EIS data—are also expected to be dominated by scattered light in coronal holes.

Transits↗

Simultaneous Observation of Carrier-Specific Redistribution and Coherent Lattice Dynamics in 2H-MoTe 2 with Femtosecond Core-Level Spectroscopy

In this study, we employ few-femtosecond extreme ultraviolet (XUV) transient absorption spectroscopy to reveal simultaneously the intra- and interband carrier relaxation and the light-induced structural dynamics in nanoscale thin films of layered 2H-MoTe 2 semiconductor. By interrogating the valence electronic structure via localized Te 4 d (39-46 eV) and Mo 4 p (35-38 eV) core levels, the relaxation of the photoexcited hole distribution is directly observed in real time. We obtain hole thermalization and cooling times of 15 ± 5 fs and 380 ± 90 fs, respectively, and an electron-hole recombination time of 1.5 ± 0.1 ps. Furthermore, excitations of coherent out-of-plane A 1g (5.1 THz) and in-plane E 1g (3.7 THz) lattice vibrations are visualized through oscillations in the XUV absorption spectra. By comparison to Bethe-Salpeter equation simulations, the spectral changes are mapped to real-space excited-state displacements of the lattice along the dominant A 1g coordinate. By directly and simultaneously probing the excited carrier distribution dynamics and accompanying femtosecond lattice displacement in 2H-MoTe 2 within a single experiment, our work provides a benchmark for understanding the interplay between electronic and structural dynamics in photoexcited nanomaterials.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Effect of Networking Density on the Patterning Performance of Molecular Layer Deposited Alucone Electron Beam/EUV Resists

One of the main barriers to continued device scaling in the era of extreme ultraviolet (EUV) lithography is the need for improved photoresist chemistries to address challenges such as poor EUV sensitivity, inadequate etch resistance, and pattern collapse. Metal-organic photoresists are a promising class of materials that can address many of these challenges, and among them, resists deposited via hybrid molecular layer deposition (MLD) have attracted interest for their unique advantages in thickness control, chemical homogeneity, and compatibility with vacuum processing. However, despite many successful demonstrations of patterning, little is known about how the molecular design of hybrid MLD resists affects their lithographic performance. In this work, we study the effect of the network structure, a common feature among all hybrid MLD resists, via a series of aluminum alkoxide ("alucone") negative tone resists with varying networking density. Their patterning mechanism is investigated via electron beam lithography (EBL)─a common proxy for EUV─and compared to their EUV-induced reactions studied via flood exposure and in situ characterization. In conclusion, we show that the resist with the least networking density demonstrates the best sensitivity and resolution, with the ability to resolve dense line/space gratings as small as 14 nm half pitch via EBL.

electron beam lithography↗

Study of SXR/EUV radiation of exploded foils and wires with spectral, spatial and temporal resolution simultaneously on KING electric discharge facility.

The results of studies of the soft X-ray and extreme ultraviolet (SXR/EUV) radiation of thin flat aluminum foils and wires under the explosion in an electric discharge on the compact high-current KING generator are presented. These studies were based on the SXR/EUV spectroscopy with a spectral resolution of 6 Å, a temporal resolution of 5 ns and a spatial resolution of 200 μm. To study the plasma radiation of exploded foils and wires in the SXR/EUV range, we used a transmission diffraction grating spectrograph which in combination with two additional slits provided spectral and spatial resolution. The spectrograph was coupled with a 4-frame recorder based on a microchannel plate for providing temporal resolution. The analysis and comparison of the spectral, spatial, temporal, and energy characteristics of the SXR/EUV radiation of plasma formed under the explosion of foils and wires of a similar mass made of aluminum was carried out. Here, the spectra were calculated as well and the plasma parameters and their changes in time and space were estimated on the basis of these calculations and comparison with relevant experimental results. Experiments have shown that when foils explode, a single intense source of SXR/EUV radiation is formed with radiated energy in the range of 10-20 J and a power of up to 100 MW in the quantum energy range from 30 to 250 eV. At the same time, the radiation power under the explosion of foils turned out to be about twice above the power under the explosion of wires of comparable mass.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Highly charged ion approach to measure nuclear charge radii of Fr, Ra, and Rn isotopes for precision measurements

Conventional electron scattering and muonic atom spectroscopy techniques are challenging to apply to heavy ions unless the element has at least one stable or extremely long-lived isotope. To overcome this limitation, a recently introduced method for determining nuclear charge radii relies on extreme-ultraviolet (EUV) spectroscopy of the D 1 line in highly charged Na-like ions. In this work, we present an experimental approach to measure the nuclear charge radii of isotopes of radioactive elements such as Fr, Ra, and Rn using this method at TRIUMF’s Ion Trap for Atomic and Nuclear Science (TITAN) instrument, located at the ISAC radioactive beam facility. We also explore the potential of using Na-like D 2 lines in the soft x-ray region for future measurements.

Electron beam ion trap↗

Time-Resolved Probing of the Iodobenzene C-Band Using XUV-Induced Electron Transfer Dynamics

Time-resolved extreme ultraviolet spectroscopy was used to investigate photodissociation within the iodobenzene C-band. The carbon–iodine bond of iodobenzene was photolyzed at 200 nm, and the ensuing dynamics were probed at 10.3 nm (120 eV) over a 4 ps range. Two product channels were observed and subsequently isolated by using a global fitting method. Their onset times and energetics were assigned to distinct electron transfer dynamics initiated following site-selective ionization of the iodine photoproducts, enabling the electronic states of the phenyl fragments to be identified using a classical over-the-barrier model for electron transfer. In combination with previous theoretical work, this allowed the corresponding neutral photochemistry to be assigned to (1) dissociation via the 7B2, 8A2, and 8B1 states to give ground-state phenyl, Ph(X), and spin–orbit excited iodine and (2) dissociation through the 7A1 and 8B2 states to give excited-state phenyl, Ph(A), and ground-state iodine. The branching ratio was determined to be 87 ± 4% Ph(X) and 13 ± 4% Ph(A). Similarly, the corresponding amount of energy deposited into the internal phenyl modes in these channels was determined to be 44 ± 10 and 65 ± 21%, respectively, and upper bounds to the channel rise times were found to be 114 ± 6 and 310 ± 60 fs.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗