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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 541 records · Page 30
All sourcesNASA NTRSDOE OSTI
DOE OSTI2025

Modeling the Nucleation and Growth of Lead Sulfate Particles on Lead Electrodes

Lead-acid batteries (LABs) play a pivotal role in the energy storage sector with applications spanning from starting-lighting-ignition batteries to grid energy storage. Passivation of lead negative electrodes by PbSO 4 particles is a fundamental mechanism limiting the performance of LAB. In this regard, an electrochemical model is developed that simulates the nucleation and growth (N&G) dynamics of PbSO 4 particles on a flat lead electrode, responsible for its passivation. The model considers the electrochemical reactions between lead electrode and sulfuric acid, N&G of PbSO 4 particles, passivation of the lead surface, and the ternary transport of PbSO 4 (aq), bisulfate, and protons in H 2 SO 4 electrolyte. The model is validated with a dataset of cyclic voltammetry (CV) responses collected at several scan rates and H 2 SO 4 concentrations. The model shows remarkable qualitative and quantitative agreement with the experimental data including CV peak features, discharge capacity, and particle size. The model was employed to explore key N&G quantities, such as supersaturation, nucleation rate, particle count, growth rate, particle size, and surface coverage, and to examine how their interactions influence electrode utilization. Parametric studies were also conducted to evaluate how scan rates and acid concentrations influence the previously mentioned N&G quantities and, subsequently, the utilization of the electrode.

25 ENERGY STORAGE↗
NASA NTRS1988

Monolithic GaAs digitizer for space-based laser pulse spreading effect

A 6-bit 1-GHz digitizer was designed to analyze the 1-ns pulse spreading effects in a space based altimeter. The digitizer consisted of four 4-bit flash A/D converters and a 6-bit encoder. Also, the converter utilized four 4-bit converters and a 4-to-6 bit encoder to achieve 6 bit resolution at the 1 GHz sample rate. The design was unique because it utilized only the inverters and NOR gates for the converters and encoder, hence it could be fabricated using the existing state-of-the-art GaAs processing techniques. This GHz digitizer has many commercial applications. It could be applicable to: (1) digital microwave transmission system for the telecommunication industries, (2) pulse monitoring in high kinetic chemical reactions, (3) transient signals in the medical field, and (4) microwave signals in astronomy.

Lao, Bennig↗
NASA NTRS1976

Comparative performance of solar thermal power generation concepts

A performance comparison is made between the central receiver system (power tower) and a distributed system using either dishes or troughs and lines to transport fluids to the power station. These systems were analyzed at a rated capacity of 30 MW of thermal energy delivered in the form of superheated steam at 538 C (1000 F) and 68 atm (1000 psia), using consistent weather data, collector surface waviness, pointing error, and electric conversion efficiency. The comparisons include technical considerations for component requirements, land utilization, and annual thermal energy collection rates. The relative merits of different representative systems are dependent upon the overall conversion as expressed in the form of performance factors in this paper. These factors are essentially indices of the relative performance effectiveness for different concepts based upon unit collector area. These performance factors enable further economic tradeoff studies of systems to be made by comparing them with projected production costs for these systems.

Wen, L.↗
NASA NTRS1982

Airfoil deposition model

The methodology to predict deposit evolution (deposition rate and subsequent flow of liquid deposits) as a function of fuel and air impurity content and relevant aerodynamic parameters for turbine airfoils is developed in this research. The spectrum of deposition conditions encountered in gas turbine operations includes the mechanisms of vapor deposition, small particle deposition with thermophoresis, and larger particle deposition with inertial effects. The focus is on using a simplified version of the comprehensive multicomponent vapor diffusion formalism to make deposition predictions for: (1) simple geometry collectors; and (2) gas turbine blade shapes, including both developing laminar and turbulent boundary layers. For the gas turbine blade the insights developed in previous programs are being combined with heat and mass transfer coefficient calculations using the STAN 5 boundary layer code to predict vapor deposition rates and corresponding liquid layer thicknesses on turbine blades. A computer program is being written which utilizes the local values of the calculated deposition rate and skin friction to calculate the increment in liquid condensate layer growth along a collector surface.

Kohl, F. J.↗
DOE OSTI2023

Hydrogen Equipment Enclosure Risk Reduction through Earlier Detection of Component Failures

Hydrogen component reliability and the hazard associated with failure rates is a critical area of research for the successful implementation and growth of hydrogen technology across the globe. The research team has partnered to quantify system risk reduction through earlier detection of hydrogen component failures. A model of hydrogen dispersion in a hydrogen equipment enclosure has been developed utilizing experimentally quantified hydrogen component leak rates as inputs. This model provides insight into the impact of hydrogen safety sensors and ventilation on the flammable mass within a hydrogen equipment enclosure. This model also demonstrates the change in safety sensor response time due to detector placement under various leak scenarios. The team looks to improve overall hydrogen system safety through an improved understanding of hydrogen component reliability and risk mitigation methods. This collaboration fits under the work program of IEA Hydrogen Task 43 Subtask E Hydrogen System Safety.

CFD↗
NASA NTRS2004

Traveling Wave Tube (TVT) RF Power Combining Demonstration for use in the Jupiter Icy Moons Orbiter (JIMO)

The Jupiter Icy Moons Orbiter (JIMO) is set to launch between the years 2012 and 2015. It will possibly utilize a nuclear reactor power source and ion engines as it travels to the moons of Jupiter. The nuclear reactor will produce hundreds of kilowatts of power for propulsion, communication and various scientific instruments. Hence, the RF amplification devices aboard will be able to operate at a higher power level and data rate. The initial plan for the communications system is for an output of 1000 watts of RF power, a data rate of at least 10 megabits a second, and a frequency of 32 GHz. A higher data rate would be ideal to fully utilize the instruments aboard JIMO. At NASA Glenn, one of our roles in the JIMO project is to demonstrate RF power combining using multiple traveling wave tubes (TWT). In order for the power of separate TWT s to be combined, the RF output waves from each must be in-phase and have the same amplitude. Since different tubes act differently, we had to characterize each tube using a Network Analyzer. We took frequency sweeps and power sweeps to characterize each tube to ensure that they will behave similarly under the same conditions. The 200 watt Dornier tubes had been optimized to run at a lower power level (120 watts) for their extensive use in the ACTS program, so we also had to experiment with adjusting the voltage settings on several internal components (helix, anode, collector) of the tubes to reach the full 200 watt potential. from the ACTS program. Phase shifters and power attenuators were placed in the waveguide circuit at the inputs to the tubes so that adjustments could be made individually to match them exactly. A magic tee was used to route and combine the amplified electromagnetic RF waves on the tube output side. The demonstration of 200 watts of combined power was successful with efficiencies greater than 90% over a 500 MHz bandwidth. The next step will be to demonstrate the use of three amplifiers using two magic tees by adding a 200 watt Dornier tube to the Varian and Logimetrics combined setup for a total of 400 watts. After that we will use two 200 watt Dorniers for 400 watts and eventually four 200 watt Dornier tubes to demonstrate 800 watts. After demonstrating the success of power combining, we will need to verify the integrity of a modulated signal sent through the combined tubes. The purpose will be to see what effects separating and recombining will have on the modulated signal and also what effect it will have on combining efficiency. A Bit Error Rate (BER) will be determined by a Bit Error Rate Tester (BERT) by comparing the random information it transmits to what it receives back. The process began with two 100 watt tubes, a Varian and a Logimetrics, salvaged

Downey, Joseph A.↗
NASA NTRS1993

Bandwidth characteristics of multimedia data traffic on a local area network

Limited spacecraft communication links call for users to investigate the potential use of video compression and multimedia technologies to optimize bandwidth allocations. The objective was to determine the transmission characteristics of multimedia data - motion video, text or bitmap graphics, and files transmitted independently and simultaneously over an ethernet local area network. Commercial desktop video teleconferencing hardware and software and Intel's proprietary Digital Video Interactive (DVI) video compression algorithm were used, and typical task scenarios were selected. The transmission time, packet size, number of packets, and network utilization of the data were recorded. Each data type - compressed motion video, text and/or bitmapped graphics, and a compressed image file - was first transmitted independently and its characteristics recorded. The results showed that an average bandwidth of 7.4 kilobits per second (kbps) was used to transmit graphics; an average bandwidth of 86.8 kbps was used to transmit an 18.9-kilobyte (kB) image file; a bandwidth of 728.9 kbps was used to transmit compressed motion video at 15 frames per second (fps); and a bandwidth of 75.9 kbps was used to transmit compressed motion video at 1.5 fps. Average packet sizes were 933 bytes for graphics, 498.5 bytes for the image file, 345.8 bytes for motion video at 15 fps, and 341.9 bytes for motion video at 1.5 fps. Simultaneous transmission of multimedia data types was also characterized. The multimedia packets used transmission bandwidths of 341.4 kbps and 105.8kbps. Bandwidth utilization varied according to the frame rate (frames per second) setting for the transmission of motion video. Packet size did not vary significantly between the data types. When these characteristics are applied to Space Station Freedom (SSF), the packet sizes fall within the maximum specified by the Consultative Committee for Space Data Systems (CCSDS). The uplink of imagery to SSF may be performed at minimal frame rates and/or within seconds of delay, depending on the user's allocated bandwidth. Further research to identify the acceptable delay interval and its impact on human performance is required. Additional studies in network performance using various video compression algorithms and integrated multimedia techniques are needed to determine the optimal design approach for utilizing SSF's data communications system.

Chuang, Shery L.↗
DOE OSTI2020

Low-temperature and high-rate-charging lithium metal batteries enabled by an electrochemically active monolayer-regulated interface

Stable operation of rechargeable lithium (Li)-based batteries at low temperatures is vital for cold-climate applications but is plagued with dendritic Li plating and unstable solid-electrolyte interphase (SEI). Here we report high-performance Li-metal batteries under low-temperature and high-rate-charging conditions. This is realized by utilizing a self-assembled monolayer of electrochemically active molecules on current collectors that regulates the nanostructure and composition of SEI and deposition morphology of Li metal anodes. A multilayer SEI containing a LiF-rich inner phase and amorphous outer layer effectively seals the Li surface in contrast to the conventional impassive SEI at low temperatures. As a result, galvanic Li corrosion and self-discharge were suppressed; stable Li deposition was realized from -60º to 45ºC; and a Li|LiCoO 2 cell with a capacity of 2.0 mAh cm -2 displayed a 200-cycle life at -15ºC with a recharge time of 45 minutes.

25 ENERGY STORAGE↗
NASA NTRS2014

Integration of the Total Lightning Jump Algorithm into Current Operational Warning Environment Conceptual Models

The presence and rates of total lightning are both correlated to and physically dependent upon storm updraft strength, mixed phase precipitation volume and the size of the charging zone. The updraft modulates the ingredients necessary for electrification within a thunderstorm, while the updraft also plays a critical role in the development of severe and hazardous weather. Therefore utilizing this relationship, the monitoring of lightning rates and jumps provides an additional piece of information on the evolution of a thunderstorm, more often than not, at higher temporal resolution than current operational radar systems. This correlation is the basis for the total lightning jump algorithm that has been developed in recent years. Currently, the lightning jump algorithm is being tested in two separate but important efforts. Schultz et al. (2014; AMS 10th Satellite Symposium) is exploring the transition of the algorithm from its research based formulation to a fully objective algorithm that includes storm tracking, Geostationary Lightning Mapper (GLM) Proxy data and the lightning jump algorithm. Chronis et al. (2014; this conference) provides context for the transition to current operational forecasting using lightning mapping array based products. However, what remains is an end to end physical and dynamical basis for relating lightning rates to severe storm manifestation, so the forecaster has a reason beyond simple correlation to utilize the lightning jump algorithm within their severe storm conceptual models. Therefore, the physical basis for the lightning jump algorithm in relation to severe storm dynamics and microphysics is a key component that must be further explored. Many radar studies have examined flash rates and their relation to updraft strength, updraft volume, precipitation‐sized ice mass, etc.; however, relation specifically to lightning jumps is fragmented within the literature. Thus the goal of this study is to use multiple Doppler techniques to resolve the physical and dynamical storm characteristics specifically around the time of the lightning jump. This information will help forecasters anticipate lightning jump occurrence, or even be of use to determine future characteristics of a given storm (e.g., development of a mesocyclone, downdraft, or hail signature on radar), providing additional lead time/confidence in the severe storm warning paradigm.

Shultz, Christopher J.↗
NASA NTRS2014

Physical and Dynamical Linkages between Lightning Jumps and Storm Conceptual Models

The presence and rates of total lightning are both correlated to and physically dependent upon storm updraft strength, mixed phase precipitation volume and the size of the charging zone. The updraft modulates the ingredients necessary for electrification within a thunderstorm, while the updraft also plays a critical role in the development of severe and hazardous weather. Therefore utilizing this relationship, the monitoring of lightning rates and jumps provides an additional piece of information on the evolution of a thunderstorm, more often than not, at higher temporal resolution than current operational radar systems. This correlation is the basis for the total lightning jump algorithm that has been developed in recent years. Currently, the lightning jump algorithm is being tested in two separate but important efforts. Schultz et al. (2014; this conference) is exploring the transition of the algorithm from its research based formulation to a fully objective algorithm that includes storm tracking, Geostationary Lightning Mapper (GLM) Proxy data and the lightning jump algorithm. Chronis et al. (2014; this conference) provides context for the transition to current operational forecasting using lightning mapping array based products. However, what remains is an end-to-end physical and dynamical basis for coupling total lightning flash rates to severe storm manifestation, so the forecaster has a reason beyond simple correlation to utilize the lightning jump algorithm within their severe storm conceptual models. Therefore, the physical basis for the lightning jump algorithm in relation to severe storm dynamics and microphysics is a key component that must be further explored. Many radar studies have examined flash rates and their relationship to updraft strength, updraft volume, precipitation-sized ice mass, etc.; however, their relationship specifically to lightning jumps is fragmented within the literature. Thus the goal of this study is to use multiple Doppler and polarimetric radar techniques to resolve the physical and dynamical storm characteristics specifically around the time of the lightning jump. This information will help forecasters anticipate lightning jump occurrence, or even be of use to determine future characteristics of a given storm (e.g., development of a mesocyclone, downdraft, or hail signature on radar), providing additional lead time/confidence in the severe storm warning paradigm.

Schultz, Christopher J.↗
NASA NTRS2014

Physical and Dynamical Linkages Between Lightning Jumps and Storm Conceptual Models

The presence and rates of total lightning are both correlated to and physically dependent upon storm updraft strength, mixed phase precipitation volume and the size of the charging zone. The updraft modulates the ingredients necessary for electrification within a thunderstorm, while the updraft also plays a critical role in the development of severe and hazardous weather. Therefore utilizing this relationship, the monitoring of lightning rates and jumps provides an additional piece of information on the evolution of a thunderstorm, more often than not, at higher temporal resolution than current operational radar systems. This correlation is the basis for the total lightning jump algorithm that has been developed in recent years. Currently, the lightning jump algorithm is being tested in two separate but important efforts. Schultz et al. (2014; this conference) is exploring the transition of the algorithm from its research based formulation to a fully objective algorithm that includes storm tracking, Geostationary Lightning Mapper (GLM) Proxy data and the lightning jump algorithm. Chronis et al. (2014) provides context for the transition to current operational forecasting using lightning mapping array based products. However, what remains is an end-to-end physical and dynamical basis for coupling total lightning flash rates to severe storm manifestation, so the forecaster has a reason beyond simple correlation to utilize the lightning jump algorithm within their severe storm conceptual models. Therefore, the physical basis for the lightning jump algorithm in relation to severe storm dynamics and microphysics is a key component that must be further explored. Many radar studies have examined flash rates and their relationship to updraft strength, updraft volume, precipitation-sized ice mass, etc.; however, their relationship specifically to lightning jumps is fragmented within the literature. Thus the goal of this study is to use multiple Doppler and polarimetric radar techniques to resolve the physical and dynamical storm characteristics specifically around the time of the lightning jump. This information will help forecasters anticipate lightning jump occurrence, or even be of use to determine future characteristics of a given storm (e.g., development of a mesocyclone, downdraft, or hail signature on radar), providing additional lead time/confidence in the severe storm warning paradigm.

Schultz, Christopher J.↗
NASA NTRS1984

The application of dimensional analysis to the problem of solar wind-magnetosphere energy coupling

The constraints imposed by dimensional analysis are used to find how the solar wind-magnetosphere energy transfer rate depends upon interplanetary parameters. The analyses assume that only magnetohydrodynamic processes are important in controlling the rate of energy transfer. The study utilizes ISEE-3 solar wind observations, the AE index, and UT from three 10-day intervals during the International Magnetospheric Study. Simple linear regression and histogram techniques are used to find the value of the magnetohydrodynamic coupling exponent, alpha, which is consistent with observations of magnetospheric response. Once alpha is estimated, the form of the solar wind energy transfer rate is obtained by substitution into an equation of the interplanetary variables whose exponents depend upon alpha.

Bargatze, L. F.↗
NASA NTRS1986

Do large rate coefficients for ion-polar neutral reactions have a serious effect on chemical models of dense clouds?

In order to incorporate large ion-polar neutral rate coefficients into existing gas phase reaction networks, it is necessary to utilize simplified theoretical treatments because of the significant number of rate coefficients needed. The authors have used two simple theoretical treatments: the locked dipole approach of Moran and Hamill for linear polar neutrals and the trajectory scaling approach of Su and Chesnavich for nonlinear polar neutrals. The former approach is suitable for linear species because in the interstellar medium these are rotationally relaxed to a large extent and the incoming charged reactants can lock their dipoles into the lowest energy configuration. The latter approach is a better approximation for nonlinear neutral species, in which rotational relaxation is normally less severe and the incoming charged reactants are not as effective at locking the dipoles. The treatments are in reasonable agreement with more detailed long range theories and predict an inverse square root dependence on kinetic temperature for the rate coefficient. Compared with the locked dipole method, the trajectory scaling approach results in rate coefficients smaller by a factor of approximately 2.5.

Herbst, E.↗
NASA NTRS1995

ACTS broadband aeronautical terminal

This paper discusses the design of, and experiments with, the ACTS Broadband Aeronautical Terminal. As part of the ongoing effort to investigate commercial applications of ACTS technologies, NASA's Jet Propulsion Laboratory and various industry/government partners are developing a broadband mobile terminal for aeronautical applications. The ACTS Broadband Aeronautical Terminal is designed to explore the use of K/Ka-band for high data rate aeronautical satellite communications. Currently available commercial aeronautical satellite communications systems are only capable of achieving data rates on the order of tens of kilobits per second. The broadband terminal used in conjunction with the ACTS mechanically steerable antenna, can achieve data rates of 384 kilobits per second, while use of an ACTS spot beam antenna with this terminal will allow up to T1 data rates (1.544 megabits per second). The aeronautical terminal will be utilized to test a variety of applications that require a high data rate communications link. The use of the K/Ka-band for wideband aeronautical communications has the advantages of spectrum availability and smaller antennas, while eliminating the one major drawback of this frequency band, rain attenuation, by flying above the clouds the majority of the time.

Agan, M. J.↗
NASA NTRS1979

Economics of hydrogen production and liquefaction updated to 1980

Revised costs for generating and liquefying hydrogen in mid-1980 are presented. Plant investments were treated as straight-forward escalations resulting from inflation. Operating costs, however, were derived in terms of the unit cost of coal, fuel gas and electrical energy to permit the determination of the influence of these parameters on the cost of liquid hydrogen. Inflationary influence was recognized by requiring a 15% discounted rate of return on investment for Discounted Cash Flow financing analysis, up from 12% previously. Utility financing was revised to require an 11% interest rate on debt. The scope of operation of the hydrogen plant was revised from previous studies to include only the hydrogen generation and liquefaction facilities. On-site fuel gas and power generation, originally a part of the plant complex, was eliminated. Fuel gas and power are now treated as purchased utilities. Costs for on-site generation of fuel gas however, are included.

Baker, C. R.↗
DOE OSTI2022

Highly Loaded Sulfur Cathode, Coated Separator and Gel Electrolyte for High Rate Li-Sulfur Batteries

As one of DOE Battery 500 Seedling projects, Cornell University and EIC Labs investigated and developed i) highly loaded sulfur cathodes (> 3 mg/cm 2 ), ii) hybrid separators, and iii) gel ceramic electrolytes (GCE) to mitigate the low rate capability, shuttling effect and limited cycle life in high performance Li-Sulfur batteries. Scalable nanomanufacturing processes such as air-controlled electrospray (ACES) and gas-assisted electrospinning (GAES) have been utilized to develop directly deposited electrodes and polymer/ceramic hybrid separators. First, in the development of highly loaded cathodes, alternating layers of sulfur impregnated mesoporous carbon and graphene were fabricated via ACES and the resulting layered cathodes and coated separators exhibit higher capacity and capacity retention (about 1,000 mAh/g capacity with less than 0.02% fade/cycles) than single layer cathode or cathode prepared by conventional slurry cast. Alternating layer approach via ACES has been applied to high loading systems (3 - 5 mg S/cm 2 ), demonstrating the potential to increase sulfur utilization and capacity retention. We have also incorporated iron oxides (Fe 3 O 4 ) into S/mesoporous carbon/graphene cathodes to enhance sulfur utilization and mitigation of polysulfide shuttling. and the effect of Fe 3 O 4 in mesoporous carbon and Gr is highly pronounced at high C rates of 1C and 2C cycling performance. To further improve the cathodes at high rates, graphene nanoribbons (GNR) which can promote ion transport were incorporated in the cathode, resulting in 550 mAh/g at 5C/5C rates. Hybrid Li-ion/Li-S cathodes has also been explored to better engage unreacted polysulfides during charge/discharge. S/LFP hybrid cathodes offer higher sulfur utilization and enhanced rate capability, as well as higher areal loading. This study suggests inclusion of iron phosphide (Fe2P) which can chemically interact with polysulfides can further enhance sulfur utilization and mitigation of soluble polysulfides at high rates. Secondly, in the development of hybrid separators, we first employed graphene coating on the commercial polyolefin separators, which exhibits higher capability, better capacity retention and enhanced rate capability. To improve the rate capability with enhanced safety features such as thermal stability and nonflammability, we developed polymer/ceramic hybrids based on thermally stable polyimide (PI) and room temperature curable ceramic precursors such as organopolysilazane (OPSZ) or polysilsesquioxanes (PSSQ), which exhibit no shrinkages up to 300 ºC and non-flammability. To improve mechanical properties and electrochemical stability, polybenzimidazole (PBI) and alumina have been incorporated in polymer/ceramic hybrid separator, replacing PI and OPSZ/PSSQ, respectively. Finally, the gel ceramic electrolyte (GCE) based on ceramic cross linkers have been applied to make Li-S cells even safer and also to mitigate the polysulfide shuttling further. The resulting gel ceramic electrolyte offers improved capacity retention and rate capability, and also effectively mitigates polysulfide shuttling which was also confirmed by modeling. Inclusion of high ion conducting additives into GCE together with polymer/ceramic hybrid separators exhibit the higher ionic conductivity than liquid electrolyte with commercial polyolefin separator. We demonstrated that the developed highly loaded sulfur cathodes, polymer/ceramic hybrid separators and gel ceramic electrolyte can effectively mitigate the low rate capability, shuttling effect and limited cycle life in high performance Li-Sulfur batteries with improved safety.

25 ENERGY STORAGE↗
DOE OSTI2020

Study of a linear surface wave plasma source for tin removal in an extreme ultraviolet source

Tin deposition mitigation employs hydrogen radicals and ions, formed in a hydrogen plasma, to interact with tin to form tin hydride (SnH 4 ) in the gaseous state, which is then pumped away. Surface wave plasma (SWP) technology developed at Illinois generates hydrogen radicals and ions, resulting in tin etch rates that are high enough to keep extreme ultraviolet (EUV) lithographic tools clean. An advantage of an SWP antenna is the ability to generate a high density of hydrogen radicals and hydrogen ions directly at the desired etching location. In situ etching of tin enables high availability EUV tools by maintaining high reflectivity of the multilayer mirror of the collector. Additionally, the SWP is characterized with low ion energies and low electron temperature, such that the multilayer mirror does not suffer any damage from sputtering or implantation of hydrogen ions during operation. Here, experiments elucidating the fundamental processes of tin removal are conducted by varying pressure, power, surface temperature, and gas flow rate in order to observe the etch rate behavior. Our results have shown that the presence of hydrogen ions increases etch rates because ion bombardment weakens Sn–Sn bonds, which, in turn, allows for a higher rate of chemical etching by the radicals. The ion bombardment reduces the number of radicals needed to etch a single tin atom to the range of 10 2 –10 3 . The linear SWP antenna yields plasma densities on the order of 10 17 to 10 18 m -3 and radical densities on the order of 10 18 to 10 19 m -3 , allowing for greater utilization of ion etch enhancement. Etch rates of up to 200 nm/min have been achieved. The surface temperature of the samples is an important factor in the etching process such that the decrease in the surface temperature increases the etch rates and decreases the hydrogen desorption rates. In addition, a kinetic etch model is developed to explain the behavior of etch rates as a function of surface temperature. Furthermore, results from experiments performed in an Illinois NXE:3100 chamber will be discussed.

42 ENGINEERING↗