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At least 541 records · Page 30

Predictive Data-driven Platform for Subsurface Energy Production

Subsurface energy activities such as unconventional resource recovery, enhanced geothermal energy systems, and geologic carbon storage require fast and reliable methods to account for complex, multiphysical processes in heterogeneous fractured and porous media. Although reservoir simulation is considered the industry standard for simulating these subsurface systems with injection and/or extraction operations, reservoir simulation requires spatio-temporal “Big Data” into the simulation model, which is typically a major challenge during model development and computational phase. In this work, we developed and applied various deep neural network-based approaches to (1) process multiscale image segmentation, (2) generate ensemble members of drainage networks, flow channels, and porous media using deep convolutional generative adversarial network, (3) construct multiple hybrid neural networks such as convolutional LSTM and convolutional neural network-LSTM to develop fast and accurate reduced order models for shale gas extraction, and (4) physics-informed neural network and deep Q-learning for flow and energy production. We hypothesized that physicsbased machine learning/deep learning can overcome the shortcomings of traditional machine learning methods where data-driven models have faltered beyond the data and physical conditions used for training and validation. We improved and developed novel approaches to demonstrate that physics-based ML can allow us to incorporate physical constraints (e.g., scientific domain knowledge) into ML framework. Outcomes of this project will be readily applicable for many energy and national security problems that are particularly defined by multiscale features and network systems.

58 GEOSCIENCES↗

Scalable and compact magnetocaloric heat pump technology

Magnetocaloric heat pumping (MCHP) promises to be more efficient than traditional vapor compression while also eliminating the deleterious effects of gaseous refrigerants. While MCHP devices have shown the temperature spans and efficiencies needed for different heating and cooling applications, they struggle to become commercially viable due to their large size and mass, and resultant high cost. This paper evaluates a baseline MCHP device and explores methods to boost its system power density (SPD). The key components of the baseline system are the gadolinium packed-particle bed active magnetic regenerator (AMR) and a magnetic source composed of permanent magnets and high permeability magnetic steel. To enhance the SPD, the paper evaluates maximizing the AMR volume, opting for first-order magnetocaloric materials, optimizing the magnet and AMR geometry, and reducing the size of magnets and magnetic steel parts. At larger thermal powers, increasing the AMR diameter and the number of magnetic poles were evaluated. Using finite element models, solid models, and estimates of magnetocaloric material performance, thermal powers ranging from 37 W to 44 kW at a nominal 10 K temperature span were projected, and SPD was estimated to improve from 6 W/kg to 81 W/kg. Neglecting end effects, an upper limit of 114 W/g is estimated. Compared to SPD of off-the-shelf compressors with similar environment temperatures, MCHP power density using gadolinium is competitive up to roughly 200 W of cooling power. This is extended to 1 kW when using LaFeSi alloys and up to 3 kW in the limiting case. In conclusion, these results indicate that the performance and mass of MCHP can match that of compressors, which is a critical step toward cost-competitive magnetocaloric technology.

42 ENGINEERING↗

Polariton spectra under the collective coupling regime. I. Efficient simulation of linear spectra and quantum dynamics

We outline two general theoretical techniques to simulate polariton quantum dynamics and optical spectra under the collective coupling regimes described by a Holstein–Tavis–Cummings (HTC) model Hamiltonian. The first one takes advantage of sparsity of the HTC Hamiltonian, which allows one to reduce the cost of acting polariton Hamiltonian onto a state vector to the linear order of the number of states, instead of the quadratic order. The second one is applying the well-known Chebyshev series expansion approach for quantum dynamics propagation and to simulate the polariton dynamics in the HTC system; this approach allows us to use a much larger time step for propagation and only requires a few recursive operations of the polariton Hamiltonian acting on state vectors. These two theoretical approaches are general and can be applied to any trajectory-based non-adiabatic quantum dynamics methods. We apply these two techniques with our previously developed Lindblad-partially linearized density matrix approach to simulate the linear absorption spectra of the HTC model system, with both inhomogeneous site energy disorders and dipolar orientational disorders. Our numerical results agree well with the previous analytic and numerical work.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Overcoming the fundamental limit of quantum transduction via intraband entanglement

A quantum transducer converts an input signal to an output probe at a distant frequency band while maintaining the quantum information with high fidelity, which is crucial for quantum networking and distributed quantum sensing and computing. In terms of microwave–optical quantum transduction, the state-of-the-art quantum transducers suffer low transduction efficiency from weak nonlinear coupling, wherein increasing pump power to enhance efficiency inevitably leads to thermal noise from heating. Moreover, we reveal that the efficiency-bandwidth product of a cavity electro-optical or electro-optomechanical transducer is fundamentally limited by pump power and nonlinear coupling coefficient, irrespective of cavity engineering efforts. To overcome this fundamental limit, we propose to noiselessly boost the transduction efficiency by consuming intraband entanglement (e.g., microwave–microwave or optical–optical entanglement in the case of microwave–optical transduction). Via a squeezer–coupler–antisqueezer sandwich structure, the protocol enhances the transduction efficiency to unity in the ideal lossless case, given an arbitrarily weak pump and nonlinear coupling. In practical cavity systems, our entanglement-assisted protocol surpasses the non-assisted fundamental limit of the efficiency-bandwidth product and reduces the threshold cooperativity for positive quantum capacity by a factor proportional to two-mode squeezing gain. Given a fixed cooperativity, our approach increases the broadband quantum capacity by orders of magnitude. The entanglement-assisted advantage is robust to ancilla loss and cavity detuning.

Shi, Haowei [Southern California U.] (ORCID:000000↗

Plutonium Retention by Crystalline Silicotitanate under Hyperalkaline Conditions Relevant to Tank-Side Cesium-Removal at the Hanford Site

Crystalline silicotitanate (CST) is used in Hanford’s Tank-Side Cesium-Removal (TSCR) process to selectively remove Cs-137 from highly caustic, nitrate-rich tank supernatants. Recent testing with actual waste samples suggests that CST can also retain measurable plutonium (Pu), which could affect radiological classification and disposal pathways for spent CST. To quantify this behavior, Pu partitioning to CST was studied under Hanford-relevant conditions using batch-contact experiments in a representative simulant (2 M NaNO3, 0.7 M NaOH). Isotherm data were measured and distribution ratios calculated, with Cs+ uptake used as benchmark. Under low-carbonate conditions, Pu was retained strongly by CST in systems initially contacted with either PuO2 nanoparticles (Pu(IV)) or aqueous Pu(VI), with distribution ratios of ~2,200–3,700 mL/g, generally exceeding those for Cs+ (~400–1,000 mL/g). Increasing carbonate concentration strongly reduced PuO2 nanoparticle retention; at [Na2CO3] = 1 M, distribution ratios decreased by up to one order of magnitude to roughly 100–300 mL/g. Electron microscopy suggests that Pu retention involves a combination of mechanisms such as PuO2 NP aggregation induced by CST leachate components, and association with CST bead surfaces.

Neumann, J.↗

Solving Critical Problems of the Muon Collider Higgs Factory: Optics, Magnets and their Protection, Detector Backgrounds

A low-energy medium-luminosity Muon Collider (MC) is being studied as a possible Higgs Factory (HF). Electrons from muon decays will deposit more than 300 kW in superconducting magnets of the HF collider ring. This imposes significant challenges to superconducting (SC) magnets used in the MC storage ring (SR) and interaction regions (IR). Magnet designs are proposed which provide high operating gradient and magnetic field in a large aperture to accommodate the large size of muon beams (due to low beta*), as well as a cooling system to intercept the large heat deposition from the showers induced by decay electrons. The distribution of heat deposition in the MC SR lattice elements requires large-aperture magnets in order to accommodate thick high-Z absorbers to protect the SC coils. Based on the developed MARS15 model and intensive simulations, a sophisticated radiation protection system was designed for the collider SR and IR to bring the peak power density in the superconducting coils below the quench limit and reduce the dynamic heat deposition in the cold mass by a factor of 100. The system consists of tight tungsten masks in the magnet interconnect regions and elliptical tungsten liners in the magnet aperture optimized individually for each magnet. These also reduce the background particle fluxes in the collider detector.

43 PARTICLE ACCELERATORS↗

LA17-V-InverseRadTransportProblem-PD2Kb. Final Project Report

In the inverse radiation transport problem, a radiation signal emanating from an unknown object is used to reconstruct geometric and material parameters of the object , e.g., the mass of special nuclear material (SNM), the isotopic composition of the SNM (e.g., the enrichment of 235U), the thickness of shielding, etc. The inverse radiation transport problem is one of the most fundamental and important in the emergency response mission, and has been addressed in previous NA-22 and NA-42/84 investments by using derivative-free optimization methods. Our project was aimed at (i) consolidating previous work by applying polynomial chaos expansion (PCE) for reducing significantly the number of forward model simulations required by derivative-free optimization methods; (ii) developing a general-purpose framework and stand-alone software for solving the inverse radiation transport problem by applying a new “predictive modeling” methodology (predictive modeling of coupled multi-physics systems, PM_CMPS) which enables the fusing of experimental and computational information; and (iii) developing several benchmarks (for unscattered gamma rays) for demonstrating the quantification of non-Gaussian features (e.g., skewness and kurtosis, which characterize asymmetries and long tails) of response distributions by deterministically and efficiently propagating parameter uncertainties (covariances and higher-order moments, where available) using high-order sensitivities computed by the recently developed comprehensive adjoint sensitivity analysis methodology (C-ASAM). With regard to (i), application of PCE, the most significant accomplishment of this project was an implementation of PCE into INVERSE that significantly reduced computation time for the DiffeRential Evolution Adaptive Metropolis (DREAM) and Differential Evolution (DE) methods. For inverse transport problems with measurements of neutron leakage, neutron multiplication, and neutron-induced gamma-rays, the solution times for the DREAM and DE methods were reduced by factors of 30-300, reducing run times from hours to minutes while maintaining the same accuracy as the standard (non-PCE) DREAM and DE. Speedups were further improved by exploring sparse grid quadrature sets using the Toolkit for Adaptive Stochastic Modeling and Non-Intrusive ApproximatioN (Tasmanian) toolset. An initial exploration of sparse grids indicated that further speedups factors of 5-10 are obtainable. The implementation of PCE in INVERSE is not in a form that users can easily access. With regard to (ii), solving the inverse problem using a predictive modeling paradigm, the most significant accomplishment of this project were the derivation and implementation of adjoint-based second derivatives in neutron and photon transport theory. There are two codes that compute these derivatives. SENSPG computes them for uncollided gamma rays and SENSMG computes them for neutron leakage. SENSMG is open-source code available on github. Other significant accomplishments included a stand-alone code, MULTI-PRED, that implements the predictive modeling paradigm, along with a detailed manual. The code was implemented in the existing INVERSE code for inverse problems, but a head-to-head comparison of inverse methods was not achieved. We also derived and implemented the capability to compute sensitivities for multiplicity measurements into the SENSMG code, and this capability was used in a data assimilation application, but it was not used for solving inverse problems. With regard to (iii), developing benchmarks to demonstrate the importance of high-order sensitivity and uncertainty analysis, the most significant accomplishment of this project were two test problems that showed how important second-order sensitivities are.

07 ISOTOPE AND RADIATION SOURCES↗

Tribal Renewable Energy: Bishop Paiute Tribe, Residential Solar Program Phase II (Final Report)

The project consisted of the design, installation, inspection, and interconnection of 35 grid-tied, solar electric systems, totaled 123 kW rated capacity, on qualified existing low-income single-family homes located within the Bishop Paiute Reservation, which provide at least 65-79% savings in displaced electricity. Tribal job trainees were hired for each installation, gaining valuable job experience. Additionally, each homeowner was educated on energy efficiency and renewable energy. The overall project goal was to deploy clean energy systems in order to achieve the Bishop Paiute Tribe’s long-term goals of energy self-sufficiency, environmental protection, and better lives for our Tribal members and community. The energy displaced was 82.4 percent of total electricity used (exceeding estimated 65-79%)or over 170,000 kWh/year generating approximately $1.29 million worth of power for low-income families over their lifespans, while eliminating an estimated 2,640 tons of greenhouse gas emissions. This reduction makes a significant difference on the reservation giving more families money to spend on other essential items, while reducing their carbon footprint in this beautiful mountain community. Also, implementing these 35 systems provided a approximately 132 hours of paid solar installation work for tribal members. Training and good paying jobs are scarce on the reservation and solar is the fastest growing industry in CA and this training offered our members a real chance to learn and then get paid. The program is very significant to the family who qualified, as most families fall below the federal poverty guidelines, and many are living paycheck to paycheck. Overall, the triple impact of the Bishop Paiute Tribe Residential Solar Program Phase II— affordable energy for low-income families, on-site clean energy production, and hands-on solar installation jobs for local workers—these all help build the Tribe’s energy, economic, environmental, and social self-sufficiency and sovereignty amongst the most needy on the Reservation

14 SOLAR ENERGY↗

Q-balls meet fuzzballs: non-BPS microstate geometries

We construct a three-parameter family of non-extremal microstate geometries, or “microstrata”, that are dual to states and deformations of the D1-D5 CFT. These families are non-extremal analogues of superstrata. We find these microstrata by using a Q-ball-inspired Ansatz that reduces the equations of motion to solving for eleven functions of one variable. We then solve this system both perturbatively and numerically and the results match extremely well. We find that the solutions have normal mode frequencies that depend upon the amplitudes of the excitations. We also show that, at higher order in perturbations, some of the solutions, having started with normalizable modes, develop a “non-normalizable” part, suggesting that the microstrata represent states in a perturbed form of the D1-D5 CFT. This paper is intended as a “Proof of Concept” for the Q-ball-inspired approach, and we will describe how it opens the way to many interesting follow-up calculations both in supergravity and in the dual holographic field theory.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

Experimental Realization of One-Dimensional Helium

Abstract As the spatial dimension is lowered, locally stabilizing interactions are reduced, leading to the emergence of strongly fluctuating phases of matter without classical analogues. Realizing 1D platforms has been elusive, due to their inherent lack of stability, with a few notable exceptions such as spin chains and ultracold low-density gasses. The inability of such systems to exhibit long range order is essential to their universal description in terms of the Tomonaga-Luttinger liquid theory. Here we report on the experimental observation of a one-dimensional quantum liquid of $$^4$$ 4 He using nanoengineering to confine it within a porous material preplated with a noble gas to enhance dimensional reduction. The resulting excitations of the confined $$^4$$ 4 He, confirmed by neutron scattering, are qualitatively different than three- and two-dimensional superfluid helium, and consistent with Quantum Monte Carlo calculations. The results can be analyzed in terms of a mobile impurity in an otherwise linear Luttinger liquid allowing for the extraction of the microscopic parameters describing the emergent quantum liquid.

Sokol, Paul E.↗

Improved single-particle phase-space distributions for viscous fluid dynamic models of relativistic heavy ion collisions

Comparison of hydrodynamic calculations with experimental data inevitably requires a model for converting the fluid to particles. For shear viscous fluids, several different conversion models have been proposed, such as the quadratic Grad corrections, the Strickland-Romatschke (SR) ansatz, self-consistent shear corrections from linearized kinetic theory, or corrections from the relaxation time approach. We show, via comparison to nonlinear 2 → 2 kinetic theory evolution, that even for low specific shear viscosities 0.03 ≲ $\textit{η/s}$ ≲ 0.2 , these four models have varying accuracy and still significant errors in reproducing particle phase space densities from hydrodynamic fields. Moreover, we demonstrate that the overall reconstruction error of additive shear viscous $f = f_{eq} + δf$ models dramatically reduces by up to one order of magnitude, if one ensures through exponentiation that $\textit{f}$ is always positive. Further, we also illustrate how even more accurate viscous $\textit{δf}$ models can be constructed by incorporating the first time derivatives of hydrodynamic fields to account for the past evolution of the system. Such time derivatives are readily available in hydrodynamic simulations, though usually not included in the output. Though our comparisons are limited to a one-component massless system undergoing a (0 + 1)-dimensional (0 + 1D) longitudinal boost-invariant expansion, we expect that the improved models will be useful in 2 + 1D and 3 + 1D hydrodynamic studies as well.

73 NUCLEAR PHYSICS AND RADIATION PHYSICS↗

Risk-Constrained Reinforcement Learning for Inverter-Dominated Power System Controls

Here, this paper develops a risk-aware controller for grid-forming inverters (GFMs) to minimize large frequency oscillations in GFM inverter-dominated power systems. To tackle the high variability from loads/renewables, we incorporate a mean-variance risk constraint into the classical linear quadratic regulator (LQR) formulation for this problem. The risk constraint aims to bound the time-averaged cost of state variability and thus can improve the worst-case performance for large disturbances. The resulting risk-constrained LQR problem is solved through the dual reformulation to a minimax problem, by using a reinforcement learning (RL) method termed as stochastic gradient-descent with max-oracle (SGDmax). In particular, the zero-order policy gradient (ZOPG) approach is used to simplify the gradient estimation using simulated system trajectories. Numerical tests conducted on the IEEE 68-bus system have validated the convergence of our proposed SGDmax for GFM model and corroborate the effectiveness of the risk constraint in improving the worst-case performance while reducing the variability of the overall control cost.

Frequency control↗

Adapting Quantum Approximation Optimization Algorithm (QAOA) for Unit Commitment

In the present Noisy Intermediate-Scale Quantum (NISQ), hybrid algorithms that leverage classical resources to reduce quantum costs are particularly appealing. We formulate and apply such a hybrid quantum-classical algorithm to a power system optimization problem called Unit Commitment, which aims to satisfy a target power load at minimal cost. Our algorithm extends the Quantum Approximation Optimization Algorithm (QAOA) with a classical minimizer in order to support mixed binary optimization. Using Qiskit, we simulate results for sample systems to validate the effectiveness of our approach. Here, we also compare to purely classical methods. Our results indicate that classical solvers are effective for our simulated Unit Commitment instances with fewer than 400 power generation units. However, for larger problem instances, the classical solvers either scale exponentially in runtime or must resort to coarse approximations. This opens the door to potential quantum advantage for systems with several hundred units, though quantum error correction may be necessary at this scale.

42 ENGINEERING↗

Delta-Rice: A HDF5 Compression Plugin optimized for Digitized Detector Data

Delta-Rice is an HDF5 (The HDF Group et al., 2020) filter plugin that was developed to compress digitized detector signals recorded by the Nab experiment (Fry et al., 2019), a fundamental neutron physics experiment. This is a two-step process where incoming data is passed through a pre-processing filter and then compressed with Rice coding. A routine for determining the optimal pre-processing filter for a dataset is provided along with an example GPU deployment. When applied to data collected by the Nab data acquisition system, this method produced output files 29% their initial size, and was able to do so with an average read/write throughput in excess of 2 GB/s on a single CPU. Compared to the widely used Gzip compression routine, Delta-Rice reduces the file size by 33% more with over an order of magnitude increase in read/write throughput. Delta-Rice is available on CPU to users through the HDF5 library.

97 MATHEMATICS AND COMPUTING↗

(Project 18-15502) Reducing Uncertainty in Radionuclide Transport Prediction Using Multiple Environmental Tracers (Final Report)

In order to successfully site and design a nuclear waste disposal facility, DOE scientists are required to show safe containment of the radioactive waste for up to 1 million years. A significant hurdle to accurately and convincingly demonstrating disposal safety is predicting the fate of radioactive elements once they enter the groundwater system surrounding the repository. These predictions are often made with computer models, which contain accurate physics of groundwater movement and chemical reactions that occur during groundwater flow. As computer power increases, the physics and chemistry of these computer simulators can become more and more realistic and the physically based error decreases. However, the ability of these computer models to provide accurate predictions in a specific place, over long time periods, requires the scientists and engineers to know the subsurface properties of the Earth that control groundwater movement. In particular, groundwater scientists and engineers need to know the groundwater fluid velocity, which can change over time and strongly vary with location within the groundwater system. Because the Earth’s subsurface cannot be directly seen, and can only be sampled at drilling locations, the properties of the groundwater system are never known completely, and computer models of groundwater transport will always have some amount of uncertainty. This project’s principal goal was to use chemicals and isotope “tracers”, which have been introduced to the groundwater system by natural processes over long time periods, to help inform computer models of the groundwater velocity and subsurface properties. The goal was to calculate how much better predictions of groundwater transport were when these “tracers” were used to inform the computer models.

12 MANAGEMENT OF RADIOACTIVE AND NON-RADIOACTIVE W↗

Zero-pairing and zero-temperature limits of finite-temperature Hartree-Fock-Bogoliubov theory

Recently, variational Hartree-Fock-Bogoliubov (HFB) mean-field equations were shown to possess a mathematically well-defined zero-pairing limit, independently of the closed- or open-shell character of the system under consideration. This limit is non-trivial for open-shell systems such that HFB theory does {\it not} reduce to the Hartree-Fock (HF) formalism in all cases. The present work extends this analysis to finite-temperature HFB (FTHFB) theory by investigating the behavior of this more general formalism in the combined zero-temperature and zero-pairing limits. The zero-pairing and zero-temperature limits of the FTHFB statistical density operator constrained to carry an arbitrary (integer) number of particles A on average is worked out analytically and realized numerically using a two-nucleon interaction. While the FTHFB density operator reduces to the projector corresponding to a pure HF Slater determinant for closed-shell nuclei, the FTHFB formalism does not reduce to the HF theory in all cases in the zero-temperature and zero-pairing limits, i.e. for open-shell nuclei. However, the fact that a nucleus can be of open-shell character in these joint limits is necessarily the result of some symmetry restrictions. Whenever it is the case, the non-trivial description obtained for open-shell systems is shown to depend on the order with which both limits are taken, i.e. the two limits do not commute for these systems. When the zero-temperature limit is performed first, the FTHFB density operator is demoted to a projector corresponding to a pure state made out of a linear combination of a finite number of Slater determinants with different (even) numbers of particles. When the zero-pairing limit is performed first, the FTHFB density operator remains a statistical mixture of a finite number of Slater determinants with both even and odd particle numbers. While the entropy (pairing density) is zero in the first (second) case, it does not vanish in the second (first) case in spite of the temperature (pairing) tending towards zero. The difference between both limits can have striking consequences for the (thermal) expectation values of observables. For instance, the particle-number variance does not vanish in either case and has limiting values that differ by a factor of two in both cases. In conclusion, while in the textbook situation associated with closed-shell nuclei Hartree-Fock-Bogoliubov (finite-temperature Hartree-Fock) theory reduces to Hartree-Fock theory in the zero-pairing (zero-temperature) limit, the present analysis demonstrates that a non trivial and unexpected limit is obtained for this formalism in open-shell systems. This result sheds a new light on certain aspects of this otherwise very well-studied many-body formalism.

20 ≤ A ≤ 38↗

A co-kurtosis PCA based dimensionality reduction with nonlinear reconstruction using neural networks

For turbulent reacting flow systems, identification of low-dimensional representations of the thermo-chemical state space is vitally important, primarily to significantly reduce the computational cost of device-scale simulations. Principal component analysis (PCA), and its variants, are a widely employed class of methods. Recently, an alternative technique that focuses on higher-order statistical interactions, co-kurtosis PCA (CoK-PCA), has been shown to effectively provide a low-dimensional representation by capturing the stiff chemical dynamics associated with spatiotemporally localized reaction zones. While its effectiveness has only been demonstrated based on a priori analyses with linear reconstruction, in this work, we employ nonlinear techniques to reconstruct the full thermo-chemical state and evaluate the efficacy of CoK-PCA compared to PCA. Specifically, we combine a CoK-PCA-/PCA-based dimensionality reduction (encoding) with an artificial neural network (ANN) based reconstruction (decoding) and examine, a priori, the reconstruction errors of the thermo-chemical state. In addition, we evaluate the errors in species production rates and heat release rates, which are nonlinear functions of the reconstructed state, as a measure of the overall accuracy of the dimensionality reduction technique. We employ four datasets to assess CoK-PCA/PCA coupled with ANN-based reconstruction: zero-dimensional (homogeneous) reactor for autoignition of an ethylene/air mixture that has conventional single-stage ignition kinetics, a dimethyl ether (DME)/air mixture which has two-stage (low and high temperature) ignition kinetics, a one-dimensional freely propagating premixed ethylene/air laminar flame, and a two-dimensional dataset representing turbulent autoignition of ethanol in a homogeneous charge compression ignition (HCCI) engine. Finally, results from the analyses demonstrate the robustness of the CoK-PCA based low-dimensional manifold with ANN reconstruction in accurately capturing the data, specifically from the reaction zones.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Si–Cl 2 –Ar + Atomic Layer Etching Window: A Fundamental Study Using Molecular Dynamics Simulations and a Reduced Order Model

Silicon (Si) atomic layer etching (ALE) by alternating exposure to chlorine gas (Cl 2 ) and argon ions (Ar + ) is studied by using molecular dynamics (MD) simulations and a reduced order model (ROM). Here, the purpose of this study is to elucidate the properties of the ALE window, a range of ion energies where the amount of Si etched over a series of cycles is nonzero and nearly independent of ion energy. Experimental studies of the Si–Cl 2 –Ar + ALE system report contradictory results related to the ALE window’s ion energy range. Both MD simulations and the ROM show that there is an ALE window present from approximately 15 to 20 eV for normal incidence argon ions. The Si–Cl 2 –Ar + system, therefore, exhibits a narrow ALE window. The amount of Si etched per cycle is less than one atomic layer because of the higher etch yield of Cl atoms relative to atomic Si and silicon chlorides. A modified version of the ROM with an artificially increased Si physical sputtering threshold energy expands the ALE window, illustrating the importance of the difference in chemical and physical sputtering threshold energies in the ALE window energy range. The ROM is also used to examine the dependence of the EPC on the Ar + ion fluence.

energy↗