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At least 541 records · Page 30

Plasma etching of wide bandgap and ultrawide bandgap semiconductors

The precise patterning of front-side mesas, backside vias, and selective removal of ternary alloys are all needed for power device fabrication in the various wide bandgap (AlGaN/GaN, SiC) and ultrawide bandgap (high Al-content alloys, boron nitride, Ga2O3, diamond) semiconductor technologies. The plasma etching conditions used are generally ion-assisted because of the strong bond strengths in these materials, and this creates challenges for the choice of masks in order to have sufficient selectivity over the semiconductor and to avoid mask erosion and micromasking issues. It can also be challenging to achieve practical etch rates without creating excessive damage in the patterned surface. The authors review the optimum choices for plasma chemistries for each of the semiconductors and acknowledge the pioneering work of John Coburn, who first delineated the ion-assisted etch mechanism.

42 ENGINEERING↗

Deposition and dielectric characterization of highly oriented V 2 O 5 thin films

The possibility of ferroelectricity in orthorhombic V 2 O 5 thin flms was investigated. Films were deposited via either a chemical solution deposition (CSD) route or by RF magnetron sputtering. Highly (001) oriented V 2 O 5 flms were achieved with both deposition routes at temperatures as low as 300°C. No evidence for ferroelectricity was observed, even in flms which had been doped to provide local nuclei for polarization reversal. Loss originated from mid-gap trap states stemming from oxygen vacancies that were observed with photoluminescence, supplemented by piezoresponse force microscopy measurements. Furthermore, these trap states may have helped mimic ferroelectricity in previous reports on V 2 O 5 .

36 MATERIALS SCIENCE↗

A study of the microstructure and optical properties of thin lead-dielectric cermet films

A transmission electron microscopy study involving direct and replicating techniques is directed to a definition of the microstructure of radio frequency-sputtered, thin lead-dielectric cermet films. Once defined, this microstructure is used to obtain theoretical film refractive indices. The Maxwell Garnett theory provides a basis for the theoretical results. Measurements of film transmission and reflectivity are used to obtain rough experimental values for film refractive indices by the Tekucheva method. More exact values are obtained via ellipsometry. The rough Tekucheva values are used to determine the range over which computer calculations interpreting the ellipsometric results must be made. This technique yields accurate values for the film refractive indices.

Owen, R. B.↗

Electron radiation effects on time-dependent dielectric breakdown in SiO2 films

An experiment testing the effect of ionizing radiation on breakdown characteristics of SiO2 films is presented. Silicon wafers were oxidized and metallized, and a capacitor array was etched into a control sample while the rest were first irradiated with 1 MeV electrons and then etched. Time-dependent dielectric tests were made on all the capacitors, and the average characteristics of 96 capacitors are illustrated graphically. The curves are consistent with the model of holes trapped in the SiO2 film during irradiation leading to a retarding field for positive ion emission and drift toward the interface. It is shown how an externally applied field is reduced by the trapped charge, and that changes in the dielectric breakdown properties of the SiO2 film after irradiation depend on the positive trapped charge near the metal interface.

Li, S. P.↗

Pulsed plane wave analytic solutions for generic shapes and the validation of Maxwell's equations solvers

Generic shapes are subjected to pulsed plane waves of arbitrary shape. The resulting scattered electromagnetic fields are determined analytically. These fields are then computed efficiently at field locations for which numerically determined EM fields are required. Of particular interest are the pulsed waveform shapes typically utilized by radar systems. The results can be used to validate the accuracy of finite difference time domain Maxwell's equations solvers. A two-dimensional solver which is second- and fourth-order accurate in space and fourth-order accurate in time is examined. Dielectric media properties are modeled by a ramping technique which simplifies the associated gridding of body shapes. The attributes of the ramping technique are evaluated by comparison with the analytic solutions.

Yarrow, Maurice↗

Ground truth measurement for the analysis of airborne SAR data recorded over Oberpfaffenhofen, FRG, 1989

As a preliminary investigation to the joint multiparameter SIR-C/X-SAR shuttle experiment of NASA/JPL (USA), DLR (FRG), and PSN (Italy) which is scheduled for the year 1992 an airborne SAR campaign was conducted over Oberpfaffenhofen, FRG, in August 1989. Primarily this campaign was planned to test and verify equipment and algorithms developed at the DLR to calibrate multifrequency polarimetric SAR data. Oberpfaffenhofen is designated as one of the super test sites for the SIR-C/X-SAR experiment which will be imaged under all circumstances except severe mission errors. A super test site drives radar parameters and look directions and the recorded SAR data will be calibrated. In addition ancillary data will be available for the site. During the airborne STAR campaign conducted in the week of August 14th 1989 various sensor types were used to record remote sensing data over the calibration test site and its vicinity: the polarimetric DC-8 JPL-SAR (P-, L-, C-band), the DLR airborne SAR (C-, X-band), color infrared aerial photography (DLR), and the truck-mounted scatterometer (C- and X-band) of the Institute for Navigation, University of Stuttgart (INS). Because of this variety of different sensor types used and out of the fact that sufficiently large forested and agriculturally used areas were planned to be covered by these sensors, the interest of several German research groups involved in investigations concerning SAR land applications arose. The following groups carried out different ground-truth measurements: University of Bonn, Institute for plant cultivation (plant morphology and moisture content); University of Braunschweig, Institute for Geography (soil moisture and surface roughness); University of Freiburg, Institute for Geography (dielectric soil properties, landuse); and University of Munich, Institute for Geography (landuse inventory, plant, surface, and soil parameters). This paper presents the joint ground truth activities of the Institute for Geography, University of Munich, and the German Remote Sensing Data Center of the DLR.

Bayer, T.↗

Packaging Technologies for 500 C SiC Electronics and Sensors: Challenges in Material Science and Technology

This paper presents ceramic substrates and thick-film metallization based packaging technologies in development for 500C silicon carbide (SiC) electronics and sensors. Prototype high temperature ceramic chip-level packages and printed circuit boards (PCBs) based on ceramic substrates of aluminum oxide (Al2O3) and aluminum nitride (AlN) have been designed and fabricated. These ceramic substrate-based chip-level packages with gold (Au) thick-film metallization have been electrically characterized at temperatures up to 550C. The 96 alumina packaging system composed of chip-level packages and PCBs has been successfully tested with high temperature SiC discrete transistor devices at 500C for over 10,000 hours. In addition to tests in a laboratory environment, a SiC junction field-effect-transistor (JFET) with a packaging system composed of a 96 alumina chip-level package and an alumina printed circuit board was tested on low earth orbit for eighteen months via a NASA International Space Station experiment. In addition to packaging systems for electronics, a spark-plug type sensor package based on this high temperature interconnection system for high temperature SiC capacitive pressure sensors was also developed and tested. In order to further significantly improve the performance of packaging system for higher packaging density, higher operation frequency, power rating, and even higher temperatures, some fundamental material challenges must be addressed. This presentation will discuss previous development and some of the challenges in material science (technology) to improve high temperature dielectrics for packaging applications.

dielectric properties↗

Prediction of Dielectric Constant in Series of Polymers by Quantitative Structure-Property Relationship (QSPR)

This work is devoted to the investigation of dielectric permittivity which is influenced by electronic, ionic, and dipolar polarization mechanisms, contributing to the material’s capacity to store electrical energy. In this study, an extended dataset of 86 polymers was analyzed, and two quantitative structure–property relationship (QSPR) models were developed to predict dielectric permittivity. From an initial set of 1273 descriptors, the most relevant ones were selected using a genetic algorithm, and machine learning models were built using the Gradient Boosting Regressor (GBR). In contrast to Multiple Linear Regression (MLR)- and Partial Least Squares (PLS)-based models, the gradient boosting models excel in handling nonlinear relationships and multicollinearity, iteratively optimizing decision trees to improve accuracy without overfitting. The developed GBR models showed high R2 coefficients of 0.938 and 0.822, for the training and test sets, respectively. An Accumulated Local Effect (ALE) technique was applied to assess the relationship between the selected descriptors—eight for the GB_A model and six for the GB_B model, and their impact on target property. ALE analysis revealed that descriptors such as TDB09m had a strong positive effect on permittivity, while MLOGP2 showed a negative effect. These results highlight the effectiveness of the GBR approach in predicting the dielectric properties of polymers, offering improved accuracy and interpretability.

Ascencio-Medina, Estefania↗

Concentric Coplanar Capacitive Sensor System with Quantitative Model

A concentric coplanar capacitive sensor includes a charged central disc forming a first electrode, an outer annular ring coplanar with and outer to the charged central disc, the outer annular ring forming a second electrode, and a gap between the charged central disc and the outer annular ring. The first electrode and the second electrode may be attached to an insulative film. A method provides for determining transcapacitance between the first electrode and the second electrode and using the transcapacitance in a model that accounts for a dielectric test piece to determine inversely the properties of the dielectric test piece.

Bowler, Nicola↗

Spiral configuration of electrodes and dielectric material for sensing an environmental property

A reliable moisture-indicating capactive sensor is provided with wire electrodes at least one of which includes a coating of moisture-absorbing dielectric material by spirally twisting the wire electrodes about each other, thereby establishing a pair of electrodes in contact with opposite surfaces of a layer of dielectric material, and assuring consistent contact of each electrode with the dielectric material despite changes in environmental conditions.

Laue, Eric G.↗

Propagation and application of waves in the ionosphere.

This review deals with the propagation of waves, especially radio waves in the ionosphere. In the macroscopic electromagnetic theory, the mathematical structure of wave propagation problems depends entirely on the properties of the dielectric operator in a magnetically nonpermeable medium. These properties can be deduced from general discussions of symmetry and considerations of physical principles. When the medium is specifically the ionosphere, various physical phenomena may occur. Because of a large number of parameters, it is desirable to define a parameter space. A point in the parameter space corresponds to a specific plasma. The parameter space is subdivided into regions whose boundaries correspond to conditions of resonance and cutoff. As the point crosses these boundaries, the refractive index surface transforms continuously.

Yeh, K. C.↗

Electrostatic measurement system

A system for and method of contact-electrifying a dielectric to determine its electrostatic properties is described. The dielectric is placed in contact with a contact plate means, and connected to a voltage source means to charge the contact plate and to contact-electrify the dielectric. The contact plate means is disconnected from the voltage source and a charge sensor means monitors the rate of decay of the charge on the dielectric. If a conductive path from the contact plate to ground is desired, a lead may be connected between the conductor and ground. Automatic timing and charge monitoring are preferred for maximum accuracy, especially where dielectrics treated with antistatic agents are tested.

Johnston, J. E.↗

The anomalous thermal properties of glasses at low temperatures

While experimentally there is great regularity below 1 deg K in the behavior of a particular thermal property for all amorphous dielectrics it is not understood why these properties should differ from those of crystalline dielectrics, since it would seem that at low temperatures long-wavelength elastic waves, similar in both cases, would determine the thermal properties. A model involving systems having very few levels is used in the present study, although the relation between the model's systems and the nature of the glassy state is not known. It is shown, among other effects, that: specific heat measurements above 0.1 K indicate a distribution of local modes independent of energy; ultrasonic velocity measurements give information about phonon-local mode coupling parameters; and thermal expansion and far infrared experiments indicate a phonon-assisted tunneling model.

Pohl, R. O.↗

Interactions of light with rough dielectric surfaces - Spectral reflectance and polarimetric properties

The nature of the interactions of visible and NIR radiation with the surfaces of rock and mineral samples was investigated by measuring the reflectance and the polarization properties of scattered and reflected light for slab samples of obsidian and fine-grained basalt, prepared to controlled surface roughness. It is shown that the degree to which radiation can penetrate a surface and then scatter back out, an essential criterion for mineralogic determinations based on reflectance spectra, depends not only upon the composition of the material, but also on its physical condition such as sample grain size and surface roughness. Comparison of the experimentally measured reflectance and polarization from smooth and rough slab materials with the predicted models indicates that single Fresnel reflections are responsible for the largest part of the reflected intensity resulting from interactions with the surfaces of dielectric materials; multiple Fresnel reflections are much less important for such surfaces.

Yon, S. A.↗

Monitoring Depolymerization in Mesopores Using Dynamic Properties of Polymeric Melt Accessed via Dielectric Spectroscopy

Traditional design principles for heterogeneous catalysis guide the use of catalytic particles with mesosized (∼2–50 nm) pores to increase the number of surface-active sites by way of an increased surface area. However, the entry of long-chain polymers into such pores may be significantly limited by the size and entanglement of polymers in the melt state, thereby decreasing the number of accessible sites. Assessment of catalyst performance from traditional reactor-based studies averages over intrapore reaction events as well as reactions on the surface of a particle, resulting in an inability to distinguish between differences in site accessibility and activity. Techniques that assess the intrapore performance can inform the design of future heterogeneous catalysts for polymer upcycling. In this work, we demonstrate the use of broadband dielectric spectroscopy to monitor depolymerization of a polymer melt within mesopores via changes in the segmental relaxation time scale of amorphous polymer chains. In particular, we highlight the use of an anodic aluminum oxide (AAO) membrane as a readily available model for catalyst pores with a well-characterized pore morphology. The decrease in the segmental relaxation (α-relaxation) time of the melt with increasing chain scission emerges as a measure of the extent of polymer deconstruction inside mesopores. To demonstrate the utility of this technique, we demonstrate the decomposition of two commercial poly(propylene carbonate) polymers with different decomposition rates within mesopores. As the polymers depolymerize, their segmental relaxation time decreases as the molecular weight decreases (as predicted by the Fox–Flory equation). The BDS-measured change in segmental relaxation time mirrors the expected trend based on change in molecular weight measured by size exclusion chromatography.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

Scattering from perfectly conducting and resistive strips on a grounded dielectric slab

The scattering properties of perfectly conducting and resistive strips are predicted for strips which are located on a dielectric slab backed by a perfectly conducting ground plane. The spectral domain Green's function is used to relate the currents and fields on the strip, and the resulting integral equation is solved using the method of moments. Both TE and TM strips are examined using piecewise linear and pulse subdomain basis functions, respectively, to model the current on the strip. Calculated results are compared with results measured at the NASA Langley Research Center.

PULSE SUBDOMAIN BASIS FUNCTION↗