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At least 55 records · Page 3

Preliminary 3D Simulations of Anomalous Thermocouple Coupling to Surface Electric Fields

Anomalous measurements from subsurface thermocouples have been observed during re-entry of the Orion capsule (EFT-1 plugs). These measurements are considered anomalous because the amplitude and frequency of the inferred temperature modulations are too large to be due to plausible heating processes. Consequently, it is believed the anomalies are caused by electrical interference generated by the re-entry plasma. Quantifying these effects requires several steps: modeling the external plasma flows, modeling the plasma-surface interaction, and finally modeling the surface-thermocouple coupling. This paper addresses this last step using 3D finite element simulations of a wire embedded in a weakly conductive medium.

thermocouple anomaly

Experimental breakdown of selected anodized aluminum samples in dilute plasmas

Anodized aluminum samples representative of Space Station Freedom structural material were tested for electrical breakdown under space plasma conditions. In space, this potential arises across the insulating anodized coating when the spacecraft structure is driven to a negative bias relative to the external plasma potential due to plasma-surface interaction phenomena. For anodized materials used in the tests, it was found that breakdown voltage varied from 100 to 2000 volts depending on the sample. The current in the arcs depended on the sample, the capacitor, and the voltage. The level of the arc currents varied from 60 to 1000 amperes. The plasma number density varied from 3 x 10 exp 6 to 10 exp 3 ions per cc. The time between arcs increased as the number density was lowered. Corona testing of anodized samples revealed that samples with higher corona inception voltage had higher arcing inception voltages. From this it is concluded that corona testing may provide a method of screening the samples.

Grier, Norman T.

Plasma variables and tribological properties of coatings in low pressure (0.1 - 10.0 torr) plasma systems

A detailed treatment is presented of the dialog known as plasma surface interactions (PSI) with respect to the coating process and its tribological behavior. Adsorption, morphological changes, defect formation, sputtering, chemical etching, and secondary electron emission are all discussed as promoting and enhancing the surface chemistry, thus influencing the tribological properties of the deposited flux. Phenomenological correlations of rate of deposition, flux composition, microhardness, and wear with the plasma layer variables give an insight to the formation of chemical bonding between the deposited flux and the substrate surface.

Avni, R.

Surrogate models to optimize plasma-assisted atomic layer deposition in high aspect ratio features

In this work, we explore surrogate models to optimize plasma enhanced atomic layer deposition (PEALD) in high aspect ratio features. In plasma-based processes such as PEALD and atomic layer etching (ALE), surface recombination can dominate the reactivity of plasma species with the surface, which can lead to unfeasibly long exposure times to achieve full conformality inside nanostructures like high aspect ratio vias. Using a synthetic dataset based on simulations of PEALD, we train artificial neural networks to predict saturation times based on cross section thickness data obtained for partially coated conditions. The results obtained show that just two experiments in undersaturated conditions contain enough information to predict saturation times within 10% of the ground truth. A surrogate model trained to determine whether surface recombination dominates the plasma–surface interactions in a PEALD process achieves 99% accuracy. This demonstrates that machine learning can provide a new pathway to accelerate the optimization of PEALD processes in areas such as microelectronics. Our approach can be easily extended to ALE and more complex structures.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Center for Tokamak Transient Simulations (RPI Unstructured Mesh Developments for FES SciDAC4 Partnerships) (Final Report)

The goal of this project was the development of unstructured mesh technologies for fusion simulation codes” for FES SciDAC partnerships and to integrate those technologies into the simulation workflows of those partnerships. Specific developments were executed in support of the following FES SciDAC4 partnerships: Partnership Center for High‐fidelity Boundary Plasma Simulation (HBPS), Center for Integrated Simulation of Fusion Relevant RF (RF‐SciDAC), Center for Plasma Surface Interactions: Predicting the Performance and Impact of Dynamic PFC Surfaces (PSI2), and Center for Tokamak Transient Simulations (CTTS). The key unstructured mesh development areas addressed in this project include (i) methods to most effectively perform PIC calculations on unstructured meshes; (ii) creating meshes for fusion systems accounting for any desired level of geometric complexity and providing physics aware mesh configurations, (iii) adapting unstructured meshes to control the discretization errors, (iv) executing unstructured mesh calculations on GPU accelerated systems, (v) supporting physics/application‐specific PIC operations including surface/wall interactions of particles, (vi) providing infrastructure tools to support the interactions of solvers with unstructured meshes, and (vii) providing advanced methods for coupling plasma physics codes.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Recent progress in atomic-scale controlled plasma processing

Atomic-scale control in plasma processing is becoming increasingly critical for fabricating of advanced semiconductor devices, particularly as the industry shifts toward three-dimensional (3D) architectures and high-aspect-ratio (HAR) structures. This review presents a comprehensive overview of recent developments in atomic-scale controlled plasma processes, organized along two key directions: the hierarchical structure of plasma–surface interactions and the generational evolution of atomic layer processing (ALP) technologies. We examined the gas phase, where molecular design enables selective generation of ions and radicals; the boundary layer, where transport phenomena govern species delivery into nanoscale features, and the surface, where temperature-dependent reactions and cyclic processing determine etching selectivity and precision. Building on this foundation, we outline five generations of ALP—from thermal atomic layer deposition to transport-aware, temporally and structurally decoupled processes—highlighting the increasing sophistication of process control. The review further explores the transition from empirical recipe development to science-based, data-driven methodologies. By integrating quantum-chemical modeling, advanced diagnostics, and machine learning, we demonstrated how predictive models can link plasma species composition to process outcomes, enabling autonomous and adaptive control strategies. Finally, this review discusses the broader societal implications of plasma process innovation through the E4 quartet: energy and resource efficiency, environmental sustainability, evolutionary advancement, and educational promotion. These principles guide the development of sustainable and intelligent atomic-scale manufacturing technologies that are not only technically advanced but also socially responsible.

Ishikawa, Kenji [Nagoya Univ. (Japan)] (ORCID:0000

A neural master equation framework for multiscale modeling of molecular processes: application to atomic-scale plasma processes

Plasma-surface interactions (PSI) play a crucial role in microelectronics fabrication; however, their multiscale nature and array of complex, often unknown interactions make computational modeling of PSIs extremely difficult. To this end, we propose a general neural master equation (NME) framework that uses master equations to describe the dynamics of a molecular process, wherein neural networks learned from atomistic simulations represent unknown transitions between different system states. By leveraging the physics-based structure of master equations and data-driven state transitions, the NME framework promotes generalizability and physics interpretability, and can bridge disparate length and time scales. The framework is demonstrated for multiscale modeling of Si atomic layer etching and reactive ion etching, where the learned NME-based surface kinetic models exhibit good predictive and extrapolative capabilities for predicting experimentally relevant observables as a function of process parameters. The NME-based surface kinetic models obey physical constraints, which are violated in models based on neural ordinary differential equations. The proposed NME framework for multiscale modeling of molecular processes can pave the way for the discovery of new chemistries and materials in atomic-scale plasma processes.

Chemical engineering

Development of a deep potential model for F and CF 2 etching of Si and SiO 2

An understanding of plasma-surface interactions at increasingly smaller scales is invaluable for the development of novel technologies and processing techniques. Molecular dynamics (MD) simulations can provide insights into atomic-scale interactions, though they are restricted by the availability of interatomic potentials. Machine learning methods, such as Deep Potential Molecular Dynamics (DeepMD), provide a systematic framework for the development of accurate and flexible ab initio-based models. In this work, we develop DeepMD models for the ion-enhanced etching of Si and SiO 2 by F and CF 2 radicals. We employ an active learning process to expand the data set on which the model is trained and demonstrate its effect on the model accuracy. The DeepMD results are compared to data from classical MD simulations and experiments. Physical sputtering yields of SiO 2 by Ar + ions show good agreement with previous simulation results using conventional interatomic potentials, though the predicted depth profiles are different. Etching yields are calculated as a function of ion energy and neutral to ion flux ratio for the Ar + ion-enhanced etching of SiO 2 and Si by F atoms, as well as for etching of SiO 2 by CF 2 radicals, showing reasonable agreement with experimental data. Finally, an ion-enhanced surface kinetic model is fitted to the DeepMD etch yields, and the fitted parameters are compared to quantities computed directly from DeepMD simulations. This study illustrates how molecular dynamics simulations using machine learning potentials can provide an accurate model of etching processes relevant to device manufacturing.

Kounis-Melas, Andreas [Princeton Univ., NJ (United

Effects of the Solar and Extraterrestrial Environments on Space Power Systems

Environments surrounding the major extraterrestrial bodies in the solar system and their interactions with spacecraft power systems are summarized. The environments associated with neutrals/dust, low energy plasma, and where applicable, magnetospheres are discussed for a wide variety of cases. The impact of these environments on power systems - in particular, radiation effects, spacecraft charging, plasma interactions, surface sputtering/erosion, and induced currents - are presented. As power systems must be designed to survive in these hostile environments, it is important that they be taken into account in planning future power systems.

Garrett, H. B.

Effect of argon and hydrogen on deposition of silicon from tetrochlrosilane in cold plasmas

The roles of Ar and H2 on the decomposition of SiCl4 in cold plasma were investigated by Langmuir probes and mass spectrometry. Decomposition of the reactant by Ar only has been found to be very slow. In presence of H2 in the plasma SiCl4 is decomposed by fast radical-molecule reactions which are further enhanced by Ar due to additional ion-molecule reactions in which more H radicals are produced. A model for the plasma-surface interactions during deposition of mu-Si in the Ar + H2 + SiCl4 system is presented.

Manory, R. R.

Direct Solar Wind Proton Access into Permanently Shadowed Lunar Polar Craters

Recent analyses of Lunar Prospector neutron spectrometer (LPNS) data have suggested that high abundances of hydrogen exist within cold traps at the lunar poles, and it has often been assumed that hydrogen-bearing volatiles sequestered in permanent shadow are topographically shielded from sputtering by solar wind protons. However, recent simulation results are presented showing that solar wind protons clearly access the floor of an idealized, shadowed lunar crater through a combination of thermal and ambipolar processes, in effect creating a plasma "miniwake". These simulations are the first to model the mini-wake environment in two spatial dimensions with a self-consistent lunar surface-plasma interaction. Progress is reported on constraining the nonzero particle fluxes and energies incident on kilometer-scale shadowed topography, such as a small crater embedded within a larger one. The importance of direct solar wind proton bombardment is discussed within the context of understanding the stability and inventory of hydrogen-bearing volatiles in shadow at the lunar poles. The support of the National Lunar Science institute, the DREAM institute, LPROPS, and the NASA Postdoctoral Program at NASA Goddard Space Flight Center administered by ORAU are gratefully acknowledged.

Zimmerman, M. I.

Measurement of material recession and shock standoff in plasma windtunnel using neural nets

Arcjets are plasma wind tunnels used to test the performance of heatshield materials for spacecraft atmospheric entry. These facilities present an extremely harsh flow environment with heat fluxes up to 10^9 W/m^2 for up to 30 minutes. The plasma is low-temperature (~1 eV) but high pressure (> 10 kPa) creating high-enthalpy supersonic flows similar to atmospheric entry conditions. Typically, material samples are measured before and after a test to characterize the total recession. However, this does not capture time-dependent effects such as material expansion and non-linear recession. This work will present new analysis of arcjet test videos which measure both the time-dependent 2D recession of the material samples and the shock standoff distance. New results showing non-linear material erosion rates will be highlighted. The material and shock edges are extracted from the videos by training and applying a convolutional neural network. Due to the consistent camera settings, the machine learning model achieves high accuracy (~99%) on new data with only a small number of training frames (~80). The new results will be discussed in the context of temperature dependent plasma-surface interaction.

Magnus A Haw

Observations of moon-plasma interactions by orbital and surface experiments

Extensive magnetic field observations together with crucial plasma measurements by the Explorer 35 lunar orbiter and Apollo surface and orbital experiments have established the basic nature of the moon's interaction with the solar wind and interplanetary magnetic field. The effective absorption of the incident solar wind by the moon creates a plasma void or cavity behind the moon. The cavity-associated magnetic signature is characterized by an enhancement in magnetic field magnitude B within the cavity as compared with the mean level of B in the surrounding interplanetary plasma and dips or decreases in B near the cavity boundaries with the solar wind. Apollo particle and field measurements on the lunar surface have provided evidence of a regional interaction of the highly conducting solar wind with lunar remanent magnetic fields. Simultaneous plasma and magnetic field data, from the spectrometer and the lunar surface magnetometer at the Apollo 12 location, show the compression of the local remanent field by large solar wind and magnetosheath plasma dynamic pressures.

Schubert, G.

Two-dimensional mapping of absolute OH densities in an atmospheric pressure plasma effluent via planar laser-induced fluorescence: effects of He/H 2 O and He/O 2 mixtures in N 2 and air, with and without solid targets

Planar laser-induced fluorescence (LIF) was employed to measure the absolute density of hydroxyl radicals (OH) in the effluent of the COST Reference Microplasma Jet for two feed gas mixtures: He/H 2 O and He/O 2 . Experiments were conducted with the effluent propagating into air and N 2 environments. For the He/H 2 O case, measurements were also performed with the effluent impinging on a solid target at varying distances from the jet nozzle. Calibration of the OH-LIF signal from the COST-Jet was achieved by comparing it to a reference signal generated by the photofragmentation of H 2 O 2 . Results demonstrated that OH densities were sustained longer when the effluent propagates in a nitrogen environment compared to air, particularly with water added to the feed gas. The broader OH distribution in N 2 suggests slower consumption due to the absence of oxygen, which accelerates OH depletion in air via reactions involving O 2 and HO 2 . Even when water was not added to the feed, as in the He/O 2 case, appreciable OH densities were observed, due to gas impurities and reactive species interactions with atmospheric humidity, forming reaction fronts that delineate the gas flow. Two-dimensional fluid dynamics simulations elucidated the influence of atmospheric gas entrainment and solid targets on the OH distribution. Experimental trends were further compared with a zero-dimensional chemistry model to explore OH production and consumption mechanisms in air and nitrogen environments.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

Interactions of surfaces with the solar plasma

The induced environment is the main source of contamination on a spacecraft. The contamination of surfaces by volatile condensable material (VCM) present on spacecraft is being studied by many investigators both in the laboratory and space. In addition to VCM, the space environment is also a contributing factor in the contamination of surfaces. The effects of the interaction of the solar plasma with surfaces is examined. Plasma particles impact at energies in the multi-kilovolt range and penetrate and become trapped in surfaces. Results show that protons can penetrate up to 600 monolayers into surfaces and reach saturation concentrations of 6%.

Mckeown, D.

Solar-Storm/Lunar Atmosphere Model (SSLAM): An Overview of the Effort and Description of the Driving Storm Environment

On 29 April 1998, a coronal mass ejection (CME) was emitted from the Sun that had a significant impact on bodies located at 1 AU. The terrestrial magnetosphere did indeed become more electrically active during the storm passage but an obvious question is the effect of such a storm on an exposed rocky body like our Moon. The solar-storm/lunar atmosphere modeling effort (SSLAM) brings together surface interactions, exosphere, plasma, and surface charging models all run with a common driver - the solar storm and CME passage occurring from 1-4 May 1998. We present herein an expanded discussion on the solar driver during the 1-4 May 1998 period that included the passage of an intense coronal mass ejection (CME) that had> 10 times the solar wind density and had a compositional component of He++ that exceeded 20%. We also provide a very brief overview oflhe SSLAM system layout and overarching results. One primary result is that the CME driver plasma can greatly increase the exospheric content via sputtering, with total mass loss rates that approach 1 kg/s during the 2-day CME passage. By analogy, we suggest that CME-related sputtering increases might also be expected during a CME passage by a near-earth asteroid or at the Mars exobase, resulting in an enhanced loss of material.

Farrell, W. M.

Dynamics of electrified liquid surface during plasma-liquid interaction

The research goal of this Department of Energy (DOE) Office of Fusion Energy Science (OFES) project was to investigate the electrified liquid surface dynamics using a shallow water model. The project was an extension of the Princeton Collaborative Research Facility (PCRF) project to work with Dr. Mikhail Shneider at Princeton University.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY

The Plasma Interaction Experiment (PIX) description and test program

The plasma interaction experiment (PIX) is a battery powered preprogrammed auxiliary payload on the LANDSAT-C launch. This experiment is part of a larger program to investigate space plasma interactions with spacecraft surfaces and components. The varying plasma densities encountered during available telemetry coverage periods are deemed sufficient to determine first order interactions between the space plasma environment and the biased experimental surfaces. The specific objectives of the PIX flight experiment are to measure the plasma coupling current and the negative voltage breakdown characteristics of a solar array segment and a gold plated steel disk. Measurements will be made over a range of surface voltages up to plus or minus kilovolt. The orbital environment will provide a range of plasma densities. The experimental surfaces will be voltage biased in a preprogrammed step sequence to optimize the data returned for each plasma region and for the available telemetry coverage.

Ignaczak, L. R.