SEARCH · Engineering Papers

Results for “plasma processing”

Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

SourceResearch connectionFrom yearThrough year

Quote a phrase for an exact phrase match. Source license links do not imply unrestricted reuse.

At least 55 records · Page 3

All sources NASA NTRS DOE OSTI

NASA NTRS1987

Electrodynamics and plasma processes in the ionosphere

The paper examines the advances achieved between 1983 and 1986 on understanding ionospheric electrodynamics and associated plasma processes, including an assessment of the roles of the E- and F-region neutral winds in providing the large-scale electric field in the ionosphere, as well as of the influence of electric fields of magnetospheric origin on the motion and distribution of plasma. Studies of the factors affecting the creation and evolution of plasma structure with many different scale sizes are discussed. Consideration is also given to the ground-based and in situ techniques used in these studies.

Heelis, R. A.↗

NASA NTRS1975

Practical aspects of plasma processes in thermionic energy converters

Over a decade of cesium vapor thermionic converter research has yielded sufficient understanding of the basic plasma processes to permit application of this understanding to improvement of converter performance. A performance index is defined which relates such converter improvements directly to increases in system performance. A prime practical objective of current research is to reduce or eliminate the arc potential drop presently required to sustain the plasma in the ignited cesium diode. This will substantially increase the energy conversion efficiency, and will permit operation at substantially lower emitter temperatures without requiring lower collector (heat rejection) temperature. Present work is concentrating on evaluating and reducing to practice the several methods employing auxiliary ion sources to eliminate the arc drop which were demonstrated over a decade ago: i.e., various ignited and unignited triode concepts, and the pulse-enhanced diode and triode. These methods are reviewed in light of present understanding and recent experimental data.

Rasor, N. S.↗

DOE OSTI2025

Open‐Air Combustion Synthesis with Rapid Plasma Processing of Large‐Area Transparent Conducting Oxides

A vacuum-free, high-throughput synthesis of indium tin oxide (ITO) via Combustion Oxidation with Rapid Plasma Processing (CORP) utilizes a solution-based exothermic combustion reaction to generate the oxide with tunable control of either amorphous or crystalline phases. A subsequent open-air, forming gas plasma treatment is used to introduce oxygen vacancies and promote crystallization. Here, the evolution of the oxide structure is elucidated by extended X-ray absorption spectroscopy fine structure analysis. Using CORP, fabrication of 300 cm 2 of ITO possessing a champion sheet resistance of 38 Ω sq. −1 , visible transmission of 89%, conductivity stability for over 250 days, roughness < 2nm, and Haacke figure of merit (%T 550nm 10 /R s ) of 0.012 Ω −1 is achieved. Cost modeling of CORP demonstrates up to a 67% reduction in price for TCOs using fully continuous, in-line unit operations compared with vacuum sputtering. The work shows a path toward a low-cost, vacuum-free manufacturing method for TCOs at commercial scales.

42 ENGINEERING↗

DOE OSTI2025

Rapid scalable plasma processing of thin-film Li–La–Zr–O solid-state electrolytes

Solid-state electrolytes, such as lithium lanthanum zirconium oxide (LLZO), show promise as technologies for next-generation high-energy-density batteries, but commercial development has been hindered by a lack of scalable processing methods. Current fabrication methods are costly or require long annealing steps to create dense films. We report an atmospheric pressure blown-arc nitrogen plasma jet process to rapidly form sub-micrometer-thick, dense amorphous LLZO (a-LLZO) films from sol-gel precursors. Films are processed in less than 2 min, an order of magnitude faster than what has previously been reported. We demonstrate 500-nm-thick a-LLZO films processed at 350°C with an ionic conductivity of 2 × 10 −6 S/cm at 30°C and 2 × 10 −3 S/cm at 100°C and a conductance of 19 S at 100°C, the highest conductance of any LLZO phase to date. Here, the films exhibit outstanding smooth surface morphology with low defectivity, advancing atmospheric plasma processing as a scalable processing method for solid-state electrolytes.

25 ENERGY STORAGE↗

NASA NTRS1979

Plasma processes in inert gas thrusters

Inert gas thrusters, particularly with large diameters, have continued to be of interest for space propulsion applications. Two plasma processes are treated in this study: electron diffusion across magnetic fields and double ion production in inert-gas thrusters. A model is developed to describe electron diffusion across a magnetic field that is driven by both density and potential gradients, with Bohm diffusion used to predict the diffusion rate. This model has applications to conduction across magnetic fields inside a discharge chamber, as well as through a magnetic baffle region used to isolate a hollow cathode from the main chamber. A theory for double ion production is presented, which is not as complete as the electron diffusion theory described, but it should be a useful tool for predicting double ion sputter erosion. Correlations are developed that may be used, without experimental data, to predict double ion densities for the design of new and especially larger ion thrusters.

Kaufman, H. R.↗

NASA NTRS1992

Experimental studies of ionospheric irregularities and related plasma processes

Utah State University (USU) continued its program of measuring and interpreting electron density and its variations in a variety of ionospheric conditions with the Experimental Studies of Ionospheric Irregularities and Related Plasma Processes program. The program represented a nearly ten year effort to provide key measurements of electron density and its fluctuations using sounding rockets. The program also involved the joint interpretation of the results in terms of ionospheric processes. A complete campaign summary and a brief description of the major rocket campaigns are also included.

Baker, Kay D.↗

NASA NTRS2012

Method to Improve Indium Bump Bonding via Indium Oxide Removal Using a Multi-Step Plasma Process

A process for removing indium oxide from indium bumps in a flip-chip structure to reduce contact resistance, by a multi-step plasma treatment. A first plasma treatment of the indium bumps with an argon, methane and hydrogen plasma reduces indium oxide, and a second plasma treatment with an argon and hydrogen plasma removes residual organics. The multi-step plasma process for removing indium oxide from the indium bumps is more effective in reducing the oxide, and yet does not require the use of halogens, does not change the bump morphology, does not attack the bond pad material or under-bump metallization layers, and creates no new mechanisms for open circuits.

Greer, H. Frank↗

NASA NTRS1994

Laser-Induced Fluorescence Helps Diagnose Plasma Processes

Technique developed to provide in situ monitoring of rates of ion sputter erosion of accelerator electrodes in ion thrusters also used for ground-based applications to monitor, calibrate, and otherwise diagnose plasma processes in fabrication of electronic and optical devices. Involves use of laser-induced-fluorescence measurements, which provide information on rates of ion etching, inferred rates of sputter deposition, and concentrations of contaminants.

Beattie, J. R.↗

NASA NTRS1992

Satellite probes plasma processes in earth orbit

The mission of the DOD/NASA Combined Release and Radiation Effects Satellite (CRRES) is to deepen understanding of the earth's near-space environment, including the radiation belts and the ionosphere; this will help spacecraft designers protect against radiation-belt particles that affect onboard electronics, solar panel arrays, and crewmembers. Attention is presently given to CRRES's study of ionospheric plasma processes through releases of Ba, Ca, Sr, and Li at altitudes of 400-36,000 km.

Christensen, Andrew B.↗

DOE OSTI2021

Study of the niobium oxide structure and microscopic effect of plasma processing on the Nb surface

A study of the niobium oxide structure is presented here, focusing on the niobium suboxides. Multiple steps of argon sputtering and XPS measurements were carried out until the metal surface was exposed. Subsequently, the sample was exposed to air for different time intervals and the oxide regrowth was studied. In addition, three Nb samples prepared with different surface treatments were studied before and after being subjected to plasma processing. The scope is investigating the microscopic effect that the reactive oxygen contained in the glow discharge may have on the niobium surface. This study suggests that the Nb 2 O 5 thickness may increase. Nevertheless, since the Nb 2 O 5 is dielectric, its thickening would not negatively affect the cavity performance.

36 MATERIALS SCIENCE↗

DOE OSTI2021

Study of the Niobium Oxide Structure and Microscopic Effect of Plasma Processing on the Nb Surface

36 MATERIALS SCIENCE↗

DOE OSTI2024

Operando XPS for Plasma Process Monitoring: A Case Study on the Hydrogenation of Copper Oxide Confined under h-BN

Here, we demonstrate that ambient pressure x-ray photoelectron spectroscopy (APXPS) can be used for in situ studies of dynamic changes in surface chemistry in a plasma environment. This opens a new and vast application space for XPS and greatly complements modern spectroscopy techniques to probe plasma-solid/liquid interactions relevant to process monitoring in the semiconductor industry, bio-medical plasma applications and plasma remediation technologies. Hexagonal boron nitride (h-BN) grown on Cu was used in this study as a well-defined model system for plasma process monitoring and because of its unique chemical, optical and electrical properties that make it a prospective material for advanced electronics. To better understand the stability and surface chemistry of h-BN during plasma assisted processing, we track in real time the plasma-induced chemical state changes of B, N and the underlying Cu substrate using APXPS equipped with an AC discharge plasma source operating at 13 Pa. Residual gas analysis (RGA) mass-spectra were concurrently collected during plasma-XPS to track reaction products formed during plasma exposure. A clear reduction of Cu x O is seen, while an h-BN layer remains intact, suggesting hydrogen radical (H • ) species can attack the exposed and h-BN covered Cu oxide patches and partially reduce the underlying substrate without significantly damaging the overlaying h-BN, which is of practical importance for development of h-BN encapsulated devices and interfaces. In addition to demonstration of plasma-XPS capabilities we discuss the observed challenges (e.g., parasitic plasma-chamber walls reactions and charging effects) and propose potential solutions.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

NASA NTRS1990

Cold plasma processing of local planetary ores for oxygen and metallurgically important metals

The utilization of a cold plasma in chlorination processing is described. Essential equipment and instruments were received, the experimental apparatus assembled and tested, and preliminary experiments conducted. The results of the latter lend support to the original hypothesis: a cold plasma can both significantly enhance and bias chemical reactions. In two separate experiments, a cold plasma was used to reduce TiCl4 vapor and chlorinate ilmenite. The latter, reacted in an argon-chlorine plasma, yielded oxygen. The former experiment reveals that chlorine can be recovered as HCl vapor from metal chlorides in a hydrogen plasma. Furthermore, the success of the hydrogen experiments has lead to an analysis of the feasibility of direct hydrogen reduction of metal oxides in a cold plasma. That process would produce water vapor and numerous metal by-products.

Lynch, D. C.↗

NASA NTRS1976

Plasma processes in space

Elementary microscopic interactions in plasmas are described. The importance of plasma physics in space studies is illustrated by examining several phenomena which cannot be explained satisfactorily by MHD theory. These include kinetic instabilities, plasma turbulence in the bow shock, magnetic turbulence near the moon, VLF emissions in the magnetosphere, planetary and solar radio emissions, and interaction of planetary and cometary plasmas with the solar wind. Evidence for the existence of anomalous transport processes in terrestrial and planetary magnetospheres is presented.

Wu, C. S.↗

NASA NTRS1991

Cold plasma processing of local planetary ores for oxygen and metallurgically important metals

The utilization of a cold or nonequilibrium plasma in chlorination processing is discussed. Titanium dioxide (TiO2) was successfully chlorinated at temperatures between 700 and 900 C without the aid of carbon. In addition to these initial experiments, a technique was developed for determining the temperature of a specimen in a plasma. Development of that technique has required evaluating the emissivity of TiO2, ZrO2, and FeOTiO2 and analyzing the specimen temperature in a plasma as a function of both power absorbed by the plasma and the pressure of the plasma. The mass spectrometer was also calibrated with TiCl4 and CCl4 vapor.

Lynch, D. C.↗

NASA NTRS1976

Theoretical investigations of plasma processes

System analyses are presented for electrically sustained, collision dominated plasma centrifuges, in which the plasma rotates under the influence of the Lorentz forces resulting from the interaction of the current density fields with an external magnetic field. It is shown that gas discharge centrifuges are technically feasible in which the plasma rotates at speeds up to 1 million cm/sec. The associated centrifugal forces produce a significant spatial isotope separation, which is somewhat perturbed in the viscous boundary layers at the centrifuge walls. The isotope separation effect is the more pronounced. The induced magnetic fields have negligible influence on the plasma rotation if the Hall coefficient is small. In the technical realization of collision dominated plasma centrifuges, a trade-off has to be made between power density and speeds of rotation. The diffusion of sputtered atoms to system surfaces of ion propulsion systems and the deposition of the atoms are treated theoretically by means of a simple model which permits an analytical solution. The problem leads to an inhomogeneous integral equation.

Wilhelm, H. E.↗

DOE OSTI2022

In Situ Plasma Processing of Superconducting Cavities at Jefferson Lab

Jefferson Lab began a plasma processing program starting in the spring of 2019. Plasma processing is a common technique for removing hydrocarbons from surfaces, which increases the work function and reduces the secondary emission coefficient. Unlike helium processing which relies on ion bombardment of the field emitters, plasma processing uses free oxygen produced in the plasma to break down the hydrocarbons on the surface of the cavity. The residuals of the hydrocarbons in the form of water, carbon monoxide and carbon dioxide are removed from the cryomodule as part of the process gas flow. The initial focus of the effort is processing C100 cavities by injecting RF power into the HOM coupler ports. We will then start investigating processing of C50 cavities by introducing RF into the fundamental power coupler. The plan is to start processing cryomodules in the CEBAF tunnel in the mid-term future, with a goal of improving the operational gradients and the energy margin of the linacs. This work will describe the systems and methods used at JLAB for processing cavities using an argon oxygen gas mixture. Before and after plasma processing results will also be presented.

Powers, T.↗

DOE OSTI2020

Plasma Process for Using CO2

Explore the source record for details and available documents.

54 ENVIRONMENTAL SCIENCES↗