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Longitudinal Proximity Effect, Lateral Inverse Proximity Effect, and Nonequilibrium Superconductivity in Transition-edge Sensors

We have recently shown that normal-metal/superconductor (N/S) bilayer TESs (superconducting Transition-Edge Sensors) exhibit weak-link behavior. Our measurements were explained in terms of a longitudinal proximity effect model in which superconducting order from the higher transition temperature leads is induced into the TES bilayer plane over remarkably long distances (up to 290 micron). Here we extend our understanding to include TESs with added noise-mitigating normal-metal structures (N structures). We explain our results of an effect converse to the longitudinal proximity effect (LoPE), the lateral inverse proximity effect (LaiPE), for which the order parameter in the N/S bilayer is reduced due to the neighboring N structures. We present resistance and critical current measurements as a function of temperature and magnetic field taken on square Mo/Au bilayer TESs with lengths ranging from 8 to 130 micron with and without added N structures. We observe the inverse proximity effect on the bilayer over in-plane distances many tens of microns and find the transition shifts to lower temperature scale approximately as the inverse square of the in-plane N-structure separation distance, without appreciable broadening of the transition width. We find TESs with added Au structures exhibit weak-link behavior as evidenced by exponential temperature dependence of the critical current and Josephson-like oscillations of the critical current with applied magnetic field. We also present evidence for nonequilbrium superconductivity and estimate a quasiparticle lifetime of 1.8 x 10(exp -10) s for the bilayer. The LoPE model is also used to explain the increased conductivity at temperatures above the bilayer's steep resistive transition

Sadleir, John E.

The Impact of Transition-Edge Sensor Design on Internal Thermal Fluctuation Noise and Thermal Conductance

The measured noise in transition-edge sensor (TES) microcalorimeters with a Mo/Au bilayer has been shown to have a significant contribution from internal thermal fluctuation noise (ITFN) between the absorber and the TES. Previous measurements showed the relevant thermal link leading to the noise was the thermal conductance of the TES bilayer, and ITFN has been shown to correlate with the sheet resistance of the TES. As a result, ITFN is particularly significant in devices with a large bilayer sheet resistance. However, because of more favorable transition shapes, such high resistance devices have recently been shown to be preferable under alternating current bias, which is required for the frequency division multiplexed readout baselined for the X-ray Integral Field Unit (X-IFU) instrument on the ATHENA satellite. Therefore, it is important to investigate how else to minimize the ITFN beyond changes to the sheet resistance. In this presentation, we will discuss our investigation of how changes to the TES design can affect ITFN for a fixed sheet resistance. We will present how ITFN is altered by changes to the aspect ratio of the TES, the addition of normal metal banks parallel to the TES current direction, and the size and position of the connections between the absorber and the TES. We will also discuss how these design changes impact the superconducting transition shape, and the thermal conductance from the TES to the thermal bath. These results may provide routes for further improvements of TES performance, and a deeper understanding of the physics of the thermal network in a TES microcalorimeter.

Nicholas A Wakeham

Proximity Effects and Nonequilibrium Superconductivity in Transition-Edge Sensors

We have recently shown that normal-metal/superconductor (N/S) bilayer TESs (superconducting Transition-Edge Sensors) exhibit weak-link behavior.l Here we extend our understanding to include TESs with added noise-mitigating normal-metal structures (N structures). We find TESs with added Au structures also exhibit weak-link behavior as evidenced by exponential temperature dependence of the critical current and Josephson-like oscillations of the critical current with applied magnetic field. We explain our results in terms of an effect converse to the longitudinal proximity effect (LoPE) 1, the lateral inverse proximity effect (LaiPE), for which the order parameter in the N/S bilayer is reduced due to the neighboring N structures. Resistance and critical current measurements are presented as a function of temperature and magnetic field taken on square Mol Au bilayer TESs with lengths ranging from 8 to 130 {\mu}m with and without added N structures. We observe the inverse proximity effect on the bilayer over in-plane distances many tens of microns and find the transition shifts to lower temperatures scale approximately as the inverse square of the in- plane N-structure separation distance, without appreciable broadening of the transition width. We also present evidence for nonequilbrium superconductivity and estimate a quasiparticle lifetime of 1.8 \times 10-10 s for the bilayer. The LoPE model is also used to explain the increased conductivity at temperatures above the bilayer's steep resistive transition.

Sadleir, John E.

Small Pitch Transition-Edge Sensors with Broadband High Spectral Resolution for Solar Physics

We are developing small pitch transition-edge sensor (TES) X-ray detectors optimized for solar astronomy. These devices are fabricated on thick Si substrates with embedded Cu heat-sink layer. We use 35 x 35 square micrometers Mo/Au TESs with 4.5 micrometer thick Au absorbers. We have tested devices with different geometric absorber stem contact areas with the TES and surrounding substrate area. This allows us to investigate the loss of athermal phonons to the substrate. Results show a correlation between thc stem contact area and a broadening in the spectral line shape indicative of athermal phonon loss. When the contact area is minimized we have obtained exceptional broadband spectral resolution of 1.28 plus or minus 0.03 eV at an energy of 1.5 keV, 1.58 plus or minus 0.07 eV at 5.9 keV and 1.96 plus or minus 0.08 eV at 8 keV. The linearity in the measured gain scale is understood in the context of the longitudinal proximity effect from the electrical bias leads resulting in transition characteristics that are strongly dependent upon TES size.

Smith, S. J.

Development of Kilo-Pixel Arrays of Transition-Edge Sensors for X-Ray Spectroscopy

We are developing kilo-pixel arrays of transition-edge sensor (TES) microcalorimeters for future X-ray astronomy observatories or for use in laboratory astrophysics applications. For example, Athena/XMS (currently under study by the european space agency) would require a close-packed 32x32 pixel array on a 250-micron pitch with < 3.0 eV full-width-half-maximum energy resolution at 6 keV and at count-rates of up to 50 counts/pixel/second. We present characterization of 32x32 arrays. These detectors will be readout using state of the art SQUID based time-domain multiplexing (TDM). We will also present the latest results in integrating these detectors and the TDM readout technology into a 16 row x N column field-able instrument.

Adams, J. S.

Longitudinal Proximity Effect, Lateral Inverse Proximity Effect, and Nonequilibrium Superconductivity in Transition-Edge Sensors

We have recently shown that normal-metal/superconductor (N /S) bilayer TESs (superconducting Transition-Edge Sensors) exhibit weak-link behavior. Our measurements were explained in terms of a longitudinal proximity effect model in which superconducting order from the higher transition temperature leads is induced into the TES bilayer plane over remarkably long distances (up to 290 micron). Here we extend our understanding to include TESs with added noise-mitigating normal-metal structures (N structures). We explain our results in terms of an effect converse to the longitudinal proximity effect (LoPE), the lateral inverse proximity effect (LaiPE), for which the order parameter in the N /S bilayer is reduced due to the neighboring N structures. We present resistance and critical current measurements as a function of temperature and magnetic field taken on square Mo/Au bilayer TESs with lengths ranging from 8 to 130 micron with and without added N structures. We observe the inverse proximity effect on the bilayer over in-plane distances many tens of microns and find the transition shifts to lower temperatures scale approximately as the inverse square of the in-plane N-structure separation distance, without appreciable broadening of the transition width. We find TESs with added Au structures exhibit weak-link behavior as evidenced by exponential temperature dependence of the critical current and Josephson-like oscillations of the critical current with applied magnetic field. We also present evidence for nonequilbrium superconductivity and estimate a quasiparticle lifetime of 1.8 x 10(exp -10) s for the bilayer. The LoPE model is also used to explain the increased conductivity at temperatures above the bilayer's steep resistive transition.

Sadleir, John E.

Mapping of the Resistance of a Superconducting Transition Edge Sensor as a Function of Temperature, Current, and Applied Magnetic Field

We have measured the resistance R (T, I, B(sub ext) of a superconducting transition edge sensor over the entire transition region on a fine scale, producing a four-dimensional map of the resistance surface. The dimensionless temperature and current sensitivities (alpha equivalence partial derivative log R/partial derivative log T|(sub I) and beta equivalence partial derivative log R/partial derivative log I|(sub T) of the TES resistance have been determined at each point. alpha and beta are closely related to the sensor performance, but show a great deal of complex, large amplitude fine structure over large portions of the surface that is sensitive to the applied magnetic field. We discuss the relation of this structure to the presence of Josephson weak link fringes.

Zhang, Shou

Longitudinal Proximity Effects in Superconducting Transition-Edge Sensors

We have found experimentally that the critical current of a square thin-film superconducting transition-edge sensor (TES) depends exponentially upon the side length L and the square root of the temperature T, a behavior that has a natural theoretical explanation in terms of longitudinal proximity effects if the TES is regarded as a weak link between superconducting leads. As a consequence, the effective transition temperature T(sub c) of the TES is current-dependent and at fixed current scales as 1/L(sup 2). We also have found that the critical current can show clear Fraunhofer-like oscillations in an applied magnetic field, similar to those found in Josephson junctions. We have observed the longitudinal proximity effect in these devices over extraordinarily long lengths up to 290 micrometers, 1450 times the mean-free path.

Sadlier, John E.

Longitudinal Proximity Effects in Superconducting Transition-Edge Sensors

We have found experimentally that the critical current of a square thin-film superconducting transition-edge sensor (TES) depends exponentially upon the side length L and the square root of the temperature T, a behavior that has a natural theoretical explanation in terms of longitudinal proximity effects if the TES is regarded as a weak link between superconducting leads. As a consequence, the effective transition temperature T(sub c) of the TES is current-dependent and at fixed current scales as 1/L(sup 2). We also have found that the critical current can show clear Fraunhofer-like oscillations in an applied magnetic field, similar to those found in Josephson junctions. We have observed the longitudinal proximity effect in these devices over extraordinarily long lengths up to 290 micrometers, 1450 times the mean-free path.

Sadleir, John E.

Development of Fast, Background-Limited Transition-Edge Sensors for the Background-Limited Infrared/Sub-Millimetre Spectrograph (BLISS) for SPICA

We report experimental progress toward demonstrating background-limited arrays of membrane-isolated transition-edge sensors (TESs) for the Background Limited Infrared/Sub-mm Spectrograph (BLISS). BLISS is a space-borne instrument with grating spectrometers for wavelengths lambda = 35-435 microns and with R = lambda/(delta)lambda approx. 500. The goals for BLISS TESs are: noise equivalent power (NEP) = 5x10(exp -20) W/Hz(1/2) and response time t<30ms. We expect background-limited performance from bilayers TESs with T(sub c)=65mK and G=15fW/K. However, such TESs cannot be operated at 50mK unless stray power on the devices, or dark power PD, is less than 200aW. We describe criteria for measuring P? that requires accurate knowledge of TC. Ultimately, we fabricated superconducting thermistors from Ir (T(sub c) > or = 135mK) and Mo/Cu proximitized bilayers, where T(sub c) is the thermistor transition temperature. We measured the Ir TES arrays in our 50mK adiabatic demagnetization refrigerator test system, which can measure up to eight 1x32 arrays simultaneously using a time-division multiplexer, as well as our single-pixel test system which can measure down to 15mK. In our previous Ir array measurements our best reported performance was NEP=2.5x10(exp -19) W/Hz(1/2) and tapprox.5ms for straight-beam TESs. In fact, we expected NEPapprox.1.5x10(exp -19)W/Hz(1/2) for meander beam TESs, but did not achieve this previously due to 1/f noise. Here, we detail improvements toward measuring the expected NEP and demonstrate NEP=(1.3+0.2)x10(exp -19)W/Hz(1/2) in our single-pixel test system and NEP=(1.6+0.3)x10(exp -19)W/Hz(1/2) in our array test system.

transition-edge sensors

Development of Fast, Background-Limited Transition-Edge Sensors for the Background-Limited Infrared/Sub-mm Spectrograph (BLISS) for SPICA

We report experimental progress toward demonstrating background-limited arrays of membrane-isolated transition-edge sensors (TESs) for the Background Limited Infrared/Sub-mm Spectrograph (BLISS). BLISS is a space-borne instrument with grating spectrometers for wavelengths lambda=35-435 micron and with R=lambda/delta lambda approximately equals 500. The goals for BLISS TESs are: noise equivalent power (NEP) = 5x10 (sup -20) W/Hz(exp 1/2) and response time tau <30ms. We expect background-limited performance from bilayers TESs with T(sub c) = 65mK and G=15fW/K. However, such TESs cannot be operated at 50mK unless stray power on the devices, or dark power P(sub D), is less than 200aW. We describe criteria for measuring P(sub D) that requires accurate knowledge of TC. Ultimately, we fabricated superconducting thermistors from Ir (T(sub c) >= 135mK) and Mo/Cu proximitized bilayers, where T(sub c) is the thermistor transition temperature. We measured the Ir TES arrays in our 50mK adiabatic demagnetization refrigerator test system, which can measure up to eight 1x32 arrays simultaneously using a time-division multiplexer, as well as our single-pixel test system which can measure down to 15mK. In our previous Ir array measurements our best reported performance was NEP=2.5x10(exp -19) W/Hz(sub 1/2) and Tau approximately equals 5ms for straight-beam TESs. In fact, we expected NEP approximately equals 1.5x10(exp -19)?W/Hz(sup 1/2) for meander beam TESs, but did not achieve this previously due to 1/f noise. Here, we detail improvements toward measuring the expected NEP and demonstrate NEP=(1.3+0.2)x10 (sup -19)W/Hz(exp 1/2) in our single-pixel test system and NEP=(1.6+/-0.3)x10(sup -19)W/Hz(sup 1/2) in our array test system.

infrared spectrometer

AlMn Transition Edge Sensors for Advanced ACTPol

Advanced ACTPol (Adv ACT) will use an array of multichroic polarization sensitive AIMn transition edge sensor (TES) bolometers read out through time-division multiplexing. Aluminum doped with a low concentration of manganese can be deposited to a bulk film thickness for a more reliable superconducting critical temperature uniformity compared to thin bilayers. To build the TES, the AlMn alloy is deposited, over Nb wiring, to a specific thickness to set the TES normal resistance. The doping concentration of manganese coarsely defines the TES critical temperature, while a fine tuning is achieved by heating the deposited film to a specific temperature. The TES island is connected to the thermal bath via four silicon-nitride membranes, where their geometry defines the thermal conductance to the temperature of the bath. Lastly, the TES heat capacity is increased by addition of PdAu electrically connected to the AlMn film. Designs and performance characteristics of these AlMn TESs are presented for use in AdvACT.

Advanced ACTPol (AdvACT)

Ultra-Sensitive Transition-Edge Sensors (TESs) for Far-IR/Submm Space-Borne Spectroscopy

We have built surface micromachined thin-film metallized Si(x)N(y) optical absorbers for transition-edge sensors (TESs) suitable for the Background - Limited far-IR/Submm Spectrograph (BLISS). BLISS is a broadband (38 micrometers - 433 micrometers), grating spectrometer consisting of five wavebands each with a modest resolution of R (is) approx. 1000. Because BLISS requires the effective noise equivalent power (NEP) of the TES to be below 10 (exp 19) W/Hz(exp 1/2), our TESs consist of four long (1000 micrometers), narrow (0.4 micrometers ), and thin (0.25 micrometers ) Si(x) N(y) support beams that reduce the thermal conductance G between the substrate and the optical absorber. To reduce the heat capacity of the absorber and make the response time tau fast enough for BLISS, our absorbers are patterned into a mesh geometry with a fill factor of less than 10%. We use a bilayer of Ti/Au to make the effective impedance of the absorber match the impedance of the incoming radiation for each band. Measurements of the response time of the metallized absorbers to heat pulses show that their heat capacity exceeds the predictions of the Debye model. Our results are suggestive that the surface of the low pressure chemical vapor deposition (LPCVD) Si(x)N(y) used in the absorbers' construction is the source of microstates that dominate the heat capacity.

far-IR spectrometer

The Impact of Transition Edge Sensor Design on Achievable Performance Uniformity of Kilo-Pixel Arrays

Future astronomy missions using x-ray transition-edge sensor (TES) microcalorimeters, such as X-IFU on Athena, will require large arrays of 1000s of pixels fabricated on a single wafer. To wire out so many pixels the current array designs have pixels with different rotational orientations. Fabrication is done in multiple layers and so, dependent on method, there is potential for spatial misalignment between layers. Because of the variation of orientation of pixels, misalignment may not impact each pixel equally. This has the potential to degrade the achievable uniformity of performance across an array. How well aligned do different layers need to be? How does sensitivity to misalignment depend on choice of pixel design?

Wakeham, Nicholas

Distributed Antenna-Coupled Transition Edge Sensors

We describe progress toward realizing a new architecture for focal plane arrays for the Submillimeter and Far- Infrared (FIR) bands. This architecture is based on a detector design utilizing distributed hot{electron transition edge sensors (TES) coupled to slot antenna elements. Arrays utilizing this type of detector can be considerably easier to manufacture than membrane-isolated TES arrays, because the need for micro-machining is eliminated. We present background and rationale for this new array architecture and details of a new antenna design for an imaging polarimeter, which yields greater bandwidth than past designs. In addition, we describe a cryogenic facility for testing these arrays.

bolometer

Excess Heat Capacity in Mo/Au Transition Edge Sensor Bolometric Detectors

Excessheat capacity in a bolometric detector has the consequence of increasing or leading to multiple device time con-stants.The Mo/Au bilayer transition edge sensor (TES) bolo-metric detectors intended for the high resolution mid-infrared spectrometer (HIRMES) have two response time, one of which is a few times longer than that estimated from materials used in the design. The relative contribution of this settling time to the overall time response of the detectors is roughly proportional with the pixel area, which ranges between ~0.3 and 2.6 mm2.Use of laser ablation to remove sections of the silicon membranes comprising the pixels results in a detector response with a smaller contribution from the secondary time constant.Additional information about the nature of this excess heat capacity is gleaned from glancing in-cidence x-ray diffraction, which reveals the presence of molyb-denum silicides near the silicon surface from the bi-layer deposi-tion.Quantitative analysis of the concentration of excess molyb-denum, estimated with secondary ion mass spectroscopy, is com-mensurate to the additional heat capacity needed to explain the anomalous time response of the detectors.

HIRMES

Patterning Techniques for Magnesium Diboride Films for Superconducting Transition Edge Sensor Bolometer Arrays

We present a comparison of several patterning techniques for magnesium diboride films with the goal of making membrane-supported superconducting transition edge sensor bolometer arrays suited for far infrared exploration of outer planets and icy moons. We compare etch properties such as etch rate, selectivity to resist, and edge roughness for wet etching, reactive ion etching, and ion-milling processes.

Travers, D. E.

The Transition-Edge-Sensor Array for the Micro-X Sounding Rocket

The Micro-X sounding rocket program will fly a 128-element array of transition-edge-sensor microcalorimeters to enable high-resolution X-ray imaging spectroscopy of the Puppis-A supernova remnant. To match the angular resolution of the optics while maximizing the field-of-view and retaining a high energy resolution (< 4 eV at 1 keV), we have designed the pixels using 600 x 600 sq. micron Au/Bi absorbers, which overhang 140 x 140 sq. micron Mo/Au sensors. The data-rate capabilities of the rocket telemetry system require the pulse decay to be approximately 2 ms to allow a significant portion of the data to be telemetered during flight. Here we report experimental results from the flight array, including measurements of energy resolution, uniformity, and absorber thermalization. In addition, we present studies of test devices that have a variety of absorber contact geometries, as well as a variety of membrane-perforation schemes designed to slow the pulse decay time to match the telemetry requirements. Finally, we describe the reduction in pixel-to-pixel crosstalk afforded by an angle-evaporated Cu backside heatsinking layer, which provides Cu coverage on the four sidewalls of the silicon wells beneath each pixel.

Eckart, M. E.