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DOE OSTI2025

Exascale granular microstructure reconstruction in 3D volumes of arbitrary geometries with generative learning

Reconstructing 3D granular microstructures within volumes of arbitrary geometries from limited 2D image data is crucial for predicting the material properties, as well as performances of structural components accounting for material microstructural effects. We present a novel generative learning framework that enables exascale reconstruction of granular microstructures within complex 3D geometric volumes. Building upon existing transfer learning techniques using pre-trained convolutional neural networks (CNN), we introduce several key innovations to overcome the difficulties inherent in arbitrary geometries. Our framework incorporates periodic boundary conditions using circular padding techniques, ensuring continuity and representativeness of the reconstructed microstructures. We also introduce a novel seamless transition reconstruction (STR) method that creates statistically equivalent transition zones to integrate multiple pre-existing 3D microstructure volumes. Based on STR, we propose a cost-effective strategy for reconstructing microstructures within complex geometric volumes, minimizing computational waste. Validation through numerical experiments using kinetic Monte Carlo simulations demonstrates accurate reproduction of grain statistics, including grain size distributions and morphology. A case study involving the reconstruction of a 4-blade propeller microstructure illustrates the method’s capability to efficiently handle complex geometries. In conclusion, the proposed framework significantly reduces computational demands while maintaining high reconstruction quality, paving the way for scalable microstructure reconstruction in materials design and analysis.

36 MATERIALS SCIENCE↗

DOE OSTI2024

An Updated Life Cycle Assessment of Utility-Scale Solar Photovoltaic Systems Installed in the United States

Given the high deployment targets for solar photovoltaics (PV) needed to meet U.S. decarbonization goals, and the limited carbon budget remaining to limit global temperature rise, accurate accounting of the energy-use and greenhouse-gas emissions over the life-cycle of PV systems is needed. In the United States, most PV systems are large utility-scale systems which use single-axis trackers and central inverters, which are not commonly examined in existing life-cycle assessment (LCA) literature. In this study, we present a cradle-to-grave LCA of a typical silicon U.S. utility PV (UPV) installation which is consistent with the utility system features documented in the annual NREL PV system cost benchmark reports. We analyze and present results for four main metrics: cumulative energy demand (CED), greenhouse gas (GHG) emissions, energy payback time (EPBT), and carbon payback time (CPBT). We consider six primary manufacturing options: three based on an imported PV module supply chain (comparing low-carbon imports, high-carbon imports, and average imports), and three based on a potential domestic PV module supply chain (comparing low-carbon U.S. regions, high-carbon U.S. regions, and average U.S. regions). These manufacturing options were then paired with installation locations to create six main cases: low-carbon options were installed in Phoenix (Arizona), high-carbon options were installed in Seattle (Washington), and average options were installed in Fredonia (Kansas). These locations were selected to represent a range of irradiance and grid mixes in the United States, in order to illustrate the likely range of EPBTs and CPBTs possible across the United States. For all six cases, a sensitivity analysis for end-of-life (EOL) handling was explored to capture current and future management options: landfilling, partial recycling, and high-quality recycling. For the purposes of this report, the benchmark system was defined to use an average imported supply chain with partial recycling, installed in Fredonia (Kansas). CED results show ratios at or below 0.1 MJ oil-eq /MJgenerated which demonstrates efficient use of primary energy resources (below a 1:1 ratio), and represents a slight improvement over previous results in literature. GHG emissions per kWh range from 10-36 g CO 2 e, which are consistent with or lower than previous results published by NREL and IEA-PVPS. We use a graphical approach for calculating EPBT and CPBT in this report, which improves upon methods typically used in literature by accounting for non-linearity and avoiding data quality issues associated with long-term projections. EPBT was determined to vary from 0.5 to 1.2 years, with a benchmark EPBT of 0.6 years; CPBT was shown to vary from 0.8 to 20 years, with benchmark CPBT of 2.1 years, which is lower than other estimates from recent literature (typically >2 years).

14 SOLAR ENERGY↗

DOE OSTI2026

Quality Control of Silicon Sensor Modules for Particle Detectors

The High-Luminosity Large Hadron Collider (HL-LHC) will produce a higher rate of particle collisions than the current Large Hadron Collider (LHC), requiring important upgrades to the Compact Muon Solenoid (CMS) to handle an increased amount of data. An important upgrade is the Phase-2 Outer Tracker Upgrade, which consists of 13,000 silicon sensor modules made of two parallel silicon sensors and readout electronics. These modules undergo careful quality control checks both during and after module assembly to ensure precise and reliable detector performance. This project focuses on precision testing for quality control of silicon sensor modules at Fermilab. Hands-on work includes visual inspection, current-voltage testing, module testing, and ultraviolet (UV) light exposure of modules showing abnormal current-voltage behavior. The ultraviolet exposure process improves the abnormal sensor readout data by placing the selected sensor side of the module directly under the UV light inside a controlled box. In addition to laboratory testing and ultraviolet experiments, I developed a Python-based data tool that connects to a module database and allows selected testing conditions and module information to be retrieved and displayed efficiently. These different testing procedures, experimental processes, and computational tools support the broader goal of identifying module issues and improving modules that will be used in the CMS Outer Tracker Phase-2 Upgrade.

Siddiqui, Hooriya [DuPage Coll.] (ORCID:0009000151↗

DOE OSTI2026

Quality Control of Silicon Sensor Modules for Particle Detectors

The High-Luminosity Large Hadron Collider (HL-LHC) will produce a higher rate of particle collisions than the current Large Hadron Collider (LHC), requiring significant upgrades to the Compact Muon Solenoid (CMS) to handle the increased amount of data. An important upgrade is the Phase-2 Outer Tracker Upgrade, which consists of 13,000 silicon sensor modules made of two parallel silicon sensors and readout electronics. These modules undergo careful quality control checks both during and after module assembly to ensure precise and reliable detector performance. This project focuses on precision testing for quality control of silicon sensor modules at Fermilab. Hands-on work includes visual inspection, current-voltage testing, module testing, and ultraviolet (UV) light exposure of modules showing abnormal current-voltage behavior. The ultraviolet exposure process improves the abnormal sensor readout data by placing the selected sensor side of the module directly under the UV light inside a controlled box. In addition to laboratory testing and ultraviolet experiments, I developed a Python-based data tool that connects to a module database and allows selected testing conditions and module information to be retrieved and displayed efficiently. These different testing procedures, experimental processes, and computational tools support the broader goal of identifying module issues and improving modules that will be used in the CMS Outer Tracker Phase-2 Upgrade.

Siddiqui, Hooriya [DuPage Coll.; Fermilab] (ORCID:↗

DOE OSTI2025

Reinforcement Learning Control for Buildings Co-Optimizing Energy, Comfort, and Indoor Air Quality: An Annual Assessment

Efficient control of Heating, Ventilation, and Air Conditioning (HVAC) systems is crucial for optimizing energy use and maintaining indoor comfort in buildings. Traditional control methods, such as PID control, cannot handle energy use trade-offs among multiple components in the building energy system at a supervisory level. Reinforcement learning (RL) presents a promising solution, offering adaptive and data-driven control strategies that optimize performance over time. However, RL also faces several challenges, including the conflicts encountered in co-optimizing energy savings, occupant comfort, and indoor air quality, and the requirement for extensive interactions with the environment in training. We proposed a flexible simulation platform that integrates a hybrid model for RL training and designed an RL agent to control the entire central HVAC system, focusing on co-optimizing energy consumption, thermal comfort, and indoor air quality ($\text{CO}_{2}$ and PM2.5 concentrations). Finally, we evaluated the RL agent's performance over an annual cycle. Our findings indicate that the RL agent can effectively manage the HVAC system with 14.7 % energy savings annually and balance multiple objectives, which demonstrates significant potential for improving HVAC system control and sustainability in buildings.

Guo, Fangzhou↗

DOE OSTI2022

Flowability of Crumbler Rotary Shear Size-Reduced Granular Biomass: An Experiment-Informed Modeling Study on the Angle of Repose

Biomass has potential as a carbon-neutral alternative to petroleum for chemical and energy products. However, complete replacement of fossil fuel is contingent upon efficient processes to eliminate undesirable characteristics of biomass, e.g., low bulk density, variability, and storage-induced quality problems. Mechanical size reduction via comminution is a processing operation to engineer favorable biomass flowability in handling. Crumbler rotary shear mill has been empirically demonstrated to produce more uniformly shaped particles with higher flowability than hammermilled biomass. This study combines modeling and experimentation to unveil fundamental understandings of the relation between granular particle characteristics and biomass flow behavior, which elucidate underlying mechanisms and guide selection of critical processing parameters. For this purpose, the impact of critical material attributes, including particle size (2–6 mm), particle shape (briquette, chip, clumped-sphere, cube, etc.), and surface roughness, on the angle of repose (AOR) of milled pine chips were investigated using discrete element method (DEM) simulations. Forest Concepts Crumbler rotary shear system is used to produce milled pine particles within the same size range considered in DEM simulations. AOR of different sets of these particles were measured experimentally to benchmark DEM results against experimental data. Specific energy consumption for the comminution of biomass with different particle size and moisture content are measured for technoeconomic analysis. Our results show that the smaller size (2 mm) of pine particle achieves better followability (i.e., smaller AOR) while the energy cost of comminution is significantly higher and bulk density is almost the same as the 6-mm pine particles. For the 2-mm particle size, Crumbles from veneer have better flow properties than Crumbles from chips. Contrarily, no significant difference was observed between the AOR of the two materials for the 6-mm particle size. Furthermore, from DEM simulations, mechanical interlocking between particles was found as a dominant factor in determining AOR of complex-shaped particles such as milled pine, which cannot be accurately captured by using simple particle shapes (e.g., mono-sphere) with a rolling resistance model. Conversely, clumped-sphere model alleviates this limitation without increasing computational cost significantly and can be used for accurate representation of biomass granular particles when simulating free-flow behavior.

09 BIOMASS FUELS↗

DOE OSTI2024

A Versatile Electrochemical Cell for Operando XAS

In situ and operando X–ray absorption spectroscopy (XAS) provides fundamental insight into the working principles of electrocatalysts and is an important tool for future catalyst development. However, the design of an operando XAS electrocatalytic cell is not facile, and researchers designing cells, whether new cells or modifications to previous cells, often spend many hours on cell design before obtaining high–quality XAS data. Here, we describe the design, with engineering drawings, and operation of a versatile XAS cell with options for gas flow, electrolyte flow, pH monitoring, temperature monitoring, and the ability to handle many catalyst forms (any catalyst that can be deposited onto a conductive X–ray transparent substrate). We benchmarked XAS spectra collected using the new experimental cell to a previous cell design showing its ability to produce quality XAS data. We demonstrate the viability of this cell by providing insight into electrocatalysts by studying cation effects and show the tetrabutylammonium cation prevents bulk oxidation of copper. Finally, we hope the availability of this cell allows researchers to convert time typically spent on cell design to time spent on breakthroughs in electrocatalysis.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗

DOE OSTI2023

Binary Control Pulse Optimization for Quantum Systems

Quantum control aims to manipulate quantum systems toward specific quantum states or desired operations. Designing highly accurate and effective control steps is vitally important to various quantum applications, including energy minimization and circuit compilation. In this paper we focus on discrete binary quantum control problems and apply different optimization algorithms and techniques to improve computational efficiency and solution quality. Specifically, we develop a generic model and extend it in several ways. We introduce a squared L 2 -penalty function to handle additional side constraints, to model requirements such as allowing at most one control to be active. We introduce a total variation (TV) regularizer to reduce the number of switches in the control. We modify the popular gradient ascent pulse engineering (GRAPE) algorithm, develop a new alternating direction method of multipliers (ADMM) algorithm to solve the continuous relaxation of the penalized model, and then apply rounding techniques to obtain binary control solutions. We propose a modified trust-region method to further improve the solutions. Our algorithms can obtain high-quality control results, as demonstrated by numerical studies on diverse quantum control examples.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

DOE OSTI2024

Achievement in Beam Power Records for the NOvA Target System

We began upgrading the NOvA target system for 1-Mega Watt (1-MW) beam operation in 2017. Major challenges included maintaining the quality of neutrino beams with reliable instrumentation, reducing instantaneous beam heating on the target, increasing cooling power to handle the high-power beam, and controlling tritium water production rate. We finally achieved a one-hour beam power record of 1.018 MW in Summer 2024. This milestone demonstrates our capability to operate at 2+ MW beam power for the future Long Baseline Neutrino Facility (LBNF) and Deep Underground Neutrino Experiment (DUNE).

43 PARTICLE ACCELERATORS↗

DOE OSTI2024

Achievement in Beam Power Records for the NOvA Target System

We began updating the NOvA target system for 1-Mega Watt (1-MW) beam operation in 2017. Major changes include maintaining the quality of neutrino beams with reliable instrumentation, reducing instantaneous beam heating on the target, increasing cooling power to handle the high power beam, and controlling tritium water production rate. We successfully achieved a onehour beam power report of 1.018 MW in Summer 2024. This achievement marks an important milestone for Fermilab, demonstrating the capability of the accelerator complex to handle highintensity proton beams at a fast repetition rate. We are now prepared to proceed with a new accelerator upgrade plan, known as the Accelerator Complex Evolution - Main Injector Ramp and Targetry R&D (ACE-MIRT) to support future operates at beam power exceeding 2 MW for the Long Baseline Neutrino Facility (LBNF) and Deep Underground Neutrino Experiment (DUNE). We present the improvement of the target system to exceed the beam power 1-MW.

Yonehara, Katsuya [Fermilab] (ORCID:00000002544041↗

DOE OSTI2022

Cosmological inference from an emulator based halo model. II. Joint analysis of galaxy-galaxy weak lensing and galaxy clustering from HSC-Y1 and SDSS

Here, we present high-fidelity cosmology results from a blinded joint analysis of galaxy-galaxy weak lensing (ΔΣ) and projected galaxy clustering (w p ) measured from the Hyper Suprime-Cam Year-1 (HSC-Y1) data and spectroscopic Sloan Digital Sky Survey (SDSS) galaxy catalogs in the redshift range 0.15 < z < 0.7. We define luminosity-limited samples of SDSS galaxies to serve as the tracers of w p in three spectroscopic redshift bins, and as the lens samples for ΔΣ. For the ΔΣ measurements, we select a single sample of 4×10 6 source galaxies over 140 deg 2 from HSC-Y1 with photometric redshifts (photo z) greater than 0.75, enabling a better handle of photo- z errors by comparing the ΔΣ amplitudes for the three lens redshift bins. The deep, high-quality HSC-Y1 data enable significant detections of the ΔΣ signals, with integrated signal-to-noise ratio S/N ~ 15 in the range 3 ≤ R/[h –1 Mpc] ≤ 30 for the three lens samples, despite the small area coverage. For cosmological parameter inference, we use an input galaxy-halo connection model built on the dark emulator package (which uses an ensemble set of high-resolution N-body simulations and enables fast, accurate computation of the clustering observables) with a halo occupation distribution that includes nuisance parameters to marginalize over modeling uncertainties. We model the ΔΣ and wp measurements on scales from R≃3 and 2h –1 Mpc , respectively, up to 30 h –1 Mpc (therefore excluding the baryon acoustic oscillations information) assuming a flat Λ CDM cosmology, marginalizing over about 20 nuisance parameters and demonstrating the robustness of our results to them. With various tests using mock catalogs described in Miyatake et al. [preceding paper, Phys. Rev. D 106, 083519 (2022)], we show that any bias in the clustering amplitude S 8 ≡ σ 8 (Ω m /0.3) 0.5 due to uncertainties in the galaxy-halo connection is less than ~ 50 % of the statistical uncertainty of S 8 , unless the assembly biaseffect is unexpectedly large. Our best-fit models have S 8 = 0.795$_{-0.042}^{+0.049}$ (mode and 68% credible interval) for the flat Λ CDM model; we find tighter constraints on the quantity S 8 (α = 0.17)≡σ 8 (Ω m /0.3) 0.17 = 0.745$_{-0.031}^{+0.039}$.

79 ASTRONOMY AND ASTROPHYSICS↗

DOE OSTI2025

DOE Zero Energy Ready Manufactured Housing: Subject Matter Expert Technical Assistance Summary

Manufactured homes offer American consumers an affordable option for decent single-family detached housing. For working-class American families in many U.S. markets, manufactured homes are the first step toward home ownership. They now make up 10% of all new homes constructed in the United States, with higher percentages in the south and in rural communities. To help encourage the production of homes that are more durable, healthy, efficient, and disaster resistant, the U.S. Department of Energy is bringing its building science research to the manufactured housing industry through DOE’s Zero Energy Ready Manufactured Home (ZER-MH) program, which provides technical assistance and voluntary guidelines to manufactured home builders. Homes built to these guidelines are better able to handle power outages and less likely to experience moisture issues, offering a better product option for American families. This higher quality is evidenced by energy modeling which shows homes manufactured to these voluntary guidelines will typically use half the energy of manufactured homes built to the current minimum requirements of the U.S. Department of Housing and Urban Development (HUD)’s Manufactured Housing and Construction Safety Standard (MHCSS). These homes can also reduce critical energy demand during the busiest hours of the day, typically late afternoon and early evening in the summer when air conditioning demand is highest and mornings in the winter when furnaces and heaters are heating up. Reducing electricity demand during these peak periods when electricity rates are at their highest reduces costs for American families while freeing up capacity on overburdened energy distribution networks. Builders participating in the DOE ZER-MH program are eligible for a tax incentive via the 45L tax credit, which helps to offset the costs of ZER-MH upgrades, enabling builders to offer these certified homes at no additional cost. Together these factors enable manufactured homes to offer home buyers a housing option that is both affordable to finance and affordable to operate, with lower monthly mortgage payments and lower monthly energy bills.

32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATI↗

DOE OSTI2022

An Easy‐to‐Use Custom‐Built Cell for Neutron Powder Diffraction Studies of Rechargeable Batteries

Abstract In operando powder diffraction remains one of the most powerful tools for non‐destructive investigation of battery electrode materials. While in operando X‐ray, especially synchrotron radiation, powder diffraction is by now a routine experimental technique, in operando neutron powder diffraction is still less established. We present a new electrochemical cell for in operando neutron powder diffraction, which is, first and foremost, easy to use, but can also cycle electrode materials under electrochemical conditions close to those achieved using standard laboratory cells. The cell has been designed in multiple sizes, and high‐quality electrochemical and neutron powder diffraction data is presented for sample sizes as low as 48 mg total active material. The cell handles lithium‐ion and sodium‐ion materials equally well, with no difference in how the cell is prepared and assembled. The cell is intended to be used as sample environment at powder diffractometers at the neutron facilities MLZ, ORNL and ACNS.

25 ENERGY STORAGE↗

DOE OSTI2025

PV backsheets survey protocol: A framework for geo-spatial field surveys for bulk material characterization and reliability analysis applied across 41 PV systems

As widespread adoption of photovoltaic (PV) technologies continues, understanding the lifetime of modules is paramount to the viability of the industry as an environmentally conscious alternative to traditional energy generation. Although power degradation can affect the total energy production of a module over its lifetime, module safety failures necessitate the removal of a module leading to a loss of not only the particular asset, but the earning potential of the device. Therefore, it is critical to ensure that the components that provide essential safety functions for PV module operate for their entire rated lifetime. PV backsheets provide necessary electrical insulation to the completed device and failure of this component is cause for a immediate removal of the module. Degradation of the PV module backsheet has led to module safety failures in large-scale installations, costing millions of dollars in damages and lost potential revenue. The spatio-temporal degradation of fielded PV modules is important to study in order to identify which modules within installations are experiencing the greatest exposure conditions and in turn have the highest chance of failure. This paper describes a comprehensive field survey protocol developed for monitoring PV module backsheet performance using solely non-destructive methods in commercial PV fields. The protocol establishes a field naming convention, sampling method, data handling requirements, and measurement procedures. By ensuring consistent data collection practices, the field survey protocol enables research groups to obtain data of uniform quality on backsheet performance over multiple years and locations. In this study, the developed protocol was implemented at forty-one PV sites. Eight different types of airside layer backsheet materials including poly(vinylidene fluoride) (PVDF), acrylic PVDF, poly(tetrafluoroethylene-co-hexafluoropropylene-co-vinylidene fluoride) (THV), poly(vinyl fluoride) (PVF), poly(ethylene terephthalate) (PET), fluoroethylene vinyl ether (FEVE), polyethylene naphthalate (PEN), and glass were identified using attenuated total reflection Fourier transform infrared (ATR-FTIR) spectroscopy. The field survey results show that the spatial distribution of degradation indicators are non-uniform within a particular module, individual site, and across site locations. The degradation of PV modules increased in severity for modules mounted at the edge of rows (across a field) and near the junction box (within a module). This study demonstrates the sensitivity of material performance to exposure length across different materials and climates.

14 SOLAR ENERGY↗

DOE OSTI2023

Voltage Support With PV Inverters in Low-Voltage Distribution Networks: An Overview

Large solar photovoltaic (PV) penetration using inverters in low voltage (LV) distribution networks may pose several challenges, such as reverse power flow and voltage rise situations. These challenges will eventually force grid operators to carry out grid reinforcement to ensure continued safe and reliable operations. However, smart inverters with reactive power control capability enable PV systems to support voltage quality in the distribution network better. Here, this paper gives an overview of the current state-of-the-art control strategies for handling voltage problems through PV inverters and other devices. In addition, the (control) technical issues of PV systems integrated into the LV distribution network are considered from a control point of view. By comparing the control issues of PV integration into the grid, the paper aims to help distribution system operators to expand the volume of PV generation in the distribution system in an efficient and safe manner. Additionally, it will help control engineers and researchers select proper control strategies for PV systems as well as other distributed renewable sources.

42 ENGINEERING↗

DOE OSTI2022

Magnetic Designs of New First Target Beamline Magnets for the ORNL SNS Upgrade

The Spallation Neutron Source (SNS) at ORNL currently is being upgraded from 1.0 GeV to 1.3 GeV. Several water-cooled magnets should be upgraded to transport 30% of higher beam energy. New chicane, injection/extraction septum, and Lambertson magnets were designed. Designing the magnets was a challenging task because the new magnets required good combined integrated field quality and needed to occupy the old magnets space but with about 20% greater integrated magnetic field. Additional strong requirements applied to the magnets fringe field do not disturb the circulating beam. The special field profiles had to be provided in foil areas between magnets. The analysis described here was based on OPERA3D simulations. A special technique was used for analyzing the integrated field harmonics. Initially, the particle track was simulated, and integrated field components were calculated along this track for the reference radius, which were used for the harmonics analysis. In addition, 3D field maps were provided for beam optics simulations. The final beamline analysis confirmed good beam transmission and low losses.

3d field maps↗

DOE OSTI2022

NSUF Report EBSD analyses on metallic fuel samples: Tips and improvements in sample preparation

EBSD (Electron Backscatter Diffraction) is an analytic technique used to evaluate the microstructure of a specimen. It can be used to evaluate interesting crystallographic data ranging from grains size to grain orientation, from grain boundaries to stresses. Moreover, in the field of nuclear materials EBSD can aid in estimating properties important for reactor performance, such as dislocation and residual strain [1]. EBSD patterns are generated by focusing a stationary electron gun on the specimen and detecting the backscatter electrons that satisfy Bragg conditions, and thus are diffracted by the crystal planes forming the so called Kikuchi bands. These bands correspond to each of the lattice diffracting crystal planes and are detected on a phosphor screen via a low-light CCD camera [2]. The patterns are generated within a small interaction volume located at a depth of less than 50-100 nm. Because of this, the data quality is extremely sensitive to the integrity of the crystallographic lattice order at the surface of the sample and thus to sample preparation and to oxidation [3]. While conventional sample preparation methods are widely used in materials science, they often do not lead to quality electron backscatter patterns needed for the characterization of nuclear materials [4]. This has been related by many authors to the challenges associated with handling radiological specimens, their rapid oxidation, and artifacts in such samples (e.g. high number of defects, precipitates and/or porosities) [4-8]. EBSD, however, can be an invaluable technique to evaluate microstructural evolution during fabrication and after irradiation at the required mesoscale for model and simulation. It also provides important information on grain structure necessary to understand irradiation effect, such as grain subdivision. Thus, it is of paramount importance to further the application of this technique to nuclear materials and especially irradiated fuels.

11 NUCLEAR FUEL CYCLE AND FUEL MATERIALS↗

DOE OSTI2024

Characterization of latent image of electron beam resist via critical-dimension resonant soft X-ray scattering

Metrology plays a crucial role in semiconductor manufacturing by providing accurate and precise measurement and characterization of critical parameters. With the development of high-resolution extreme ultraviolet lithography (EUVL) processes, critical dimensions are shrinking to sub-10 nm. Resist materials encounter the challenge of providing heightened sensitivity and a handle on exacerbating stochastic variations. A comprehensive understanding of the chemical profile of the latent image is pivotal for mitigating stochastic effects and optimizing pattern quality. However, the subtle differences in chemistry between the exposed and unexposed regions of the resists make it extremely challenging to characterize the latent images with sub-nanometer precision. Here, we develop the metrology with critical-dimension resonant soft X-ray scattering (CD-RSoXS) to probe the chemical profiles of latent images stored in resist after exposure. The combination of absorption spectroscopy and enhanced scattering contrast makes it possible to characterize the subtle structural and chemical variations in the latent image. Moreover, the results of the measurements are compared with the simulations with a finite element method–based Maxwell solver to extract a detailed profile of the latent and developed images. We demonstrate that the CD-RSoXS technique can provide valuable insights into the high spatial resolution and local chemical sensitivity simultaneously, which is crucial to understanding the resolution limits and stochastic effects in EUVL processes.

36 MATERIALS SCIENCE↗