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At least 505 records · Page 28

Study of a linear surface wave plasma source for tin removal in an extreme ultraviolet source

Tin deposition mitigation employs hydrogen radicals and ions, formed in a hydrogen plasma, to interact with tin to form tin hydride (SnH 4 ) in the gaseous state, which is then pumped away. Surface wave plasma (SWP) technology developed at Illinois generates hydrogen radicals and ions, resulting in tin etch rates that are high enough to keep extreme ultraviolet (EUV) lithographic tools clean. An advantage of an SWP antenna is the ability to generate a high density of hydrogen radicals and hydrogen ions directly at the desired etching location. In situ etching of tin enables high availability EUV tools by maintaining high reflectivity of the multilayer mirror of the collector. Additionally, the SWP is characterized with low ion energies and low electron temperature, such that the multilayer mirror does not suffer any damage from sputtering or implantation of hydrogen ions during operation. Here, experiments elucidating the fundamental processes of tin removal are conducted by varying pressure, power, surface temperature, and gas flow rate in order to observe the etch rate behavior. Our results have shown that the presence of hydrogen ions increases etch rates because ion bombardment weakens Sn–Sn bonds, which, in turn, allows for a higher rate of chemical etching by the radicals. The ion bombardment reduces the number of radicals needed to etch a single tin atom to the range of 10 2 –10 3 . The linear SWP antenna yields plasma densities on the order of 10 17 to 10 18 m -3 and radical densities on the order of 10 18 to 10 19 m -3 , allowing for greater utilization of ion etch enhancement. Etch rates of up to 200 nm/min have been achieved. The surface temperature of the samples is an important factor in the etching process such that the decrease in the surface temperature increases the etch rates and decreases the hydrogen desorption rates. In addition, a kinetic etch model is developed to explain the behavior of etch rates as a function of surface temperature. Furthermore, results from experiments performed in an Illinois NXE:3100 chamber will be discussed.

42 ENGINEERING↗

Study of synchronous RF pulsing in dual frequency capacitively coupled plasma

Low-pressure multi-frequency capacitively coupled plasmas (CCPs) are used for numerous etch and deposition applications in the semiconductor industry. Pulsing of the radio-frequency (RF) sources enables control of neutral and charged species in the plasma on a millisecond timescale. The synchronous (i.e. simultaneous, in-phase) pulsing of both power sources in a dual frequency CCP is examined in this article. Due to the low gas pressure, modeling has been done using the electrostatic particle-in-cell/Monte Carlo collision method. Here, the objective of this work is to investigate the sensitivity of the plasma properties to small changes in timing during synchronous pulsing of the two RF sources. It is demonstrated that small deviations in the on and off times of the two RF sources can lead to major changes in the plasma characteristics. This high sensitivity is of concern for process repeatability but can be utilized to enable better control of the dynamics of plasma-surface interaction. In the simulations, the pulsing parameters (on and off times and ramp rates) are varied and the temporal evolution of plasma characteristics such as electron density (n e ), species current at the electrode, and electron temperature are examined. It is demonstrated that if the low-frequency (LF) source is turned off a few μs before (or after) the high-frequency source, n e during the off-state is significantly higher (or lower) due to the frequency coupling effect. Similarly, turning on the LF source with a small delay results in a sharp increase in the plasma density when the RF sources are turned on.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Segmented wall-less hall thruster

Disclosed is a miniaturized plasma propulsion device with minimized surface area of the thruster walls exposed to the plasma and, as a result, reduced plasma-surface interactions including a set of segmented electrodes to facilitate the following improvements compared to relevant existing technologies: 1) control of the plasma flow including focusing of the plasma plume 2) increase of the thrust 2) reduction of inefficiencies associated with the electron cross field current, and 3) mitigation of low frequency oscillations. The electrodes affect all these actions when a DC or modulated voltage is applied to one or all of them with the same or different amplitudes, with the same or different frequencies or phases which are all optimized to realize the best performance through changes in the acceleration and/or ionization regions. In addition, the applied voltage to the main electrodes may also be modulated.

Simmonds, Jacob↗

Predicting hot electron generation in inertial confinement fusion with particle-in-cell simulations

A series of two-dimensional particle-in-cell simulations with speckled laser drivers was carried out to study hot electron generation in direct-drive inertial confinement fusion on OMEGA. Scaling laws were obtained for hot electron fraction and temperature as functions of laser/plasma conditions in the quarter-critical region. Using these scalings and conditions from hydro simulations, the temporal history of hot electron generation can be predicted. The scalings can be further improved to predict hard x-rays for a collection of OMEGA warm target implosions within experimental error bars. Furthermore, these scalings can be readily implemented into inertial confinement fusion design codes.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Material Plasma Exposure eXperiment (MPEX) High Heat Flux Bellows for Component Alignment in High Microwave Environment

The Material Plasma Exposure eXperiment (MPEX) device is a linear plasma device developed to perform plasma material interaction experiments under the conditions prototypic of a fusion reactor divertor. MPEX has multiple systems that must be precisely aligned to the plasma axis, including an electron cyclotron heating system that emits up to 400 kW of microwave power into the vacuum vessel. Five distinct systems require precise alignment on the MPEX device, thus requiring four bellows, all of which are adjacent to the plasma at a relatively high heat flux of approximately 47 kW/m2 and microwave power regions. The MPEX high heat flux bellows (HHFB) is designed to deliver 6 degrees of freedom positioning. The HHFB includes titanium–zirconium–molybdenum (TZM) inserts that are brazed into a Glidcop AL-15 body using a high-temperature braze alloy, thus blocking direct line of sight to an edge-welded bellows from the plasma and microwave screen to block microwaves from the bellows. Further, a custom ConFlat knife edge is machined into the Glidcop AL-15, so the vacuum flanges do not need a braze or weld joint on the vacuum interface. Fingerstock or copper mesh is used to restrict microwave power from entering the interstitial space between the water-cooled Glidcop AL-15 body and edge-welded bellows. Glidcop AL-15 was selected as the material of choice for the water-cooled body because it can maintain mechanical integrity at elevated temperatures, and it also allows for a high-temperature braze. TZM was selected for its machinability and compatibility with vacuum and plasma requirements. A test article is also being considered for a similarly shaped component, the MPEX limiter, that will demonstrate the integrity of the braze joint under high thermal load. Results from this testing will be extrapolated to deduce the lifetime and integrity of the HHFB design.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Force-free Wave Interaction in Magnetar Magnetospheres: Computational Modeling in Axisymmetry

Abstract Crustal quakes of highly magnetized neutron stars can disrupt their magnetospheres, triggering energetic phenomena like X-ray and fast radio bursts. Understanding plasma wave dynamics in these extreme environments is vital for predicting energy transport across scales to the radiation length. This study models relativistic plasma wave interaction in magnetar magnetospheres with force-free electrodynamics simulations. For propagation along curved magnetic field lines, we observe the continuous conversion of Alfvén waves to fast magnetosonic (FMS) waves. The conversion efficiency can be up to three times higher when counter-propagating Alfvén waves interact in the equatorial region. Alfvén waves generate FMS waves of twice their frequency during their first crossing of the magnetosphere. After the initial transient burst of FMS waves, Alfvén waves convert to FMS waves periodically, generating variations on timescales of the magnetospheric Alfvén wave crossing time. This decaying FMS wave tail carries a significant portion (half) of the total energy emitted. Plastic damping of “bouncing” Alfvén waves by the magnetar crust has minimal impact on the FMS efficiency. We discuss the implications of the identified wave phenomena for magnetar observations. Outgoing FMS waves can develop electric zones, potential sources of coherent radiation. Long wavelength FMS waves could generate FRBs through reconnection beyond the light cylinder.

Astronomy & Astrophysics↗

Optimizing MeV photon dose generation in laser-solid interactions via stable beam propagation

Bremsstrahlung MeV x rays with high doses are essential for radiography of dense objects. Intense, short-pulse laser-driven MeV x-ray sources offer a promising solution, but understanding how the dose scales with laser intensity is crucial for their development. While theory predicts a square root scaling with laser intensity, experimental verification has been hindered by significant shot-to-shot variations, often exacerbated by long preplasma scale lengths from low laser contrast. Here, we demonstrate low shot-to-shot dose variation and confirm the theoretical scaling using high-contrast OMEGA EP laser interactions with millimeter-thick tantalum foils, achieving MeV x-ray doses up to 5.4 rad at 1 m for E photon > 500 keV. Simulations reveal that the unique focal spot of the OMEGA EP laser enables efficient x-ray generation and reduced variability by facilitating deeper laser penetration into dense plasma, even with shorter preplasma scale lengths. Published by the American Physical Society 2025

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Modeling and simulations of hydrodynamic shocks in a plasma flowing across randomized ICF scale laser beams

High-energy laser beams interacting with flowing plasmas can produce a plasma response that leads to deflection of the beam, beam bending. Such beams have usually a speckle structure generated by optical smoothing techniques that reduce the spatial and temporal coherence in the laser field pattern. The cumulative plasma response from laser speckles slows down the velocity of the incoming flow by momentum conservation. For slightly super-sonic flow the cumulative plasma response to the ponderomotive force exerted by the beam speckle ensemble is the strongest, such that slowing down the flow to subsonic velocities leads eventually to the generation of a shock around the cross section of the beam. This scenario has been predicted theoretically and is confirmed here by our hydrodynamic simulations in two dimensions with speckled beams and in one dimension with a reduced model. The conditions of shock generation are given in terms of the ponderomotive pressure, speckle size and the flow velocity. The nonlinear properties of the shocks are analyzed using Rankine–Hugoniot relations. According to linear theory, temporally smoothed laser beams exhibit a higher threshold for shock generation. Numerical simulations with beams that are smoothed by spectral dispersion compare well with the linear theory results, diverging from those produced by beams with only a random phase plates in the nonlinear regime. The conditions necessary for shock generation and their effects on the laser plasma coupling in inertial confinement fusion (ICF) experiments are also discussed.

71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSIC↗

A Domestic Program for Liquid Metal PFC Research in Fusion

While high-Z solid plasma-facing components (PFCs) are the leading candidates for reactors, it is unclear that they can survive the intense plasma material interaction (PMI). Liquid metals (LM) PFCs offer potential solutions since they are not susceptible to the same type of damage, and can be “self-healing”. Following the Fusion Energy System Study on Liquid Metal Plasma Facing Components study that recently was completed by Kessel et al. (Fusion Sci Technnol 75:886, 2019) a domestic LM PFC design program has been initiated to develop reactor-relevant LM PFC concepts. This program seeks to evaluate LM PFC concepts for a Fusion Nuclear Science Facility (FNSF) or a Compact Pilot Plant via engineering design calculations, modeling of PMI and PFC components and laboratory experiments. The latter involves experiments in dedicated test stands and confinement devices and seeks to identify and answer open questions in LM PFC design. The new national LM PFC program is first investigating lithium as the plasma facing material for a flowing divertor PFC concept. Several flow speeds will be evaluated, ranging from ~ cm/s to m/s. The surface temperature will initially be held below the strongly evaporative limit in the first design; higher temperatures with strong evaporation will be considered in future concepts. Other topics of interest include: understanding of the hydrogen and helium interaction with the liquid lithium; single effect experiments on wetting, compatibility and embrittlement; and prototypical experiments for control and characterization of flowing LM. A path to plasma and future tokamak exposure of these concepts will be developed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Ex situ calibration of the scattered-light time-history diagnostic on the National Ignition Facility

The scattered-light time-history diagnostic (SLTD) suite measures time-resolved scattered light in three wavelength bands: stimulated Brillouin scattering (350–352 nm), stimulated Raman scattering (430–760 nm), and plasma emission at half the laser frequency (695–735 nm), at 15 locations around the National Ignition Facility (NIF) target chamber. The SLTD, along with the full-aperture backscatter station (FABS), collects scattered light from direct- and indirect-drive inertial confinement fusion experiments. The SLTD calibration was revisited after a discrepancy between FABS and SLTD measurements was observed on NIF polar direct-drive experiments. An integrated calibration of the SLTD was performed for the first time, and individual components were also calibrated for the wavelengths of 351, 527, and 532 nm. The optical transmission of the instrument was measured to be (1.12 ± 0.04) × 10 –7 and (1.96 ± 0.11) × 10 –7 for the wavelengths of 351 and 532 nm, respectively. The revised calibration at 351 nm brings the SLTD measured scattered energy in agreement with the FABS measured scattered energy after additionally accounting for the degradation of an optical element in FABS. Furthermore, this decreased the inferred absorption by 7% for a representative experiment. However, discrepancies remain between FABS and SLTD measurements in the SRS band (532 nm).

47 OTHER INSTRUMENTATION↗

The 2020 plasma catalysis roadmap

Abstract Plasma catalysis is gaining increasing interest for various gas conversion applications, such as CO 2 conversion into value-added chemicals and fuels, CH 4 activation into hydrogen, higher hydrocarbons or oxygenates, and NH 3 synthesis. Other applications are already more established, such as for air pollution control, e.g. volatile organic compound remediation, particulate matter and NO x removal. In addition, plasma is also very promising for catalyst synthesis and treatment. Plasma catalysis clearly has benefits over ‘conventional’ catalysis, as outlined in the Introduction. However, a better insight into the underlying physical and chemical processes is crucial. This can be obtained by experiments applying diagnostics, studying both the chemical processes at the catalyst surface and the physicochemical mechanisms of plasma-catalyst interactions, as well as by computer modeling. The key challenge is to design cost-effective, highly active and stable catalysts tailored to the plasma environment. Therefore, insight from thermal catalysis as well as electro- and photocatalysis is crucial. All these aspects are covered in this Roadmap paper, written by specialists in their field, presenting the state-of-the-art, the current and future challenges, as well as the advances in science and technology needed to meet these challenges.

Bogaerts, Annemie (ORCID:0000000198756460)↗

Kinetic modeling of neutral transport for a continuum gyrokinetic code

In this work we present the first-of-its-kind coupling of a continuum full- f gyrokinetic turbulence model with a 6D continuum model for kinetic neutrals, carried out using the Gkeyll code. Our objective is to improve the first-principle understanding of the role of neutrals in plasma fueling, detachment, and their interaction with edge plasma profiles and turbulence statistics. Our model includes only atomic hydrogen and incorporates electron-impact ionization, charge exchange, and wall recycling. These features have been successfully verified with analytical predictions and benchmarked with the DEGAS2 Monte Carlo neutral code. We carry out simulations for a scrape-off layer (SOL) with simplified geometry and National Spherical Torus Experiment parameters. We compare these results to a baseline simulation without neutrals and find that neutral interactions reduce the normalized density fluctuation levels and associated skewness and kurtosis, while increasing auto-correlation times. A flatter density profile is also observed, similar to the SOL density shoulder formation in experimental scenarios with high fueling.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Measurement of atomic oxygen densities using TALIF on a dielectric barrier discharge: insights into the volume above a micro cavity plasma array

Dielectric barrier discharges, particularly micro cavity plasma arrays, offer significant potential for plasma-catalytic research due to their ability to ignite plasma in direct contact with a catalytic surface, enabling the observation of plasma-surface interactions. A key factor in their application is the generation of reactive species, such as atomic oxygen, within the cavities. These species can interact with both the surface (e.g. for activation or cleaning) and the gas being treated (e.g. for oxidation). Given the central role of oxygen atoms in plasma catalysis and their use as a model for more complex species, this work investigates the transport of these atoms out of the cavities. Two-photon absorption laser-induced fluorescence spectroscopy with picosecond laser excitation is performed in the volume above the cavities. The results are compared with a basic diffusion model. The reactor operates with a He/O 2 mixture at a flow rate of 1 slm and atmospheric pressure. Densities of up to 10 16 cm -3 are measured near the surface. Time-dependent measurements show that, at a distance of 350 µm from the surface, a density equilibrium is reached within less than 3 ms of reactor operation. Decay times due to ozone formation after the reactor is turned off are on a similar scale. Spatially resolved measurements show that the oxygen density decreases exponentially from the surface but remains detectable up to approximately 1 mm above the surface, indicating significant application potential. Variations in the O 2 admixture show a density maximum at 0.4%, confirming previous helium state enhanced actinometry measurements within the cavities.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Analytic model for neutral penetration and plasma fueling

Neutral atoms recycled from wall interaction interact with confined plasma, thereby refuelling it, most strongly in the region closest to the wall. This occurs near the X-point in diverted configurations, or else near the wall itself in limited configurations. A progression of analytic models is developed for neutral density in the vicinity of a planar or linear source in an ionising domain. First-principles neutral transport simulations with DEGAS2 are used throughout to test the validity and limits of the model when using equivalent sources. The model is further generalised for strong plasma gradients or the inclusion of charge exchange. An important part of the problem of neutral fuelling from recycling is thereby isolated and solved with a closed-form analytic model. A key finding is that charge exchange with the confined plasma can be significantly simplified with a reasonable sacrifice of accuracy by treating it as a loss. The several assumptions inherent to the model (and the simulations with which it is compared) can be adapted according to the particular behaviour of neutrals in the divertor and the manner in which they cross the separatrix.

fusion plasma↗

An investigation of shock formation vs shock mitigation of colliding plasma jets

Here, this work studies the interaction between colliding plasma jets to understand regimes in which jet merging results in shock formation vs regimes in which the shock formation is mitigated due to the collisionless interpenetration of the jets. A kinetic model is required for this study because fluid models will always produce a shock upon the collision of plasma jets. The continuum-kinetic, Vlasov–Maxwell–Dougherty model with one velocity dimension is used to accurately capture shock heating, along with a novel coupling with a moment equation to evolve perpendicular temperature for computational efficiency. As a result, this relatively inexpensive simulation can be used for detailed scans of the parameter space toward predictions of shocked vs shock-mitigated regimes, which is of interest for several fusion concepts such as plasma-jet-driven magneto-inertial fusion, high-energy-density plasmas, astrophysical phenomena, and other laboratory plasmas. The initial results obtained using this approach are in agreement with the preliminary outcomes of the plasma liner experiment.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Impact of Variable Perpendicular Transport Coefficients in WEST Simulations Using SolEdge-HDG

Plasma–wall interaction is one of the key research topics on the way to controlled fusion. To study the best operational designs with reduced heat and particle fluxes onto tokamak plasma facing components (PFCs) comprehensive plasma simulations are required. A recent implementation of a hybridized discontinuous Galerkin scheme into a new version of SolEdge code has the advantage of using magnetic equilibrium-free mesh. This allows us to conduct pioneering 2-D transport simulations of a full discharge in the WEST tokamak. In this work, we implemented plasma transport coefficients as functions of coordinate in the poloidal plane and neutral diffusion as a function of neutral mean free path. Moreover, the perpendicular convection flux terms were added to the code. Using the new features, a few test cases were investigated. Finally, the influence of nonconstant transport coefficients on the simulated particle and heat fluxes onto the WEST tokamak PFCs are demonstrated.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗