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Metrology of Large Parts

As discussed in the first chapter of this book, there are many different methods to measure a part using optical technology. Chapter 2 discussed the use of machine vision to measure macroscopic features such as length and position, which was extended to the use of interferometry as a linear measurement tool in chapter 3, and laser or other trackers to find the relation of key points on large parts in chapter 4. This chapter looks at measuring large parts to optical tolerances in the sub-micron range using interferometry, ranging, and optical tools discussed in the previous chapters. The purpose of this chapter is not to discuss specific metrology tools (such as interferometers or gauges), but to describe a systems engineering approach to testing large parts. Issues such as material warpage and temperature drifts that may be insignificant when measuring a part to micron levels under a microscope, as will be discussed in later chapters, can prove to be very important when making the same measurement over a larger part. In this chapter, we will define a set of guiding principles for successfully overcoming these challenges and illustrate the application of these principles with real world examples. While these examples are drawn from specific large optical testing applications, they inform the problems associated with testing any large part to optical tolerances. Manufacturing today relies on micrometer level part performance. Fields such as energy and transportation are demanding higher tolerances to provide increased efficiencies and fuel savings. By looking at how the optics industry approaches sub-micrometer metrology, one can gain a better understanding of the metrology challenges for any larger part specified to micrometer tolerances. Testing large parts, whether optical components or precision structures, to optical tolerances is just like testing small parts, only harder. Identical with what one does for small parts, a metrologist tests large parts and optics in particular to quantify their mechanical properties (such as dimensions, mass, etc); their optical prescription or design (i.e. radius of curvature, conic constant, vertex location, size); and their full part shape. And, just as with small parts, a metrologist accomplishes these tests using distance measuring instruments such as tape measures, inside micrometers, coordinate measuring machines, distance measuring interferometers; angle measuring instruments such as theodolites, autocollimators; and surface measuring instruments including interferometers, stylus profilers, interference microscopes, photogrammetric cameras, or other tools. However, while the methodology may be similar, it is more difficult to test a large object for the simple reason that most metrologists do not have the necessary intuition. The skills used to test small parts or optics in a laboratory do not extrapolate to testing large parts in an industrial setting any more than a backyard gardener might successfully operate a farm. But first, what is a large part? A simple definition might be the part's size or diameter. For optics and diffuse surface parts alike, the driving constraint is ability to illuminate the part's surface. For reflective convex mirrors, large is typically anything greater than 1 meter. But, for refractive optics, flats or convex mirrors, large is typically greater than 0.5 meter. While a size definition is simple, it may be less than universal. A more nuanced definition might be that a large part is any component which cannot be easily tested in a standard laboratory environment, on a standard vibration isolated table using standard laboratory infrastructure. A micro-switch or a precision lens might be easily measured to nanometer levels under a microscope in a lab, but a power turbine spline or a larger telescope mirror will not fit under that microscope and may not even fit on the table.

Stahl, H. Philip↗

A real-time interferometer technique for compressible flow research

Strengths and shortcomings in the application of interferometric techniques to transonic flow fields are examined and an improved method is elaborated. Such applications have demonstrated the value of interferometry in obtaining data for compressible flow research. With holographic techniques, interferometry may be applied in large scale facilities without the use of expensive optics or elaborate vibration isolation equipment. Results obtained using holographic interferometry and other methods demonstrate that reliable qualitative and quantitative data can be acquired. Nevertheless, the conventional method can be difficult to set up and apply, and it cannot produce real-time data. A new interferometry technique is investigated that promises to be easier to apply and can provide real-time information. This single-beam technique has the necessary insensitivity to vibration for large scale wind tunnel operations. Capabilities of the method and preliminary tests on some laboratory scale flow fluids are described.

Bachalo, W. D.↗

Implementation of Nonlinear Control Laws for an Optical Delay Line

This paper discusses the implementation of a globally stable nonlinear controller algorithm for the Realtime Interferometer Control System Testbed (RICST) brassboard optical delay line (ODL) developed for the Interferometry Technology Program at the Jet Propulsion Laboratory.

nonlinear↗

2006 Interferometry Imaging Beauty Contest

We present a formal comparison of the performance of algorithms used for synthesis imaging with optical/infrared long-baseline interferometers. Five different algorithms are evaluated based on their performance with simulated test data. Each set of test data is formatted in the OI-FITS format. The data are calibrated power spectra and bispectra measured with an array intended to be typical of existing imaging interferometers. The strengths and limitations of each algorithm are discussed.

aperture synthesis↗

An Interferometry Imaging Beauty Contest

We present a formal comparison of the performance of algorithms used for synthesis imaging with optical/infrared long-baseline interferometers. Six different algorithms are evaluated based on their performance with simulated test data. Each set of test data is formated in the interferometry Data Exchange Standard and is designed to simulate a specific problem relevant to long-baseline imaging. The data are calibrated power spectra and bispectra measured with a ctitious array, intended to be typical of existing imaging interferometers. The strengths and limitations of each algorithm are discussed.

aperture synthesis↗

The determination of atmospheric trace gases using the correlation interferometer technique

The theoretical feasibility inherent in the correlation interferometry technique is demonstrated. High signal to noise and increased information content in a given partial interferogram are attractive features of the technique. The separation of interfering gas species is overcome by a precise measurement program for spectral line parameters of methane and other species. There are optical, mechanical, and electronic difficulties with the interferometry hardware design. Flight data from Cessna 402 over southeastern Virginia during April 1978 yielded amplitude fluctuations that are explainable only as internal nonlinearities. Misalignment of the AGC/interferometer optical axis also contributed to a large error source in the flight data. It is concluded that no useful data on gas burdens was obtained from these flights.

Kindle, E. C.↗

Dynamics of plasma atomic layer etching: Molecular dynamics simulations and optical emission spectroscopy

Atomic layer etching is intrinsically dynamic as it involves sequential and repeated exposures of a surface to be etched with different species at different energies. The composition and structure of the near surface region change in both time and depth. Full understanding of this process requires resolving both temporal and spatial variations. In this work, we consider silicon (Si) atomic layer etching (ALE) by alternating exposure to chlorine gas (Cl 2 ) and argon ions (Ar + ). Molecular dynamics (MD) simulations are compared to experimental measurements with the aim of better understanding the dynamics of ALE and to test the simulation procedure. The simulations help to more fully interpret the experimental measurements. Further, optical emission measured just above the surface being etched can be related to etch products and can, therefore, be directly compared to simulation predictions. The simulations capture the measured initial product distribution leaving the surface and match the measured etch per cycle reasonably well. While simulations demonstrate the importance of ion-induced surface damage and mixing into a layer below the surface, the depth of which depends mainly on ion energy, the experiments suggest there is more Cl mixed into the layer than the MD procedure predicts.

74 ATOMIC AND MOLECULAR PHYSICS↗

Wideband optical measurements of ultrasonic pulses

Calibrated masurements of acoustic surface wave pulses by wide bandwidth differential interferometry are described. By interrogating the interference pattern formed by superimposing two optical beams reflected from the surface at slightly separated points, an output signal proportional to instantaneous surface particle displacement is obtained. Response to ideal propagating step function displacements is analyzed and measurements of gated pulses are described.

Claus, R. O.↗

A New Spectroscopic and Interferometric Study of the Young Stellar Object V645 Cyg

Aims. We present the results of high-resolution optical spectroscopy, low-resolution near-IR spectroscopy and near-infrared speckle interferometry of the massive young stellar object candidate V645 Cyg that were taken in order to refine its fundamental parameters and properties of its circumstellar envelope. Methods. Speckle interferometry in the H- and K-bands and an optical spectrum in the range 5200-6680 A with a spectral resolving power of R = 60000 were obtained at the 6 m telescope of the Russian Academy of Sciences. Another optical spectrum in the range 4300-10500 A with R = 79000 was obtained at the 3.6m CFHT. A low-resolution spectrum in the ranges 0.46-1.4 and 1.4-2.5 microns with a R approx. 800 and approx. 700, respectively, were obtained at the 3m Shain telescope of the Lick Observatory. Results. Using a new kinematic method based on non-linear modeling of the neutral hydrogen density profile in the direction toward the object, we suggest a new a distance D = 4.2+/-0.2 kpc. We also suggest a new estimate for the star's effective temperature, T(sub eff) approx. 25000 K. We have resolved the object in both H- and K-bands. Using a two-component ring fit, we derived a compact component size of 18 mas and 15 mas in the H- and K-band, respectively, which correspond to 37 and 33 AU at the new distance. Analysis of our and previously published data shows a approx. 2 mag drop of the near-infrared brightness of V645 Cyg in the beginning of the 1980 s. At the same time, the cometary nebular condensation N1 seems to fade in this wavelength range with respect to the N0 object, which represent the star with a nearly pole-on optically-thick disk and an optically-thin envelope. Conclusions. We conclude that V645 Cyg is a young massive main-sequence star, which recently emerged from its cocoon. and already passed the protostellar accretion stage. The presence of accretion is not necessary to account for the high observed luminosity of (2.6) x 10(exp 4) Solar Mass/yr. The receding part of a strong, mostly uniform outflow with a terminal velocity of approx.800 km/s is only blocked from view far from the star, where forbidden lines form. The near-infrared size of the source is consistent with the dust sublimation distance near this hot and luminous star and is the largest among young stellar objects observed interferometrically to-date.

Miroshinichenko, A. S.↗

Stitching interferometry for synchrotron mirror metrology at National Synchrotron Light Source II (NSLS-II)

With the fast development of diffraction-limited storage rings and free electron lasers, the requirement for ultimate quality X-ray mirror is getting higher and the mirror surface needs to approach the sub-nm root mean square height specifications. Here, these ultimate specifications challenge the X-ray mirror metrology community. In this work, we present our developed dedicated stitching metrology platform for X-ray mirror metrology. Various stitching methods with different stitching parameters are investigated in our stitching interferometric system. Some experimental results are given to demonstrate its validity and performance. According to the measurement results, the repeatability of measuring a flat mirror in the software stitching mode is at 0.1 nm RMS level. In relative angle determinable stitching mode when measuring a curved mirror with its radius of curvature varying from 50 m to 175 m, the repeatability is around 1 nm RMS.

42 ENGINEERING↗

Complete spectroscopy in the attosecond regime

Harnessing light waveforms at attosecond time scales provides information of the structure and dynamics of matter on it's natural time scales. For this reason attosecond metrology has been at the forefront of the optical sciences for more than a decade, and it represents the latest time-domain frontier of the quantum world. Attosecond light pulses are commonly generated using higher-order harmonic generation (HHG) , a process capable of generating XUV coherent pulses. In addition to generate attosecond pulses, HHG can be used to study the structure and dynamics of atoms and molecules by analyzing the spectral content of the XUV pulses. This approach is known as HHG spectroscopy and it provides a coherent, time-dependent approach to study structure and dynamics in the quantum world. In this proposal we will generate harmonics from two optical foci produced by a system of a two-dimensional spatial light modulator (SLM) and a lens. In the far eld the train of attosecond pulses will interfere creating harmonic-dependent fringes. The position of such fringes is a direct measurement of the relative phase between the two foci and they also carry information about the quantum state of the target atom or molecule. Therefore, by measuring the amplitude and relative phase of the emitted harmonics we will have access to both, the amplitude and phase of the dipole moments of the studied target. Because the two beams are completely indistinguishable from each other up to a few millimeters from the focus, both driving pulses share the exact beam path. So far we have measured a jitter of 700 zeptoseconds with a 12.5 attosecond resolution in the delay control of the two foci. These two time scales represent some of the best time controls ever achieved to date.

74 ATOMIC AND MOLECULAR PHYSICS↗

Speckle Interferometry of Red Dwarf Stars

We report high-resolution optical speckle observations of 336 M dwarfs, which results in 113 measurements of the relative position of 80 systems and 256 other stars with no indications of duplicity. These are the first measurements for two of the systems. We also present the earliest measurements of relative position for 17 others. We include orbits for six of the systems, two revised and four reported for the first time. For one of the systems with a new orbit, G 161-7, we determine masses of 0.156 ± 0.011 and 0.1175±0.0079 M{sub ⊙} for the A and B components, respectively. All six of these new calculated orbits have short periods (between five and 38 years) and hold the promise of deriving accurate masses in the near future. For many other pairs we can establish their nature as physical or chance alignment, depending on their relative motion. Of the 80 systems, 32 have calculated orbits, 25 others are physical pairs, four are optical pairs, and 19 are currently unknown.

79 ASTRONOMY AND ASTROPHYSICS↗

Optical pathlength control experiment on JPL phase B testbed

An experimental implementation of a nanometer level optical pathlength control for large baseline space interferometry is presented. The pathlength compensation system is installed on a large flexible experimental truss, thus structural motions play a dominant role in the control system design. The associated control structure interaction problem is addressed to maintain the optical pathlength within the prescribed variation of 10-15 nanometer rms. By a successful blend of a structural control for damping augmentation and a direct pathlength control for the pathlength compensation, the optical pathlength variation has been maintained with 6 nanometer rms under the laboratory ambient disturbance and within 9 nanometer rms under a severe forced resonant disturbance.

Rahman, Zahidul H.↗

Ion Beam Figuring System for Synchrotron X-Ray Mirrors Achieving Sub-0.2-µrad and Sub-0.5-nm Root Mean Square

Abstract Optics with high-precision height and slope are increasingly desired in numerous industrial fields. For instance, Kirkpatrick–Baez (KB) mirrors play an important role in synchrotron X-ray applications. A KB system is composed of two aspherical, grazing-incidence mirrors used to focus an X-ray beam. The fabrication of KB mirrors is challenging due to the aspherical departure of the mirror surfaces from base geometries and the high-quality requirements for slope and height residuals. In this paper, we present the process of manufacturing an elliptical cylinder KB mirror using our in-house-developed ion beam figuring (IBF) and metrology technologies. First, the key aspects of figuring and finishing processes with IBF are illustrated in detail. The effect of positioning error on the convergence of the residual slope error is highlighted and compensated. Finally, inspection and cross-validation using different metrology instruments are performed and used as the final validation of the mirror. Results confirm that relative to the requested off-axis ellipse, the mirror has achieved 0.15-µrad root mean square (RMS) and 0.36-nm RMS residual slope and height errors, respectively, while maintaining the initial 0.3-nm RMS microroughness.

36 MATERIALS SCIENCE↗

Faraday-effect polarimeter diagnostic for internal magnetic field fluctuation measurements in DIII-D

Motivated by the need to measure fast equilibrium temporal dynamics, non-axisymmetric structures, and core magnetic fluctuations (coherent and broadband), a three-chord Faraday-effect polarimeter-interferometer system with fast time response and high phase resolution has recently been installed on the DIII-D tokamak. A novel detection scheme utilizing two probe beams and two detectors for each chord results in reduced phase noise and increased time response [δb ∼ 1G with up to 3 MHz bandwidth]. First measurement results were obtained during the recent DIII-D experimental campaign. Simultaneous Faraday and density measurements have been successfully demonstrated and high-frequency, up to 100 kHz, Faraday-effect perturbations have been observed. Preliminary comparisons with EFIT are used to validate diagnostic performance. Principle of the diagnostic and first experimental results is presented.

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND ↗

Correlation polarimeter-interferometer in the DIII-D tokamak

A correlation polarimeter-interferometer system has been developed for the DIII-D tokamak to detect small amplitude magnetic and density fluctuations. Two collinear, frequency-offset (5–15 MHz), orthogonally polarized (right- and left-handed, circularly polarized) electromagnetic waves at 650 GHz probing the plasma are used to detect the Faraday effect. A third, linearly polarized, electromagnetic wave serves as the local-oscillator to provide a measure of the line-averaged density. Correlation polarimetric measurement is accomplished by correlating the Faraday effect measured along the same line of sight using two independent detectors, whereas simultaneous correlation interferometric measurement is realized by correlating the line-averaged density measured at two different intermediate frequencies. The noise floor of the correlation polarimeter-interferometer has been demonstrated to be more than one order of magnitude lower than that of a standard polarimeter-interferometer measurement. Line-averaged correlation polarimetric-interferometric measurements in DIII-D H-mode plasmas show broadband (up to 750 kHz) magnetic and density fluctuations with amplitudes as low as 0.03 $Gauss$/$\sqrt{kHz}$ and 4 × 10 13 m –3 /$\sqrt{kHz}$, respectively.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Free space Thomson scattering to study high energy density shocks

A free space collective Thomson scattering system has been developed to study pulsed power produced plasmas. While most Thomson scattering diagnostics on pulsed power machines use a bundle of fibers to couple scattered light from the plasma to the spectrometer, this system used free space coupling of the light, which enabled a spatially continuous image of the plasma. Initial experiments with this diagnostic were performed on an inverse wire array generated by a 200 kA, 1100 ns rise time pulse power generator. The capabilities of this diagnostic were demonstrated by using the low frequency ion acoustic wave feature of the Thomson scattering spectra to measure the plasma flow velocity. The diagnostic was demonstrated to measure velocities between 20 and 40 km/s with an error of 4.7 km/s when fitting with a 600 μm spatial resolution or 8.9 km/s when fitting with a 150 μm spatial resolution. In some experiments, the diagnostic observed a bow shock in the plasma flow as the scattering intensity increased and flow velocity decreased.

47 OTHER INSTRUMENTATION↗

Collective plasma effects of electron–positron pairs in beam-driven QED cascades

Understanding the interplay of strong-field QED and collective plasma effects is important for explaining extreme astrophysical environments like magnetars. It has been shown that QED pair plasma can be produced and observed by passing a relativistic electron beam through an intense laser field. This work presents in detail multiple sets of 3D QED-particle-in-cell simulations to show the creation of pair plasma in the QED cascade. The beam driven method enables a high pair particle density and also a low particle Lorentz factor, which both play equal roles on exhibiting large collective plasma effects. Finite laser frequency upshift is observed with both ideal parameters (24 PW laser colliding with a 300 GeV electron beam) and with existing technologies (3 PW laser colliding with a 30 GeV electron beam).

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗