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Search indexed NASA NTRS and DOE OSTI research on propulsion, heat transfer, battery materials and energy systems. Follow report and document links to the original sources.

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At least 505 records · Page 28
All sourcesNASA NTRSDOE OSTI
DOE OSTI2026

Advancing Porous Carbons: Understanding the Importance of Surface Chemistry for the Energy–Environment Nexus

This review intends, in a critical way, the comprehensive view of the importance of porous carbons surface chemistry for their applications in an energy− environment nexus. Surface chemistry is presented as a combination of functional heteroatom-containing groups, dopants, and structural defects. First, we briefly address carbon surface chemical environment and the methods of its modification and characterization, indicating their practical limitations. Then, the effects of surface chemistry on separation, catalysis, energy storage, sensing and microwave absorption are introduced. Besides a critical analysis of published findings on these topics, we also include our views on the advancement in the processes which rely on porous carbons surface chemistry, and identify strategic areas and directions that should deserve further attention. We focus on new findings and important original contributions to the field. Since the community of carbon researchers grows following the strategic application of these materials, the role of functional groups, dopants and structural defects in various cutting-edge applications is emphasized, showing the progress in the field and the evolution of findings. A clear determination of the effects of carbon surface is often a challenge since carbons porosity and the locations of specific bonds/sites/ defects in the carbon texture provide nanoconfinement effects.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2022

Influence of Vane Trailing Edge Flow on the Formation of Cavity Cells and Rim Sealing

Abstract Hot gas ingestion into the turbine rim seal cavity is an important concern for engine designers. To prevent ingestion, rim seals use high-pressure purge flow; however, the penalty is that excessive use of the purge flow decreases engine thermal efficiency. In this paper, a one-stage turbine operating at engine-representative conditions was used to study the effect of steady and time-resolved under-platform cavity temperatures and pressures across a range of coolant flowrates in the presence of vane trailing edge (VTE) flow. This study correlates time-resolved pressure with time-resolved temperature to identify primary frequencies driving ingestion. At certain flowrates, the time-resolved pressures are out of phase with the temperatures, indicating ingestion. Measurements from high-frequency response pressure sensors in the rim seal and vane platform were also used to determine rotational speed and quantity of large-scale structures (cells). In a parallel effort, a computational model using Unsteady Reynolds-averaged Navier–Stokes (URANS) was applied to determine swirl ratio in the rim seal cavity and time-resolved rim sealing effectiveness. The experimental results confirm that at low purge flowrates, the VTE flow influences the unsteady flow field by decreasing pressure unsteadiness in the rim seal cavity. Results show an increase in purge flow increases the number of unsteady large-scale structures in the rim seal and decreases their rotational speed. However, VTE flow was shown to not significantly change the cell speed and count in the rim seal. Simulations point to the importance of the large-scale cell structures in influencing rim sealing unsteadiness, which is not captured in current rim sealing predictive models.

Engineering↗
DOE OSTI2023

No detectable redox exchange between sulfur and iron during rapid cooling of basalts

The valence states of iron and sulfur in mantle-derived melts influence and respond to the composition of the mantle as well as the subsequent evolution of those melts in Earth's crust. Characterizing the valence states of iron and sulfur in silicate melts that have quenched to form glasses is therefore critical to understanding the composition of the mantle and the magmatic processes that take place before and during volcanic eruptions. Glasses quenched from silicate melts offer the opportunity to precisely measure sulfur and iron valence states, but whether the transition from melt to glass affects the valence state of sulfur and iron is uncertain. Here, we use the glassy margins of two pillow basalts, one from a mid-ocean ridge and one from a back-arc basin, as a natural experiment to test the effect of quench rate on sulfur and iron valence states. We report micro-X-ray Absorption Near Edge Structure (XANES) measurements of S 6+ /ΣS (S 6+ /[S 6+ +S 2- ]) and Fe 3+ /ΣFe (Fe 3+ /[Fe 2+ +Fe 3+ ]) along transects from the rapidly quenched rims of the pillows down into the slowly cooled crystal-rich interiors. The range of average quench rates estimated for our selected analysis areas range from 1.2 x 10 5 °C/sec at the pillow margin to 1.1 °C/sec in the interior and span quench rates experienced by natural and experimental glasses. On average, S6+/ΣS = 0.09 ± 0.01 and Fe 3+ /ΣFe = 0.147 ± 0.002 in the mid-ocean ridge sample and S 6+ /ΣS = 0.21 ± 0.01and Fe 3+ /ΣFe = 0.153 ± 0.004 in the back-arc sample, where the quoted uncertainty is the 1σ standard deviation of n= 9-16 analyses. We find that the S 6+ /ΣS and Fe 3+ /ΣFe values along transects in each sample show no systematic changes with depth, and by proxy, no systematic changes with quench rate. In each pillow, all measured S 6+ /ΣS and Fe 3+ /ΣFe ratios are within the absolute uncertainty of each technique. We propose that these observations are consistent with either sluggish reaction kinetics between sulfur and iron, or an insignificant temperature effect on sulfur-iron redox exchange equilibria. These observations demonstrate that sulfur and iron valence states in glasses with varying quench rates can be directly compared, and that changes in sulfur and iron valence during quench are below the limits of detection with XANES.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2020

Core excitations with excited state mean field and perturbation theory

In this work, we test the efficacy of excited state mean field theory and its excited-state-specific perturbation theory on the prediction of K-edge positions and x-ray peak separations. We find that the mean field theory is surprisingly accurate, even though it contains no accounting of differential electron correlation effects. In the perturbation theory, we test multiple core-valence separation schemes and find that, with the mean field theory already so accurate, electron-counting biases in one popular separation scheme become a dominant error when predicting K-edges. Happily, these appear to be relatively easy to correct for, leading to a perturbation theory for K-edge positions that is lower scaling and more accurate than coupled cluster theory and competitive in accuracy with recent high-accuracy results from restricted open-shell Kohn-Sham theory. For peak separations, our preliminary data show excited state mean field theory to be exceptionally accurate, but more extensive testing will be needed to see how it and its perturbation theory compare to coupled cluster peak separations more broadly.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2020

Predominance of non-adiabatic effects in zero-point renormalization of the electronic band gap

Electronic and optical properties of materials are affected by atomic motion through the electron–phonon interaction: not only band gaps change with temperature, but even at absolute zero temperature, zero-point motion causes band-gap renormalization. We present a large-scale first-principles evaluation of the zero-point renormalization of band edges beyond the adiabatic approximation. For materials with light elements, the band gap renormalization is often larger than 0.3 eV, and up to 0.7 eV. This effect cannot be ignored if accurate band gaps are sought. For infrared-active materials, global agreement with available experimental data is obtained only when non-adiabatic effects are taken into account. They even dominate zero-point renormalization for many materials, as shown by a generalized Fröhlich model that includes multiple phonon branches, anisotropic and degenerate electronic extrema, whose range of validity is established by comparison with first-principles results.

36 MATERIALS SCIENCE↗
DOE OSTI2022

Comparison of the Gaussian Wind Farm Model with Historical Data of Three Offshore Wind Farms

A recent expert elicitation showed that model validation remains one of the largest barriers for commercial wind farm control deployment. The Gaussian-shaped wake deficit model has grown in popularity in wind farm field experiments, yet its validation for larger farms and throughout annual operation remains limited. This article addresses this scientific gap, providing a model comparison of the Gaussian wind farm model with historical data of three offshore wind farms. The energy ratio is used to quantify the model’s accuracy. We assume a fixed turbulence intensity of $I_∞$ = 6% and a standard deviation on the inflow wind direction of $σ_{wd}$ = 3° in our Gaussian model. First, we demonstrate the non-uniqueness issue of $I_∞$ and $σ_{wd}$, which display a waterbed effect when considering the energy ratios. Second, we show excellent agreement between the Gaussian model and historical data for most wind directions in the Offshore Windpark Egmond aan Zee (OWEZ) and Westermost Rough wind farms (36 and 35 wind turbines, respectively) and wind turbines on the outer edges of the Anholt wind farm (110 turbines). Turbines centrally positioned in the Anholt wind farm show larger model discrepancies, likely due to deep-array effects that are not captured in the model. A second source of discrepancy is hypothesized to be inflow heterogeneity. In future work, the Gaussian wind farm model will be adapted to address those weaknesses.

17 WIND ENERGY↗
DOE OSTI2025

Comparative studies of cross-phase dynamics in turbulent momentum flux and particle flux at the tokamak edge

Turbulent transport events, including turbulent transport flux of momentum (i.e., turbulent momentum flux or Reynolds stress) and turbulent transport flux of particle (i.e., turbulent particle flux), have important effects on the confinement performance of magnetic confinement fusion devices. Poloidal Reynolds stress is the ensemble average of the product of radial velocity fluctuations and poloidal velocity fluctuations, i.e., $\langle {\widetilde{v}}_{r}{\widetilde{v}}_{\theta }\rangle$. Turbulent particle flux is the ensemble average of the product of radial velocity fluctuations and density fluctuations, i.e., $\langle \widetilde{n}{\widetilde{v}}_{r}\rangle$. Changes in either amplitude of fluctuations or cross phase between fluctuations can cause changes in turbulent transport. In this paper, cross-phase dynamics in the Reynolds stress and turbulent particle flux at the tokamak edge are studied in detail. Reynolds stress and turbulent particle flux are, respectively, written as the product of fluctuation amplitudes and an average cross-phase factor. The mathematical expressions of the average cross-phase factors are derived. The average cross-phase factors and the power spectra of cross phase are obtained using experimental measurement data. It is found that the cross-phase dynamics in Reynolds stress and particle flux are very different. Reynolds stress is found to be more sensitive to cross phase than particle flux is. In the strong $E\times B$ shear layer, spatial slips of cross phase lead to the obvious radial gradient of Reynolds stress. In the no/weak $E\times B$ shear region, the cross phase in Reynolds stress tends to lock. Here, phase locking refers to that the power spectra of phase tend to distribute around a fixed phase which does not change with radial position, while phase slip means that the power spectra of cross phase tend to distribute around a phase that varies with radial position. Phase slip or locking mainly describes the central phase weighted by the power spectra, while the phase scattering mainly describes the dispersion of the power spectrum distribution of the phase. The increased scattering of cross phase, which indicates the power spectra distribution of the phase is more dispersed, contributes to the decreased Reynolds stress for higher collisionality. The cross phase in particle flux tends to lock in both strong and no/weak shear regions. The degree of scattering of cross phase in the particle flux does not change obviously as collisionality increases. For higher collisionality, it is the increased density fluctuation amplitude rather than cross-phase dynamics that leads to the increased particle flux. The underlying physical mechanism that causes Reynolds stress and particle flux to exhibit different phase dynamics is discussed.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2021

Atomistic simulations of dislocation mobility in refractory high-entropy alloys and the effect of chemical short-range order

Abstract Refractory high-entropy alloys (RHEAs) are designed for high elevated-temperature strength, with both edge and screw dislocations playing an important role for plastic deformation. However, they can also display a significant energetic driving force for chemical short-range ordering (SRO). Here, we investigate mechanisms underlying the mobilities of screw and edge dislocations in the body-centered cubic MoNbTaW RHEA over a wide temperature range using extensive molecular dynamics simulations based on a highly-accurate machine-learning interatomic potential. Further, we specifically evaluate how these mechanisms are affected by the presence of SRO. The mobility of edge dislocations is found to be enhanced by the presence of SRO, whereas the rate of double-kink nucleation in the motion of screw dislocations is reduced, although this influence of SRO appears to be attenuated at increasing temperature. Independent of the presence of SRO, a cross-slip locking mechanism is observed for the motion of screws, which provides for extra strengthening for refractory high-entropy alloy system.

36 MATERIALS SCIENCE↗
DOE OSTI2021

Effect of 3d/4p Mixing on 1s2p Resonant Inelastic X-ray Scattering: Electronic Structure of Oxo-Bridged Iron Dimers

1s2p resonant inelastic X-ray scattering (1s2p RIXS) has proven successful in the determination of the differential orbital covalency (DOC, the amount of metal vs ligand character in each d molecular orbital) of highly covalent centrosymmetric iron environments including heme models and enzymes. However, many reactive intermediates have noncentrosymmetric environments, e.g., the presence of strong metal-oxo bonds, which results in the mixing of metal 4p character into the 3d orbitals. This leads to significant intensity enhancement in the metal K-pre-edge and as shown here, the associated 1s2p RIXS features, which impact their insight into electronic structure. Binuclear oxo bridged high spin Fe(III) complexes are used to determine the effects of 4p mixing on 1s2p RIXS spectra. In addition to developing the analysis of 4p mixing on K-edge XAS and 1s2p RIXS data, this study explains the selective nature of the 4p mixing that also enhances the analysis of L-edge XAS intensity in terms of DOC. These 1s2p RIXS biferric model studies enable new structural insight from related data on peroxo bridged biferric enzyme intermediates. The dimeric nature of the oxo bridged Fe(III) complexes further results in ligand-to-ligand interactions between the Fe(III) sites and angle dependent features just above the pre-edge that reflect the superexchange pathway of the oxo bridge. Lastly, we present a methodology that enables DOC to be obtained when L-edge XAS is inaccessible and only 1s2p RIXS experiments can be performed as in many metalloenzyme intermediates in solution.

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CH↗
DOE OSTI2021

Investigating profile stiffness and critical gradients in shaped TCV discharges using local gyrokinetic simulations of turbulent transport

The experimental observation made on the TCV tokamak of a significant confinement improvement in plasmas with negative triangularity ( δ < 0) compared to those with standard positive triangularity has been interpreted in terms of different degrees of profile stiffness (Sauter et al. Phys. Plasmas 21 055906, 2014) and/or different critical gradients. Employing the Eulerian gyrokinetic code GENE (Jenko et al. Phys. Plasmas 7 1904, 2000), profile stiffness and critical gradients are studied under TCV relevant conditions. For the considered experimental discharges, trapped electron modes (TEMs) and electron temperature gradient (ETG) modes are the dominant microinstabilities, with the latter providing a significant contribution to the non-linear electron heat fluxes near the plasma edge. Two series of simulations with different levels of realism are performed, addressing the question of profile stiffness at various radial locations. Retaining finite collisionality, impurities and electromagnetic effects, as well as the physical electron-to-ion mass ratio are all necessary in order to approach the experimental flux measurements. However, flux-tube simulations are unable to fully reproduce the TCV results, pointing towards the need to carry out radially nonlocal (global) simulations, i.e. retaining finite machine size effects, in a future study. Some conclusions about the effect of triangularity can nevertheless be drawn based on the flux-tube results. In particular, the importance of considering the sensitivity to both temperature and density gradient is shown. The flux tube results show an increase of the critical gradients towards the edge, further enhanced when δ < 0, and they also appear to indicate a reduction of profile stiffness towards plasma edge.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2021

Single Nanoflake Photoelectrochemistry Reveals Intrananoflake Doping Heterogeneity That Explains Ensemble-Level Photoelectrochemical Behavior

Transition metal dichalcogenide (TMD) nanoflake thin films are attractive electrode materials for photoelectrochemical (PEC) solar energy conversion and sensing applications, but their photocurrent quantum yields are generally lower than those of bulk TMD electrodes. The poor PEC performance has been primarily attributed to enhanced charge carrier recombination at exposed defect and edge sites introduced by the exfoliation process. Here, a single nanoflake PEC approach reveals how an alternative effect, doping heterogeneity, limits ensemble-level PEC performance. Photocurrent mapping and local photocurrent–potential (i–E) measurements of MoS 2 nanoflakes exfoliated from naturally occurring bulk crystals revealed the presence of n- and p-type domains within the same nanoflake. Interestingly, the n- and p-type domains in the natural MoS 2 nanoflakes were equally efficient for iodide oxidation and tri-iodide reduction (IQE values exceed 80%). At the single domain-level, the natural MoS 2 nanoflakes were nearly as efficient as nanoflakes exfoliated from synthetic n-type MoS 2 crystals. Single domain-level i–E measurements explain why natural MoS 2 nanoflakes exhibit an n-type to p-type photocurrent switching effect in ensemble-level measurements: the n- and p-type diode currents from individual domains oppose each other upon illuminating the entire nanoflake, resulting in zero photocurrent at the switching potential. Furthermore, the doping heterogeneity effect is likely due to nonideal stoichiometry, where p-type domains are S-rich according to XPS measurements. Although this doping heterogeneity effect limits photoanode or photocathode performance, these findings open the possibility to synthesize efficient TMD nanoflake photocatalysts with well-defined lateral p- and n-type domains for enhanced charge separation.

14 SOLAR ENERGY↗
DOE OSTI2024

Multi-delay coherence imaging spectroscopy optimized for ion temperature measurements in the divertor plasma of the Wendelstein 7-X stellarator

A new coherence imaging spectroscopy (CIS) diagnostic optimized to measure the C 2+ impurity ion temperature T i spatial distribution in the divertor plasma of the W7-X stellarator is designed, tested, and validated. Using CIS to obtain T i in the edge of magnetically confined plasmas has historically been challenging because Doppler broadening and Zeeman splitting have comparable effects on the shape of spectral emission lines. To distinguish between these two mechanisms, a novel approach to birefringent crystal design is employed to minimize the diagnostic’s sensitivity to Zeeman splitting. The recently developed pixelated multi-delay CIS approach is also used to obtain four times as much spectral information as traditional CIS approaches. The T i -optimized CIS diagnostic is validated in a long-pulse W7-X plasma by comparison with a high-resolution spectrometer whose sightlines overlap with the CIS field of view. The CIS and spectrometer T i profiles have the same shape and agree to within 10% on average and 25% in the worst case. Images of the T i distribution near the divertor show toroidally elongated bands aligned with the magnetic field, with T i ranging between 10 and 40 eV.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗
DOE OSTI2026

Permanent magnets for ELM suppression in tokamaks: feasibility and operational compatibility

Permanent magnets can provide static magnetic fields without power supplies or feed lines, offering a simpler alternative to conventional electromagnets in tokamaks. This work examines permanent magnet arrays (PMAs) for edge localized mode (ELM) control in double-null (DN) configurations, where traditional RMP coils exhibit limited effectiveness. Linear plasma response calculations using IPEC assess high-field-side (HFS) permanent magnet placement, benchmarking performance against DIII-D low-field-side (LFS) internal coils (I-coils) while evaluating engineering constraints. Modeling results demonstrate that HFS permanent magnet configurations generate HFS plasma response amplitudes more than 5 times larger than conventional I-coil systems. While other resonant response metrics show comparable or reduced response relative to I-coils, the combination of conventional RMP systems and permanent magnets is expected to provide enhanced performance. Operational impact assessments of persistent magnetic fields, including sideband field effects and startup/ramp-up compatibility, reveal acceptable performance within established operational boundaries. This analysis establishes PMAs as a technically viable approach for DN ELM control with reductions in system complexity, motivating further experimental validation on existing tokamak facilities.

3D magnetic perturbation↗
DOE OSTI2024

Spin-Orbit-Lattice Entangled State in A 2 ⁢MgReO 6 (A = Ca, Sr, Ba) Revealed by Resonant Inelastic X-Ray Scattering

The 5d 1 ordered double perovskites present an exotic playground for studying novel multipolar physics due to large spin-orbit coupling. Here, we present Re L 3 edge resonant inelastic Xray scattering (RIXS) results that reveal the presence of the dynamic Jahn-Teller effect in the A 2 MgReO 6 (A = Ca, Sr, Ba) family of 5d 1 double perovskites. The spin-orbit excitations in these materials show a strongly asymmetric lineshape and exhibit substantial temperature dependence, indicating that they are dressed with lattice vibrations. Our experimental results are explained quantitatively through a RIXS calculation based on a spin-orbit-lattice entangled electronic ground state with the dynamic Jahn-Teller effect taken into consideration. We find that the spin-orbitlattice entangled state is robust against magnetic and structural phase transitions as well as against significant static Jahn-Teller distortions. Our results illustrate the importance of including vibroniccoupling for a complete description of the ground state physics of 5d 1 double perovskites.

72 PHYSICS OF ELEMENTARY PARTICLES AND FIELDS↗
DOE OSTI2024

Efficient graph representation framework for chemical molecule similarity tasks

Graph data has emerged in numerous scientific domains and machine learning techniques have been widely used for analysis and learning of diverse data for prediction and decision. Machine learning techniques can readily address complex problems by leveraging their structural information. But graphs cannot be directly used for existing machine learning algorithms unless encoded as vectors. The problem of efficient representation of graphs is a substantial challenge in graph machine learning. In this paper, we propose a novel two-stage framework for the representation of chemical molecule graphs based on the strengths of Graph Isomorphism Networks (GINs) and Siamese autoencoders. In the first stage, the GIN model is constructed and trained using the structural information of chemical molecule graphs. Node attributes, edge attributes, and edge indices are used as input data, while graph attributes are used as labels. The GIN model effectively captures the structural characteristics of graphs and can accurately predict graph attributes, i.e., molecular properties. It also generates Graph Embeddings, represented as vectors that encode the structural information of graphs. In the second stage, Graph Embedding vectors are further optimized for downstream similarity tasks while preserving the graph structural information. The Siamese autoencoder is constructed and trained, which reduces the dimensionality of the Graph Embedding vectors, while maximizing the preservation of structural information in the original high-dimensional vectors. The resulting low-dimensional Graph Embeddings can be effectively utilized for tasks such as approximate nearest neighbor search. The experimental results demonstrate the effectiveness of our proposed framework in accurately predicting graph similarity.

Ma, Jiaji↗
DOE OSTI2026

A Relief Zone Architecture for Enhanced Durability of Ultrathin Membranes in Electrochemical Conversion Devices

Premature cell failures in electrochemical conversion systems often result when membrane electrode assemblies (MEAs) are prepared with ultra-thin (= 15 micrometer-thick) polymer electrolyte membranes (PEMs). These high-performance PEMs are susceptible to mechanical degradation from stress concentrations arising from component and device-level integration. Herein, a relief zone was developed to mitigate mechanical degradation by alleviating excess and non-uniform compression across the active area. Relief zones, created through the ablation of carbonaceous diffusion material achieves a seamless adaptation across a range of MEA dimensions and electrochemical applications without need for costly hardware modifications. This concept was demonstrated using fuel cells as a case study. Accelerated stress test (AST) validations yielded a 6-fold improvement for MEAs prepared with relief zones (i.e., lifetime approximately 1500 h) compared to those fabricated using conventional edge-protection techniques, showcasing the utility of this technique in decoupling integration and device-level engineering effects from intrinsic material limitations for durable electrochemical devices.

14 SOLAR ENERGY↗
DOE OSTI2022

Quasiparticle excitations in a one-dimensional interacting topological insulator: Application for dopant-based quantum simulation

Here, we study the effects of electron-electron interactions on the charge excitation spectrum of the spinful Su-Schrieffer-Heeger (SSH) model, a prototype of a one-dimensional bulk obstructed topological insulator. In view of recent progress in the fabrication of dopant-based quantum simulators we focus on experimentally detectable signatures of interacting topology in finite lattices. To this end we use Lanczos-based exact diagonalization to calculate the single-particle spectral function in real space which generalizes the local density of states to interacting systems. Its spatial and spectral resolution allows for the direct investigation and identification of edge states. By studying the noninteracting limit, we demonstrate that the topological in-gap states on the boundary are robust against both finite-size effects as well as random bond and onsite disorder which suggests the feasibility of simulating the SSH model in engineered dopant arrays in silicon. While edge excitations become zero-energy spinlike for any finite interaction strength, our analysis of the spectral function shows that the single-particle charge excitations are gapped out on the boundary. Despite the loss of topological protection, we find that these edge excitations are quasiparticlelike as long as they remain within the bulk gap. Above a critical interaction strength of U c ≈5t these quasiparticles on the boundary lose their coherence which is explained by the merging of edge and bulk states. This is in contrast to the many-body edge excitations which survive the limit of strong coupling, as established in the literature. Our findings show that for moderate repulsive interactions the nontrivial phase of the interacting SSH model can be detected through remnant signatures of topological single-particle states using single-particle local measurement techniques such as scanning tunneling spectroscopy.

75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND↗
DOE OSTI2025

Optimization of edge bead removal (EBR) process to enhance defect reduction in optical lithography

Defect reduction remains a critical objective in the integrated circuit manufacturing process, particularly within the highly re-entrant lithography modules where minimizing defects is crucial. Defects at the wafer edge can contaminate lithography modules and downstream processing equipment, leading to redistribution onto the wafer surface and adversely affecting overall device yield. A persistent challenge in the resist coating process is the formation of resist edge beads, driven by the strong Van der Waals attraction of excess photoresist (PR) to itself and the underlying substrate. The edge bead removal (EBR) process is a standard cleaning step designed to eliminate these edge beads and prevent potential contamination. Here, in this study, we identify the sources of EBR induced defects and additional EBR process encroachment toward edge patterning during the EBR cleaning process. This study provides a comprehensive study aimed at optimizing the EBR cleaning process to effectively eliminate EBR-induced defects, thereby enhancing overall device yield. Specifically, we identify three primary defects induced by the EBR cleaning process: rainbow-type, finger-shaped, and teardrop-type defects. Our experimental study reveals that in addition to EBR rinse time, PR cast time is crucial parameters contributing to the formation of these defects. By properly optimizing the PR cast time and EBR rinse time, we were able to remove nearly 100 % of dense clusters of defects that were easily visible even at low magnification optical microscopy throughout the wafer edge. We observed that shorter PR casting times shows edge defects caused by inefficient EBR process because of insufficient time for PR to fully settle causing superfluous PR to continue flowing toward wafer edge during EBR clearing step, leading to partial removal of PR at the wafer edge and the formation of rainbow defects. Proper optimization of both PR casting time and EBR chemistries dispense time is essential to resolve these defects, ensuring efficient EBR cleaning process and improved overall device yield.

42 ENGINEERING↗