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At least 505 records · Page 28

Feasibility study of silicon nitride protection of plastic encapsulated semiconductors

The application of low temperature silicon nitride protective layers on wire bonded integrated circuits mounted on lead frame assemblies is reported. An evaluation of the mechanical and electrical compatibility of both plasma nitride and photochemical silicon nitride (photonitride) passivations (parallel evaluations) of integrated circuits which were then encapsulated in plastic is described. Photonitride passivation is compatible with all wire bonded lead frame assemblies, with or without initial chip passivation. Plasma nitride passivation of lead frame assemblies is possible only if the chip is passivated before lead frame assembly. The survival rate after the environmental test sequence of devices with a coating of plasma nitride on the chip and a coating of either plasma nitride or photonitride over the assembled device is significantly greater than that of devices assembled with no nitride protective coating over either chip or lead frame.

Peters, J. W.↗

Science challenges and research opportunities for plasma applications in microelectronics

Low-temperature plasmas (LTPs) are essential to manufacturing devices in the semiconductor industry, from creating extreme ultraviolet photons used in the most advanced lithography to thin film etching, deposition, and surface modifications. It is estimated that 40%–45% of all process steps needed to manufacture semiconductor devices use LTPs in one form or another. LTPs have been an enabling technology in the multidecade progression of the shrinking of device dimensions, often referred to as Moore’s law. New challenges in circuit and device design, novel materials, and increasing demands to achieve environmentally benign processing technologies require advances in plasma technology beyond the current state-of-the-art. The Department of Energy Office of Science Fusion Energy Sciences held a workshop titled Plasma Science for Microelectronics Nanofabrication in August 2022 to discuss the plasma science challenges and technical barriers that need to be overcome to continue to develop the innovative plasma technologies required to support and advance the semiconductor industry. One of the key outcomes of the workshop was identifying a set of priority research opportunities (PROs) to focus attention on the most strategic plasma science challenges to address to benefit the semiconductor industry. For each PRO, scientific challenges and recommended strategies to address those challenges were identified. Furthermore, this article summarizes the PROs identified by the workshop participants.

36 MATERIALS SCIENCE↗

First lithium experiments in HIDRA and evidence of helium retention during quasi-steady-state stellarator plasma operations

Recent experiments in Hybrid Illinois Device for Research and Applications (HIDRA) have had operational discharges between t discharge = 60 and 1000 s using electron cyclotron resonant heating (ECRH) of the plasma. This means that quasi-steady-state plasma discharges reach conditions to study long-pulse plasma material interactions (PMIs). The newly commissioned HIDRA-Material Analysis Test-stand PMI diagnostic is used to place a drop of lithium onto a heated tungsten surface, transfer the sample in-vacuo and expose it in a helium plasma. Helium is of interest as there is an open question to whether lithium will be able to remove helium ash in real fusion devices. The introduction of the W-Li sample in HIDRA resulted in evaporation of lithium into the helium plasma during a 600 s pulse and caused a reduction of over 90% in neutral pressure during the discharge. It was also observed that the plasma density and temperature increased by over 2.5 times. Using spectroscopy and a helium collisional radiative model, the peak temperature and density of the helium plasma can be monitored during the discharge. During lithium evaporation, as significant lithium ionization occurs, there is a 85% drop in the HIDRA vessel neutral pressure, despite a constant flow rate of He gas. This reduction in neutral pressure is supported by spectroscopy data with corresponding reductions in He I line intensities (587 nm, 667 nm, 706 nm, and 728 nm), as well as those of other impurities. At one point in the discharge a lithium plasma is created, as indicated by an increase in Li + emission and a complete reduction in He + emission, but the electron density jumps from ne = 3 × 10 18 m –3 to over ne = 8 × 10 18 m –3 while the core temperature stays relatively constant between Te = 16 eV and 20 eV. Once lithium has completely evaporated from the sample and the majority of the ionized lithium has diffused from the plasma to the vessel walls, pressure and spectroscopy data paired with He collisional radiative model calculations shows a re-establishment of a helium plasma in a low recycling regime. In this regime, the density drops down to ne = 2 × 10 18 m –3 and the electron temperature increases from T e = 20 eV to over T e = 50 eV indicating an increase in helium heating efficiency. This is also indicated by the He+ emission re-establishing and having a higher intensity. Here, we show the results from the first lithium campaign in HIDRA. In the presence of lithium, and in particular when lithium ions are present, the helium disappears from the plasma via an as of yet unknown complex relationship that needs to be further studied. The most likely explanation is that the lithium ions are distributed around the vessel and able to trap helium to the surface turning HIDRA into a large gettering surface. These results have potential implications on future plasma facing component design using liquid lithium for impurity and recycling control using limiters and divertors.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Plasma-parameter dependence of ro-vibrational temperatures for H 2 in LHD divertor

We analyzed a thousand visible spectra of Fulcher-α band measured for divertor plasmas in Large Helical Device. With a coronal model and Bayesian inference, the population distribution of hydrogen molecule in the electronic ground state was estimated. The non-thermal population distribution was recovered with a two-temperature model, which has two sets of rotational and vibrational temperatures, as well as their mixture coefficient. The lower rotational temperature significantly changes according to the plasma parameters. Its nearly linear dependence on the electron density was found, which is consistent with previous works. The lower vibrational temperature also shows a small density dependence, as reported by a previous work. On the other hand, the higher rotational and vibrational temperatures as well as the mixture coefficient only show slight changes over the broad range of plasma parameters. These population parameters show a significant correlation; with higher electron density, all the temperatures and the fraction of the higher-temperature component increase simultaneously. In conclusion, this suggests that the electron impact plays an important role to determine the population distribution.

42 ENGINEERING↗

NASA Tech Briefs, July 2007

Topics covered include: Miniature Intelligent Sensor Module; "Smart" Sensor Module; Portable Apparatus for Electrochemical Sensing of Ethylene; Increasing Linear Dynamic Range of a CMOS Image Sensor; Flight Qualified Micro Sun Sensor; Norbornene-Based Polymer Electrolytes for Lithium Cells; Making Single-Source Precursors of Ternary Semiconductors; Water-Free Proton-Conducting Membranes for Fuel Cells; Mo/Ti Diffusion Bonding for Making Thermoelectric Devices; Photodetectors on Coronagraph Mask for Pointing Control; High-Energy-Density, Low-Temperature Li/CFx Primary Cells; G4-FETs as Universal and Programmable Logic Gates; Fabrication of Buried Nanochannels From Nanowire Patterns; Diamond Smoothing Tools; Infrared Imaging System for Studying Brain Function; Rarefying Spectra of Whispering-Gallery-Mode Resonators; Large-Area Permanent-Magnet ECR Plasma Source; Slot-Antenna/Permanent-Magnet Device for Generating Plasma; Fiber-Optic Strain Gauge With High Resolution And Update Rate; Broadband Achromatic Telecentric Lens; Temperature-Corrected Model of Turbulence in Hot Jet Flows; Enhanced Elliptic Grid Generation; Automated Knowledge Discovery From Simulators; Electro-Optical Modulator Bias Control Using Bipolar Pulses; Generative Representations for Automated Design of Robots; Mars-Approach Navigation Using In Situ Orbiters; Efficient Optimization of Low-Thrust Spacecraft Trajectories; Cylindrical Asymmetrical Capacitors for Use in Outer Space; Protecting Against Faults in JPL Spacecraft; Algorithm Optimally Allocates Actuation of a Spacecraft; and Radar Interferometer for Topographic Mapping of Glaciers and Ice Sheets.

Source record↗

Physics-assisted Latent Space Dynamics Learning for Stiff Collisional-radiative Models

Collisional-radiative (CR) models describe the atomic processes in a plasma by tracking the population density in the ground and excited states for each charge state of the atom/ion. These models predict important plasma properties such as charge state distributions and radiative emissivity and opacity. Accurate descriptions of the CR balance of the plasma are essential in fusion whole device modeling, especially when significant impurities are introduced into the plasmas. In an integrated fusion plasma and CR simulation, a CR model, which is a high-dimensional stiff ODE, needs to be solved on each grid point in the configuration space, and can overwhelm the overall computational cost. In this work, we propose a machine-learning-based method that discovers a latent space and learns its corresponding latent dynamics, which can capture the essential physics to make accurate predictions at much lower online computational cost. The proposed approach is physics-assisted, due to its combination of a physical latent space and a data-driven latent space. It has been demonstrated that the proposed architecture can predict both the full-order CR dynamics and a physical quantity of interest accurately.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Plasma Igniter for Reliable Ignition of Combustion in Rocket Engines

A plasma igniter has been developed for initiating combustion in liquid-propellant rocket engines. The device propels a hot, dense plasma jet, consisting of elemental fluorine and fluorine compounds, into the combustion chamber to ignite the cold propellant mixture. The igniter consists of two coaxial, cylindrical electrodes with a cylindrical bar of solid Teflon plastic in the region between them. The outer electrode is a metal (stainless steel) tube; the inner electrode is a metal pin (mild steel, stainless steel, tungsten, or thoriated-tungsten). The Teflon bar fits snugly between the two electrodes and provides electrical insulation between them. The Teflon bar may have either a flat surface, or a concave, conical surface at the open, down-stream end of the igniter (the igniter face). The igniter would be mounted on the combustion chamber of the rocket engine, either on the injector-plate at the upstream side of the engine, or on the sidewalls of the chamber. It also might sit behind a valve that would be opened just prior to ignition, and closed just after, in order to prevent the Teflon from melting due to heating from the combustion chamber.

Martin, Adam↗

Indium gallium arsenide microwave power transistors

Depletion-mode InGaAs microwave power MISFETs with 1-micron gate lengths and up to 1-mm gate widths have been fabricated using an ion-implantation process. The devices employed a plasma-deposited silicon/silicon dioxide gate insulator. The dc I-V characteristics and RF power performance at 9.7 GHz are presented. The output power, power-added efficiency, and power gain as a function of input power are reported. An output power of 1.07 W with a corresponding power gain and power-added efficiency of 4.3 dB and 38 percent, respectively, was obtained. The large-gate-width devices provided over twice the previously reported output power for InGaAs MISFETs at X-band. In addition, output power stability within 1.2 percent over 24 h of continuous operation was achieved. In addition, a drain current drift of 4 percent over 10,000 sec was obtained.

Johnson, Gregory A.↗

Drift-cyclotron loss-cone instability in 3-D simulations of a sloshing-ion simple mirror

The kinetic stability of collisionless, sloshing beam-ion (45° pitch angle) plasma is studied in a three-dimensional (3-D) simple magnetic mirror, mimicking the Wisconsin high-temperature superconductor axisymmetric mirror experiment. The collisional Fokker–Planck code CQL3D-m provides a slowing-down beam-ion distribution to initialize the kinetic-ion/fluid-electron code Hybrid-VPIC, which then simulates free plasma decay without external heating or fuelling. Over 1 – 10 μs, drift-cyclotron loss-cone (DCLC) modes grow and saturate in amplitude. The DCLC scatters ions to a marginally stable distribution with gas-dynamic rather than classical-mirror confinement. Sloshing ions can trap cool (low-energy) ions in an electrostatic potential well to stabilize DCLC, but DCLC itself does not scatter sloshing beam-ions into the said well. Instead, cool ions must come from external sources such as charge-exchange collisions with a low-density neutral population. Manually adding cool ∼1keV ions improves beam-ion confinement several-fold in Hybrid-VPIC simulations, which qualitatively corroborates prior measurements from real mirror devices with sloshing ions.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

First result of boronization assisted by the ICWC on EAST with full metal wall

Boron (B), a low-Z (atomic number) material, has been widely utilized in wall conditioning to improve plasma performance in fusion devices. In 2023, boronization was successfully conducted on EAST featuring an ITER-like tungsten divertor and fully metallic first wall. The process employed predischarge coating with carborane (C 2 B 10 H 12 ) as the working material, assisted by ion cyclotron wall conditioning (ICWC). After one time 12 g boronization, it was found the thickness of B film was approximately 120 nm. Post-boronization observations indicated that substantial hydrogen (H) release during initial plasma discharges compared with the consumed W/B wall, attributed to H co-deposition during the ICWC-boronization processing, which led to uncontrollable divertor neutral pressure and plasma density. The H/(H + D) ratio demonstrated a gradual reduction from ∼85% to 30% over more than 1850 s of deuterium plasma, with a cumulative injected energy of 2325 MJ. The B coating significantly enhanced the stored energy in plasma and improved confinement performance. The stored energy in plasma showed an increase of about 20%, primarily due to a reduction in impurity radiation, including oxygen (O) and heavy impurities such as tungsten (W), iron (Fe), and copper (Cu). The effective ion charge (Z eff ) decreased from 2.3 to 2.0. Following ICWC-boronization, the line-integrated radiation profile decreased by nearly 35% in the plasma core, plasma density and electron temperature exhibited an increase of ∼7% and 12% due to enhanced wall fueling and reduced impurity radiation. The lifetime of boronization, as evaluated by the line emissions from boron and other impurity radiation, was about 1700 s of deuterium plasma, with a cumulative injected energy of 2125 MJ on EAST. These findings provide significant insights for evaluating ICWC-boronization applicability in ITER with full W wall structure.

EAST↗

Physics of E × B discharges relevant to plasma propulsion and similar technologies

This paper provides perspectives on recent progress in understanding the physics of devices in which the external magnetic field is applied perpendicular to the discharge current. This configuration generates a strong electric field that acts to accelerate ions. The many applications of this set up include generation of thrust for spacecraft propulsion and separation of species in plasma mass separation devices. These “E × B” plasmas are subject to plasma–wall interaction effects and to various micro- and macroinstabilities. In many devices we also observe the emergence of anomalous transport. This perspective presents the current understanding of the physics of these phenomena and state-of-the-art computational results, identifies critical questions, and suggests directions for future research.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Mapping Rydberg States of H 2 with the Halfium R-Matrix Method

In this article, we use the Halfium R-matrix method to investigate the Rydberg states of the H 2 molecule up to n = 20, filling the gap above the low-lying bound states already calculated with configuration interaction packages. Moreover, we show that the use of Quantum Defect Theory scaling laws, allows for a comprehensive analysis of the regular patterns resulting from the coupling between Rydberg series and doubly excited states. The results should open the door for more efficient quasi-diabatization of the potential energy curves which is required for calculating cross sections and rate coefficients of the (e + H 2 + ) collisional processes, involved in the plasma modeling for fusion devices.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Demonstration of low-density, high-performance operation of sustained spheromaks and favorable scalability toward compact, low-cost fusion power plants (Final Scientific/Technical Report)

This project worked to advance the technical viability of a novel method for efficiently sustaining stable, high-performance spheromak plasma configurations to serve as the basis of compact, low-cost fusion power plants. In particular, our group worked to improve the method of Steady Inductive Helicity Injection (SIHI) with Imposed-Dynamo Current Drive (IDCD) for spheromak plasma sustainment. Prior to this project demonstrations of this plasma sustainment technology have achieved plasma performance consistent with entry milestone 3 of the BETHE FOA. Research and development (R&D) activities for this project were focused on increasing plasma performance toward a level consistent with exit milestone 4. To do this the PI and his group worked to increase the performance of sustained spheromaks produced in an existing experimental prototype (HIT-SIU) while improving confidence in projections to and design of future, higher performance devices through three primary R&D activities: 1) Improved control over the density of plasma in the device throughout a discharge to provide a pathway for demonstration of spheromaks Ohmically heating to the Mercier beta limit via: a. Fueling the device directly with plasma through the installation of pre-ionized source on the injectors b. Optimization of electrical current waveforms in the driver circuits to enable low-density plasma formation with a lower fueling rate 2) Computational demonstration of a validated, realistic injector circuit coupled to a dynamic plasma model capable of use as a design tool for SIHI drivers and associated circuits for new experimental design points on the pathway to commercial reactors. The improvements in plasma performance achieved during research activity 1), and the computational projections performed in research activity 2) increased the technological readiness level (TRL) of this fusion energy concept toward a level sufficient to attract early-stage private investment and/or other forms of follow-on investment to pursue required R&D activities required for the eventual fusion power plants based on this novel technical approach.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Resonance cones in cold plasma: Origin, singularities, and power flow

In magnetized tenuous plasma, typical at the plasma edge of fusion devices, a nearly electrostatic wave mode with relatively enhanced electric field can propagate along a specific angle with the magnetic field. For this characteristic, it is known as a “resonance cone.” For instance, these waves can be excited by radio frequency antennas in the ion-cyclotron and lower-hybrid range of frequencies. We consider the resonance cones emitted by idealized spatially extended sources. In 2D, we use a novel geometric construction which generalizes the d'Alembert solution to curved boundaries/moving sources, and show, for the first time, that singular electric fields arise under these conditions, thereby bringing the resonance cones in line with the other resonances of the cold plasma theory. Still in 2D, we give an expression for the amount of power radiated by resonance cones in terms of surface quantities on the source, which is finite despite the singular electric field. In conclusion, we generalize the conclusions regarding the presence and location of singular electric fields to the 3D electromagnetic case.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Type-I ELM mitigation by continuous lithium granule gravitational injection into the upper tungsten divertor in EAST

Large edge-localized modes (ELMs) were mitigated by gravitational injection of lithium granules into the upper X-point region of the experimental advanced superconducting tokamak (EAST) device with tungsten plasma-facing components. The maximum ELM size was reduced by ~70% in high β N H-mode plasmas. Large ELM stabilization was sustained for up to about 40 energy confinement times, with constant core radiated power and no evidence of high-Z or low-Z impurity accumulation. The lithium granules injection reduced the edge plasma pedestal density and temperature and their gradients, due to increased edge radiation and reduced recycling from the plasma-facing components. Ideal stability calculations using the ELITE code indicate that the stabilization of large ELMs correlates with improved stability of intermediate-n peeling-ballooning modes, due to reduced edge current resulting from the profile changes. The pedestal pressure reduction was partially offset by a core density increase, which resulted in a modest ~7% drop in core stored energy and normalized energy confinement time. We surmise that the remnant small ELMs are triggered by the penetration of multiple Li granules just past the separatrix, similar to small ELMs triggered by deuterium pellet Futatani et al (2014 Nucl. Fusion 54 073008). This study extends previous ELM elimination with Li powder injection Maingi et al (2018 Nucl. Fusion 58 024003) in EAST because (1) use of small, dust-like powder and the related potential health hazards were eliminated, and (2) use of macroscopic granules should be more applicable to future devices, due to deeper penetration than dust particles, e.g. inside the separatrix with velocities ~10 m s -1 in EAST.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Physics and applications of dusty plasmas: The Perspectives 2023

Dusty plasmas are electrically quasi-neutral media that, along with electrons, ions, neutral gas, radiation, and electric and/or magnetic fields, also contain solid or liquid particles with sizes ranging from a few nanometers to a few micrometers. These media can be found in many natural environments as well as in various laboratory setups and industrial applications. As a separate branch of plasma physics, the field of dusty plasma physics was born in the beginning of 1990s at the intersection of the interests of the communities investigating astrophysical and technological plasmas. An additional boost to the development of the field was given by the discovery of plasma crystals leading to a series of microgravity experiments of which the purpose was to investigate generic phenomena in condensed matter physics using strongly coupled complex (dusty) plasmas as model systems. Finally, the field has gained an increasing amount of attention due to its inevitable connection to the development of novel applications ranging from the synthesis of functional nanoparticles to nuclear fusion and from particle sensing and diagnostics to nano-contamination control. The purpose of the present perspectives paper is to identify promising new developments and research directions for the field. As such, dusty plasmas are considered in their entire variety: from classical low-pressure noble-gas dusty discharges to atmospheric pressure plasmas with aerosols and from rarefied astrophysical plasmas to dense plasmas in nuclear fusion devices. Both fundamental and application aspects are covered.

70 PLASMA PHYSICS AND FUSION TECHNOLOGY↗

Prediction of electric and magnetic fields from spectral data using machine learning algorithms for Doppler-free saturation spectroscopy diagnostics

The prediction of electric and magnetic field amplitudes from atomic spectral data is critical for plasma control in fusion devices such as tokamaks. Conventional approaches that rely on physics-based models are computationally expensive and unsuitable for real-time applications. In this work, we develop and benchmark three machine learning algorithms—simulation-based inference (SBI), fully connected neural networks (FCNN), and histogram-based gradient boosting regression (GBR-Hist)—to infer field intensities directly from Doppler-free saturation spectroscopy (DFSS) spectra. Synthetic datasets of spectra were generated using the EZSSS code and evaluated both with and without added Poisson noise to mimic experimental conditions. We find that SBI achieves the highest accuracy and robustness, FCNN provides a strong balance of accuracy and computational efficiency for real-time applications, and GBR-Hist offers the fastest inference but is more sensitive to noise. Furthermore, these results demonstrate the potential of machine learning to accelerate DFSS analysis and enhance its utility for plasma diagnostics and control.

Doppler-free saturation spectroscopy↗

Type-I ELM mitigation by continuous lithium granule gravitational injection into the upper tungsten divertor in EAST

Large edge-localized modes (ELMs) were mitigated by gravitational injection of lithium granules into the upper X-point region of the EAST device with tungsten plasma-facing components. The maximum ELM size was reduced by ~ 70% in high βN H-mode plasmas. Large ELM stabilization was sustained for up to about 40 energy confinement times, with constant core radiated power and no evidence of high-Z or low-Z impurity accumulation. The lithium granules injection reduced the edge plasma pedestal density and temperature and their gradients, due to increased edge radiation and reduced recycling from the plasma-facing components. Ideal stability calculations using the ELITE code indicate that the stabilization of large ELMs correlates with improved stability of intermediate-n peeling-ballooning modes, due to reduced edge current resulting from the profile changes. The pedestal pressure reduction was partially offset by a core density increase, which resulted in a modest ~ 7% drop in core stored energy and normalized energy confinement time. We surmise that the remnant small ELMs are triggered by the penetration of multiple Li granules just past the separatrix, similar to small ELMs triggered by deuterium pellet [S. Futatani et al., Nucl. Fusion 54 (2014) 073008]. This study extends previous ELM elimination with Li powder injection [R. Maingi et al., Nucl. Fusion 58 (2018) 024003] in EAST because 1) use of small, dust-like powder and the related potential health hazards were eliminated, and 2) use of macroscopic granules should be more applicable to future devices, due to deeper penetration than dust particles, e.g. inside the separatrix with velocities ~ 10 m/s in EAST.

EAST↗